USD616395S1 - Support of wafer boat for manufacturing semiconductor wafers - Google Patents
Support of wafer boat for manufacturing semiconductor wafers Download PDFInfo
- Publication number
- USD616395S1 USD616395S1 US29/342,857 US34285709F USD616395S US D616395 S1 USD616395 S1 US D616395S1 US 34285709 F US34285709 F US 34285709F US D616395 S USD616395 S US D616395S
- Authority
- US
- United States
- Prior art keywords
- support
- semiconductor wafers
- manufacturing semiconductor
- wafer boat
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 title claims description 6
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 239000004065 semiconductor Substances 0.000 title claims description 3
Images
Description
Claims (1)
- The ornamental design for a support of wafer boat for manufacturing semiconductor wafers, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009-005411 | 2009-03-11 | ||
JP2009005411 | 2009-03-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD616395S1 true USD616395S1 (en) | 2010-05-25 |
Family
ID=42184700
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/342,857 Expired - Lifetime USD616395S1 (en) | 2009-03-11 | 2009-09-02 | Support of wafer boat for manufacturing semiconductor wafers |
Country Status (2)
Country | Link |
---|---|
US (1) | USD616395S1 (en) |
TW (1) | TWD137196S1 (en) |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD744967S1 (en) | 2012-03-20 | 2015-12-08 | Veeco Instruments Inc. | Spindle key |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD748591S1 (en) | 2012-03-20 | 2016-02-02 | Veeco Instruments Inc. | Keyed spindle |
USD761745S1 (en) * | 2013-06-28 | 2016-07-19 | Sumitomo Electric Industries, Ltd. | Semiconductor device |
USD763807S1 (en) * | 2014-05-22 | 2016-08-16 | Hzo, Inc. | Boat for a deposition apparatus |
USD766850S1 (en) * | 2014-03-28 | 2016-09-20 | Tokyo Electron Limited | Wafer holder for manufacturing semiconductor |
USD769201S1 (en) * | 2014-11-20 | 2016-10-18 | Tokyo Electron Limited | Wafer boat |
USD772183S1 (en) * | 2014-11-20 | 2016-11-22 | Tokyo Electron Limited | Wafer boat |
USD789310S1 (en) * | 2014-11-20 | 2017-06-13 | Tokyo Electron Limited | Wafer boat |
USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
US9816184B2 (en) | 2012-03-20 | 2017-11-14 | Veeco Instruments Inc. | Keyed wafer carrier |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD926715S1 (en) * | 2019-07-29 | 2021-08-03 | Epicrew Corporation | Support for a wafer for fabricating a semiconductor |
USD935424S1 (en) * | 2019-05-06 | 2021-11-09 | Lam Research Corporation | Semiconductor wafer processing tool |
USD1022933S1 (en) * | 2021-08-27 | 2024-04-16 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
-
2009
- 2009-09-02 US US29/342,857 patent/USD616395S1/en not_active Expired - Lifetime
- 2009-09-10 TW TW098304263F patent/TWD137196S1/en unknown
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9816184B2 (en) | 2012-03-20 | 2017-11-14 | Veeco Instruments Inc. | Keyed wafer carrier |
USD744967S1 (en) | 2012-03-20 | 2015-12-08 | Veeco Instruments Inc. | Spindle key |
USD748591S1 (en) | 2012-03-20 | 2016-02-02 | Veeco Instruments Inc. | Keyed spindle |
USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD761745S1 (en) * | 2013-06-28 | 2016-07-19 | Sumitomo Electric Industries, Ltd. | Semiconductor device |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD766850S1 (en) * | 2014-03-28 | 2016-09-20 | Tokyo Electron Limited | Wafer holder for manufacturing semiconductor |
USD763807S1 (en) * | 2014-05-22 | 2016-08-16 | Hzo, Inc. | Boat for a deposition apparatus |
USD789310S1 (en) * | 2014-11-20 | 2017-06-13 | Tokyo Electron Limited | Wafer boat |
USD772183S1 (en) * | 2014-11-20 | 2016-11-22 | Tokyo Electron Limited | Wafer boat |
USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
USD769201S1 (en) * | 2014-11-20 | 2016-10-18 | Tokyo Electron Limited | Wafer boat |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD935424S1 (en) * | 2019-05-06 | 2021-11-09 | Lam Research Corporation | Semiconductor wafer processing tool |
USD926715S1 (en) * | 2019-07-29 | 2021-08-03 | Epicrew Corporation | Support for a wafer for fabricating a semiconductor |
USD1022933S1 (en) * | 2021-08-27 | 2024-04-16 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
Also Published As
Publication number | Publication date |
---|---|
TWD137196S1 (en) | 2010-10-01 |
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