USD589034S1 - Microwave introducing antenna for a plasma processing apparatus - Google Patents

Microwave introducing antenna for a plasma processing apparatus Download PDF

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Publication number
USD589034S1
USD589034S1 US29/281,070 US28107007F USD589034S US D589034 S1 USD589034 S1 US D589034S1 US 28107007 F US28107007 F US 28107007F US D589034 S USD589034 S US D589034S
Authority
US
United States
Prior art keywords
processing apparatus
plasma processing
microwave introducing
introducing antenna
antenna
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/281,070
Inventor
Atsushi Ueda
Cai zhong Tian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TIAN, CAI ZHONG, UEDA, ATSUSHI
Application granted granted Critical
Publication of USD589034S1 publication Critical patent/USD589034S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a front view of a microwave introducing antenna for a plasma processing apparatus showing our new design:
FIG. 2 is a right side view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a sectional view taken along line 4—4 of FIG. 1 thereof; and,
FIG. 5 is a perspective view thereof.

Claims (1)

    CLAIM
  1. The ornamental design for a microwave introducing antenna for a plasma processing apparatus, as shown.
US29/281,070 2006-12-15 2007-06-14 Microwave introducing antenna for a plasma processing apparatus Expired - Lifetime USD589034S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-034512 2006-12-15
JP2006034512 2006-12-15

Publications (1)

Publication Number Publication Date
USD589034S1 true USD589034S1 (en) 2009-03-24

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US29/281,070 Expired - Lifetime USD589034S1 (en) 2006-12-15 2007-06-14 Microwave introducing antenna for a plasma processing apparatus

Country Status (2)

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US (1) USD589034S1 (en)
TW (1) TWD123705S1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD710832S1 (en) * 2013-03-13 2014-08-12 Airgain, Inc. Antenna
USD785604S1 (en) * 2015-02-13 2017-05-02 Airgain Incorporated Antenna

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0248806B2 (en) 1984-05-22 1990-10-26 Matsushita Electric Ind Co Ltd NENSHOSOCHI
US5175561A (en) 1989-08-21 1992-12-29 Radial Antenna Laboratory, Ltd. Single-layered radial line slot antenna
JPH05226927A (en) 1992-02-14 1993-09-03 Mitsubishi Electric Corp Slot array antenna
JPH0567918B2 (en) 1984-01-25 1993-09-27 Matsushita Electric Works Ltd
JPH0590834U (en) 1992-05-22 1993-12-10 日本航空電子工業株式会社 contact
US6124833A (en) * 1996-12-18 2000-09-26 The University Of Queensland Radial line slot antenna
JP2001338918A (en) 2000-05-26 2001-12-07 Tadahiro Omi Apparatus for plasma treatment
US20040036660A1 (en) * 2002-08-21 2004-02-26 Huor Ou Hok Radial line slot antenna
US20050250338A1 (en) * 1997-01-29 2005-11-10 Tadahiro Ohmi Plasma device
US20060118241A1 (en) * 2001-03-28 2006-06-08 Tadahiro Ohmi & Tokyo Electron Limited Plasma processing apparatus
JP2006244891A (en) 2005-03-04 2006-09-14 Tokyo Electron Ltd Microwave plasma processing device
US20070134895A1 (en) * 2002-05-16 2007-06-14 Tokyo Electron Limited Nitriding method of gate oxide film
US20070163617A1 (en) * 2004-02-19 2007-07-19 Tokyo Electron Limited Method for cleaning treatment chamber iIn substrate treating apparatus and method for detecting endpoint of cleaning
USD563950S1 (en) * 2006-12-15 2008-03-11 Tokyo Electron Limited Microwave introducing antenna for a plasma processing apparatus
USD563949S1 (en) * 2006-12-15 2008-03-11 Tokyo Electron Limited Microwave introducing antenna for a plasma processing apparatus
USD563951S1 (en) * 2006-12-15 2008-03-11 Tokyo Electron Limited Microwave introducing antenna for a plasma processing apparatus

Patent Citations (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0567918B2 (en) 1984-01-25 1993-09-27 Matsushita Electric Works Ltd
JPH0248806B2 (en) 1984-05-22 1990-10-26 Matsushita Electric Ind Co Ltd NENSHOSOCHI
US5175561A (en) 1989-08-21 1992-12-29 Radial Antenna Laboratory, Ltd. Single-layered radial line slot antenna
JPH05226927A (en) 1992-02-14 1993-09-03 Mitsubishi Electric Corp Slot array antenna
JPH0590834U (en) 1992-05-22 1993-12-10 日本航空電子工業株式会社 contact
US6124833A (en) * 1996-12-18 2000-09-26 The University Of Queensland Radial line slot antenna
US20050250338A1 (en) * 1997-01-29 2005-11-10 Tadahiro Ohmi Plasma device
JP2001338918A (en) 2000-05-26 2001-12-07 Tadahiro Omi Apparatus for plasma treatment
US20020020498A1 (en) * 2000-05-26 2002-02-21 Tadahiro Ohmi Plasma processing apparatus and plasma processing method
US20060118241A1 (en) * 2001-03-28 2006-06-08 Tadahiro Ohmi & Tokyo Electron Limited Plasma processing apparatus
US20070134895A1 (en) * 2002-05-16 2007-06-14 Tokyo Electron Limited Nitriding method of gate oxide film
US20040036660A1 (en) * 2002-08-21 2004-02-26 Huor Ou Hok Radial line slot antenna
US20070163617A1 (en) * 2004-02-19 2007-07-19 Tokyo Electron Limited Method for cleaning treatment chamber iIn substrate treating apparatus and method for detecting endpoint of cleaning
JP2006244891A (en) 2005-03-04 2006-09-14 Tokyo Electron Ltd Microwave plasma processing device
USD563950S1 (en) * 2006-12-15 2008-03-11 Tokyo Electron Limited Microwave introducing antenna for a plasma processing apparatus
USD563949S1 (en) * 2006-12-15 2008-03-11 Tokyo Electron Limited Microwave introducing antenna for a plasma processing apparatus
USD563951S1 (en) * 2006-12-15 2008-03-11 Tokyo Electron Limited Microwave introducing antenna for a plasma processing apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD710832S1 (en) * 2013-03-13 2014-08-12 Airgain, Inc. Antenna
USD785604S1 (en) * 2015-02-13 2017-05-02 Airgain Incorporated Antenna

Also Published As

Publication number Publication date
TWD123705S1 (en) 2008-07-11

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