WO1995031823A1 - A method of treating a semi-conductor wafer - Google Patents
A method of treating a semi-conductor wafer Download PDFInfo
- Publication number
- WO1995031823A1 WO1995031823A1 PCT/GB1995/001057 GB9501057W WO9531823A1 WO 1995031823 A1 WO1995031823 A1 WO 1995031823A1 GB 9501057 W GB9501057 W GB 9501057W WO 9531823 A1 WO9531823 A1 WO 9531823A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- deposited
- polymer
- wafer
- deposition
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000004065 semiconductor Substances 0.000 title abstract description 5
- 229920000642 polymer Polymers 0.000 claims abstract description 19
- 238000009792 diffusion process Methods 0.000 claims abstract description 14
- 238000000151 deposition Methods 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims description 3
- 238000005334 plasma enhanced chemical vapour deposition Methods 0.000 claims description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02304—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment formation of intermediate layers, e.g. buffer layers, layers to improve adhesion, lattice match or diffusion barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
- H01L21/02312—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour
- H01L21/02315—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02362—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment formation of intermediate layers, e.g. capping layers or diffusion barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
Definitions
- This invention relates to a method for treating a semi ⁇ conductor wafer and in particular, but not exclusively, to what is known as planarisation.
- Our Copending International Application No. PCT/GB93/- 01368 (published as O94/01885) describes two methods of depositing a short-chain polymer on a wafer to form a generally planar layer:
- a method of treating a semi-conductor wafer comprising, depositing a liquid short-chain polymer having the general formula Si ⁇ (OH) y or Si ⁇ H (OH) z on the wafer to form a generally planar layer.
- a method of treating a semi-conductor wafer including positioning the wafer in a chamber, introducing into the chamber silicon-containing gas or vapour and a compound, containing peroxide bonding, in vapour form, reacting the silicon-containing gas or vapour with the compound to form a short-chain polymer and condensing the polymer on the wafer to form a generally planar layer.
- silicon-containing gas or vapour introducing into the chamber silicon-containing gas or vapour and a compound, containing peroxide bonding, in vapour form, reacting the silicon-containing gas or vapour with the compound to form a short-chain polymer and condensing the polymer on the wafer to form a generally planar layer.
- the polymer With the method of the type described the polymer will be in liquid form, at least to the extent that it is capable of a degree of self-levelling and, as is noted in Applica- tion No. PCT/GB93/01368, the water in the layer has to be removed at least partially, by heating.
- a relatively thick capping layer was deposited prior to heating with the intention of providing physical stability for the polymer layer. Whilst this is advantage ⁇ ous it has not proved entirely successful as careful control of the process is required.
- the invention consists in a method of the type described, further comprising depositing a diffu ⁇ sion layer on the surface of the polymer layer to allow moisture to be released from the polymer at a controlled rate.
- the diffusion layer acts as a permeable membrane.
- the diffusion layer is deposited at between -20 and 60°C and preferably at around 0°C.
- the diffusion layer can be deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) and may be of the order of 500°A.
- PECVD Plasma Enhanced Chemical Vapour Deposition
- the wafer may be subjected to a preliminary heating stage prior to having a capping layer deposited. A final bake may then take place between 400-475°C.
- the polymer layer may be preceded by the deposition of an underlayer or seed layer.
- the method can conveniently include two chambers, one being a 'cold' chamber for the deposition of the polymer layer and the diffusion layer and the other being a hot chamber for the deposition of the underlayer and the capping layer.
- Figure 1 to 4 illustrates schematically the steps of a planarisation process with the exception of the deposition of the diffusion layer.
- Figures 1 to 4 substantially correspond with Figures 3a to 3d of Application No. PCT/GB93/01368 with the excep ⁇ tion that Figure 3 replaces Figure 3c of the earlier Application.
- Figures 1, 2 and 4 substantially stand and are hereby incorporated into this specification.
- the first is a •hot' chamber in which it is proposed that the steps illustrated in Figures 1 and 4 (of this Application) should be performed, whilst the second chamber is a 'cold' chamber in which the steps described in connection with Figures 1 and 2 (of this Application) are performed.
- the use of two chambers is not essential, but substantially increases the process control and repeatability.
- a very thin capping layer e.g. of Si0 2
- the lattice structure of that layer is sufficiently open for it to act as a diffusion membrane, which controls the rate of moisture loss from the polymer or planarising layer when the wafer is heated, for example, by the heating up of the 'hot' chamber, to which the wafer can be transferred, prior to the Figure 4 "hot" capping.
- this heating may raise the wafer temperature to between 200-450°C (preferably 300°C) .
- a furnace or other final bake to 400°to 475°C (preferably 450°C) can take place.
- the 'cold* cap or diffusion layer is preferably around 500°A.
- the use of this 'cold* cap has produced high quality planarisation layers without cracks.
- N 2 0, 0 2 or 0 2 containing gas plasma after the underlayer has been deposited. This can in affect be a continuation of the deposition process or a separate step. It appears to enhance the 'flowing' properties of the planarising layer.
- This feature can be beneficially used in a method of the type described with or without the 'cold' cap.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7529436A JPH09501020A (en) | 1994-05-14 | 1995-05-10 | Semiconductor wafer processing method |
US08/578,660 US5858880A (en) | 1994-05-14 | 1995-05-10 | Method of treating a semi-conductor wafer |
EP95918082A EP0708982A1 (en) | 1994-05-14 | 1995-05-10 | A method of treating a semi-conductor wafer |
KR1019960700128A KR100334855B1 (en) | 1994-05-14 | 1995-05-10 | A method of treating a semi-conductor wafer |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB9409713.6 | 1994-05-14 | ||
GB9409713A GB9409713D0 (en) | 1994-05-14 | 1994-05-14 | A method of treating a semi-conductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1995031823A1 true WO1995031823A1 (en) | 1995-11-23 |
Family
ID=10755170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/GB1995/001057 WO1995031823A1 (en) | 1994-05-14 | 1995-05-10 | A method of treating a semi-conductor wafer |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP0708982A1 (en) |
JP (1) | JPH09501020A (en) |
KR (1) | KR100334855B1 (en) |
CN (1) | CN1128582A (en) |
CA (1) | CA2167085A1 (en) |
GB (1) | GB9409713D0 (en) |
TW (1) | TW307020B (en) |
WO (1) | WO1995031823A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0743675A1 (en) * | 1995-05-15 | 1996-11-20 | France Telecom | Isolation process by deposition of viscous oxide in narrow cavities and semiconductor device |
GB2311653A (en) * | 1996-03-26 | 1997-10-01 | Lg Electronics Inc | Liquid crystal display and method of manufacture |
US7923383B2 (en) | 1998-05-21 | 2011-04-12 | Tokyo Electron Limited | Method and apparatus for treating a semi-conductor substrate |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991012630A1 (en) * | 1990-02-07 | 1991-08-22 | Mitel Corporation | Spin-on glass processing technique for the fabrication of semiconductor devices |
WO1994001885A1 (en) * | 1992-07-04 | 1994-01-20 | Christopher David Dobson | A method of treating a semiconductor wafer |
-
1994
- 1994-05-14 GB GB9409713A patent/GB9409713D0/en active Pending
-
1995
- 1995-05-10 JP JP7529436A patent/JPH09501020A/en active Pending
- 1995-05-10 EP EP95918082A patent/EP0708982A1/en not_active Withdrawn
- 1995-05-10 WO PCT/GB1995/001057 patent/WO1995031823A1/en not_active Application Discontinuation
- 1995-05-10 CN CN95190426A patent/CN1128582A/en active Pending
- 1995-05-10 KR KR1019960700128A patent/KR100334855B1/en not_active IP Right Cessation
- 1995-05-10 CA CA002167085A patent/CA2167085A1/en not_active Abandoned
- 1995-06-16 TW TW084106199A patent/TW307020B/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991012630A1 (en) * | 1990-02-07 | 1991-08-22 | Mitel Corporation | Spin-on glass processing technique for the fabrication of semiconductor devices |
WO1994001885A1 (en) * | 1992-07-04 | 1994-01-20 | Christopher David Dobson | A method of treating a semiconductor wafer |
Non-Patent Citations (1)
Title |
---|
ITO ET AL: "Reduction of water in inorganic SOG by plasma treatment", EXTENDED ABSTRACTS OF THE 22ND INT. CONF. ON SOLID STATE DEVICES AND MATERIALS, SENDAI, JAPAN, pages 235 - 238 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0743675A1 (en) * | 1995-05-15 | 1996-11-20 | France Telecom | Isolation process by deposition of viscous oxide in narrow cavities and semiconductor device |
GB2311653A (en) * | 1996-03-26 | 1997-10-01 | Lg Electronics Inc | Liquid crystal display and method of manufacture |
FR2746961A1 (en) * | 1996-03-26 | 1997-10-03 | Lg Electronics Inc | TRANSISTOR SUBSTRATE FOR A LIQUID CRYSTAL DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME |
GB2311653B (en) * | 1996-03-26 | 1999-08-04 | Lg Electronics Inc | Liquid crystal display and method for manufacturing the same |
US7923383B2 (en) | 1998-05-21 | 2011-04-12 | Tokyo Electron Limited | Method and apparatus for treating a semi-conductor substrate |
Also Published As
Publication number | Publication date |
---|---|
KR960704349A (en) | 1996-08-31 |
TW307020B (en) | 1997-06-01 |
CN1128582A (en) | 1996-08-07 |
KR100334855B1 (en) | 2002-11-13 |
JPH09501020A (en) | 1997-01-28 |
CA2167085A1 (en) | 1995-11-23 |
EP0708982A1 (en) | 1996-05-01 |
GB9409713D0 (en) | 1994-07-06 |
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