WO1994015171A1 - Tastelement fur koordinatenmesssysteme - Google Patents
Tastelement fur koordinatenmesssysteme Download PDFInfo
- Publication number
- WO1994015171A1 WO1994015171A1 PCT/EP1993/003647 EP9303647W WO9415171A1 WO 1994015171 A1 WO1994015171 A1 WO 1994015171A1 EP 9303647 W EP9303647 W EP 9303647W WO 9415171 A1 WO9415171 A1 WO 9415171A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- probe
- micro
- elements
- element according
- probe element
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
Definitions
- the invention relates to a key element for coordinate measuring systems, which can be used in particular for surface probing or three-dimensional measurement of test specimens of the smallest dimensions.
- the lateral resolving power of a sphere is extremely unfavorable because the curvature of the sphere surface and the flattening do not result in a measuring point but a measuring spot due to the measuring force, the diameter in the range of a hundredth! mm. The consequence of this is. that the measured value represents an average value obtained over this spot.
- the measurement signal is obtained by tilting a spring-loaded plate as a result of the probing movement. An electrical contact that opens in this way starts the measurement signal acquisition.
- the method allows dynamic measurement from the movement, but is not very accurate.
- ball switches have recently been used, the stem of which is connected to piezo resonators, which react to pressure and which allow higher switching accuracy.
- a further increase in measuring accuracy can be achieved by equipping the probe with its own 3-D fine adjustments, precision measuring systems and adjustable measuring force devices, which make it possible to let the probe touch the surface of the test object when the probe is at a standstill and the probe ball along short lengths the surface (scanning).
- optical probe elements for coordinate measurement are known (Gussek, B .; Bartel, R .; Hof ⁇ mann, W. "A microswitch detects non-contact profiles in the optical probe section", Feintechnik und Messtechnik 98 (1990) 10, pages 401 - 405).
- Such probe elements are mainly used for soft test objects. Their advantages are that they measure contactless and force-free and the position of the optical touch point, in contrast to the sphere, is known.
- a triangulation method with a geometrical effect has resolutions of less than 0J ⁇ m in the vertical direction, but the measurement errors caused by the optical properties of the specimen surface are up to several micrometers.
- An autofocus method like the one above requires surfaces with sufficient reflectivity and, depending on this, also has measurement errors of up to several micrometers.
- the diameter of the light beam or focus is several micrometers and limits the lateral resolution of these systems.
- the conventional surface probing methods of coordinate measuring technology are unsuitable for measuring tasks that require a lateral resolution and measuring errors of less than 1 ⁇ m or measuring lengths of less than 1 mm for internal measurements. This is the measurement of gears with a module from 0.01 mm, bores with a diameter ⁇ 1 mm, threads ⁇ Ml and test specimens. Micr ⁇ mechanik not solved by conventional 3-D measurement technology.
- Arrangements are also known in which surface structures are measured with micro-scanning electrodes and piezo-resonators, but which are unsuitable for tasks in 3-D measuring technology, since a 3-D measuring head does not appear to make sense with the measuring elements described there.
- the contact of the oscillating needle attached to the piezo resonator with the surface of the test object is determined by measuring either the change in the resonator parameters or the contact forces (DE-OS 4035076.2, DE-OS 4035084.2).
- the invention has for its object to a probe element for coordinate measuring systems develop, which with a defined point probing with measuring forces of ⁇ 10 " ° N
- the invention consists in that the probe element is arranged from polygon
- Piezoresonators exist and polygon-like micro-tactile elements, which detect inner and outer surfaces in different coordinates, are attached to the piezo resonators.
- piezoresonators as tuning fork, torsion or
- Longitudinal vibrators are cross sections of approx. 100 - 1000 ⁇ rn * - * * with a length of
- the piezoresonator consists of a plate-shaped element which has four tuning fork, torsion or longitudinal oscillators oriented by 90 °, * three by 120 ° or six by 60 °. Due to the use of several micro-touch elements, at least one micro-touch element comes into contact with the surface of the sample to be measured when measuring a sample area.
- the position of the micro-probe elements on the probe element must be known, for which purpose a calibration method known also with conventional ball probe elements
- a calibration ball can be used.
- the probe element By designing the probe element using micro-probe elements, a defined point probing realized. At the same time, the probe forces are reduced by a factor of 10 ** ⁇ to 10 "° N compared to conventional ball probing. Since the vibration amplitudes of the resonators range from angstroms to nanometers depending on the geometric shape, it is important to evaluate a warning signal to safely approach a surface In this case, known arrangement or process engineering solutions can be used, for example by using an additional optical indicator It is also possible to use the acoustic coupling effects acting in the medium air between the micro-sensing element and the test specimen surface with gap widths of micrometers as a priority signal They also cause a change in the resonance parameters of the piezoresonator.
- Figure 2 3D probe element, representation of the piezoresonator in the form of a
- FIG. 3 3D keying, representation of the piezoresonator in the form of torsion or longitudinal oscillators
- FIG. 4 3D keying element, representation of the piezoresonator in the form of torsion or
- FIG. 1 shows the tactile element according to the invention, consisting of five piezoresonators 3, 4, 5 arranged polygonally on a rod 1.
- Micro-probe elements 2 are attached to the piezoresonators 3, 4, 5.
- the probe element is brought closer to the sample surface in a known manner by means of a piezo tube 8 with applied control electrodes.
- the piezo tube 8 made of piezoceramic with applied control electrodes has a length of approximately 20 mm and an outer diameter of approximately 2 mm.
- the control electrodes applied to the outer and inner cylinder jacket of the piezo tube 8 are electrically conductive and separated so that the same shell-like control electrodes are formed which are produced by Control electronics, not shown, can be subjected to the same or different control voltages.
- Control electronics not shown
- the same electrical errors form between the inner and outer electrodes in the piezo tube, which, due to the reciprocal transverse piezoelectric effect, lead to an expansion or compression of the piezo tube in the direction of the cylinder axis z, depending on the sign and the magnitude of the control voltage.
- the piezo tube or the sample is measurably displaced in the coordinates x, y, z by known mechanical adjustment devices.
- the micro-tactile elements 2 arranged in the manner of a polygon have dimensions in the range from approximately 100 nm to 10 mm, while the size of the piezo resonators 3, 4, 5 is in the range from 10 ⁇ m to 10 mm, depending on the field of application.
- the piezoresonators 3, 4 and 5 advantageously consist of piezoelectric quartz, which, with suitable orientation, vibrator geometry and excitation electrode design, has high vibration quality, high resonance frequencies in the range of 0J - 10 MHz, low time constants of 1 ⁇ s - 1 ms and low probe forces of 0J - 100 nN enables.
- the micro-probe elements 2 can also be connected via passive connecting elements 6, for example in the form of cones or rods, which are adapted in size to the micro-probe elements 2 depending on the application be connected to the piezoresonator. They can consist of metals or non-metals. It is of crucial importance for the functionality of the probe operation of the probe element according to the invention that all mechanical elements involved in the probing process have high mechanical natural resonances of more than 10 kHz. Under this condition, the measuring process remains largely unaffected by disturbing mechanical environmental vibrations.
- the probing of the sample surface is carried out in a known manner in that the with the Piezo-resonators 3, 4 or 5 in the above-mentioned frequency range vibrating micro-touch elements 2 when approaching or touching the sample change the resonance of the piezo-resonator 3, 4 or 5 in its frequency, phase or amplitude.
- These resonance changes can be measured electronically in a known manner and can be used to either switch off the sewing process of the sample and the micro-probe element 2 or to track the vibrating micro-probe element 2 in a controlled manner.
- a piezoresonator serving as a sensing element in the form of a tuning fork oscillator arrangement is shown in FIG.
- a piezoresonator is obtained by inserting two different tuning fork oscillators 3 and 4 into each other, each of the tuning fork oscillators 3 and 4 being equipped with at least one micro-touch element 2.
- piezoresonators can be produced photolithographically in very small dimensions, bore walls with a diameter of ⁇ 1 mm can be measured.
- the length of the tuning fork pairs, which oscillate against one another by appropriate design of the excitation electrodes, can be approximately 1 mm.
- FIG. 3 shows a 3D key element made of piezo resonators in the form of a torsion or
- Longitudinal vibrator 5 which is equipped with at least one micro-touch element 2.
- the torsion or longitudinal vibration 5 is in the middle of the vibration node
- FIG. 4 shows a 3-D touch probe made of piezoresonators in the form of torsional or longitudinal vibrators 5 with polygon-like micro-probe elements 2, a passive one between the torsional or longitudinal vibrator elements 5 and the micro-probe elements 2 Connection element 6 is interim storage. There are micro-probe elements 2 arranged in a polygon-like manner on the connecting element 6. Such a design option for the probe element is particularly suitable for measurements of the smallest internal dimensions, wherein touch detection can be carried out in three coordinates per probe element.
- micro probe elements 2 When using micro probe elements 2 with diameters of approximately 100 n, internal measurements in the submicrometer range can be carried out with this key element.
- FIG. 5 shows embodiments of the probe element in which, due to the crystallography of piezoelectric materials such as e.g. Quartz or lithium niobate from a plate-shaped element 7 three rod or tuning fork transducers 5 oriented by 120 ° (FIG. 5), six by 60 ° (FIG. 6) or 4 offset by 90 ° (FIG. 7), each of which can be obtained in the Micro button elements 2, not shown, are arranged.
- piezoelectric materials such as e.g. Quartz or lithium niobate from a plate-shaped element 7
- three rod or tuning fork transducers 5 oriented by 120 ° (FIG. 5), six by 60 ° (FIG. 6) or 4 offset by 90 ° (FIG. 7), each of which can be obtained in the Micro button elements 2, not shown, are arranged.
- FIG. 8 shows a micro-touch element 2 consisting of glass fiber and miniature spheres.
- the glass fiber 9 can have a diameter of approx.
- the front end of the glass fiber 9 is melted into a miniature bead 10.
- Miniature beads 10 has e.g. a diameter of 100 ⁇ m.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP94903857A EP0627068B1 (de) | 1992-12-21 | 1993-12-21 | Tastelement fur koordinatenmesssysteme |
US08/290,887 US5524354A (en) | 1992-12-21 | 1993-12-21 | Probe element for coordinate measurement systems |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4243284A DE4243284C2 (de) | 1992-12-21 | 1992-12-21 | Tastelement für Koordinatenmeßsysteme |
DEP4243284.7 | 1992-12-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1994015171A1 true WO1994015171A1 (de) | 1994-07-07 |
Family
ID=6475980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1993/003647 WO1994015171A1 (de) | 1992-12-21 | 1993-12-21 | Tastelement fur koordinatenmesssysteme |
Country Status (4)
Country | Link |
---|---|
US (1) | US5524354A (de) |
EP (1) | EP0627068B1 (de) |
DE (1) | DE4243284C2 (de) |
WO (1) | WO1994015171A1 (de) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4331069A1 (de) * | 1993-09-13 | 1995-03-16 | Zeiss Carl Fa | Koordinatenmeßgerät mit einem Taster in Form eines Festkörperschwingers |
JP3197860B2 (ja) * | 1997-12-24 | 2001-08-13 | 株式会社ミツトヨ | タッチ信号プローブ |
GB2336433B (en) * | 1998-04-14 | 2002-02-06 | Mitutoyo Corp | Touch signal probe |
US6430828B1 (en) * | 1998-04-17 | 2002-08-13 | Electronic Measuring Devices, Inc. | Coordinate positioning apparatus with indexable stylus, components thereof, and method of using it |
DE19828701C1 (de) * | 1998-06-26 | 2000-03-16 | Mycrona Ges Fuer Innovative Me | Faser-Meßtaster für Koordinaten-Meßmaschinen |
JP3130289B2 (ja) * | 1998-08-04 | 2001-01-31 | 株式会社ミツトヨ | タッチ信号プローブ |
NL1010894C2 (nl) * | 1998-12-24 | 2000-06-27 | Univ Eindhoven Tech | Mechanisch tastsysteem voorzien van een in de ophanging geïntegreerd meetsysteem voor gebruik in coördinaten meetmachines, geschikt om met hoge nauwkeurigheid geometrische eigenschappen van werkstukken te bepalen. |
US6708420B1 (en) | 1999-01-06 | 2004-03-23 | Patrick M. Flanagan | Piezoelectric touch probe |
US6385858B1 (en) * | 2000-01-10 | 2002-05-14 | Trex Company, L.L.C. | Spacing tool |
JP2001299747A (ja) * | 2000-04-20 | 2001-10-30 | Nippon Koden Corp | 超音波3次元走査プローブ |
JP3819250B2 (ja) * | 2000-05-15 | 2006-09-06 | 株式会社ミツトヨ | 加振型接触検出センサ |
US6640459B1 (en) | 2001-02-15 | 2003-11-04 | Fast Forward Devices, Llc | Multidimensional contact mechanics measurement system |
DE10108774A1 (de) | 2001-02-23 | 2002-09-05 | Zeiss Carl | Koordinatenmessgerät zum Antasten eines Werkstücks, Tastkopf für ein Koordinatenmessgerät und Verfahren zum Betrieb eines Koordinatenmessgerätes |
WO2003032871A1 (en) * | 2001-10-16 | 2003-04-24 | Massachusetts Institute Of Technology | Stent concept for minimization of deployment related wall shear and injury |
EP1563249A1 (de) * | 2002-10-29 | 2005-08-17 | Koninklijke Philips Electronics N.V. | Koordinatenmesseinrichtung und verfahren zur messung der position eines objekts |
DE10345993B4 (de) * | 2003-10-02 | 2008-07-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zum Messen und zum Feinstellen eines Werkzeuges in einem Werkzeughalter und Verfahren zum Messen einer Bearbeitungskraft |
US7278297B2 (en) * | 2003-11-17 | 2007-10-09 | Insitutec, Inc. | Oscillating probe with a virtual probe tip |
GB0722477D0 (en) * | 2007-11-15 | 2007-12-27 | Secretary Trade Ind Brit | Microprobe |
EP2202501A1 (de) | 2008-12-23 | 2010-06-30 | ETH Zürich | piezoelektrische Hohlanordnung für die Unterscheidung von Kräften und Momenten |
JP5270384B2 (ja) * | 2009-01-15 | 2013-08-21 | 株式会社ミツトヨ | 直線案内機構および測定装置 |
US9422843B2 (en) * | 2013-09-08 | 2016-08-23 | Michael Wayne Barrett | Resonance generating muffler |
JP6613162B2 (ja) * | 2016-02-10 | 2019-11-27 | 株式会社ミツトヨ | 三次元座標測定機用プローブヘッド及び接触検出方法 |
CN105698661A (zh) * | 2016-03-07 | 2016-06-22 | 安徽电气工程职业技术学院 | 微纳米三坐标测量机接触式扫描探头 |
JP1578944S (de) * | 2016-09-26 | 2017-06-12 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2005022A (en) * | 1977-09-27 | 1979-04-11 | Meseltron Sa | Contact sensing head |
FR2468875A1 (fr) * | 1979-11-05 | 1981-05-08 | Vilnjussky Ex | Capteur de toucher piezoelectrique a resonance |
GB2070249A (en) * | 1980-02-21 | 1981-09-03 | Rank Organisation Ltd | Contact-sensitive probe |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH549438A (fr) * | 1971-03-01 | 1974-05-31 | Far Fab Assortiments Reunies | Dispositif de transmission simultanee des mouvements d'un palpeur a au moins deux organes de lecture. |
DE3417991A1 (de) * | 1984-05-15 | 1985-11-21 | Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf | Tastkopf einer messmaschine |
GB8729632D0 (en) * | 1987-12-18 | 1988-02-03 | Renishaw Plc | Workpiece inspection |
JPH0758193B2 (ja) * | 1990-09-14 | 1995-06-21 | 三菱電機株式会社 | 原子間力顕微鏡の微動走査機構 |
US5247751A (en) * | 1990-09-29 | 1993-09-28 | Nikon Corporation | Touch probe |
DE4035084A1 (de) * | 1990-11-05 | 1992-05-07 | Jenoptik Jena Gmbh | Anordnung zum messen linearer abmessungen auf einer strukturierten oberflaeche eines messobjektes |
-
1992
- 1992-12-21 DE DE4243284A patent/DE4243284C2/de not_active Expired - Fee Related
-
1993
- 1993-12-21 US US08/290,887 patent/US5524354A/en not_active Expired - Fee Related
- 1993-12-21 EP EP94903857A patent/EP0627068B1/de not_active Expired - Lifetime
- 1993-12-21 WO PCT/EP1993/003647 patent/WO1994015171A1/de active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2005022A (en) * | 1977-09-27 | 1979-04-11 | Meseltron Sa | Contact sensing head |
FR2468875A1 (fr) * | 1979-11-05 | 1981-05-08 | Vilnjussky Ex | Capteur de toucher piezoelectrique a resonance |
GB2070249A (en) * | 1980-02-21 | 1981-09-03 | Rank Organisation Ltd | Contact-sensitive probe |
Also Published As
Publication number | Publication date |
---|---|
EP0627068B1 (de) | 1998-11-25 |
US5524354A (en) | 1996-06-11 |
EP0627068A1 (de) | 1994-12-07 |
DE4243284C2 (de) | 1996-09-12 |
DE4243284A1 (de) | 1994-06-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0627068B1 (de) | Tastelement fur koordinatenmesssysteme | |
DE69109216T2 (de) | Fein-Abtastmechanismus für Atomkraft-Mikroskop. | |
DE19827056A1 (de) | Mikromechanischer Magnetfeldsensor | |
DE10230528A1 (de) | Verbesserungen in bzw. bezüglich eines Systems der Beseitigung der Abweichung für ein Schwinggyroskop | |
EP0372060B1 (de) | Akustisches rastermikroskop zur untersuchung eines objektes im nahfeld eines resonanten akustischen oszillators | |
DE4228795C2 (de) | Drehratensensor und Verfahren zur Herstellung | |
DE19936560A1 (de) | Berührungssignalführer | |
DE10040537B4 (de) | Mikromechanischer Drehratensensor und Verfahren zu seiner Herstellung | |
DE29617410U1 (de) | Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen | |
DE4417132C2 (de) | Resonanter Meßwertaufnehmer und dessen Verwendung | |
DE19531466C2 (de) | Mikromechanische Sonde für Rastermikroskope | |
WO1992008101A1 (de) | Anordnung zum messen linearer abmessungen auf einer strukturierten oberfläche eines messobjektes | |
WO1992008102A1 (de) | Anordnung zum messen linearer abmessungen auf einer strukturierten oberfläche eines messobjektes | |
EP3060933B1 (de) | Gradientenmagnetometer und verfahren zur bestimmung einer einzelnen komponente eines gradiententensors eines magnetfelds | |
DE3820518C2 (de) | ||
EP2051069A2 (de) | Paramagnetischer Gassensensor sowie Verfahren zum Betrieb desselben | |
DE102006025513A1 (de) | Monolithischer Oszillator | |
DE4435635A1 (de) | Mikrobiegebalken für die atomare Kraftmikroskopie und Verfahren zu seiner Herstellung | |
WO1992008946A2 (de) | Anordnung zum messen linearer abmessungen auf einer strukturierten oberfläche eines messobjektes | |
AT412915B (de) | Sensor zur bestimmung von oberflächenparametern eines messobjekts | |
DE102005045379A1 (de) | Drehratensensor | |
DE102017202455A1 (de) | MEMS- oder NEMS-basierter Sensor und Verfahren zum Betrieb eines solchen | |
WO1996007868A1 (de) | Verfahren zum scannen einer probenoberfläche, insbesondere mit rastersondenmikroskopen | |
WO2010105584A1 (de) | Rasterkraftmikroskop | |
EP2984449A1 (de) | Drehratensensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): JP US |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH DE DK ES FR GB GR IE IT LU MC NL PT SE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1994903857 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 08290887 Country of ref document: US |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWP | Wipo information: published in national office |
Ref document number: 1994903857 Country of ref document: EP |
|
WWG | Wipo information: grant in national office |
Ref document number: 1994903857 Country of ref document: EP |