USD818961S1 - Insulation unit cover of semiconductor manufacturing apparatus - Google Patents

Insulation unit cover of semiconductor manufacturing apparatus Download PDF

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Publication number
USD818961S1
USD818961S1 US29/572,569 US201629572569F USD818961S US D818961 S1 USD818961 S1 US D818961S1 US 201629572569 F US201629572569 F US 201629572569F US D818961 S USD818961 S US D818961S
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US
United States
Prior art keywords
manufacturing apparatus
semiconductor manufacturing
unit cover
insulation unit
insulation
Prior art date
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Active
Application number
US29/572,569
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English (en)
Inventor
Takatomo Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Hitachi Kokusai Electric Inc
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Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: YAMAGUCHI, TAKATOMO
Application granted granted Critical
Publication of USD818961S1 publication Critical patent/USD818961S1/en
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
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US29/572,569 2016-02-10 2016-07-28 Insulation unit cover of semiconductor manufacturing apparatus Active USD818961S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2016-2843F JP1565116S (https=) 2016-02-10 2016-02-10
JP002843/2016 2016-02-10

Publications (1)

Publication Number Publication Date
USD818961S1 true USD818961S1 (en) 2018-05-29

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ID=57482774

Family Applications (1)

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US29/572,569 Active USD818961S1 (en) 2016-02-10 2016-07-28 Insulation unit cover of semiconductor manufacturing apparatus

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US (1) USD818961S1 (https=)
JP (1) JP1565116S (https=)
TW (1) TWD183005S (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1003243S1 (en) 2021-06-28 2023-10-31 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus
USD1003834S1 (en) 2021-06-28 2023-11-07 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus
USD1051838S1 (en) * 2020-03-12 2024-11-19 Applied Materials, Inc. Single-slot tubular cathode
USD1053157S1 (en) * 2022-08-10 2024-12-03 Kokusai Electric Corporation Heat reflector for semiconductor manufacturing equipment
USD1108381S1 (en) * 2024-03-08 2026-01-06 Kokusai Electric Corporation Filler block for substrate processing apparatus
USD1120893S1 (en) 2023-03-13 2026-03-31 Kokusai Electric Corporation Susceptor cover of semiconductor manufacturing apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1110288S1 (en) 2024-03-20 2026-01-27 Kokusai Electric Corporation Heat insulation pedestal of a semiconductor manufacturing apparatus

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD493873S1 (en) * 2002-05-24 2004-08-03 Tokyo Electron Limited Heating gas supplier for semiconductor manufacturing equipment
US6922326B2 (en) * 2002-11-29 2005-07-26 Honda Motor Co., Ltd. Accumulating element module
USD522456S1 (en) * 2002-11-29 2006-06-06 Honda Giken Kogyo Kabushiki Kaisha Capacitor cell
US7440258B2 (en) * 2005-03-14 2008-10-21 Maxwell Technologies, Inc. Thermal interconnects for coupling energy storage devices
JP2009194297A (ja) * 2008-02-18 2009-08-27 Hitachi Kokusai Electric Inc 基板処理装置、半導体装置の製造方法及び天井断熱体
US20110134584A1 (en) * 2009-11-13 2011-06-09 Stockman Richard W Hard start kit for multiple replacement applications
US20110317333A1 (en) * 2009-03-03 2011-12-29 Nesscap Co., Ltd. Electrical energy storage device
US8098479B1 (en) * 2008-09-19 2012-01-17 Cornell Dubilier Marketing, Inc. Capacitor having zinc coated common edge with welded aluminum terminal
US20120231407A1 (en) * 2011-03-07 2012-09-13 Tokyo Electron Limited Thermal treatment apparatus
US20120243142A1 (en) * 2011-03-21 2012-09-27 Schmit Christopher J Capacitor assembly
US20150249025A1 (en) * 2014-02-28 2015-09-03 Toyo Tanso Co., Ltd. Semiconductor device manufacturing apparatus
USD775075S1 (en) * 2014-12-12 2016-12-27 Hitachi Metals, Ltd. Connector for power cable

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD493873S1 (en) * 2002-05-24 2004-08-03 Tokyo Electron Limited Heating gas supplier for semiconductor manufacturing equipment
US6922326B2 (en) * 2002-11-29 2005-07-26 Honda Motor Co., Ltd. Accumulating element module
USD522456S1 (en) * 2002-11-29 2006-06-06 Honda Giken Kogyo Kabushiki Kaisha Capacitor cell
US7440258B2 (en) * 2005-03-14 2008-10-21 Maxwell Technologies, Inc. Thermal interconnects for coupling energy storage devices
JP2009194297A (ja) * 2008-02-18 2009-08-27 Hitachi Kokusai Electric Inc 基板処理装置、半導体装置の製造方法及び天井断熱体
US8098479B1 (en) * 2008-09-19 2012-01-17 Cornell Dubilier Marketing, Inc. Capacitor having zinc coated common edge with welded aluminum terminal
US20110317333A1 (en) * 2009-03-03 2011-12-29 Nesscap Co., Ltd. Electrical energy storage device
US20110134584A1 (en) * 2009-11-13 2011-06-09 Stockman Richard W Hard start kit for multiple replacement applications
US20120231407A1 (en) * 2011-03-07 2012-09-13 Tokyo Electron Limited Thermal treatment apparatus
US20120243142A1 (en) * 2011-03-21 2012-09-27 Schmit Christopher J Capacitor assembly
US20150249025A1 (en) * 2014-02-28 2015-09-03 Toyo Tanso Co., Ltd. Semiconductor device manufacturing apparatus
USD775075S1 (en) * 2014-12-12 2016-12-27 Hitachi Metals, Ltd. Connector for power cable

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Ferrotec. <URL: https://quartz.ferrotec.com/products/.> Visited Sep. 12, 2017. Quartz Insulator. *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1051838S1 (en) * 2020-03-12 2024-11-19 Applied Materials, Inc. Single-slot tubular cathode
USD1003243S1 (en) 2021-06-28 2023-10-31 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus
USD1003834S1 (en) 2021-06-28 2023-11-07 Kokusai Electric Corporation Heat insulator cover of semiconductor manufacturing apparatus
USD1053157S1 (en) * 2022-08-10 2024-12-03 Kokusai Electric Corporation Heat reflector for semiconductor manufacturing equipment
USD1120893S1 (en) 2023-03-13 2026-03-31 Kokusai Electric Corporation Susceptor cover of semiconductor manufacturing apparatus
USD1108381S1 (en) * 2024-03-08 2026-01-06 Kokusai Electric Corporation Filler block for substrate processing apparatus

Also Published As

Publication number Publication date
TWD183005S (zh) 2017-05-11
JP1565116S (https=) 2016-12-12

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