WO1990004144A1 - Systeme de commande de la temperature pour un refrigerateur cryogenique - Google Patents

Systeme de commande de la temperature pour un refrigerateur cryogenique Download PDF

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Publication number
WO1990004144A1
WO1990004144A1 PCT/US1989/004393 US8904393W WO9004144A1 WO 1990004144 A1 WO1990004144 A1 WO 1990004144A1 US 8904393 W US8904393 W US 8904393W WO 9004144 A1 WO9004144 A1 WO 9004144A1
Authority
WO
WIPO (PCT)
Prior art keywords
armature
temperature
signal
cryogenic refrigerator
reciprocating
Prior art date
Application number
PCT/US1989/004393
Other languages
English (en)
Inventor
James Livingstone
Graham J. Higham
Gerald R. Pruitt
Original Assignee
Helix Technology Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corporation filed Critical Helix Technology Corporation
Publication of WO1990004144A1 publication Critical patent/WO1990004144A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1906—Control of temperature characterised by the use of electric means using an analogue comparing device
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/001—Gas cycle refrigeration machines with a linear configuration or a linear motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/14—Compression machines, plants or systems characterised by the cycle used 
    • F25B2309/1428—Control of a Stirling refrigeration machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2500/00—Problems to be solved
    • F25B2500/13—Vibrations

Definitions

  • This invention relates to cryogenic refrigerators, or cryocoolers utilizing linear drive motors having pistons or displacers which reciprocate in cylinders.
  • Such refrigerators include Gifford-McMahon or Stirling refrigerators and expansion engines.
  • a working fluid such as helium is introduced into a cylinder, and the fluid is expanded at one end of a piston to cool the cylinder.
  • high pressure working fluid may be valved into the warm end of the cylinder.
  • the fluid is passed through a regenerator by movement of a displacer-type piston.
  • the fluid which has been cooled in the regenerator is then expanded at the cold end of the displacer.
  • the displacer movement may be controlled by either fluid pressure differentials or by a mechanical drive.
  • a control system for a cryogenic refrigerator is disclosed in U.S. Patent No. 4,543,793.
  • One or more parameters of a reciprocating-piston type refrigerator are monitored to provide an electrical feedback signal. That signal is processed to control the timing of the piston movement and or the flow of refrigeration gas into the refrigerator.
  • the feedback signal is an indication of the position of the piston within its cylinder and/or the temperature at the cold end of the cylinder throughout a refrigeration cycle. Continuous position indication may be provided by a linear variable displacement transformer or by a rotary encoder or by other means.
  • the feedback signal is used to control valves which introduce the refrigeration gas into the cylinder or a piston drive motor.
  • the feedback signal may be used to control valves to and from both the refrigeration cylinder and the drive cylinder. By controlling the stroke, the temperature of the cold end of the refrigerator can be controlled.
  • a split Stirling refrigerator is disclosed in U.S. Patent No. 4,664,685 wherein a compressor provides a nearly sinusoidal pressure variation to a refrigerant gas in communication with a cold finger.
  • the compressor is comprised of a linear drive motor having a drive coil which drives a reciprocating armature.
  • a detector circuit is coupled to the drive coil for sensing an electrical parameter of the coil which is a function of movement of the armature.
  • Motor drive circuitry which applies current to the drive coil is responsive to the sensed electrical parameter in controlling movement of the piston element.
  • the detector circuit can be connected to sense back EMF in a displacer drive motor within the cold finger.
  • Rotary driven compressors of cryogenic refrigerators have been known to employ controlled variations in speed to adjust the temperature at the cold end of the refrigerator.
  • a reciprocating magnetic armature can be driven by an electrically pulsed coil so that the armature alternately compresses and expands the working fluid.
  • the working fluid is in communication with a cold finger of the refrigerator.
  • a Hall-effect sensor can be positioned along the wall or at the end of the operating volume of the armature to sense the location of a magnet attached to the armature. The sensor generates an electrical signal whose voltage is correlated to a particular position of the armature within the operating volume.
  • a temperature control system In cryogenic refrigerators using dynamic absorbers or counter balance systems to reduce vibration generated by the reciprocating armature, where the operating frequency of the armature is confined to a certain range, such a temperature control system has many advantages. By maintaining a fixed frequency of operation for the armature, a dynamic absorber can be used to attenuate vibration of the refrigerator housing.
  • the temperature control system of the present invention provides for control of the amplitude of motion of the armature while it reciprocates at the same frequency at which the dynamic absorber is tuned to oscillate.
  • the temperature at the cold end of the displacer is compared with the desired temperature and an electrical signal is forwarded to the control circuit of the linear drive motor to increase or decrease the displacement of the reciprocating armatur .
  • the temperature sensor adjacent the cold finger adjusts the armature displacement to slow the rate of temperature change.
  • the armature displacement is gradually altered so that the temperature does not progress beyond the desired level.
  • Figure 1 is a cross-sectional view of a linear drive assembly of a cryogenic refrigerator of the present invention
  • Figure 2 is a cross-sectional view of a cold finger of a cryogenic refrigerator in fluid contact with the compressed fluid of the linear drive assembly of Figure 1;
  • FIG. 3 is a schematic diagram of the temperature control mechanism of the present invention.
  • Figure 4 is a cross-sectional view of another preferred embodiment of a linear drive assembly of a cryogenic refrigerator; and Figures 5A-5F schematically illustrate waveforms that occur at certain positions within the circuit of Figure 3.
  • FIG. 1 A linear drive assembly of a helium cryogenic refrigerator utilizing a temperature control system of the present invention is illustrated in Figure 1.
  • a linear motor is used to control the movement of an armature 10 in the compressor 5.
  • the linear motor utilizes an involute laminated stator 20 first disclosed in U.S. Patent No. 4,761,960, of G. Higham et al. filed July 14, 1986 entitled "Cryogenic Refrigeration System Having an Involuted Laminated Stator for its Linear Drive Motor.”
  • this compressor 5 com ⁇ prises a reciprocating armature 10 which compresses helium gas in a compression space 24.
  • the compressor is charged with helium gas through the port 17.
  • the gas is allowed to communi- cate with an armature volume 12 through port 16 which is in communication with a second pre-formed conduit 18.
  • the armature 10 comprises an iron mass 38 fixed to a liner core 82. Iron is used because of its high magnetic permeability and high magnetic induc ⁇ tion; however, other materials having the same characteristics may be used. A tungsten alloy ring or other high density non-magnetic material 25 may be incorporated at one end of the armature to give more mass to adjust the resonant fre-quency of operation and to help keep the armature's center of gravity within the confines of the clearance seal of the piston.
  • the armature 10 is fitted with a ceramic cylinder 83 to provide a clearance seal with the stationary piston. It is preferred that a sleeve 82 made of non-magnetic stainless steel or aluminum line the cylinder 83 to provide structural support to the ceramic cylinder. A cermet liner 84 is mounted on the piston 11 to form part of the clearance seal.
  • a pressure housing 26 Surrounding the armature 10 just described is a pressure housing 26.
  • the size of the pressure housing is constructed to allow helium gas in the armature volume 12 to flow freely between the pressure housing 26 and the iron mass 38 as the armature 10 shuttles back and forth.
  • a stator 20 is located around the perimeter of the pressure housing 26.
  • the stator 20 comprises two coils 21 positioned between involuted laminations 23 and separated by a magnet 22.
  • This stator assembly is further described in U.S. Patent No. 4,761,960, by G. Higham et al. recited above, which is incorporated herein.
  • the splitting of the involute stator contributes to the amount of stray flux generated about the coils.
  • Two shields 90 have been concentrically disposed about the involute lamination 23 to convey the magnetic flux lines along the inside wall 51 of the housing 50. As a consequence of the armature 10 reciprocating back and forth, mechanical vibrations are produced by the compressor 5.
  • a passive vibration absorber or dynamic absorber 39 is attached to one end of the compressor and is tuned to resonate at the same frequency as the compressor's operating frequency.
  • the dynamic absorber 39 comprises a counterbalance mass 40 mounted with flange 45 between two springs 41 and 42 having small damping characteristics.
  • the axial motion of the compressor is countered by the axial vibration from the counterbalance mass 40 of the absorber 39.
  • the present system has bumpers 48 on the front 98 and rear 47 spring supports to absorb any impact of the absorber against the mounting frame of the compressor.
  • the absorber system is mounted onto the housing extension 86 by ring nut 43.
  • a spacer 44 is used to properly adjust the distance between the front 98 and rear 47 spring supports.
  • the screw flange 46 is used to attach the flat spring 61 to the end of the compressor.
  • the compressor system utilizes isolators mounted on opposite ends of the compressor.
  • the two isolators have flat spiral springs 61 and 71 which are soft in the axial direction while being very stiff in the radial direction.
  • the outer diameter of the two springs 61 and 71 are attached to the housing end plates 60 and 70 respectively.
  • the inner diameters are mounted onto flanges 64 and 72 and in turn attached to a screw flange 46 and housing plate 31, respectively, using bolts 62 and 73.
  • the inner and outer diameter of the two springs are connected by a plurality of spiral arms.
  • the springs are mounted on elastomeric material 95 and 96 located- at both ends of compressor 5 providing a substantial level of damping to the isolator system.
  • a soft metallic gasket 30 is configured between the plate 31 and flange 32 to seal the armature volume 12 of the linear drive unit from the external atmosphere.
  • a sensor 80 is used to detect a target magnet 81 fitted at one end of the armature 10.
  • the magnet 81 is mounted on an extended cylinder 85 that oscillates within an extention 86 of the armature housing 26 during motor operation. This extension permits the utilization of an otherwise unused volume within a countermass system 39 concentrically disposed about the extension 86.
  • FIG. 1 A schematic illustration of the cold finger 100 for a cryogenic refrigerator of the present invention is depicted in Figure 2.
  • a nearly sinusoidal pressure variation in a pressurized refrigeration gas such as helium is provided through a supply line 102 from the gas fitting assembly 15 on the compressor 5 of Figure 1.
  • a cylindrical displacer 114 is free to move in reciprocating motion to change the volumes of a warm space 109 and a cold space 116 within the cold finger.
  • the displacer 114 contains a regenerative heat exchanger 28 comprised of several hundred fine-mesh metal screen discs stacked to form a cylindrical matrix. Helium is free to flow through the regenerator between the warm space 108 and the cold space 24.
  • a piston element 103 extends upwardly from the main body of the displacer 114 into a gas spring volume 104 at the warm end of the cold finger. The operation of the cold finger is more fully described in U.S. Patent No. 4,545,209 referenced above.
  • a semiconductor temperature sensor 120 is positioned at the cold end of the displacer 114 for measuring the temperature of the cold space 116.
  • the sensor 120 is used to monitor the cryogenic temperature.
  • the position sensor 80 is used to measure armature displacement.
  • FIG. 4 Another embodiment of a linear drive assembly utilized in cryogenic refrigeration is illustrated in Figure 4.
  • This embodiment employs a stationary piston 160 mounted to the housing on a flexible tubular stem 162 having an axial bore 164 to provide fluid communication between the cold finger and the compression space 190.
  • the tubular stem 162 is secured to the housing with a ferrule 168 brazed to the outer surface of one end of the stem 162, with nut 166 and seal 165.
  • Front and rear flexure supports 180 and 182 are used to support the armature 170 relative to the piston 160.
  • the supports 180, 182 assist in maintaining good axial alignment between the piston 160 and the armature 170.
  • the inner cylindrical element 172 of the armature 170 forms a clearance seal 174 with the piston 160 that experiences reduced wear due to the use of the flexible stem 162 and the flexure bearing supports 180 and 182.
  • a magnet 186 is attached to the armature 170 with a non-magnetic element 187.
  • the magnet 186 reciprocates with the armature so that a sensor positioned within the fluctuating magnetic field of the magnet detects the position of the armature.
  • the sensor can be secured to the housing anywhere within the vicinity- of the magnet 186.
  • the signal at 136 can be, but is not limited to a sinusoid of certain amplitude and at a frequency optimal to a specific embodiment of the compressor. It may, in principal be any frequency required, but in practice may range between 10 and 200 Hz. The frequency is singular to a specific design and is maintained in close tolerance over the operating range.
  • the amplitude of the wave form is chosen to represent 100% of stroke of the piston.
  • FIG. 5A-5F A number of waveforms are shown in Figures 5A-5F to illustrate operation of the circuit.
  • the amplitude multiplier 134 will provide no amplitude changes to the reference waveform.
  • a typical output signal for the amplitude multiplier is seen in Figure 5A.
  • the comparator 138 will produce an error signal output when the position feedback 80 as normalized, is not precisely the same as through the amplitude multiplier.
  • Figure 5B illustrates the output of the normalized position feedback circuit 137.
  • the nature of the error signal output of comparator 138 is not the typically defined null condition. Rather, it is designed to produce a waveform of substantially the same characteristics as the inputs.
  • Figure 5C shows the output of comparator 138 that provides one input to the current amplifier 140. In the event of a true equality between the compared signals, the comparator 138 continues to provide output due to the natural quadrature relationship existing between command and feedback signals.
  • the net error signal provides a current command input to a closed current loop at the current amplifier 140.
  • the feedback portion of the current loop is a normalized measurement of motor current in the linear motor 144.
  • Various techniques can be employed to measure motor current, ranging from simple voltage analogs of the current through a low value resistor to isolating current transformers.
  • the normalization of the current feedback 148 establishes the measured current in a form compatible with the current command input.
  • Such a normalized current feedback signal is illustrated in Figure 5D.
  • a conveniently expressed relationship may be volts per ampere at the motor.
  • Line 150 represents an output which relates measured current considered detrimental to the system and arises due to some malfunction. The action usually performed in such systems is to shutdown, pending correction of the malfunction.
  • the signal level is generally a logic level change.
  • the optional line from 146 provides, if and as necessary, a current proportional term to offset an equivalent value of coupled energy reaching the position feedback under influence of the motor. Such conditions may exist in compact embodiments.
  • the signal at this point is amplitude proportional to the coupled energy but opposite in phase for cancellation.
  • the output of the current amplifier 140 is the net difference between the current demand imposed by the position loop and actual motor current.
  • the difference signal now forms the input to the Pulse Width
  • the signal level from 140 is generally of the same waveform as the operating frequency and at a low power level. Frequency terms may be added as a function of various motor and resonant dynamics.
  • the composite current difference signal is applied to a Pulse Width Modulation (PWM) circuit to convert the dynamic amplitude of the signal to one capable of providing turn-on and turn-off inputs of switching transistors in a circuit arrangement commonly referred to as an H-Bridge.
  • PWM Pulse Width Modulation
  • H-Bridge a circuit arrangement commonly referred to as an H-Bridge.
  • signals from the PWM are used to selectively turn on two switching transistors at one time to effect current flow from the positive voltage, through the motor load, and to the negative voltage.
  • the positive going current flow through the motor establishes a positive motion.
  • the value of current flowing through the motor is a function of the time the transistor pair is turned on relative to the time the transistor pair is turned off.
  • Figure 5F graphically illustrates the output of the PWM motor drive unit.
  • the repetitive time period established by the switching frequency is a single event equal to one (1) . If the time on of the transistor pair is defined as d, the time off is established as (1-d) .
  • the ratio of d/(l-d) establishes, within the context of all circuit parameters involved, the instantaneous current flow to the motor. Since the value of d may be varied in fine increments of microseconds, and may be changed selectively at each new time period of the switching frequency, a high level of control is achievable. Power efficiency is achieved by the fact that current flows through the turned-on switching transistors in saturated, low impedance conditions. When the transistors are turned off, little or no current flows. Losses are inherently reduced, relative to linear power control techniques.
  • positive current and subsequent force may be applied in any manner responsive to the dictates of the current amplifier 140 in Figure 3.
  • the actions described are performed by an additional transistor pair which during the positive cycle have been maintained in a turned-off state. These transistors, when turned on, connect the negative voltage to the motor load and thence to the positive voltage, effecting a negative current flow and negative reaction. All actions described beforehand are equally true. The physical result may be considered equal but opposite. In this manner, the piston motion is effectively controlled to the desired instantaneous values required for proper compressor operation.
  • the system components involved are the sensor conditioning 120, the temperature feedback 121, the temperature feedback normalize 131, the comparator 132, and the target temperature reference 130.
  • a usual practice is the use of a silicon semiconductor junction, properly conditioned, as the sensing element of cryogenic temperatures.
  • the junction is located in close thermal proximity to the cryogenic temperature source.
  • a temperature sensor may be comprised of a silicon transistor that is forward biased through the base - emitter junction with a regulated DC current flow of, for example, 1 milliampere.
  • the voltage from base to emitter will be in the range of 1.06 volts at approximately 77K. At higher temperatures, the voltage will be lower. Conversely, at lower temperatures, the voltage will be greater. In a range above and below the 77K value, the increments of voltage change versus temperature are reasonably linear and monotonic. In close proximity of the stated 77K, the changes are under 2 millivolts per degree:Kelvin.
  • the strategy employed is to maintain full stroke conditions from ambient to a cryogenic temperature which is several degrees above the target temperature.
  • the effect of the aforementioned elements is to reduce the amplitude of the reference waveform at the output of the ⁇ unplitude multiplier 134 by voltage action of the signal line from the comparator 132.
  • the" range of linear changes of amplitude as a function qf sensor defined cryogenic temperature will extend somewhat below the target temperature to maintain loop linearity before any saturation effects may occur.
  • the temperature chosen to begin amplitude reduction will effect the gain of the temperature? loop.
  • a convenient expression for the gain may be; given as the percentage change of amplitude pexr degree Kelvin.
  • Stability of the temperature loop may be established by proper selection off the gain figure. Additional means of stable operation may be typical in-circuit values of reactive components in passive or active filter combinations, serving as a low-frequency compensation network. The consequence of the temperature loop is to properly adjust the stroke amplitude while maintaining the defined operating stroke frequency at a constant value.
  • the current, position and temperature feedback signals are all normalized to correct for noise and variations in operation temperature.
  • a switch mode amplifier within the PWM control generates noise within the circuit which can be substantially corrected by filter techniques.
  • the linear drive motor 144, switch mode amplifier and other elements of the control circuit may generate sufficient heat to perturb efficient operation of the control circuit. Corrections for noise and temperature are made at points in the system indicated by Tc and Nc from circuits 122 and 124 respectively.
  • control circuitry as described is analog in nature. All the same actions may be performed by digital circuitry, provided that operational speeds of the control circuitry is sufficiently high to maintain required resolution of the system.
  • a digital version would preferably use a microprocessor of sufficient data word capacity and computing, frequency.
  • An eight bit processor in double precision or a sixteen bit processor in single precision can be used.
  • Operating clock frequency may be established in the 4 megahertz range.
  • Algorithms may be developed for the functional requirements, for example, the reference waveform 136 is modeled by move instructions that incrementally describe the waveform as point by point instructions. The position feedback may remain as described, followed by an analog to digital circuit of 2 resolution with a settling time of better than 10 microseconds. Alternately, a linear incremental encoder may be substituted.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Linear Motors (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Linear Motors (AREA)

Abstract

Système de commande de la température, pour un réfrigérateur cryogénique à moteur direct linéaire, commandant le déplacement de l'élément d'induit qui effectue un mouvement de va-et-vient à une fréquence donnée pour régler la température de fonctionnement d'un fluide de travail à l'extrémité réfrigérante de la tubulure. Les moteurs directs linéaires utilisant des absorbeurs dynamiques pour réduire les vibrations fonctionnent avec la même gamme de fréquence étroite que celle sur laquelle l'absorbeur est réglé. En réglant le débattement maximal de l'élément d'induit qui sert à comprimer le fluide de travail, on peut régler la température à l'extrémité réfrigérante du réfrigérateur sans pour autant modifier la fréquence de débattement.
PCT/US1989/004393 1988-10-11 1989-10-03 Systeme de commande de la temperature pour un refrigerateur cryogenique WO1990004144A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US25604288A 1988-10-11 1988-10-11
US256,042 1988-10-11

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WO1990004144A1 true WO1990004144A1 (fr) 1990-04-19

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2709358A1 (fr) * 1993-07-08 1995-03-03 Hughes Aircraft Co Procédé et système adaptatifs de limitation par anticipation des vibrations, engin spatial et refroidisseur cryogénique à cycle de stirling.
NL1017347C2 (nl) * 2000-02-17 2001-09-13 Lg Electronics Inc Pulsbuiskoelinrichting.
US6484515B2 (en) 2001-02-17 2002-11-26 Lg Electronics Inc. Pulse tube refrigerator
CN105466064A (zh) * 2015-12-16 2016-04-06 中国电子科技集团公司第十一研究所 一种通用的分置式线性斯特林制冷机驱动方法及驱动电路

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US417448A (en) * 1889-12-17 schmemann
US543793A (en) * 1895-07-30 Switch and signal mechanism
GB185834A (en) * 1921-06-10 1922-09-11 George Chappell Minnitt Improvements in or relating to louvre window or like shutters
EP0043249A2 (fr) * 1980-06-25 1982-01-06 National Research Development Corporation Machine du type à cycle de Stirling
US4664685A (en) * 1985-11-19 1987-05-12 Helix Technology Corporation Linear drive motor control in a cryogenic refrigerator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US417448A (en) * 1889-12-17 schmemann
US543793A (en) * 1895-07-30 Switch and signal mechanism
GB185834A (en) * 1921-06-10 1922-09-11 George Chappell Minnitt Improvements in or relating to louvre window or like shutters
EP0043249A2 (fr) * 1980-06-25 1982-01-06 National Research Development Corporation Machine du type à cycle de Stirling
US4664685A (en) * 1985-11-19 1987-05-12 Helix Technology Corporation Linear drive motor control in a cryogenic refrigerator

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2709358A1 (fr) * 1993-07-08 1995-03-03 Hughes Aircraft Co Procédé et système adaptatifs de limitation par anticipation des vibrations, engin spatial et refroidisseur cryogénique à cycle de stirling.
NL1017347C2 (nl) * 2000-02-17 2001-09-13 Lg Electronics Inc Pulsbuiskoelinrichting.
US6467276B2 (en) 2000-02-17 2002-10-22 Lg Electronics Inc. Pulse tube refrigerator
US6484515B2 (en) 2001-02-17 2002-11-26 Lg Electronics Inc. Pulse tube refrigerator
CN105466064A (zh) * 2015-12-16 2016-04-06 中国电子科技集团公司第十一研究所 一种通用的分置式线性斯特林制冷机驱动方法及驱动电路
CN105466064B (zh) * 2015-12-16 2018-07-17 中国电子科技集团公司第十一研究所 一种通用的分置式线性斯特林制冷机驱动方法及驱动电路

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CA2000359C (fr) 1997-12-09
CA2000359A1 (fr) 1990-04-11

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