US9057659B2 - Pressure transmitter with hydrogen getter - Google Patents

Pressure transmitter with hydrogen getter Download PDF

Info

Publication number
US9057659B2
US9057659B2 US13/477,418 US201213477418A US9057659B2 US 9057659 B2 US9057659 B2 US 9057659B2 US 201213477418 A US201213477418 A US 201213477418A US 9057659 B2 US9057659 B2 US 9057659B2
Authority
US
United States
Prior art keywords
getter material
fill fluid
hydrogen
pressure
isolation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active, expires
Application number
US13/477,418
Other languages
English (en)
Other versions
US20130312531A1 (en
Inventor
Robert C. Hedtke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Assigned to ROSEMOUNT INC. reassignment ROSEMOUNT INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HEDTKE, ROBERT C.
Priority to US13/477,418 priority Critical patent/US9057659B2/en
Priority to CN201610187179.5A priority patent/CN105806551B/zh
Priority to CN 201220470642 priority patent/CN202938959U/zh
Priority to CN201610186965.3A priority patent/CN105784262A/zh
Priority to CN201210341974.7A priority patent/CN103424223B/zh
Priority to JP2015514001A priority patent/JP5974167B2/ja
Priority to CA2872186A priority patent/CA2872186C/en
Priority to EP13711542.4A priority patent/EP2852821B1/en
Priority to PCT/US2013/030399 priority patent/WO2013176737A1/en
Publication of US20130312531A1 publication Critical patent/US20130312531A1/en
Priority to IN2188MUN2014 priority patent/IN2014MN02188A/en
Publication of US9057659B2 publication Critical patent/US9057659B2/en
Application granted granted Critical
Active legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection

Definitions

  • the present invention relates to pressure transmitters for measuring pressures of process fluids in industrial processes. More specifically, the present invention relates to reducing adverse effects of hydrogen on performance of pressure transmitters.
  • Process pressure transmitters are used in a variety of applications to sense pressure (absolute, gage, or differential) within a process environment. Additionally, a process pressure transmitter can be used to sense differential pressure from two distinct points, such as at varying elevations along a tank and provide an indication of a fluid level within the tank.
  • a thin, flexible isolation diaphragm and fill fluid separate the pressure sensitive element of the pressure transmitter from the process fluid. When process pressure is applied, the diaphragm of the pressure transmitter is displaced. This displacement is related to the process pressure and is converted electronically to an appropriate current, voltage, or digital output signal such as HART® (Highway Addressable Remote Transducer).
  • One source of gas in pressure transmitter fill fluid is hydrogen atoms which permeate the isolation diaphragm. In all crystals, some of the lattice sites are unoccupied. These unoccupied sites are called vacancies. If one of the atoms on an adjacent site jumps into the vacancy, the atom is said to have diffused by a vacancy mechanism. This type of diffusion allows hydrogen atoms to permeate the isolation diaphragm. Because transmitter diaphragms are very thin, hydrogen atoms permeating through the diaphragm can unite to form molecular hydrogen. Because molecular hydrogen is too large to permeate back through the diaphragm, it gets trapped and forms bubbles in the fill fluid. These bubbles can severely affect transmitter performance.
  • a process variable transmitter for measuring a pressure of a process fluid includes a sensor module, a pressure inlet formed in the sensor module, an isolation diaphragm positioned in the pressure inlet, a pressure sensor and an isolation tube containing a fill fluid to convey a process fluid related pressure from the isolation diaphragm to the pressure sensor.
  • a hydrogen getter material is positioned in contact with the fill fluid between the isolation diaphragm and the pressure sensor to remove hydrogen from the fill fluid.
  • FIG. 1 shows a process measurement system with a process transmitter constructed in accordance with an example embodiment.
  • FIG. 2 is a schematic side view of the process transmitter of FIG. 1 showing transmitter features.
  • FIG. 3 is a cross sectional view of a sensor module of the transmitter of FIG. 2 .
  • FIG. 4 is a diagrammatic illustration of isolation tube portions of the sensor module, showing first embodiments with hydrogen getter material mixed with fill fluid.
  • FIG. 5 is a diagrammatic illustration of portions of the sensor module, showing second embodiments with hydrogen getter material positioned in contact with the fill fluid near the isolation diaphragm.
  • FIG. 6 is a diagrammatic illustration of portions of the sensor module, showing third embodiments with hydrogen getter material positioned in contact with the fill fluid near the isolation diaphragm.
  • FIG. 7 is a diagrammatic illustration of portions of the sensor module, showing fourth embodiments with hydrogen getter material positioned in the isolation tube region.
  • FIG. 8 is a diagrammatic illustration of portions of the sensor module, showing fifth embodiments with hydrogen getter material coated on the isolation diaphragm.
  • a hydrogen getter is added to a process pressure transmitter on a fill fluid side of the transmitter's isolation diaphragm.
  • a getter or getter material is intended to mean any structure or substance that has the ability to immobilize, absorb, or otherwise remove gaseous hydrogen from the fill fluid. While various getter materials in different forms can be used, in exemplary embodiments polymer hydrogen getters, for example those commercially available from Vacuum Energy Inc. are contemplated in some embodiments for reasons of compatibility with pressure transmitter fill fluid. Other examples of known polymeric getters are disclosed in U.S. Pat. Nos. 5,837,158 and 6,063,307.
  • placement of hydrogen getter material allows the costs of manufacturing the process pressure transmitter to be reduced in some cases by eliminating the costly gold plating which has commonly been used.
  • the disclosed embodiments provide the potential for better performing or more durable process pressure transmitters in that detrimental effect of hydrogen gas is reduced or eliminated.
  • FIG. 1 shows generally the environment of a process measurement system 32 .
  • FIG. 1 shows process piping 30 containing a fluid under pressure coupled to the process measurement system 32 for measuring a process pressure.
  • the process measurement system 32 includes impulse piping 34 connected to the piping 30 .
  • the impulse piping 34 is connected to a process pressure transmitter 36 .
  • a primary element 33 such as an orifice plate, venturi tube, flow nozzle, and so on, contacts the process fluid at a location in the process piping 30 between the pipes of the impulse piping 34 .
  • the primary element 33 causes a pressure change in the fluid as it flows past the primary element 33 .
  • Transmitter 36 is a process measurement device that receives process pressures through the impulse piping 34 .
  • the transmitter 36 senses a differential process pressure and converts it to a standardized transmission signal that is a function of the process pressure. While an illustrative embodiment is described with reference to transmitter 36 measuring differential process pressure, disclosed embodiments are not limited to transmitters that measure differential pressure.
  • Pressure transmitter 36 can thus be considered to be a process pressure transmitter of any type having an isolation diaphragm and a fluid fill system.
  • a process loop 38 provides both a power signal to the transmitter 36 from control room 40 and bi-directional communication, and can be constructed in accordance with a number of process communication protocols.
  • the process loop 38 is a two-wire loop.
  • the two-wire loop is used to transmit all power to and all communications to and from the transmitter 36 during normal operations with a 4-20 mA signal.
  • a control room 40 includes a voltage power supply 46 that powers the transmitter 36 and a series resistance 44 .
  • loop 38 is a wireless connection in which data may be transmitted or received wirelessly either in a point-to-point configuration, a mesh network, or other configuration.
  • FIG. 2 schematically shows one embodiment of pressure transmitter 36 having a sensor module 52 and a transmitter electronics module 136 .
  • Sensor module 52 includes housing 152 and a base 54 , in which are disposed a sensor board 156 , a pressure sensor 56 , isolation tubes 93 and 94 and sensing or isolation diaphragms 90 .
  • Transmitter electronics module 136 includes a housing 164 , a cover 166 , a display cover 168 , an output interface 170 and transmitter circuitry 172 . Pressures P 1 and P 2 are produced on either side of primary element 33 in piping 30 shown in FIG. 1 .
  • Sensor board 156 and sensor 56 are mounted within housing 152 of sensor module 52 .
  • Housing 152 of sensor module 52 connects to housing 164 of electronics module 136 through, for example, a threaded connection.
  • covers 166 and 168 are connected to housing 164 through threaded connections that form flame-quenching seals, as are known in the art, to prevent escape of flames from within housing 164 .
  • Output interface 170 and transmitter circuitry 172 are mounted to housing 164 within transmitter electronics module 136 and can together form one or more electronics boards.
  • sensor 56 is a capacitance-based differential pressure cell having a sensing diaphragm disposed between a pair of electrode plates.
  • sensor 56 is a metal-diaphragm type sensor as is described in U.S. Pat. No. 6,295,875 to Frick et al., which is assigned to Rosemount Inc., Eden Prairie, Minn.
  • Sensor 56 is connected to base 54 with isolation tubes 93 and 94 , in which is disposed a hydraulic fill fluid. Isolation diaphragms 90 separate the fill fluid within isolation tubes 93 and 94 from pressures P 1 and P 2 of process fluid.
  • FIG. 3 is a cross sectional view of sensor module 52 shown in greater detail.
  • isolation tube 93 through base 54 couples to the differential pressure sensor 56 .
  • isolation tube 94 through base 54 also connects to differential pressure sensor 56 .
  • a solution to the formation of hydrogen bubbles utilizes the addition of a hydrogen getter, or hydrogen getter material, at one or more locations inside the oil filled system of the pressure transmitter. Eliminating hydrogen caused by permeation can improve pressure transmitter performance and durability, and can potentially eliminate the costly gold plating which is sometimes used to reduce hydrogen gas build-up.
  • hydrogen is allowed to permeate through the isolation diaphragm 90 , but is then absorbed from the fill fluid between the isolation diaphragm and the pressure sensor 56 .
  • the getter can also eliminate or reduce the extent of a bake out.
  • isolation tube 94 and isolation diaphragm 90 are shown. It should be understood that isolation tube 93 and the corresponding isolation diaphragm 90 can be identical to tube 94 and the illustrated diaphragm 90 , and the following description can be applied to both isolation tubes.
  • isolation tube 94 is filled with fill fluid 202 including silicone oil mixed with a getter material.
  • the fill fluid 202 itself contains the hydrogen getter material to remove hydrogen gas from the closed system.
  • a high viscosity liquid or gel polymer getter material such as those commercially available from Vacuum Energy Inc., is mixed with silicone oil fill fluid to form hydrogen getter fill fluid 202 .
  • a fine powder getter material is mixed with and dispersed throughout the silicone oil to form hydrogen getter fill fluid 202 . While fill fluid 202 is described as being positioned within isolation tube 94 , portions of the fluid 202 will be outside of tube 94 and in contact with isolation diaphragm 90 .
  • the getter material can absorb hydrogen from any point in the oil filled system.
  • silicone oil is immiscible with most additives, this solution may not be preferred in some cases.
  • other factors such as dielectric constant, dielectric stability, and temperature effect, may be adversely affected.
  • getter material 222 is added as a separate solid piece 222 adjacent isolation diaphragm 90 and in contact with the oil volume.
  • getter material 222 is deposited or inserted into a cavity or recess 220 formed in the material of base 54 adjacent the isolation diaphragm. While illustrated as a rectangular shaped piece of getter material 222 positioned in a rectangular recess 220 , the getter material and/or recess can be of various sizes and geometries.
  • FIG. 6 illustrates getter material 232 positioned within a recess 230 such that it is formed on both sides of isolation tube 94 and substantially over the area of isolation diaphragm 90 .
  • getter material 222 need not be positioned within a recess. Instead, in some embodiments, getter material is deposited on, or adhered or fastened to, a surface of base 54 in contact with the oil volume between isolation diaphragm 90 and sensor 56 .
  • getter material 235 is deposited or formed on isolation tube 94 .
  • getter material 235 can be in the form of a thin film getter material coated or deposited on isolation tube 94 such that it directly contacts the fill fluid within tube 94 .
  • Isolation tube 93 can similarly include getter material 235 .
  • getter material 240 is coated on a backside (the side in contact with the fill fluid) of the isolation diaphragm 90 .
  • getter material 240 can be a thin film getter material of low enough thickness so as to not interfere with the transfer of pressure across diaphragm 90 .
  • One potential advantage of this embodiment is that the addition of the getter material to the diaphragm segregates the option to the diaphragm selection. Thus, other design aspects are not affected.
  • Embodiments which coat getter material 240 on isolation diaphragm 90 can include coatings which cover substantially the entire diaphragm, and coatings which cover only one or more sections of the diaphragm but leave other sections of the diaphragm uncoated.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
US13/477,418 2012-05-22 2012-05-22 Pressure transmitter with hydrogen getter Active 2033-02-10 US9057659B2 (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
US13/477,418 US9057659B2 (en) 2012-05-22 2012-05-22 Pressure transmitter with hydrogen getter
CN201610187179.5A CN105806551B (zh) 2012-05-22 2012-09-14 具有氢吸气剂的压力变送器
CN 201220470642 CN202938959U (zh) 2012-05-22 2012-09-14 具有氢吸气剂的压力变送器
CN201610186965.3A CN105784262A (zh) 2012-05-22 2012-09-14 具有氢吸气剂的压力变送器
CN201210341974.7A CN103424223B (zh) 2012-05-22 2012-09-14 具有氢吸气剂的压力变送器
CA2872186A CA2872186C (en) 2012-05-22 2013-03-12 Pressure transmitter with hydrogen getter
JP2015514001A JP5974167B2 (ja) 2012-05-22 2013-03-12 水素ゲッターを有する圧力送信機
EP13711542.4A EP2852821B1 (en) 2012-05-22 2013-03-12 Pressure transmitter with hydrogen getter
PCT/US2013/030399 WO2013176737A1 (en) 2012-05-22 2013-03-12 Pressure transmitter with hydrogen getter
IN2188MUN2014 IN2014MN02188A (zh) 2012-05-22 2014-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13/477,418 US9057659B2 (en) 2012-05-22 2012-05-22 Pressure transmitter with hydrogen getter

Publications (2)

Publication Number Publication Date
US20130312531A1 US20130312531A1 (en) 2013-11-28
US9057659B2 true US9057659B2 (en) 2015-06-16

Family

ID=47915370

Family Applications (1)

Application Number Title Priority Date Filing Date
US13/477,418 Active 2033-02-10 US9057659B2 (en) 2012-05-22 2012-05-22 Pressure transmitter with hydrogen getter

Country Status (7)

Country Link
US (1) US9057659B2 (zh)
EP (1) EP2852821B1 (zh)
JP (1) JP5974167B2 (zh)
CN (4) CN103424223B (zh)
CA (1) CA2872186C (zh)
IN (1) IN2014MN02188A (zh)
WO (1) WO2013176737A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220112954A1 (en) * 2020-10-08 2022-04-14 Yokogawa Electric Corporation Diaphragm seal and maintenance method thereof
US11371899B2 (en) 2018-05-17 2022-06-28 Rosemount Inc. Measuring element with an extended permeation resistant layer

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9057659B2 (en) * 2012-05-22 2015-06-16 Rosemount Inc. Pressure transmitter with hydrogen getter
JP6018945B2 (ja) * 2012-10-05 2016-11-02 株式会社日立製作所 伝送装置及び伝送方法
JP2015078944A (ja) * 2013-10-18 2015-04-23 株式会社日立製作所 圧力伝送装置
JP2015078945A (ja) * 2013-10-18 2015-04-23 株式会社日立製作所 圧力伝送器
JP2015096805A (ja) * 2013-11-15 2015-05-21 株式会社日立製作所 伝送装置
JP6199765B2 (ja) * 2014-02-13 2017-09-20 株式会社日立製作所 原子力プラント計装装置
JP6283266B2 (ja) * 2014-06-05 2018-02-21 株式会社日立ハイテクソリューションズ 圧力計測装置
JP6478776B2 (ja) * 2015-04-10 2019-03-06 株式会社日立製作所 圧力伝送装置
CN107796555A (zh) * 2017-09-23 2018-03-13 南京律智诚专利技术开发有限公司 一种高温压力变送器
CN107702845A (zh) * 2017-09-23 2018-02-16 南京律智诚专利技术开发有限公司 一种具有复合填充流体的压力变送器
CN107806952A (zh) * 2017-09-23 2018-03-16 南京律智诚专利技术开发有限公司 一种新型压力变送器
CN107796554A (zh) * 2017-09-23 2018-03-13 南京律智诚专利技术开发有限公司 一种高稳定性的压力变送器
CN107782487A (zh) * 2017-09-23 2018-03-09 南京律智诚专利技术开发有限公司 一种适用于微波水热反应器的压力变送器
CN107796553A (zh) * 2017-09-23 2018-03-13 南京律智诚专利技术开发有限公司 一种污水压力变送器
CN107806953A (zh) * 2017-09-23 2018-03-16 南京律智诚专利技术开发有限公司 一种高稳定性的压力变送器的生产方法
CN108398203B (zh) * 2018-05-14 2024-06-04 苏州名列膜材料有限公司 一种阻液测试装置以及阻液测试系统
US11371902B2 (en) * 2019-12-27 2022-06-28 Rosemount Inc. Process venting feature for use in sensor applications with a process fluid barrier
DE102021109744A1 (de) 2021-04-19 2022-10-20 Vega Grieshaber Kg Druckmittler mit mehrkomponentigem Druckmittlermedium
CN114216603B (zh) * 2022-02-21 2022-05-24 成都凯天电子股份有限公司 一种压力传感器

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942546A (en) 1972-10-27 1976-03-09 Continental Oil Company Corrosion monitoring and composition-analytical apparatus
DE2901636A1 (de) 1979-01-17 1980-07-24 Leybold Heraeus Gmbh & Co Kg Druckmessgeraet mit einem abgeschlossenen vergleichsraum
US5257542A (en) 1990-10-08 1993-11-02 Leybold Aktiengesellschaft Sensor for a capacitance pressure gauge
EP0695418A1 (en) 1993-04-23 1996-02-07 Rosemount Inc. Pressure isolator assembly for sanitary processing
US5837158A (en) * 1996-09-23 1998-11-17 Sandia Corporation Polymer formulations for gettering hydrogen
US5939639A (en) * 1997-12-04 1999-08-17 Setra Systems, Inc. Pressure transducer housing with barometric pressure isolation
US6063307A (en) 1996-09-23 2000-05-16 Shepodd; Timothy Jon Polymer system for gettering hydrogen
US6295875B1 (en) 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
CN1317102A (zh) 1998-07-23 2001-10-10 塞德拉公司 恶劣环境中所用的光缆
US6568274B1 (en) 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
US20050126296A1 (en) * 2003-12-16 2005-06-16 Rosemount Inc. Remote process seal with improved stability in demanding applications
US20060248958A1 (en) * 2005-05-09 2006-11-09 Betzner Timothy M Pressure transducer for gaseous hydrogen environment
US7389697B2 (en) * 1997-12-22 2008-06-24 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US20080202211A1 (en) * 2004-07-16 2008-08-28 Inficon Gmbh Gas Sensor and Method For Operating a Getter Pump
US20100281994A1 (en) * 2009-05-11 2010-11-11 Honeywell International Inc. Pressure sensing device for harsh environments
CN102279075A (zh) 2010-06-08 2011-12-14 罗斯蒙德公司 具有管线压力测量的压差传感器
CN202582821U (zh) 2011-09-26 2012-12-05 罗斯蒙德公司 具有远程压力传感器的过程流体压力变送器
CN202938959U (zh) 2012-05-22 2013-05-15 罗斯蒙德公司 具有氢吸气剂的压力变送器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6782754B1 (en) * 2000-07-07 2004-08-31 Rosemount, Inc. Pressure transmitter for clean environments
US6675655B2 (en) * 2002-03-21 2004-01-13 Rosemount Inc. Pressure transmitter with process coupling
US7080558B2 (en) * 2003-10-06 2006-07-25 Rosemount Inc. Process seal for process control transmitter
US7117745B2 (en) * 2004-02-09 2006-10-10 Rosemount Inc. Process seal for process control transmitter
US7036381B2 (en) * 2004-06-25 2006-05-02 Rosemount Inc. High temperature pressure transmitter assembly
FR2939700B1 (fr) * 2008-12-11 2014-09-12 Commissariat Energie Atomique Materiau pour le piegeage d'hydrogene, procede de preparation et utilisations
US8132464B2 (en) * 2010-07-12 2012-03-13 Rosemount Inc. Differential pressure transmitter with complimentary dual absolute pressure sensors

Patent Citations (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942546A (en) 1972-10-27 1976-03-09 Continental Oil Company Corrosion monitoring and composition-analytical apparatus
DE2901636A1 (de) 1979-01-17 1980-07-24 Leybold Heraeus Gmbh & Co Kg Druckmessgeraet mit einem abgeschlossenen vergleichsraum
US5257542A (en) 1990-10-08 1993-11-02 Leybold Aktiengesellschaft Sensor for a capacitance pressure gauge
EP0695418A1 (en) 1993-04-23 1996-02-07 Rosemount Inc. Pressure isolator assembly for sanitary processing
US6063307A (en) 1996-09-23 2000-05-16 Shepodd; Timothy Jon Polymer system for gettering hydrogen
US5837158A (en) * 1996-09-23 1998-11-17 Sandia Corporation Polymer formulations for gettering hydrogen
US5939639A (en) * 1997-12-04 1999-08-17 Setra Systems, Inc. Pressure transducer housing with barometric pressure isolation
US7389697B2 (en) * 1997-12-22 2008-06-24 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6568274B1 (en) 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
CN1317102A (zh) 1998-07-23 2001-10-10 塞德拉公司 恶劣环境中所用的光缆
US6404961B1 (en) * 1998-07-23 2002-06-11 Weatherford/Lamb, Inc. Optical fiber cable having fiber in metal tube core with outer protective layer
US6690866B2 (en) 1998-07-23 2004-02-10 Weatherford/Lamb, Inc. Optical fiber cable for use in harsh environments
US6295875B1 (en) 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
US20050126296A1 (en) * 2003-12-16 2005-06-16 Rosemount Inc. Remote process seal with improved stability in demanding applications
US7290452B2 (en) 2003-12-16 2007-11-06 Rosemount Inc. Remote process seal with improved stability in demanding applications
CN1654831A (zh) 2003-12-16 2005-08-17 罗斯蒙德公司 在苛刻应用条件下具有改进稳定性的远程过程密封装置
US20080202211A1 (en) * 2004-07-16 2008-08-28 Inficon Gmbh Gas Sensor and Method For Operating a Getter Pump
US20060248958A1 (en) * 2005-05-09 2006-11-09 Betzner Timothy M Pressure transducer for gaseous hydrogen environment
EP1722209A1 (en) 2005-05-09 2006-11-15 Delphi Technologies, Inc. Pressure transducer for gaseous hydrogen environment
US20100281994A1 (en) * 2009-05-11 2010-11-11 Honeywell International Inc. Pressure sensing device for harsh environments
CN102279075A (zh) 2010-06-08 2011-12-14 罗斯蒙德公司 具有管线压力测量的压差传感器
US8234927B2 (en) 2010-06-08 2012-08-07 Rosemount Inc. Differential pressure sensor with line pressure measurement
CN202582821U (zh) 2011-09-26 2012-12-05 罗斯蒙德公司 具有远程压力传感器的过程流体压力变送器
US8578783B2 (en) 2011-09-26 2013-11-12 Rosemount Inc. Process fluid pressure transmitter with separated sensor and sensor electronics
CN202938959U (zh) 2012-05-22 2013-05-15 罗斯蒙德公司 具有氢吸气剂的压力变送器
US20130312531A1 (en) 2012-05-22 2013-11-28 Robert C. Hedtke Pressure transmitter with hydrogen getter

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
Chinese Office Action from Application No. CN 201220470642.4, dated Dec. 27, 2012.
Heise HPO Precision Pressure Transducers and Transmitters, Heise, 1997.
New HPO Precision Pressure Transducers, Heise.
Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority dated Jun. 14, 2013 in International Application No. PCT/US2013/030399, filed Mar. 12, 2013.
Office Action from Chinese Patent application No. CN 201210341974.7, dated Nov. 4, 2014.
The Chinese Patent and Trademark Office Action from application No. 200410081905.2, filed Dec. 16, 2003.
The German Patent and Trademark Office, Office Action from application No. 10 2004 060 647.1, filed Dec. 16, 2004.

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11371899B2 (en) 2018-05-17 2022-06-28 Rosemount Inc. Measuring element with an extended permeation resistant layer
US20220112954A1 (en) * 2020-10-08 2022-04-14 Yokogawa Electric Corporation Diaphragm seal and maintenance method thereof
US11835138B2 (en) * 2020-10-08 2023-12-05 Yokogawa Electric Corporation Diaphragm seal and maintenance method thereof

Also Published As

Publication number Publication date
CA2872186A1 (en) 2013-11-28
CN105806551A (zh) 2016-07-27
CN202938959U (zh) 2013-05-15
JP2015517673A (ja) 2015-06-22
CN105806551B (zh) 2018-11-09
EP2852821A1 (en) 2015-04-01
IN2014MN02188A (zh) 2015-08-28
EP2852821B1 (en) 2018-05-09
CN103424223B (zh) 2016-04-27
CN103424223A (zh) 2013-12-04
US20130312531A1 (en) 2013-11-28
JP5974167B2 (ja) 2016-08-23
WO2013176737A1 (en) 2013-11-28
CA2872186C (en) 2017-01-31
CN105784262A (zh) 2016-07-20

Similar Documents

Publication Publication Date Title
US9057659B2 (en) Pressure transmitter with hydrogen getter
JP5492071B2 (ja) 圧力送信機用の膨張チャンバ
CN101981425B (zh) 具有增强的介电填充流体的工业压力传感器
US6725731B2 (en) Bi-directional differential pressure flow sensor
EP3356777B1 (en) Pressure transmitter with overpressure protection
US10514311B2 (en) Process pressure transmitter with seal having diamond like carbon coating
US7866214B2 (en) Pressure gauge with hydraulic pressure transmission
EP3049783B1 (en) Multivariable process fluid transmitter for high pressure applications
US7377176B1 (en) Nano-particle modified fill fluid for pressure transmitters
US7937989B2 (en) Device for detecting a variable for a process fluid via differential measurement
CN105181224A (zh) 具有管线压力测量的压差传感器
CA2916108A1 (en) High integrity process fluid pressure probe
JP2004361159A (ja) リモートシール形圧力・差圧発信器
CN115824487B (zh) 水下压力变化探测装置

Legal Events

Date Code Title Description
AS Assignment

Owner name: ROSEMOUNT INC., MINNESOTA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:HEDTKE, ROBERT C.;REEL/FRAME:028248/0328

Effective date: 20120515

STCF Information on status: patent grant

Free format text: PATENTED CASE

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Year of fee payment: 4

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Year of fee payment: 8