USD748593S1 - Boat for use in a material deposition apparatus - Google Patents
Boat for use in a material deposition apparatus Download PDFInfo
- Publication number
- USD748593S1 USD748593S1 US29/484,067 US201429484067F USD748593S US D748593 S1 USD748593 S1 US D748593S1 US 201429484067 F US201429484067 F US 201429484067F US D748593 S USD748593 S US D748593S
- Authority
- US
- United States
- Prior art keywords
- boat
- deposition apparatus
- material deposition
- view
- perspective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000008021 deposition Effects 0.000 title claims description 3
Images
Description
Broken lines are used in the drawings to illustrate environment. The features illustrated in broken lines form no part of the claimed design.
Claims (1)
- The ornamental design for a boat for use in a material deposition apparatus, as shown and described.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/484,067 USD748593S1 (en) | 2014-03-05 | 2014-03-05 | Boat for use in a material deposition apparatus |
| US14/634,034 US20150167151A1 (en) | 2012-01-10 | 2015-02-27 | Carrier systems for introducing materials into material processing systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/484,067 USD748593S1 (en) | 2014-03-05 | 2014-03-05 | Boat for use in a material deposition apparatus |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US13/737,737 Continuation-In-Part US9156055B2 (en) | 2012-01-10 | 2013-01-09 | Precursor supplies, material processing systems with which precursor supplies are configured to be used and associated methods |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD748593S1 true USD748593S1 (en) | 2016-02-02 |
Family
ID=55175339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/484,067 Active USD748593S1 (en) | 2012-01-10 | 2014-03-05 | Boat for use in a material deposition apparatus |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | USD748593S1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD776801S1 (en) * | 2014-06-24 | 2017-01-17 | Kobe Steel, Ltd | Heat exchanger tube |
| USD778247S1 (en) * | 2015-04-16 | 2017-02-07 | Veeco Instruments Inc. | Wafer carrier with a multi-pocket configuration |
| USD793972S1 (en) | 2015-03-27 | 2017-08-08 | Veeco Instruments Inc. | Wafer carrier with a 31-pocket configuration |
| USD793971S1 (en) | 2015-03-27 | 2017-08-08 | Veeco Instruments Inc. | Wafer carrier with a 14-pocket configuration |
Citations (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD361752S (en) * | 1993-09-17 | 1995-08-29 | Tokyo Electron Kasbushiki Kaisha | Wafer boat or rack for holding semiconductor wafers |
| USD380454S (en) * | 1995-05-30 | 1997-07-01 | Tokyo Electron Limited | Wafer boat |
| US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
| US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
| US20050170616A1 (en) * | 2004-02-03 | 2005-08-04 | Disco Corporation | Wafer dividing method |
| US7115984B2 (en) * | 2002-06-18 | 2006-10-03 | Micron Technology, Inc. | Semiconductor devices including peripherally located bond pads, intermediates thereof, assemblies, and packages including the semiconductor devices, and support elements for the semiconductor devices |
| USD544452S1 (en) * | 2005-09-08 | 2007-06-12 | Tokyo Ohka Kogyo Co., Ltd. | Supporting plate |
| USD552565S1 (en) * | 2005-09-08 | 2007-10-09 | Tokyo Ohka Kogyo Co., Ltd. | Supporting plate |
| USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
| USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
| US7462094B2 (en) * | 2006-09-26 | 2008-12-09 | Disco Corporation | Wafer grinding method |
| USD600221S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
| USD600222S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
| US20090247057A1 (en) * | 2005-09-14 | 2009-10-01 | Ebara Corporation | Polishing platen and polishing apparatus |
| USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
| USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD674759S1 (en) * | 2010-08-19 | 2013-01-22 | Epistar Corporation | Wafer carrier |
| USD684551S1 (en) * | 2011-07-07 | 2013-06-18 | Phuong Van Nguyen | Wafer polishing pad holder |
| USD686582S1 (en) * | 2012-03-20 | 2013-07-23 | Veeco Instruments Inc. | Wafer carrier having pockets |
| USD697038S1 (en) * | 2011-09-20 | 2014-01-07 | Tokyo Electron Limited | Baffle plate |
| USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
-
2014
- 2014-03-05 US US29/484,067 patent/USD748593S1/en active Active
Patent Citations (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD361752S (en) * | 1993-09-17 | 1995-08-29 | Tokyo Electron Kasbushiki Kaisha | Wafer boat or rack for holding semiconductor wafers |
| USD380454S (en) * | 1995-05-30 | 1997-07-01 | Tokyo Electron Limited | Wafer boat |
| US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
| US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
| US7115984B2 (en) * | 2002-06-18 | 2006-10-03 | Micron Technology, Inc. | Semiconductor devices including peripherally located bond pads, intermediates thereof, assemblies, and packages including the semiconductor devices, and support elements for the semiconductor devices |
| US20050170616A1 (en) * | 2004-02-03 | 2005-08-04 | Disco Corporation | Wafer dividing method |
| USD544452S1 (en) * | 2005-09-08 | 2007-06-12 | Tokyo Ohka Kogyo Co., Ltd. | Supporting plate |
| USD552565S1 (en) * | 2005-09-08 | 2007-10-09 | Tokyo Ohka Kogyo Co., Ltd. | Supporting plate |
| US20090247057A1 (en) * | 2005-09-14 | 2009-10-01 | Ebara Corporation | Polishing platen and polishing apparatus |
| USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
| USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
| US7462094B2 (en) * | 2006-09-26 | 2008-12-09 | Disco Corporation | Wafer grinding method |
| USD600222S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
| USD600221S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
| USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
| USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
| USD674759S1 (en) * | 2010-08-19 | 2013-01-22 | Epistar Corporation | Wafer carrier |
| USD704155S1 (en) * | 2010-08-19 | 2014-05-06 | Epistar Corporation | Wafer carrier |
| USD684551S1 (en) * | 2011-07-07 | 2013-06-18 | Phuong Van Nguyen | Wafer polishing pad holder |
| USD697038S1 (en) * | 2011-09-20 | 2014-01-07 | Tokyo Electron Limited | Baffle plate |
| USD686582S1 (en) * | 2012-03-20 | 2013-07-23 | Veeco Instruments Inc. | Wafer carrier having pockets |
| USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD776801S1 (en) * | 2014-06-24 | 2017-01-17 | Kobe Steel, Ltd | Heat exchanger tube |
| USD793972S1 (en) | 2015-03-27 | 2017-08-08 | Veeco Instruments Inc. | Wafer carrier with a 31-pocket configuration |
| USD793971S1 (en) | 2015-03-27 | 2017-08-08 | Veeco Instruments Inc. | Wafer carrier with a 14-pocket configuration |
| USD852762S1 (en) | 2015-03-27 | 2019-07-02 | Veeco Instruments Inc. | Wafer carrier with a 14-pocket configuration |
| USD778247S1 (en) * | 2015-04-16 | 2017-02-07 | Veeco Instruments Inc. | Wafer carrier with a multi-pocket configuration |
| USD806046S1 (en) | 2015-04-16 | 2017-12-26 | Veeco Instruments Inc. | Wafer carrier with a multi-pocket configuration |
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