USD655682S1 - Boat of wafer processing apparatus - Google Patents

Boat of wafer processing apparatus Download PDF

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Publication number
USD655682S1
USD655682S1 US29/378,011 US37801110F USD655682S US D655682 S1 USD655682 S1 US D655682S1 US 37801110 F US37801110 F US 37801110F US D655682 S USD655682 S US D655682S
Authority
US
United States
Prior art keywords
boat
processing apparatus
wafer processing
view
elevational view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/378,011
Inventor
Yuji Takebayashi
Tatsuyuki Saito
Tetsuo Yamamoto
Tsutomu Kato
Satoshi Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KATO, TSUTOMU, OKADA, SATOSHI, SAITO, TATSUYUKI, TAKEBAYASHI, YUJI, YAMAMOTO, TETSUO
Application granted granted Critical
Publication of USD655682S1 publication Critical patent/USD655682S1/en
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a perspective view 1 of a boat of the wafer processing apparatus;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a left side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is an enlarged cross-sectional view thereof taken along lines 8-8 in FIG. 2;
FIG. 9 is a cross-sectional view thereof taken along lines 9-9 in FIG. 8; and,
FIG. 10 is a perspective view of the cross-section from FIG. 9.
The broken line showing of the boat of a wafer processing apparatus is for the purpose of illustrating environmental structure and forms no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a boat of a wafer processing apparatus, as shown and described.
US29/378,011 2010-06-18 2010-10-28 Boat of wafer processing apparatus Expired - Lifetime USD655682S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010015045 2010-06-18
JP2010-015045 2010-06-18

Publications (1)

Publication Number Publication Date
USD655682S1 true USD655682S1 (en) 2012-03-13

Family

ID=45788324

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/378,011 Expired - Lifetime USD655682S1 (en) 2010-06-18 2010-10-28 Boat of wafer processing apparatus

Country Status (2)

Country Link
US (1) USD655682S1 (en)
TW (1) TWD146654S (en)

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD711843S1 (en) * 2013-06-28 2014-08-26 Hitachi Kokusai Electric Inc. Reaction tube
USD719114S1 (en) * 2013-06-28 2014-12-09 Hitachi Kokusai Electric Inc. Reaction tube
USD720707S1 (en) * 2013-06-28 2015-01-06 Hitachi Kokusai Electric Inc. Reaction tube
USD725055S1 (en) * 2013-06-28 2015-03-24 Hitachi Kokusai Electric Inc. Reaction tube
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD739832S1 (en) * 2013-06-28 2015-09-29 Hitachi Kokusai Electric Inc. Reaction tube
USD739831S1 (en) * 2013-03-22 2015-09-29 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD748593S1 (en) * 2014-03-05 2016-02-02 Hzo, Inc. Boat for use in a material deposition apparatus
USD769201S1 (en) * 2014-11-20 2016-10-18 Tokyo Electron Limited Wafer boat
USD770993S1 (en) * 2015-09-04 2016-11-08 Hitachi Kokusai Electric Inc. Reaction tube
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD789310S1 (en) * 2014-11-20 2017-06-13 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD809458S1 (en) * 2016-01-29 2018-02-06 Hitachi Industrial Equipment Systems Co., Ltd. Transformer housing
USD809457S1 (en) * 2016-01-29 2018-02-06 Hitachi Industrial Equipment Systems Co., Ltd. Transformer housing
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD908103S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD908102S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD920935S1 (en) * 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus
USD939459S1 (en) * 2019-08-07 2021-12-28 Kokusai Electric Corporation Boat for wafer processing apparatus
USD958093S1 (en) * 2019-11-28 2022-07-19 Kokusai Electric Corporation Boat of substrate processing apparatus

Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4407654A (en) * 1982-01-21 1983-10-04 The Potters Supply Company Handling and support system for kiln fired ware
US5310339A (en) * 1990-09-26 1994-05-10 Tokyo Electron Limited Heat treatment apparatus having a wafer boat
US5482558A (en) * 1993-03-18 1996-01-09 Tokyo Electron Kabushiki Kaisha Heat treatment boat support
USD404372S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Ring for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
US6062853A (en) * 1996-02-29 2000-05-16 Tokyo Electron Limited Heat-treating boat for semiconductor wafers
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US20030024888A1 (en) * 2001-07-16 2003-02-06 Rohm And Haas Company Wafer holding apparatus
US6796439B2 (en) * 2001-05-11 2004-09-28 Heraeus Quarzglas Gmbh & Co. Kg Vertical type wafer supporting jig
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports
US6966771B2 (en) * 2001-12-27 2005-11-22 Tokyo Electron Limited Boat for heat treatment and vertical heat treatment equipment
US7033168B1 (en) * 2005-01-24 2006-04-25 Memc Electronic Materials, Inc. Semiconductor wafer boat for a vertical furnace
US7121414B2 (en) * 2001-12-28 2006-10-17 Brooks Automation, Inc. Semiconductor cassette reducer
USD551634S1 (en) * 2005-02-28 2007-09-25 Tokyo Electron Limited Wafer-boat for heat-processing of semiconductor wafers
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
US7484958B2 (en) * 2003-07-16 2009-02-03 Shin-Etsu Handotai Co., Ltd. Vertical boat for heat treatment and method for producing the same
USD616396S1 (en) * 2009-03-12 2010-05-25 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
US7857140B2 (en) * 2005-12-06 2010-12-28 Fujitsu Semiconductor Limited Semiconductor wafer storage case and semiconductor wafer storing method
US7971734B2 (en) * 2008-01-30 2011-07-05 Asm International N.V. Wafer boat

Patent Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4407654A (en) * 1982-01-21 1983-10-04 The Potters Supply Company Handling and support system for kiln fired ware
US5310339A (en) * 1990-09-26 1994-05-10 Tokyo Electron Limited Heat treatment apparatus having a wafer boat
US5482558A (en) * 1993-03-18 1996-01-09 Tokyo Electron Kabushiki Kaisha Heat treatment boat support
US6062853A (en) * 1996-02-29 2000-05-16 Tokyo Electron Limited Heat-treating boat for semiconductor wafers
USD404372S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Ring for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US6796439B2 (en) * 2001-05-11 2004-09-28 Heraeus Quarzglas Gmbh & Co. Kg Vertical type wafer supporting jig
US20030024888A1 (en) * 2001-07-16 2003-02-06 Rohm And Haas Company Wafer holding apparatus
US6966771B2 (en) * 2001-12-27 2005-11-22 Tokyo Electron Limited Boat for heat treatment and vertical heat treatment equipment
US7121414B2 (en) * 2001-12-28 2006-10-17 Brooks Automation, Inc. Semiconductor cassette reducer
US7484958B2 (en) * 2003-07-16 2009-02-03 Shin-Etsu Handotai Co., Ltd. Vertical boat for heat treatment and method for producing the same
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports
US7033168B1 (en) * 2005-01-24 2006-04-25 Memc Electronic Materials, Inc. Semiconductor wafer boat for a vertical furnace
USD551634S1 (en) * 2005-02-28 2007-09-25 Tokyo Electron Limited Wafer-boat for heat-processing of semiconductor wafers
US7857140B2 (en) * 2005-12-06 2010-12-28 Fujitsu Semiconductor Limited Semiconductor wafer storage case and semiconductor wafer storing method
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
US7971734B2 (en) * 2008-01-30 2011-07-05 Asm International N.V. Wafer boat
USD616396S1 (en) * 2009-03-12 2010-05-25 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD739831S1 (en) * 2013-03-22 2015-09-29 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD711843S1 (en) * 2013-06-28 2014-08-26 Hitachi Kokusai Electric Inc. Reaction tube
USD719114S1 (en) * 2013-06-28 2014-12-09 Hitachi Kokusai Electric Inc. Reaction tube
USD720707S1 (en) * 2013-06-28 2015-01-06 Hitachi Kokusai Electric Inc. Reaction tube
USD725055S1 (en) * 2013-06-28 2015-03-24 Hitachi Kokusai Electric Inc. Reaction tube
USD739832S1 (en) * 2013-06-28 2015-09-29 Hitachi Kokusai Electric Inc. Reaction tube
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD748593S1 (en) * 2014-03-05 2016-02-02 Hzo, Inc. Boat for use in a material deposition apparatus
USD769201S1 (en) * 2014-11-20 2016-10-18 Tokyo Electron Limited Wafer boat
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD789310S1 (en) * 2014-11-20 2017-06-13 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD770993S1 (en) * 2015-09-04 2016-11-08 Hitachi Kokusai Electric Inc. Reaction tube
USD809458S1 (en) * 2016-01-29 2018-02-06 Hitachi Industrial Equipment Systems Co., Ltd. Transformer housing
USD809457S1 (en) * 2016-01-29 2018-02-06 Hitachi Industrial Equipment Systems Co., Ltd. Transformer housing
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD920935S1 (en) * 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus
USD908103S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD908102S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD939459S1 (en) * 2019-08-07 2021-12-28 Kokusai Electric Corporation Boat for wafer processing apparatus
USD958093S1 (en) * 2019-11-28 2022-07-19 Kokusai Electric Corporation Boat of substrate processing apparatus

Also Published As

Publication number Publication date
TWD146654S (en) 2012-04-21

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