USD859331S1 - Vacuum contact pad - Google Patents

Vacuum contact pad Download PDF

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Publication number
USD859331S1
USD859331S1 US29/611,219 US201729611219F USD859331S US D859331 S1 USD859331 S1 US D859331S1 US 201729611219 F US201729611219 F US 201729611219F US D859331 S USD859331 S US D859331S
Authority
US
United States
Prior art keywords
contact pad
vacuum contact
vacuum
view
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/611,219
Inventor
Satoru Yamamoto
Masayuki Nakanishi
Kenji Kodera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JPD2017-6855F external-priority patent/JP1587815S/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Assigned to EBARA CORPORATION reassignment EBARA CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KODERA, KENJI, NAKANISHI, MASAYUKI, YAMAMOTO, SATORU
Application granted granted Critical
Publication of USD859331S1 publication Critical patent/USD859331S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a top plan view of a vacuum contact pad showing our new design;
FIG. 2 is a bottom plan view thereof;
FIG. 3 is a front view thereof;
FIG. 4 is a rear view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof; and,
FIG. 7 is an enlarged cross sectional view taken along line 7-7 in FIG. 1.
The broken line showing of the environment forms no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a vacuum contact pad, as shown and described.
US29/611,219 2017-03-31 2017-07-19 Vacuum contact pad Active USD859331S1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPD2017-6855F JP1587815S (en) 2017-03-31 2017-03-31
JP2017006854 2017-03-31
JP2017-006854 2017-03-31
JP2017-006855 2017-03-31

Publications (1)

Publication Number Publication Date
USD859331S1 true USD859331S1 (en) 2019-09-10

Family

ID=67809934

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/611,219 Active USD859331S1 (en) 2017-03-31 2017-07-19 Vacuum contact pad

Country Status (1)

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US (1) USD859331S1 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD873782S1 (en) * 2016-05-17 2020-01-28 Electro Scientific Industries, Inc Component carrier plate
USD913977S1 (en) * 2016-12-12 2021-03-23 Ebara Corporation Elastic membrane for semiconductor wafer polishing
USD947802S1 (en) * 2020-05-20 2022-04-05 Applied Materials, Inc. Replaceable substrate carrier interfacing film
USD980177S1 (en) * 2020-09-24 2023-03-07 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
USD1021832S1 (en) * 2020-09-17 2024-04-09 Ebara Corporation Elastic membrane
USD1049528S1 (en) * 2023-03-29 2024-10-29 Irobot Corporation Cleaning pad for use in a mobile cleaning robot
USD1051530S1 (en) * 2023-03-29 2024-11-12 Irobot Corporation Drip tray for use with a mobile cleaning robot
USD1072399S1 (en) 2023-03-15 2025-04-22 Irobot Corporation Cleaning pad
USD1091033S1 (en) 2023-03-09 2025-08-26 Irobot Corporation Drip tray for use with a mobile cleaning robot
USD1100395S1 (en) * 2024-08-08 2025-10-28 Beijing Roborock Technology Co., Ltd. Side mop for cleaning robot

Citations (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5374829A (en) * 1990-05-07 1994-12-20 Canon Kabushiki Kaisha Vacuum chuck
US6164633A (en) * 1999-05-18 2000-12-26 International Business Machines Corporation Multiple size wafer vacuum chuck
US6196532B1 (en) * 1999-08-27 2001-03-06 Applied Materials, Inc. 3 point vacuum chuck with non-resilient support members
US6257564B1 (en) * 1998-05-15 2001-07-10 Applied Materials, Inc Vacuum chuck having vacuum-nipples wafer support
US6729947B1 (en) * 2002-11-04 2004-05-04 Texas Instruments Incorporated Semiconductor wafer handler
US20040179323A1 (en) * 2003-03-11 2004-09-16 Alon Litman Electrostatic chuck for wafer metrology and inspection equipment
US20050035514A1 (en) * 2003-08-11 2005-02-17 Supercritical Systems, Inc. Vacuum chuck apparatus and method for holding a wafer during high pressure processing
US20070063453A1 (en) * 2004-03-25 2007-03-22 Ibiden Co., Ltd. Vacuum chuck and suction board
US20080051018A1 (en) * 2004-03-16 2008-02-28 Texas Instruments Incorporated Semiconductor Wafer Handler
US20090179365A1 (en) * 2008-01-15 2009-07-16 Lerner Alexander N High temperature vacuum chuck assembly
USD609655S1 (en) * 2008-10-03 2010-02-09 Ngk Insulators, Ltd. Electrostatic chuck
US20100117279A1 (en) * 2006-11-27 2010-05-13 Camtek Ltd. Supporting system and a method for supporting an object
USD616389S1 (en) * 2008-10-20 2010-05-25 Ebara Corporation Vacuum contact pad
USD633452S1 (en) * 2009-08-27 2011-03-01 Ebara Corporation Elastic membrane for semiconductor wafer polishing apparatus
USD649126S1 (en) * 2008-10-20 2011-11-22 Ebara Corporation Vacuum contact pad
USD650344S1 (en) * 2008-10-20 2011-12-13 Ebara Corporation Vacuum contact pad
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD723077S1 (en) * 2013-12-03 2015-02-24 Applied Materials, Inc. Chuck carrier film
USD769200S1 (en) * 2013-05-15 2016-10-18 Ebara Corporation Elastic membrane for semiconductor wafer polishing apparatus
USD790489S1 (en) * 2015-07-08 2017-06-27 Ebara Corporation Vacuum contact pad
USD825504S1 (en) * 2015-04-21 2018-08-14 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD837755S1 (en) * 2015-04-16 2019-01-08 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD839224S1 (en) * 2016-12-12 2019-01-29 Ebara Corporation Elastic membrane for semiconductor wafer polishing

Patent Citations (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5374829A (en) * 1990-05-07 1994-12-20 Canon Kabushiki Kaisha Vacuum chuck
US6257564B1 (en) * 1998-05-15 2001-07-10 Applied Materials, Inc Vacuum chuck having vacuum-nipples wafer support
US6164633A (en) * 1999-05-18 2000-12-26 International Business Machines Corporation Multiple size wafer vacuum chuck
US6196532B1 (en) * 1999-08-27 2001-03-06 Applied Materials, Inc. 3 point vacuum chuck with non-resilient support members
US6729947B1 (en) * 2002-11-04 2004-05-04 Texas Instruments Incorporated Semiconductor wafer handler
US20040179323A1 (en) * 2003-03-11 2004-09-16 Alon Litman Electrostatic chuck for wafer metrology and inspection equipment
US20050035514A1 (en) * 2003-08-11 2005-02-17 Supercritical Systems, Inc. Vacuum chuck apparatus and method for holding a wafer during high pressure processing
US20080051018A1 (en) * 2004-03-16 2008-02-28 Texas Instruments Incorporated Semiconductor Wafer Handler
US20070063453A1 (en) * 2004-03-25 2007-03-22 Ibiden Co., Ltd. Vacuum chuck and suction board
US20100117279A1 (en) * 2006-11-27 2010-05-13 Camtek Ltd. Supporting system and a method for supporting an object
US20090179365A1 (en) * 2008-01-15 2009-07-16 Lerner Alexander N High temperature vacuum chuck assembly
USD609655S1 (en) * 2008-10-03 2010-02-09 Ngk Insulators, Ltd. Electrostatic chuck
USD616389S1 (en) * 2008-10-20 2010-05-25 Ebara Corporation Vacuum contact pad
USD649126S1 (en) * 2008-10-20 2011-11-22 Ebara Corporation Vacuum contact pad
USD650344S1 (en) * 2008-10-20 2011-12-13 Ebara Corporation Vacuum contact pad
USD633452S1 (en) * 2009-08-27 2011-03-01 Ebara Corporation Elastic membrane for semiconductor wafer polishing apparatus
USD769200S1 (en) * 2013-05-15 2016-10-18 Ebara Corporation Elastic membrane for semiconductor wafer polishing apparatus
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD723077S1 (en) * 2013-12-03 2015-02-24 Applied Materials, Inc. Chuck carrier film
USD837755S1 (en) * 2015-04-16 2019-01-08 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD825504S1 (en) * 2015-04-21 2018-08-14 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD790489S1 (en) * 2015-07-08 2017-06-27 Ebara Corporation Vacuum contact pad
USD839224S1 (en) * 2016-12-12 2019-01-29 Ebara Corporation Elastic membrane for semiconductor wafer polishing

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD873782S1 (en) * 2016-05-17 2020-01-28 Electro Scientific Industries, Inc Component carrier plate
USD913977S1 (en) * 2016-12-12 2021-03-23 Ebara Corporation Elastic membrane for semiconductor wafer polishing
USD947802S1 (en) * 2020-05-20 2022-04-05 Applied Materials, Inc. Replaceable substrate carrier interfacing film
USD1021832S1 (en) * 2020-09-17 2024-04-09 Ebara Corporation Elastic membrane
USD980177S1 (en) * 2020-09-24 2023-03-07 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
USD1091033S1 (en) 2023-03-09 2025-08-26 Irobot Corporation Drip tray for use with a mobile cleaning robot
USD1072399S1 (en) 2023-03-15 2025-04-22 Irobot Corporation Cleaning pad
USD1049528S1 (en) * 2023-03-29 2024-10-29 Irobot Corporation Cleaning pad for use in a mobile cleaning robot
USD1051530S1 (en) * 2023-03-29 2024-11-12 Irobot Corporation Drip tray for use with a mobile cleaning robot
USD1100395S1 (en) * 2024-08-08 2025-10-28 Beijing Roborock Technology Co., Ltd. Side mop for cleaning robot

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