USD589034S1 - Microwave introducing antenna for a plasma processing apparatus - Google Patents

Microwave introducing antenna for a plasma processing apparatus Download PDF

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Publication number
USD589034S1
USD589034S1 US29/281,070 US28107007F USD589034S US D589034 S1 USD589034 S1 US D589034S1 US 28107007 F US28107007 F US 28107007F US D589034 S USD589034 S US D589034S
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US
United States
Prior art keywords
processing apparatus
plasma processing
microwave introducing
introducing antenna
antenna
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/281,070
Inventor
Atsushi Ueda
Cai zhong Tian
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Filing date
Publication date
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Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TIAN, CAI ZHONG, UEDA, ATSUSHI
Application granted granted Critical
Publication of USD589034S1 publication Critical patent/USD589034S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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FIG. 1 is a front view of a microwave introducing antenna for a plasma processing apparatus showing our new design:
FIG. 2 is a right side view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a sectional view taken along line 4—4 of FIG. 1 thereof; and,
FIG. 5 is a perspective view thereof.

Claims (1)

  1. The ornamental design for a microwave introducing antenna for a plasma processing apparatus, as shown.
US29/281,070 2006-12-15 2007-06-14 Microwave introducing antenna for a plasma processing apparatus Expired - Lifetime USD589034S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006034512 2006-12-15

Publications (1)

Publication Number Publication Date
USD589034S1 true USD589034S1 (en) 2009-03-24

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US29/281,070 Expired - Lifetime USD589034S1 (en) 2006-12-15 2007-06-14 Microwave introducing antenna for a plasma processing apparatus

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD785604S1 (en) * 2015-02-13 2017-05-02 Airgain Incorporated Antenna

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD785604S1 (en) * 2015-02-13 2017-05-02 Airgain Incorporated Antenna

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