USRE47484E1 - Solar cell - Google Patents
Solar cell Download PDFInfo
- Publication number
- USRE47484E1 USRE47484E1 US15/640,956 US201715640956A USRE47484E US RE47484 E1 USRE47484 E1 US RE47484E1 US 201715640956 A US201715640956 A US 201715640956A US RE47484 E USRE47484 E US RE47484E
- Authority
- US
- United States
- Prior art keywords
- region
- substrate
- emitter
- solar cell
- passivation layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrates Substances 0.000 claims abstract description 171
- 239000010410 layers Substances 0.000 claims description 301
- 238000002161 passivation Methods 0.000 claims description 183
- 239000004065 semiconductors Substances 0.000 claims description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound 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- 229910052814 silicon oxides Inorganic materials 0.000 claims description 18
- 239000004020 conductors Substances 0.000 claims description 11
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N Silicon nitride Chemical compound data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
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 N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound 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[Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium Chemical compound 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- 229910052738 indium Inorganic materials 0.000 claims description 4
- 239000010950 nickel Substances 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 239000011701 zinc Substances 0.000 claims description 4
- 239000011135 tin Substances 0.000 claims description 3
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- 229910052802 copper Inorganic materials 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N silver Chemical compound data:image/svg+xml;base64,PD94bWwgdmVyc2lvbj0nMS4wJyBlbmNvZGluZz0naXNvLTg4NTktMSc/Pgo8c3ZnIHZlcnNpb249JzEuMScgYmFzZVByb2ZpbGU9J2Z1bGwnCiAgICAgICAgICAgICAgeG1sbnM9J2h0dHA6Ly93d3cudzMub3JnLzIwMDAvc3ZnJwogICAgICAgICAgICAgICAgICAgICAgeG1sbnM6cmRraXQ9J2h0dHA6Ly93d3cucmRraXQub3JnL3htbCcKICAgICAgICAgICAgICAgICAgICAgIHhtbG5zOnhsaW5rPSdodHRwOi8vd3d3LnczLm9yZy8xOTk5L3hsaW5rJwogICAgICAgICAgICAgICAgICB4bWw6c3BhY2U9J3ByZXNlcnZlJwp3aWR0aD0nMzAwcHgnIGhlaWdodD0nMzAwcHgnIHZpZXdCb3g9JzAgMCAzMDAgMzAwJz4KPCEtLSBFTkQgT0YgSEVBREVSIC0tPgo8cmVjdCBzdHlsZT0nb3BhY2l0eToxLjA7ZmlsbDojRkZGRkZGO3N0cm9rZTpub25lJyB3aWR0aD0nMzAwJyBoZWlnaHQ9JzMwMCcgeD0nMCcgeT0nMCc+IDwvcmVjdD4KPHRleHQgZG9taW5hbnQtYmFzZWxpbmU9ImNlbnRyYWwiIHRleHQtYW5jaG9yPSJzdGFydCIgeD0nMTI0LjYzNicgeT0nMTU2JyBzdHlsZT0nZm9udC1zaXplOjQwcHg7Zm9udC1zdHlsZTpub3JtYWw7Zm9udC13ZWlnaHQ6bm9ybWFsO2ZpbGwtb3BhY2l0eToxO3N0cm9rZTpub25lO2ZvbnQtZmFtaWx5OnNhbnMtc2VyaWY7ZmlsbDojM0I0MTQzJyA+PHRzcGFuPkFnPC90c3Bhbj48L3RleHQ+Cjwvc3ZnPgo= data:image/svg+xml;base64,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 [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 239000010944 silver (metal) Substances 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N tin hydride Chemical compound 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[Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N titanium Chemical compound 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[Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N zinc Chemical compound 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[Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
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[Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound 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- 239000003570 air Substances 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony Chemical compound 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[Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic Chemical compound 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[As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N boron Chemical compound 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[B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 239000007769 metal materials Substances 0.000 description 2
- 238000007254 oxidation reactions Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N phosphorus Chemical compound 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[P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 238000005036 potential barrier Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910019213 POCl3 Inorganic materials 0.000 description 1
- XHXFXVLFKHQFAL-UHFFFAOYSA-N Phosphoryl chloride Chemical compound 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ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 1
- 229910000594 SnO2 Inorganic materials 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N Tin dioxide Chemical compound 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O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound 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[C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 230000001276 controlling effects Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium Chemical compound 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[Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
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Images
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells; solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Abstract
Description
This application claims priority to and the benefit of Korean Patent Application No. 10-2009-0084046 and No. 10-2010-0043961 filed in the Korean Intellectual Property Office on Sep. 7, 2009 and May 11, 2010, the entire contents of which are incorporated herein by reference.This Application is a Reissue Continuation of U.S. patent application Ser. No. 14/843,778 filed on Sep. 2, 2015, now U.S. Pat. No. RE46,515, which is a Reissue Application of U.S. Pat. No. 8,525,018 issued on Sep. 3, 2013, which claims the benefit under 35 U.S.C. § 119(a) to Korean Patent Application Nos. 10-2010-0043961 filed on May 11, 2010 and 10-2009-0084046 filed on Sep. 7, 2009, all of which are hereby expressly incorporated by reference into the present application. More than one Reissue Application has been filed for the Reissue of U.S. Pat. No. 8,325,018: the present application and U.S. application Ser. No. 14/843,778.
1. Field of the Invention
Embodiments of the invention relate to a solar cell.
2. Description of the Related Art
Recently, as existing energy sources such as petroleum and coal are expected to be depleted, interests in alternative energy sources for replacing the existing energy sources are increasing. Among the alternative energy sources, solar cells for generating electric energy from solar energy have been particularly spotlighted.
A solar cell generally includes semiconductor parts that have different conductive types, such as a p-type and an n-type, and form a p-n junction, and electrodes respectively connected to the semiconductor parts of the different conductive types.
When light is incident on the solar cell, a plurality of electron-hole pairs are generated in the semiconductor parts. The electron-hole pairs are separated into electrons and holes by the photovoltaic effect. Thus, the separated electrons move to the n-type semiconductor and the separated holes move to the p-type semiconductor, and then the electrons and holes are collected by the electrodes electrically connected to the n-type semiconductor and the p-type semiconductor, respectively. The electrodes are connected to each other using electric wires to thereby obtain electric power.
In one aspect, there is a solar cell including a substrate of a first conductive type, an emitter region of a second conductive type opposite the first conductive type that is positioned on the substrate, a first field region of the first conductive type that is positioned on the substrate to be separated from the emitter region, a first electrode electrically connected to the emitter region, a second electrode electrically connected to the first field region, and an insulating region positioned on at least one of the emitter region and the first field region.
When the insulating region is positioned on the first field region, the insulating region may be positioned on an edge of the first field region.
When the insulating region is positioned on the first field region, the insulating region may have at least one opening exposing a portion of the first field region.
The insulating region may be positioned between the emitter region and the first field region.
The insulating region may include a portion directly contacting the substrate.
The insulating region may directly contact the substrate exposed between the emitter region and the first field region.
The emitter region may include a first portion positioned at a first height and a second portion positioned at a second height greater than the first height.
When the insulating region is positioned on the emitter region, the insulating region may be positioned on the first portion of the emitter region.
The insulating region may have at least one opening exposing a portion of the first portion of the emitter region.
The solar cell may further include a passivation layer positioned between the substrate and the first field region and between the substrate and the emitter region.
The passivation layer may include a first portion positioned between the substrate and the first field region and a second portion positioned between the substrate and the emitter region.
The second portion of the passivation layer may have the same plane shape as the emitter region.
The passivation layer may be positioned between the first field region and the emitter region.
The passivation layer may extend between the first field region and the emitter region and may be positioned between the insulating region and the emitter region.
The passivation layer may have at least one opening exposing the first portion of the emitter region.
When the insulating region is positioned on the emitter region and the first field region, the insulating region may be positioned on an edge of the emitter region and an edge of the first field region.
The solar cell may further include a first auxiliary electrode positioned between the emitter region and the first electrode and a second auxiliary electrode positioned between the first field region and the second electrode.
The first and second auxiliary electrodes may be formed of a transparent conductive material.
The emitter region and the first field region may be positioned on a surface of the substrate on which light is not incident.
The substrate may be formed of crystalline semiconductor, and the emitter region and the first field region may be formed of non-crystalline semiconductor.
The solar cell may further include a second field region positioned on the substrate to be opposite to the first field region.
The solar cell may further include a passivation layer positioned between the substrate and the second field region.
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. In the drawings:
The invention will be described more fully hereinafter with reference to the accompanying drawings, in which example embodiments of the inventions are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
In the drawings, the thickness of layers, films, panels, regions, etc., are exaggerated for clarity. Like reference numerals designate like elements throughout the specification. It will be understood that when an element such as a layer, film, region, or substrate is referred to as being “on” another element, it can be directly on the other element or intervening elements may also be present. In contrast, when an element is referred to as being “directly on” another element, there are no intervening elements present. Further, it will be understood that when an element such as a layer, film, region, or substrate is referred to as being “entirely” on another element, it may be on the entire surface of the other element and may not be on a portion of an edge of the other element.
Reference will now be made in detail to embodiments of the invention, examples of which are illustrated in the accompanying drawings.
A solar cell according to an embodiment of the invention is described in detail with reference to
As shown in
The substrate 110 is a semiconductor substrate formed of first conductive type silicon, for example, n-type silicon, though not required. Silicon used in the substrate 110 may be crystalline silicon such as single crystal silicon and polycrystalline silicon. When the substrate 110 is of an n-type, the substrate 110 may contain impurities of a group V element such as phosphor (P), arsenic (As), and antimony (Sb). Alternatively, the substrate 110 may be of a p-type, and/or be formed of another semiconductor materials other than silicon. When the substrate 110 is of the p-type, the substrate 110 may contain impurities of a group III element such as boron (B), gallium (Ga), and indium (In).
The front surface of the substrate 110 may be textured to form a textured surface corresponding to an uneven surface or having uneven characteristics.
The front passivation layer 191 on the front surface of the substrate 110 performs a passivation operation that converts unstable bonds, such as a dangling bond, existing on the surface of the substrate 110 and around the surface of the substrate 110 into stable bonds to thereby prevent or reduce a recombination and/or a disappearance of carriers moving to the front surface of the substrate 110 resulting from the unstable bonds. In the present embodiment, because the front passivation layer 191 is formed of intrinsic amorphous silicon (a-Si) in which there is no impurities or impurities scarcely exist, a defect (for example, a loss of carriers) resulting from the impurities is prevented or reduced. Alternatively, the front passivation layer 191 may be formed of silicon oxide (SiOx) and/or silicon nitride (SiNx).
The FSF region 171 on the front passivation layer 191 is formed of amorphous silicon in the present embodiment, but may be formed of crystalline silicon such as polycrystalline silicon. The FSF region 171 is an impurity region (for example, an n+-type region) that is more heavily doped with impurities of the same conductive type as the substrate 110 than the substrate 110.
Accordingly, the movement of holes to the front surface of the substrate 110 is prevented or reduced by a potential barrier resulting from a difference between impurity concentrations of the substrate 110 and the FSF region 171. Hence, a recombination and/or a disappearance of electrons and holes on the surface of the substrate 110 and around the surface of the substrate 110 are prevented or reduced. The FSF region 171 performs the passivation operation in the same manner as the front passivation layer 191, thereby preventing or reducing a recombination and/or a disappearance of carriers on the surface of the substrate 110 and around the surface of the substrate 110.
The anti-reflection layer 130 on the FSF region 171 reduces a reflectance of light incident on the solar cell 11 and increases selectivity of a predetermined wavelength band, thereby increasing the efficiency of the solar cell 11. The anti-reflection layer 130 is formed of SiNx, SiOx, SiNx:H, SiOx:H, etc. In the present embodiment, the anti-reflection layer 130 has a singe-layered structure, but the anti-reflection layer 130 may have a multi-layered structure such as a double-layered structure in other embodiments. The anti-reflection layer 130 may be omitted, if desired. The anti-reflection layer 130 performs the passivation operation in the same manner as the front passivation layer 191.
Accordingly, because a recombination and/or a disappearance of carriers around the front surface of the substrate 110 resulting from the unstable bonds is prevented/or reduced through the passivation operations of the front passivation layer 191, the FSF region 171, and the anti-reflection layer 130 positioned on the front surface of the substrate 110, the efficiency of the solar cell 11 is improved.
The back passivation layer 192 on the back surface of the substrate 110 includes a plurality of first back passivation layers 1921 (i.e., first portions) separated from one another and a plurality of second back passivation layers 1922 (i.e., second portions) separated from one another. The first and second back passivation layers 1921 and 1922 adjacent to each other extend parallel to each other on the substrate 110 in a fixed direction.
Each second back passivation layer 1922 is positioned on a portion of the insulating region 161 adjacent to the second back passivation layer 1922. Hence, each first back passivation layer 1921 has the same height d11 irrespective of its formation location, and each second back passivation layer 1922 has different heights d12 and d13 depending on its formation location. For example, the height (i.e., location) d12 in a middle portion of the second back passivation layer 1922 is less than the height (i.e., location) d13 in both edge portions of the second back passivation layer 1922. The location d11 of the first back passivation layer 1921 and the location d12 of the second back passivation layer 1922 are the same as each other in the present embodiment, but may be different from each other. In the embodiment, the location (i.e., height) indicates a shortest distance between the surface of the substrate 110 and an upper surface of each of the first and second passivation layers 1921 and 1922.
The back passivation layer 192 is formed of amorphous silicon, silicon oxide (SiOx), or silicon nitride (SiNx) in the same manner as the front passivation layer 191. The back passivation layer 192 performs a passivation operation, thereby preventing or reducing a recombination and/or a disappearance of carriers moving to the back surface of the substrate 110 resulting from the unstable bonds.
Each of the first and second back passivation layers 1921 and 1922 has a thickness to the extent that carriers moving to the back surface of the substrate 110 can pass through each of the first and second back passivation layers 1921 and 1922 and can move to the BSF regions 172 and the emitter regions 121. For example, the thickness of the back passivation layer 192 may be approximately 1 nm to 10 nm.
The plurality of BSF regions 172 are positioned on the first back passivation layers 1921 and have the same plane shape as the first back passivation layers 1921. Thus, the BSF regions 172 extend on the first back passivation layers 1921 in a fixed direction along the first back passivation layers 1921. The plurality of BSF regions 172 are formed of amorphous silicon in the same manner as the FSF region 171. Each BSF region 172 is an impurity region (for example, an n+-type region) that is more heavily doped with impurities of the same conductive type as the substrate 110 than the substrate 110. Each BSF region 172 has the same height d21 irrespective of its formation location in the same manner as the first back passivation layer 1921 underlying the BSF region 172. In embodiments of the invention, reference to a plane shape also refers to having a sheet shape, and reference to the same plane shape refers to the same plane shape so that extending directions of the planar surfaces of regions and layers match.
Accordingly, carriers (for example, holes) passing through the plurality of first back passivation layers 1921 are prevented or reduced from moving to the plurality of second electrodes 142 by a potential barrier resulting from a difference between impurity concentrations of the substrate 110 and the BSF regions 172 in the same manner as the FSF region 171. Hence, a recombination and/or a disappearance of electrons and holes around the plurality of second electrodes 142 are prevented or reduced.
The plurality of emitter regions 121 are positioned on the second back passivation layers 1922 of the back passivation layer 192 and have the same plane shape as the second back passivation layers 1922. Thus, the emitter regions 121 extend on the second back passivation layers 1922 in a fixed direction along the second back passivation layers 1922.
As shown in
Each emitter region 121 is of a second conductive type (for example, a p-type) opposite a conductive type of the substrate 110. Each emitter region 121 is formed of a semiconductor (for example, a non-crystalline semiconductor such as amorphous silicon) different from the substrate 110. Thus, the plurality of emitter regions 121 and the substrate 110 form a heterojunction as well as a p-n junction.
Each emitter region 121 has a different height depending on its formation location in the same manner as the second back passivation layer 1922 underlying the emitter region 121. For example, a height d22 in a middle portion of the emitter region 121 is less than a height d23 in both edge portions of the emitter region 121. The height d22 in the middle portion of the emitter region 121 and the height d21 of the BSF region 172 are the same as each other in the present embodiment, but may be different from each other. In the embodiment, the height indicates a shortest distance between the surface of each of the first and second back passivation layers 1921 and 1922 and an upper surface of each of the BSF region 172 and the emitter region 121. The height also may be a shortest distance between the surface of the substrate 110 and the surface of each of the BSF region 172 and the emitter region 121.
When the plurality of emitter regions 121 are of the p-type, the emitter regions 121 may contain impurities of a group III element such as boron (B), gallium (Ga), and indium (In). On the contrary, when the emitter regions 121 are of an n-type, the emitter regions 121 may contain impurities of a group V element such as phosphor (P), arsenic (As), and antimony (Sb).
A plurality of electron-hole pairs produced by light incident on the substrate 110 are separated into electrons and holes by a built-in potential difference resulting from a p-n junction between the substrate 110 and the emitter regions 121. Then, the separated electrons move to the n-type semiconductor, and the separated holes move to the p-type semiconductor. Thus, when the substrate 110 is of the n-type and the emitter regions 121 are of the p-type, the separated holes pass through the second back passivation layers 1922 of the back passivation layer 192 and move to the emitter regions 121 and the separated electrons pass through the first back passivation layers 1921 of the back passivation layer 192 and move to the BSF regions 172 with the high impurity concentration.
Because the substrate 110 and each emitter region 121 form the p-n junction, the emitter region 121 may be of the n-type when the substrate 110 is of the p-type unlike the embodiment described above. In this instance, the separated electrons pass through the second back passivation layers 1922 of the back passivation layer 192 and move to the emitter regions 121, and the separated holes pass through the first back passivation layers 1921 of the back passivation layer 192 and move to the BSF regions 172.
The plurality of emitter regions 121, the plurality of BSF regions 172, and the back passivation layer 192 perform the passivation operation, thereby preventing or reducing a recombination and/or a disappearance of carriers on the back surface of the substrate 110 and around the back surface of the substrate 110 resulting from the unstable bonds. Hence, the efficiency of the solar cell 11 is improved.
Further, in the embodiment, a crystallization phenomenon when the emitter regions 121 and the BSF regions 172 are positioned on the back passivation layer 192 formed of intrinsic a-Si is reduced further than a crystallization phenomenon when the emitter regions 121 and the BSF regions 172 are positioned directly on the substrate 110 formed of a crystalline semiconductor material. Hence, characteristics of the emitter regions 121 and the BSF regions 172 positioned on an amorphous silicon layer (i.e., the back passivation layer 192) are improved.
The plurality of insulating regions 161 are formed of a non-conductive material, for example, a silicon oxide-based material such as SiOx, a-SiOx, SiOx:H, and a-SiOx:H.
Each insulating region 161 long extends on the substrate 110 between the adjacent first and second back passivation layers 1921 and 1922 and on an edge portion of the BSF region 172 on the first back passivation layer 1921 in an extending direction of the emitter regions 121 and the BSF regions 172. Thus, each insulating region 161 overlaps a portion of the BSF region 172. As described above, a portion of each insulating region 161 overlaps a portion of the second back passivation layer 1922 and a portion of the emitter region 121 on the second back passivation layer 1922.
The plurality of insulating regions 161 insulate between the emitter region 121 and the BSF region 172 adjacent to each other, thereby preventing a short-circuit between the emitter region 121 and the BSF region 172, preventing a leakage of carriers, and preventing a loss of carriers resulting from an electrical interference between the emitter region 121 and the BSF region 172 physically separated from each other. Hence, an amount of leak current of the solar cell 11 decreases.
In embodiments of the invention, the second back passivation layers 1922 includes several portions whereby one portion (a first portion) extends parallel to the substrate 110 on the substrate 110, another portion (a second portion) extends along a lateral surface of the insulation region 161, and yet another portion (a third portion) extends parallel on a surface of the insulation region 161 that is parallel to the substrate 110. Also, the emitter region 121 includes several portions whereby one portion (a first portion) extends parallel to the substrate 110, another portion (a second portion) extends parallel to a lateral surface of the insulation region 161, and yet another portion (a third portion) extends parallel to a surface of the insulation region 161 that is parallel to the substrate 110. In other embodiments, one or more portions of the second back passivation layers 1922 need not match the plane shape of corresponding one or more portions of the emitter region 121, and vice-versa.
The plurality of first auxiliary electrodes 151 on the plurality of emitter regions 121 extend along the emitter regions 121 and are electrically connected to the emitter regions 121. Further, as shown in
As described above, because each emitter region 121 has the different heights d22 and d23 depending on its formation location, each first auxiliary electrode 151 has different thicknesses depending on its formation location. For example, a thickness of the first auxiliary electrode 151 positioned in the middle portion of the emitter region 121 is greater than a thickness of the first auxiliary electrode 151 positioned in the both edge portions of the emitter region 121 and on the insulating region 161.
The plurality of second auxiliary electrodes 152 on the plurality of BSF regions 172 extend along the BSF regions 172 and are electrically connected to the BSF regions 172. Unlike the first auxiliary electrodes 151, each second auxiliary electrode 152 has a uniform thickness, or essentially a uniform thickness except for small portions at edges.
Similar to the emitter regions 121, the second auxiliary electrodes 152 and the insulating regions 161 protect the BSF regions 172 from oxygen in the air, thereby preventing changes of characteristics of the BSF regions 172 resulting from an oxidation reaction.
The plurality of first and second auxiliary electrodes 151 and 152 are formed of a transparent conductive material with conductivity. Examples of the transparent conductive material include ITO, ZnO, SnO2, TCO, etc., or a combination thereof, or a material obtained by doping these materials or the combination with aluminum (Al), germanium (Ge), gallium (Ga), ferrum (Fe), etc.
The plurality of first and second auxiliary electrodes 151 and 152 respectively transfer carriers, for example, holes and electrons respectively moving to the emitter regions 121 and the BSF regions 172 and reflects light passing through the substrate 110 and the back passivation layer 192 to the substrate 110, thereby serving as a reflector increasing an amount of light incident on the substrate 110.
An amount of carriers existing in the middle portion of the emitter region 121 is more than an amount of carriers existing in the both edge portions of the emitter region 121. Thus, in the embodiment, because a thickness of a middle portion of the first auxiliary electrode 151 is greater than a thickness of an edge portion of the first auxiliary electrode 151, an amount of carriers transferred to the first auxiliary electrode 151 corresponding to the emitter region 121 increase. Alternatively, the plurality of first and second auxiliary electrodes 151 and 152 may be omitted.
The plurality of first electrodes 141 on the plurality of first auxiliary electrodes 151 long extend along the first auxiliary electrodes 151 and are electrically and physically connected to the first auxiliary electrodes 151. The first electrode 141 and the first auxiliary electrode 151 underlying the first electrode 141 have the same plane shape in
Each first electrode 141 collects carriers (for example, holes) that move to the corresponding emitter region 121 and are transferred through the first auxiliary electrode 151. Because the first auxiliary electrode 151 has the different thicknesses depending on its formation location as described above, a carrier collection efficiency from the emitter region 121 to the corresponding first auxiliary electrode 151 is improved. Hence, an amount of carriers output to the first electrode 141 increases.
The plurality of second electrodes 142 on the plurality of second auxiliary electrodes 152 long extend along the second auxiliary electrodes 152 and are electrically and physically connected to the second auxiliary electrodes 152. The second electrode 142 and the second auxiliary electrode 152 underlying the second electrode 142 have the same plane shape in
The plurality of first and second electrodes 141 and 142 may be formed of at least one conductive material selected from the group consisting of nickel (Ni), copper (Cu), silver (Ag), aluminum (Al), tin (Sn), zinc (Zn), indium (In), titanium (Ti), gold (Au), and a combination thereof. Other conductive materials may be used.
In the embodiment, the plurality of first and second auxiliary electrodes 151 and 152 formed of the transparent conductive material exist between the plurality of emitter regions 121 and the plurality of BSF regions 172 formed of a semiconductor material such as amorphous silicon and the plurality of first and second electrodes 141 and 142 formed of a metal material, thereby improving an adhesive strength between the semiconductor material with a low adhesive strength (adhesive characteristic) and the metal material. Hence, an adhesive strength between the emitter regions 121 and the first electrodes 141 and an adhesive strength between the BSF regions 172 and the second electrodes 142 are improved.
Further, an ohmic contact is formed between the emitter regions 121 and the first electrodes 141 and between the BSF regions 172 and the second electrodes 142, thereby improving the conductivity between the emitter regions 121 and the first electrodes 141 and the conductivity between the BSF regions 172 and the second electrodes 142. Hence, the carrier transfer efficiency of the first and second electrodes 141 and 142 increases.
If the plurality of first and second auxiliary electrodes 151 and 152 are omitted, each first electrode 141 and each second electrode 142 are directly positioned on the corresponding emitter region 121 and the corresponding BSF region 172, respectively.
The solar cell 11 having the above-described structure is a solar cell in which the plurality of first and second electrodes 141 and 142 are positioned on the back surface of the substrate 110, on which light is not incident, and the substrate 110 and the emitter regions 121 are formed of different kinds of semiconductors. An operation of the solar cell 11 is described below.
When light is irradiated onto the solar cell 11, sequentially passes through the anti-reflection layer 130, the FSF region 171, and the front passivation layer 191, and is incident on the substrate 110, a plurality of electron-hole pairs are generated in the substrate 110 by light energy based on the incident light. In this instance, because the surface of the substrate 110 is the textured surface, a light reflectance in the front surface of the substrate 110 is reduced. Further, because both a light incident operation and a light reflection operation are performed on the textured surface of the substrate 110, absorption of light increases and the efficiency of the solar cell 11 is improved. In addition, because a reflection loss of the light incident on the substrate 110 is reduced by the anti-reflection layer 130, an amount of light incident on the substrate 110 further increases.
The electron-hole pairs are separated into electrons and holes by the p-n junction of the substrate 110 and the emitter regions 121, and the separated holes move to the p-type emitter regions 121 and the separated electrons move to the n-type BSF regions 172. The holes moving to the p-type emitter regions 121 are collected by the first electrodes 141 through the first auxiliary electrodes 151, and the electrons moving to the n-type BSF regions 172 are collected by the second electrodes 142 through the second auxiliary electrodes 152. When the first electrodes 141 and the second electrodes 142 are connected to each other using electric wires, current flows therein to thereby enable use of the current for electric power.
Further, because the passivation layers 192 and 191 are positioned on the front surface as well as the back surface of the substrate 110, a recombination and/or a disappearance of carriers on the front and back surfaces of the substrate 110 and around the front and back surfaces of the substrate 110 resulting from the unstable bonds are prevented or reduced. Hence, the efficiency of the solar cell 11 is improved.
Further, because the BSF regions 172 and FSF regions 171, that are heavily doped with impurities of the same conductive type as the substrate 110, are positioned on the front surface as well as the back surface of the substrate 110, a movement of holes to the front and back surfaces of the substrate 110 is prevented or reduced. Hence, a recombination and/or a disappearance of electrons and holes around the front and back surfaces of the substrate 110 resulting from the unstable bonds are prevented or reduced, and the efficiency of the solar cell 11 is improved.
In addition, because the adhesive characteristics between the emitter regions 121 and the BSF regions 172 and the first and second electrodes 141 and 142 are improved by the first and second auxiliary electrodes 151 and 152, the efficiency of the solar cell 11 is further improved.
Because a gap between the emitter region 121 and the BSF region 172 adjacent to each other is filled with the insulating region 161, an electrical insulating state is maintained between the emitter region 121 and the BSF region 172. Hence, the short-circuit between the emitter region 121 and the BSF region 172 adjacent to each other is prevented, and thus a flow of carriers in an unwanted direction is prevented. Further, an electrical interference between the emitter region 121 and the BSF region 172 adjacent to each other is prevented, and thus a loss amount of carrier is reduced. As a result, the efficiency of the solar cell 11 is further improved.
Furthermore, because the thickness of the middle portion of the first auxiliary electrode 151 contacting the middle portion of each emitter region 121 having a high carrier density is greater than the thickness of the edge portion of the first auxiliary electrode 151, the carrier transfer efficiency is improved. Hence, the efficiency of the solar cell 11 is further improved.
A method for manufacturing the solar cell 11 according to the embodiment of the invention is described below with reference to
As shown in
Next, as shown in
Next, as shown in
Next, as shown in
For example, because POCl3 is injected into a chamber, the FSF region 171 and the BSF layer 170, that have the same conductivity type as the substrate 110 and have an impurity concentration higher than the substrate 110, may be formed.
As described above, the FSF region 171 and the BSF layer 170 formed of the same material are respectively formed on the front and back surfaces of the substrate 110 by changing a location of the surface of the substrate 110 exposed to the deposition material. A formation order of the FSF region 171 and the BSF layer 170 may vary.
Next, as shown in
Next, as shown in
Next, as shown in
Next, as shown in
Next, as shown in
Next, as shown in
Next, as shown in
Next, as shown in
Next, as shown in
Next, as shown in
In this instance, the plurality of emitter regions 121 are completely covered by the plurality of first auxiliary electrodes 151, and the plurality of BSF regions 172 are completely covered by the plurality of second auxiliary electrodes 152 and the plurality of insulating regions 161. Thus, because the emitter regions 121 and the BSF regions 172 are completely protected from oxygen or moisture, changes of the characteristics of the emitter regions 121 and the BSF regions 172 resulting from the oxygen or the moisture are prevented.
Further, as shown in
In other words, as shown in
Next, as shown in
In this instance, because the plurality of first and second auxiliary electrodes 151 and 152 and the plurality of first and second electrodes 141 and 142 are formed through separate processes, the first and second electrodes 141 and 142 may be positioned on portions of the first and second auxiliary electrodes 151 and 152 as shown in
Next, as shown in
The anti-reflection layer 130 may be formed using a method (for example, a sputtering method) performed at a low temperature, so as to protect the components formed on the back surface of the substrate 110. Other methods such as the PECVD method may be used.
A solar cell according to an another embodiment of the invention is described below with reference to
A solar cell 12 shown in
More specifically, the solar cell 12 includes a front passivation layer 191, a FSF region 171, and an anti-reflection layer 130 that are sequentially positioned on a front surface of a substrate 110, a back passivation layer 192 positioned on a back surface of a substrate 110, a plurality of emitter regions 121 and a plurality of BSF regions 172 positioned on the back passivation layer 192, a plurality of first and second auxiliary electrodes 151 and 152 positioned on the plurality of emitter regions 121 and the plurality of BSF regions 172, a plurality of first and second electrodes 141 and 142 positioned on the plurality of first and second auxiliary electrodes 151 and 152, and a plurality of insulating regions 161a positioned between the emitter region 121 and the BSF region 172 adjacent to each other.
The plurality of insulating regions 161a are positioned on the substrate 110 between the adjacent first and second back passivation layers 1921 and 1922, between the emitter region 121 and the BSF region 172 adjacent to each other, and between the adjacent BSF regions 172 in the same manner as
However, unlike
In other words, the insulating region 161a is formed on substantially the entire surface of the BSF region 172 except a portion of the BSF region 172 exposed by the plurality of openings 181.
Accordingly, the second auxiliary electrode 152 connected to the BSF region 172 exists on the insulating region 161a positioned on the BSF region 172 as well as the portion of the BSF region 172 exposed by the openings 181. Hence, the second auxiliary electrode 152 is connected to the portion of the BSF region 172 exposed by the openings 181. In other words, the second auxiliary electrodes 152 are electrically and physically connected to the portion of the BSF regions 172.
The above-described solar cell 12 has the same effect as the solar cell 11. For example, because the insulating region 161a is formed between the emitter region 121 and the BSF region 172 adjacent to each other, an electrical insulation is provided between the emitter region 121 and the BSF region 172. Hence, the short-circuit and the electrical interference between the emitter region 121 and the BSF region 172 adjacent to each other are prevented. As a result, the efficiency of the solar cell 12 is improved.
Further, because the insulating region 161a is overall formed on the BSF region 172, a formation area of the insulating region 161a increases compared with
A method for manufacturing the solar cell 12 according to the embodiment of the invention is described below with reference to
As shown in
Next, as shown in
Since the subsequent processes are substantially the same as those illustrated in
A solar cell according to another embodiment of the invention is described below with reference to
A solar cell 13 shown in
More specifically, the plurality of insulating regions 161b of the solar cell 13 are positioned on the substrate 110 between the adjacent first and second back passivation layers 1921 and 1922, between the emitter region 121 and the BSF region 172 adjacent to each other, and on the adjacent BSF regions 172. Further, the plurality of insulating regions 161b are partially positioned on the plurality of emitter regions 121.
The insulating region 161b on each emitter region 121 is mostly positioned in a middle portion of each emitter region 121. Thus, the insulating region 161b includes a plurality of openings 181 exposing a portion of the BSF region 172 and a plurality of openings 182 exposing a portion of the emitter region 121. Each opening 182 may have a stripe shape or an island shape in the same manner as the opening 181.
Accordingly, the first auxiliary electrode 151 is positioned on an exposed portion of the corresponding emitter region 121 and on the insulating region 161b positioned on the corresponding emitter region 121. The second auxiliary electrode 152 is positioned on an exposed portion of the corresponding BSF region 172 and on the insulating region 161b positioned on the corresponding BSF region 172. As described above, the first auxiliary electrodes 151 and the second auxiliary electrode 152 are separated from each other.
Unlike
A method for manufacturing the solar cell 13 according to the embodiment of the invention is described below with reference to
The method for manufacturing the solar cell 13 is similar to the method for manufacturing the solar cell 11 illustrated in
More specifically, as shown in
However, unlike
Next, as shown in
As described above, the processes illustrated in
Since the subsequent processes are substantially the same as those illustrated in
However, when the etch stop layer 72 is formed of a material different from the insulating layer 160, the plurality of insulating layers 160b having the plurality of first and second openings 181 and 182 are formed through processes illustrated in
More specifically, as shown in
Next, as shown in
Subsequently, the exposed insulating layers 160 and 160c are removed using the remaining etch stop layer 76 as a mask, and the plurality of insulating layers 160b having the plurality of first and second openings 181 and 182 are formed (refer to
Various solar cells according to another embodiment of the invention are described below with reference to
When comparing with the solar cells illustrated in
As shown in
When comparing with the solar cells illustrated in
More specifically, the back passivation layer 192a is positioned on the entire back surface of the substrate 110 and between the emitter region 121 and the BSF region 172 adjacent to each other. The back passivation layer 192a extends between the emitter region 121 and the BSF region 172 in a direction parallel to the emitter region 121 and partially overlaps an edge of the insulating region 161c.
As described above, because the back passivation layer 192a is positioned between the emitter region 121 and the BSF region 172, the insulating region 161c is positioned on only the BSF region 172 as shown in
Since configuration of the solar cell 14 shown in
Similar to the solar cell 11 show in
Further, the passivation effect of the substrate 110 is greatly improved because of the back passivation layer 192a formed of amorphous silicon having the excellent passivation effect, and the open voltage of the solar cell 14 increases. Hence, the efficiency of the solar cell 14 is further improved.
A method for manufacturing the solar cell 14 according to another embodiment of the invention is almost similar to the method for manufacturing the solar cell 11 illustrated in
The method for manufacturing the solar cell 14 is described below with reference to
As shown in
Next, in a manner as shown in
Next, as shown in
In the solar cell 14, because the process, in which the second passivation layer 190b is again formed on the first passivation layer 190a and then a portion of the second passivation layer 190b is removed, is not necessary, the manufacturing process of the solar cell 14 is simplified.
A solar cell 15 shown in
More specifically, a back passivation layer 192a shown in
Hence, the insulating region 161d is positioned on only the BSF region 172 and has a plurality of openings 181 as described above with reference to
Since the configuration of the solar cell 15 illustrated in
As described above with reference to
In a method for manufacturing the solar cell 15, in a manner as shown in
A solar cell 16 shown in
More specifically, a back passivation layer 192a shown in
Hence, the plurality of insulating regions 161e are positioned on only the BSF region 172 and only the emitter region 121 and have a plurality of openings 181 and 182 as described above with reference to
Since the configuration of the solar cell 16 illustrated in
Accordingly, as described above with reference to
Further, as shown in
In a method for manufacturing the solar cell 16, in a manner as shown in
The plurality of first and second auxiliary electrodes 151 and 152 have the same plane shape as the plurality of first and second electrodes 141 and 142 positioned on the first and second auxiliary electrodes 151 and 152 as described in
Various solar cells according to another embodiment of the invention are described below with reference to
Solar cells shown in
A solar cell 17 shown in
More specifically, the solar cell 17 shown in
In the solar cell 17 shown in
A solar cell 18 shown in
A solar cell 19 shown in
In the solar cells 17 to 19 shown in
Further, the emitter region 121 shown in
A function, a material, etc. of the insulating region 161f are substantially the same as the insulating region 161 except the formation location.
Because the emitter region 121a does not adjoin the side of the insulating region 161f in
The solar cells 17 to 20 shown in
In
Although embodiments have been described with reference to a number of illustrative embodiments thereof, it should be understood that numerous other modifications and embodiments can be devised by those skilled in the art that will fall within the scope of the principles of this disclosure. More particularly, various variations and modifications are possible in the component parts and/or arrangements of the subject combination arrangement within the scope of the disclosure, the drawings and the appended claims. In addition to variations and modifications in the component parts and/or arrangements, alternative uses will also be apparent to those skilled in the art.
Claims (16)
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JP5213188B2 (en) * | 2010-04-27 | 2013-06-19 | シャープ株式会社 | Back electrode type solar cell and method of manufacturing back electrode type solar cell |
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EP2293351A2 (en) | 2011-03-09 |
USRE46515E1 (en) | 2017-08-15 |
EP2293351A3 (en) | 2013-06-12 |
CN102044579A (en) | 2011-05-04 |
US8525018B2 (en) | 2013-09-03 |
EP2293351B1 (en) | 2017-04-12 |
CN102044579B (en) | 2013-12-18 |
US20110056545A1 (en) | 2011-03-10 |
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