USD908103S1 - Transportable semiconductor wafer rack - Google Patents

Transportable semiconductor wafer rack Download PDF

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Publication number
USD908103S1
USD908103S1 US29/680,874 US201929680874F USD908103S US D908103 S1 USD908103 S1 US D908103S1 US 201929680874 F US201929680874 F US 201929680874F US D908103 S USD908103 S US D908103S
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US
United States
Prior art keywords
semiconductor wafer
wafer rack
transportable
transportable semiconductor
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/680,874
Inventor
Michael W. Pacier
Michael J. Sershen
Adam F. Bertuch
Laurent LECORDIER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Veeco Instruments Inc
Original Assignee
Veeco Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veeco Instruments Inc filed Critical Veeco Instruments Inc
Priority to US29/680,874 priority Critical patent/USD908103S1/en
Assigned to VEECO INSTRUMENTS INC. reassignment VEECO INSTRUMENTS INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: LECORDIER, LAURENT, BERTUCH, ADAM F., PACIER, MICHAEL W., SERSHEN, MICHAEL J.
Priority to TW108304982F priority patent/TWD209793S/en
Priority to JPD2019-18347F priority patent/JP1648077S/ja
Application granted granted Critical
Publication of USD908103S1 publication Critical patent/USD908103S1/en
Assigned to HSBC BANK USA, NATIONAL ASSOCIATION, AS COLLATERAL AGENT reassignment HSBC BANK USA, NATIONAL ASSOCIATION, AS COLLATERAL AGENT PATENT SECURITY AGREEMENT Assignors: VEECO INSTRUMENTS INC.
Active legal-status Critical Current
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Description

FIG. 1 is a perspective view of a transportable semiconductor wafer rack showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a first side view thereof;
FIG. 5 is a second side view thereof;
FIG. 6 is a top view thereof;
FIG. 7 is a bottom view thereof;
FIG. 8 is a cross-section view taken along line 8-8 of FIG. 7; and,
FIG. 9 is another cross-section view taken along line 9-9 of FIG. 7.
The broken lines in the Figures are for the purpose of illustrating unclaimed portions of the transportable semiconductor wafer rack and form no part of the claimed design. The shade lines in the Figures show contour and not surface ornamentation.

Claims (1)

    CLAIM
  1. The ornamental design for a transportable semiconductor wafer rack, as shown and described.
US29/680,874 2019-02-20 2019-02-20 Transportable semiconductor wafer rack Active USD908103S1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US29/680,874 USD908103S1 (en) 2019-02-20 2019-02-20 Transportable semiconductor wafer rack
TW108304982F TWD209793S (en) 2019-02-20 2019-08-20 Transportable semiconductor wafer rack
JPD2019-18347F JP1648077S (en) 2019-02-20 2019-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/680,874 USD908103S1 (en) 2019-02-20 2019-02-20 Transportable semiconductor wafer rack

Publications (1)

Publication Number Publication Date
USD908103S1 true USD908103S1 (en) 2021-01-19

Family

ID=68835635

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/680,874 Active USD908103S1 (en) 2019-02-20 2019-02-20 Transportable semiconductor wafer rack

Country Status (3)

Country Link
US (1) USD908103S1 (en)
JP (1) JP1648077S (en)
TW (1) TWD209793S (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210035835A1 (en) * 2019-07-31 2021-02-04 Kokusai Electric Corporation Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1713190S (en) 2021-10-01 2022-04-21

Citations (42)

* Cited by examiner, † Cited by third party
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USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
US5752609A (en) * 1996-02-06 1998-05-19 Tokyo Electron Limited Wafer boat
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
US6062853A (en) * 1996-02-29 2000-05-16 Tokyo Electron Limited Heat-treating boat for semiconductor wafers
US6065615A (en) * 1996-02-28 2000-05-23 Asahi Glass Company, Ltd. Vertical wafer boat
US6099302A (en) * 1998-06-23 2000-08-08 Samsung Electronics Co., Ltd. Semiconductor wafer boat with reduced wafer contact area
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US20020092815A1 (en) * 2001-01-18 2002-07-18 Hong-Guen Kim Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
US20020187023A1 (en) * 2001-05-11 2002-12-12 Itsuo Araki Vertical type wafer supporting jig
US20030024888A1 (en) * 2001-07-16 2003-02-06 Rohm And Haas Company Wafer holding apparatus
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
US7484958B2 (en) * 2003-07-16 2009-02-03 Shin-Etsu Handotai Co., Ltd. Vertical boat for heat treatment and method for producing the same
USD600222S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD600221S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD616396S1 (en) * 2009-03-12 2010-05-25 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
US7857140B2 (en) * 2005-12-06 2010-12-28 Fujitsu Semiconductor Limited Semiconductor wafer storage case and semiconductor wafer storing method
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
US20180019144A1 (en) 2016-07-15 2018-01-18 Coorstek Kk Vertical wafer boat
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
US10224185B2 (en) 2014-09-01 2019-03-05 Samsung Electronics Co., Ltd. Substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
US20190279891A1 (en) 2018-03-07 2019-09-12 Tokyo Electron Limited Horizontal Substrate Boat
CN110246791A (en) 2019-05-20 2019-09-17 武汉新芯集成电路制造有限公司 A kind of wafer handler goes deimpurity equipment and goes deimpurity method

Patent Citations (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
US5752609A (en) * 1996-02-06 1998-05-19 Tokyo Electron Limited Wafer boat
US6065615A (en) * 1996-02-28 2000-05-23 Asahi Glass Company, Ltd. Vertical wafer boat
US6062853A (en) * 1996-02-29 2000-05-16 Tokyo Electron Limited Heat-treating boat for semiconductor wafers
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
US6099302A (en) * 1998-06-23 2000-08-08 Samsung Electronics Co., Ltd. Semiconductor wafer boat with reduced wafer contact area
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
US20020092815A1 (en) * 2001-01-18 2002-07-18 Hong-Guen Kim Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US20020187023A1 (en) * 2001-05-11 2002-12-12 Itsuo Araki Vertical type wafer supporting jig
US20030024888A1 (en) * 2001-07-16 2003-02-06 Rohm And Haas Company Wafer holding apparatus
US7484958B2 (en) * 2003-07-16 2009-02-03 Shin-Etsu Handotai Co., Ltd. Vertical boat for heat treatment and method for producing the same
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports
US7857140B2 (en) * 2005-12-06 2010-12-28 Fujitsu Semiconductor Limited Semiconductor wafer storage case and semiconductor wafer storing method
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
USD600222S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD600221S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD616396S1 (en) * 2009-03-12 2010-05-25 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
US10224185B2 (en) 2014-09-01 2019-03-05 Samsung Electronics Co., Ltd. Substrate processing apparatus
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
US20180019144A1 (en) 2016-07-15 2018-01-18 Coorstek Kk Vertical wafer boat
US20190279891A1 (en) 2018-03-07 2019-09-12 Tokyo Electron Limited Horizontal Substrate Boat
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
CN110246791A (en) 2019-05-20 2019-09-17 武汉新芯集成电路制造有限公司 A kind of wafer handler goes deimpurity equipment and goes deimpurity method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210035835A1 (en) * 2019-07-31 2021-02-04 Kokusai Electric Corporation Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
US11929272B2 (en) * 2019-07-31 2024-03-12 Kokusai Electric Corporation Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device

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Publication number Publication date
JP1648077S (en) 2019-12-16
TWD209793S (en) 2021-02-11

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