USD793975S1 - Heater for semiconductor thermal process - Google Patents

Heater for semiconductor thermal process Download PDF

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Publication number
USD793975S1
USD793975S1 US29/557,678 US201629557678F USD793975S US D793975 S1 USD793975 S1 US D793975S1 US 201629557678 F US201629557678 F US 201629557678F US D793975 S USD793975 S US D793975S
Authority
US
United States
Prior art keywords
heater
thermal process
semiconductor thermal
semiconductor
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/557,678
Other languages
English (en)
Inventor
Hitoshi Murata
Yuichi Wada
Takashi Yahata
Hidenari YOSHIDA
Shuhei SAIDO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MURATA, HITOSHI, SAIDO, SHUHEI, WADA, YUICHI, YAHATA, TAKASHI, YOSHIDA, HIDENARI
Application granted granted Critical
Publication of USD793975S1 publication Critical patent/USD793975S1/en
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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US29/557,678 2015-09-29 2016-03-10 Heater for semiconductor thermal process Active USD793975S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-021292 2015-02-05
JPD2015-21292F JP1551077S (cs) 2015-09-29 2015-09-29

Publications (1)

Publication Number Publication Date
USD793975S1 true USD793975S1 (en) 2017-08-08

Family

ID=56090474

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/557,678 Active USD793975S1 (en) 2015-09-29 2016-03-10 Heater for semiconductor thermal process

Country Status (3)

Country Link
US (1) USD793975S1 (cs)
JP (1) JP1551077S (cs)
TW (1) TWD179915S (cs)

Citations (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1140145A (en) * 1914-11-11 1915-05-18 Frederick W Finger Hose-nozzle support.
US2173217A (en) * 1936-07-03 1939-09-19 Thomsen Hans Support for plants
US2205496A (en) * 1938-08-15 1940-06-25 Schneider Frederick W Max Ornament and lamp support for use on christmas trees, etc.
US2610884A (en) * 1949-09-20 1952-09-16 Enderle Herman Means for removing olives and the like from containers
US3484070A (en) * 1965-10-29 1969-12-16 Coopexim Spoldzielcze Przed Ha Elastic hanger
USD244903S (en) * 1975-11-20 1977-07-05 Wirecraft Manufacturing Company Frankfurter roasting stick
US5324920A (en) * 1990-10-18 1994-06-28 Tokyo Electron Sagami Limited Heat treatment apparatus
USD404016S (en) * 1997-01-31 1999-01-12 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
USD405428S (en) * 1997-01-31 1999-02-09 Tokyo Electron Ltd. Heat retaining tube for use in a semiconductor wafer heat processing apparatus
USD410438S (en) * 1997-01-31 1999-06-01 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
US6023091A (en) * 1995-11-30 2000-02-08 Motorola, Inc. Semiconductor heater and method for making
USD424527S (en) * 1997-01-31 2000-05-09 Tokyo Elctron Limited Quartz fin heat retaining tube
USD425871S (en) * 1997-01-31 2000-05-30 Tokyo Electron Limited Quartz fin heat retaining tube
USD426521S (en) * 1997-01-31 2000-06-13 Tokyo Electron Limited Quartz fin heat retaining tube
USD428858S (en) * 1997-01-31 2000-08-01 Tokyo Electron Limited Quartz fin heat retaining tube
USD429224S (en) * 1997-01-31 2000-08-08 Tokyo Electron Limited Quartz fin heat retaining tube
USD450801S1 (en) * 2000-06-20 2001-11-20 Ronald Fundak Retractable lobster snare
USD484283S1 (en) * 2002-03-21 2003-12-23 Sky City International Limited Dog belt
US6737613B2 (en) * 2002-03-26 2004-05-18 Hitachi Kokusai Electric Inc. Heat treatment apparatus and method for processing substrates
USD502631S1 (en) * 2003-10-30 2005-03-08 Joseph Burke Cooking pin
US7027722B2 (en) * 2002-11-25 2006-04-11 Koyo Thermo Systems Co., Ltd. Electric heater for a semiconductor processing apparatus
US7350756B2 (en) * 2005-05-10 2008-04-01 Jw Pet Company, Inc. Fastener
USD574166S1 (en) * 2006-09-12 2008-08-05 Kaisler Trinh M Food tray support
USD579885S1 (en) * 2007-02-20 2008-11-04 Tokyo Electron Limited Upper heat insulating cylinder for manufacturing semiconductor wafers
USD703578S1 (en) * 2013-10-08 2014-04-29 Polygroup Macau Limited (Bvi) Decoration holder
USD706161S1 (en) * 2013-10-08 2014-06-03 Polygroup Macau Limited (Bvi) Decoration holder
USD711771S1 (en) * 2013-10-08 2014-08-26 Polygroup Macau Limited (Bvi) Decoration holder
USD739293S1 (en) * 2014-08-01 2015-09-22 Hallmark Cards, Incorporated Wire decorative holder

Patent Citations (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1140145A (en) * 1914-11-11 1915-05-18 Frederick W Finger Hose-nozzle support.
US2173217A (en) * 1936-07-03 1939-09-19 Thomsen Hans Support for plants
US2205496A (en) * 1938-08-15 1940-06-25 Schneider Frederick W Max Ornament and lamp support for use on christmas trees, etc.
US2610884A (en) * 1949-09-20 1952-09-16 Enderle Herman Means for removing olives and the like from containers
US3484070A (en) * 1965-10-29 1969-12-16 Coopexim Spoldzielcze Przed Ha Elastic hanger
USD244903S (en) * 1975-11-20 1977-07-05 Wirecraft Manufacturing Company Frankfurter roasting stick
US5324920A (en) * 1990-10-18 1994-06-28 Tokyo Electron Sagami Limited Heat treatment apparatus
US6023091A (en) * 1995-11-30 2000-02-08 Motorola, Inc. Semiconductor heater and method for making
USD428858S (en) * 1997-01-31 2000-08-01 Tokyo Electron Limited Quartz fin heat retaining tube
USD410438S (en) * 1997-01-31 1999-06-01 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
USD405428S (en) * 1997-01-31 1999-02-09 Tokyo Electron Ltd. Heat retaining tube for use in a semiconductor wafer heat processing apparatus
USD424527S (en) * 1997-01-31 2000-05-09 Tokyo Elctron Limited Quartz fin heat retaining tube
USD425871S (en) * 1997-01-31 2000-05-30 Tokyo Electron Limited Quartz fin heat retaining tube
USD426521S (en) * 1997-01-31 2000-06-13 Tokyo Electron Limited Quartz fin heat retaining tube
USD404016S (en) * 1997-01-31 1999-01-12 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
USD429224S (en) * 1997-01-31 2000-08-08 Tokyo Electron Limited Quartz fin heat retaining tube
USD450801S1 (en) * 2000-06-20 2001-11-20 Ronald Fundak Retractable lobster snare
USD484283S1 (en) * 2002-03-21 2003-12-23 Sky City International Limited Dog belt
US6737613B2 (en) * 2002-03-26 2004-05-18 Hitachi Kokusai Electric Inc. Heat treatment apparatus and method for processing substrates
US7027722B2 (en) * 2002-11-25 2006-04-11 Koyo Thermo Systems Co., Ltd. Electric heater for a semiconductor processing apparatus
USD502631S1 (en) * 2003-10-30 2005-03-08 Joseph Burke Cooking pin
US7350756B2 (en) * 2005-05-10 2008-04-01 Jw Pet Company, Inc. Fastener
USD574166S1 (en) * 2006-09-12 2008-08-05 Kaisler Trinh M Food tray support
USD579885S1 (en) * 2007-02-20 2008-11-04 Tokyo Electron Limited Upper heat insulating cylinder for manufacturing semiconductor wafers
USD703578S1 (en) * 2013-10-08 2014-04-29 Polygroup Macau Limited (Bvi) Decoration holder
USD706161S1 (en) * 2013-10-08 2014-06-03 Polygroup Macau Limited (Bvi) Decoration holder
USD711771S1 (en) * 2013-10-08 2014-08-26 Polygroup Macau Limited (Bvi) Decoration holder
USD739293S1 (en) * 2014-08-01 2015-09-22 Hallmark Cards, Incorporated Wire decorative holder

Also Published As

Publication number Publication date
TWD179915S (zh) 2016-12-01
JP1551077S (cs) 2016-06-06

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