WO1989011104A1 - Detecteur d'acceleration - Google Patents

Detecteur d'acceleration Download PDF

Info

Publication number
WO1989011104A1
WO1989011104A1 PCT/DE1989/000263 DE8900263W WO8911104A1 WO 1989011104 A1 WO1989011104 A1 WO 1989011104A1 DE 8900263 W DE8900263 W DE 8900263W WO 8911104 A1 WO8911104 A1 WO 8911104A1
Authority
WO
WIPO (PCT)
Prior art keywords
spiral spring
resistors
sensor according
recess
net
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE1989/000263
Other languages
German (de)
English (en)
French (fr)
Inventor
Dieter Seipler
Jiri Marek
Botho Ziegenbein
Martin Holland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE8989904774T priority Critical patent/DE58901847D1/de
Publication of WO1989011104A1 publication Critical patent/WO1989011104A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges

Definitions

  • the vibrating seismic mass can also be included in the electrical control.
  • the evaluation circuit can be arranged on an extension of the spiral spring. As a result, the evaluation circuit can be applied to a ceramic substrate in a region of high strength using hybrid technology. No interference signals are generated in the evaluation circuit by mechanical deformation in this area. Furthermore, the spiral spring can thus be made relatively thin and sensitive.
  • the four strain-sensitive sensor resistors 19 to 22 of a Wheatstone 'bridge circuit are arranged on the spiral spring 13.
  • the opposing resistors 19, 21 are each brought onto one of the bending webs 15, 16.
  • the remaining resistors 20 and 22 are located on the oscillating area of the spiral spring 13 in the area of the recess 14 and in the area of the recess 14 on the spiral spring 13 in the area of the elevation 12.
  • the resistors 19 to 22 are in thick-film technology applied to the spiral spring 13, and work on the piezoresistive principle.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Air Bags (AREA)
PCT/DE1989/000263 1988-05-03 1989-04-25 Detecteur d'acceleration Ceased WO1989011104A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8989904774T DE58901847D1 (de) 1988-05-03 1989-04-25 Beschleunigungsaufnehmer.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3814949A DE3814949C1 (enExample) 1988-05-03 1988-05-03
DEP3814949.4 1988-05-03

Publications (1)

Publication Number Publication Date
WO1989011104A1 true WO1989011104A1 (fr) 1989-11-16

Family

ID=6353456

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1989/000263 Ceased WO1989011104A1 (fr) 1988-05-03 1989-04-25 Detecteur d'acceleration

Country Status (5)

Country Link
US (1) US5107708A (enExample)
EP (1) EP0376995B1 (enExample)
JP (1) JPH02504078A (enExample)
DE (2) DE3814949C1 (enExample)
WO (1) WO1989011104A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0620441A1 (en) * 1993-03-29 1994-10-19 Delco Electronics Corporation Rotational accelerometer

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0761320A (ja) * 1993-08-24 1995-03-07 Nippon Seiko Kk 衝撃検知装置
US5524490A (en) * 1994-05-25 1996-06-11 Delco Electronics Corporation Inductive proximity sensor
DE4419902A1 (de) * 1994-06-07 1995-12-14 Siemens Ag Beschleunigungssensor
WO1997030356A1 (en) * 1996-02-15 1997-08-21 Honeywell Inc. Apparatus for detection of proof mass rupture in an accelerometer
US5798641A (en) * 1997-03-17 1998-08-25 Quantum Design, Inc. Torque magnetometer utilizing integrated piezoresistive levers
DE19814261A1 (de) * 1998-03-31 1999-10-14 Mannesmann Vdo Ag Dehnungsempfindlicher Widerstand
DE10036495C2 (de) * 2000-07-25 2003-07-03 Elektronik Sachsen Gmbh Ab Kraftmessvorrichtung in Form eines Biegebalkensensors
EP2495572B1 (en) * 2010-06-25 2013-06-05 Panasonic Corporation Acceleration sensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2438829A1 (fr) * 1978-10-12 1980-05-09 Magneti Marelli Spa Dispositif mesureur de pression utilisant un extensometre a resistors
US4488445A (en) * 1983-10-28 1984-12-18 Honeywell Inc. Integrated silicon accelerometer with cross-axis compensation
GB2174500A (en) * 1985-05-04 1986-11-05 Stc Plc Accelerometer
WO1987005704A1 (fr) * 1986-03-20 1987-09-24 Robert Bosch Gmbh Capteur d'acceleration

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3705846A1 (de) * 1986-03-20 1987-09-24 Mittweida Ing Hochschule Automatisches sicherheitsgurt-notloesesystem
FR2604791B1 (fr) * 1986-10-02 1988-11-25 Commissariat Energie Atomique Procedes de fabrication d'une jauge piezoresistive et d'un accelerometre comportant une telle jauge
DE3814952A1 (de) * 1988-05-03 1989-11-23 Bosch Gmbh Robert Sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2438829A1 (fr) * 1978-10-12 1980-05-09 Magneti Marelli Spa Dispositif mesureur de pression utilisant un extensometre a resistors
US4488445A (en) * 1983-10-28 1984-12-18 Honeywell Inc. Integrated silicon accelerometer with cross-axis compensation
GB2174500A (en) * 1985-05-04 1986-11-05 Stc Plc Accelerometer
WO1987005704A1 (fr) * 1986-03-20 1987-09-24 Robert Bosch Gmbh Capteur d'acceleration

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0620441A1 (en) * 1993-03-29 1994-10-19 Delco Electronics Corporation Rotational accelerometer
US5456109A (en) * 1993-03-29 1995-10-10 Delco Electronics Corporation Thick film rotational accelerometer having two structurally integrated linear acceleration sensors

Also Published As

Publication number Publication date
US5107708A (en) 1992-04-28
EP0376995A1 (de) 1990-07-11
DE3814949C1 (enExample) 1989-08-03
EP0376995B1 (de) 1992-07-15
DE58901847D1 (de) 1992-08-20
JPH02504078A (ja) 1990-11-22

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