US7736914B2 - Plasma control using dual cathode frequency mixing and controlling the level of polymer formation - Google Patents

Plasma control using dual cathode frequency mixing and controlling the level of polymer formation Download PDF

Info

Publication number
US7736914B2
US7736914B2 US11/947,663 US94766307A US7736914B2 US 7736914 B2 US7736914 B2 US 7736914B2 US 94766307 A US94766307 A US 94766307A US 7736914 B2 US7736914 B2 US 7736914B2
Authority
US
United States
Prior art keywords
frequency
substrate
plasma
level
mhz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related, expires
Application number
US11/947,663
Other languages
English (en)
Other versions
US20090142859A1 (en
Inventor
Jingbao Liu
Taeho Shin
Bryan Y. Pu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US11/947,663 priority Critical patent/US7736914B2/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: LIU, JINGBAO, PU, BRYAN Y.
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHIN, TAEHO
Priority to PCT/US2008/084635 priority patent/WO2009070562A1/fr
Priority to TW097146344A priority patent/TWI373072B/zh
Publication of US20090142859A1 publication Critical patent/US20090142859A1/en
Application granted granted Critical
Publication of US7736914B2 publication Critical patent/US7736914B2/en
Expired - Fee Related legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H01J37/32165—Plural frequencies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31105—Etching inorganic layers
    • H01L21/31111—Etching inorganic layers by chemical means
    • H01L21/31116—Etching inorganic layers by chemical means by dry-etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31144—Etching the insulating layers by chemical or physical means using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Definitions

  • Embodiments of the present invention generally relate to plasma control in a semiconductor substrate processing system and, more particularly, to plasma control using dual cathode frequency mixing techniques.
  • the increase in size of plasma enhanced semiconductor processing chambers contributes to a spatially variant effect over the surface of the substrate being processed. That is, as the size of the substrate being processed approaches the wavelength of the frequency that is used to bias the substrate, a spatial variation in the RF power distribution forms over the surface of the substrate (e.g., proximate the cathode that forms an electrode). This spatial variation can be frequency dependent in the regime of higher frequencies (shorter wavelengths), larger substrates, or combinations of the two.
  • This spatially variant effect has a negative impact on process uniformity. For example, in an etch reactor, the standing wave effect can cause non-uniformity in the etched substrate surface.
  • a method of processing a substrate includes forming a plasma of a polymer forming chemistry to etch a feature into a substrate disposed on a substrate support in a process chamber while depositing a polymer on at least portions of the feature being etched.
  • a low frequency and a high frequency RF signal are applied to an electrode disposed in the substrate support.
  • the method further includes controlling the level of polymer formation on the substrate, wherein controlling the level of polymer formation comprises adjusting a power ratio of the high frequency to the low frequency RF signal.
  • a method of processing a substrate includes forming a plasma in a process chamber by coupling RF power at a first frequency to a polymer forming process gas disposed in the process chamber; applying RF power to an electrode disposed in the process chamber at a second frequency and a third frequency; and controlling a level of polymer formation on a substrate being etched in the process chamber. Controlling the level of polymer formation may include adjusting a power ratio of the second frequency to the third frequency.
  • FIG. 1 is a partial schematic, cross-sectional view of a plasma enhanced processing chamber useful for practicing embodiments of the present invention
  • FIG. 2 is a graph of known ion energy distributions as a function of drive frequency
  • FIG. 3 is a series of graphs depicting ion energy distribution at various RF current ratios
  • FIG. 4 is an illustrative schematic graph depicting the effect of multi-frequency mixing
  • FIG. 5 is a graph depicting improvement in uniformity realized using the frequency mixing principles of the embodiments of the present invention.
  • FIG. 6 is a partial schematic, cross-sectional view of a substrate having benefits disclosed by embodiments of the present invention.
  • FIG. 7 is a flow diagram of a method of processing a semiconductor substrate in accordance with some embodiments of the invention.
  • Embodiments of the present invention generally relate to semiconductor substrate processing in plasma enhanced processing chambers. More specifically, embodiments of the present invention pertain to a method and apparatus for controlling the characteristics of a plasma formed in a plasma enhanced processing chamber. Characteristics of the plasma which may be controlled include, but are not limited to, the power distribution within the plasma, and the ion energy distribution within the plasma and incident on the workpiece. These plasma characteristics may be controlled via a dual frequency cathode with ratio control in a plasma enhanced processing chamber.
  • Examples of plasma enhanced semiconductor processing chambers that may be adapted to benefit from the present invention include the eMaxTM, MXP®, and ENABLERTM processing chambers, all available from Applied Materials, Inc. of Santa Clara, Calif.
  • the eMaxTM processing chamber is described in U.S. Pat. No. 6,113,731, issued Sep. 5, 2000 to Shan et al.
  • the MXP® processing chamber is described in U.S. Pat. No. 5,534,108, issued Jul. 9, 1696 to Qian et al., and U.S. Pat. No. 5,674,321, issued Oct. 7, 1997 to Pu et al.
  • the ENABLERTM processing chamber is described in U.S. patent application Ser. No. 10/192,271, filed on Jul. 9, 2002. Each of these above-mentioned patents are hereby incorporated by reference in their entireties.
  • FIG. 1 depicts a partial schematic, cross-section view of a plasma enhanced processing chamber 100 useful for practicing certain embodiments of the present invention.
  • a process chamber 100 includes a grounded chamber body 102 and at least one coil segment 106 disposed proximate to the exterior of the chamber body 102 .
  • the process chamber 100 also includes a substrate support pedestal 116 disposed within the chamber body 102 and spaced apart from a gas inlet 132 .
  • the substrate support pedestal 116 comprises a cathode 127 and an electrostatic chuck 126 for retaining a substrate 114 beneath the gas inlet 132 .
  • the electrostatic chuck 126 is driven by a DC power supply 120 to develop an electrostatic force that holds the substrate on the chuck surface.
  • the cathode 127 is coupled to a pair of RF bias sources 122 , 123 through a matching network 124 .
  • the bias sources 122 , 123 are generally capable of producing an RF signal having a frequency of from about 50 kHz to about 100 MHz and a power of between about 0 and about 10,000 Watts.
  • the matching network 124 matches the impedance of the sources 122 , 123 to the plasma impedance.
  • a single feed couples energy from both sources 122 , 123 to the support pedestal 116 .
  • each source 122 , 123 can be coupled to the cathode 127 via a separate feed.
  • the gas inlet 132 may comprise one or more nozzles or a showerhead.
  • the gas inlet 132 may comprise a plurality of gas distribution zones such that various gases provided from a gas source 108 —which, when ignited, form a plasma 110 can be supplied to the chamber body 102 using a specific gas distribution gradient.
  • the gas inlet 132 may form an upper electrode 128 that opposes the support pedestal 116 .
  • the upper electrode 128 can be coupled to an RF source 118 through a matching network 119 , terminated to a specific impedance, or grounded.
  • the source 118 is generally capable of producing an RF signal having a frequency in the about 10 Mhz to about 3 GHz range and a power between about 0 and 10,000 Watts. In one embodiment, the source 118 is capable of producing an RF signal having a frequency of about 60 MHz.
  • the RF energy supplied by the source is generally used to facilitate dissociation and ionization of gases in the plasma.
  • a substrate 114 is disposed in the processing chamber 100 and held to the support pedestal 116 by the electrostatic chuck 126 .
  • a process gas is introduced into the chamber body 102 through the gas inlet 132 by the gas source 108 .
  • a vacuum pump not shown, maintains the pressure inside the chamber body 102 at operating pressures—typically between about 10 mTorr to about 20 Torr.
  • the RF source 118 provides about 1000 Watts of RF voltage at 13.56 MHz to the upper electrode 128 , thereby exciting the gas inside the chamber body 102 and forming a plasma 110 .
  • the RF source 122 is selected to generate power at a frequency of about 2 MHz and the RF source 123 is selected to generate power at a frequency of about 13.56 MHz.
  • the RF sources 122 , 123 provide up to about 10,000 Watts of total RF power in a predetermined power ratio from the source 122 to the source 123 of between 1:0 and 0:1. These RF sources 122 , 123 provide bias power that both self-biases the substrate and modulates the plasma sheath.
  • Adjusting the ratio between the source 122 and 123 controls the characteristics of the plasma as defined below.
  • the plasma having a characteristic defined by the power ratio of the bias sources, facilitates etching one or more materials on the surface of the substrate. After a period of time, or the detection of a specific endpoint, the plasma is extinguished.
  • FIG. 2 taken from IEEE Trans. Plasma Sci., Vol. 19, No. 2, page 242, depicts a series of graphs 200 1-7 of histograms (along the Y axes) of known ion energy distributions (along the X axes) as a function of drive frequencies (along the Z axis).
  • the ion energy distribution associated with lower frequencies has a broader energy bandwidth (e.g., distribution 210 1 in graph 200 1 ), while higher frequencies have a progressively much more concentrated energy bandwidth (e.g., distribution 210 7 in graph 200 7 ).
  • the relationship is generally continuous along the spectrum moving from the low frequency ion energy distribution to the high frequency ion energy distribution (e.g., compare distributions 210 1-7 from graphs 200 1-7 ).
  • the process chamber comprises a dual frequency electrode (cathode 127 ) for use in a plasma enhanced processing chamber 100 as described above.
  • the two frequencies on the cathode 127 are generally selected for the purpose of sheath modulation and are selected such that they are of a low enough frequency so as to provide a strong self-biasing sheath in the plasma discharge above the powered surface.
  • the first frequency provides a broad ion energy distribution (e.g., lower frequency).
  • the second frequency provides a peaked, well defined ion energy distribution (e.g., higher frequency).
  • the first frequency is selected such that its cycle time is much larger than the transit time of an ion in the sheath, while the second frequency is selected such that its period approaches or surpasses the transit time of the ion in the sheath.
  • These frequencies are also selected such that when used in conjunction with a third power source provided by an independently driven electrode (e.g., the electrode 128 referred to in FIG. 1 ), they are not the primary power contributor for plasma ionization and dissociation.
  • the combined applied voltage of the two frequency sources is used to control the peak-to-peak sheath voltage as well as the self-biased DC potential that is used for anisotropic etching.
  • the mixing of the two frequencies is used to tune the energy distribution about this average acceleration generated by this DC potential.
  • s ( t ) s ⁇ s 0 xMHz sin( ⁇ x t ) ⁇ s 0 yMHz sin( ⁇ y t ) (2) where the subscripts x and y refer to the first and second RF sources respectively.
  • the sheath modulation can be related to applied RF current by the relationship:
  • V sheath ⁇ ( t ) - en 2 ⁇ ⁇ 0 ⁇ s ⁇ ( t ) 2 ( 6 ) where ⁇ 0 is the permittivity of free space.
  • the expected ion energy distribution in a plasma formed under a range of operating conditions was modeled and experimentally verified.
  • the ion energy distribution was estimated by studying the on-substrate voltage on a substrate under various process conditions in an eMaxTM processing chamber outfitted with a dual frequency cathode as described above with reference to FIG. 1 .
  • the two fundamental components of the plasma relative to its interaction with the powered electrode were held constant and the ratios of applied currents (i.e., proportional to the applied power) of the two RF bias sources were varied while feeding a constant total power to the cathode.
  • the first RF source 122 was tuned to 13.56 MHz and the second RF source 123 was tuned to 2 MHz.
  • FIG. 3 is a series of graphs 300 1-5 of this analysis, illustrating the results of varying the ratio of the applied currents of the two RF sources.
  • the graphs show a distribution (axis 302 ) of the energy (axis 304 ) measured on the substrate.
  • axis 302 the energy measured on the substrate.
  • the graph 300 5 labeled 0% 13 MHz, 100% 2 MHz, if the cathode is only driven with the low frequency RF source, an ion energy distribution 310 5 which is very broad is obtained. This result is similar to the low frequency ion energy distributions depicted in FIG. 2 (see, e.g., distribution 210 1 in graph 200 1 ).
  • the graph 300 1 labeled 100% 13 MHz, 0% 2 MHz, on the other hand, shows a narrow energy distribution 310 1 similar to the high frequency ion energy distributions depicted in FIG. 2 (see, e.g., distributions 210 5 and 210 6 in graphs 200 5-6 ) when only the high frequency RF source is used.
  • the power distribution within the plasma can be controlled utilizing a plasma enhanced processing chamber with a dual frequency cathode as described above with reference to FIG. 1 .
  • two frequencies that provide similar plasma excitation properties but with different spatial uniformity profiles are combined to tune the uniformity of a process.
  • the cathode 127 forms a radial transmission line which is terminated along an outer perimeter 112 of the electrostatic chuck 126 .
  • This contributes to the creation of a spatially variant power distribution, illustratively shown as a dashed line 130 (it should be noted that the standing wave could be the inverse of the one shown as well).
  • the spatially variant power distribution affects the power distribution in the plasma 110 , resulting in greater power near the peak of the wave (near the center of the substrate 114 for the wave 130 depicted in FIG. 1 ) and lesser power in the trough (near the edge of the substrate 114 in FIG. 1 ).
  • This power differential in the plasma affects the uniformity of the process being performed on the substrate. As such, in an etch reaction, the uniformity of an etched substrate would be negatively impacted.
  • FIG. 4 shows two opposing power distribution profiles 410 , 420 centered over a substrate yielding a flat combined effect 430 .
  • any other final power distribution profile that may prove beneficial to a certain process can also be formed using this method.
  • an edge high power deposition profile is preferred to minimize the impact of non-azimuthally symmetric deposition in high-aspect ratio features on a processed workpiece).
  • This frequency mixing phenomenon may be used to control the power distribution in the plasma and thereby control uniformity of a desired process, such as etching.
  • a desired process such as etching.
  • an oxide layer and a photoresist layer on multiple substrates were etched using different cathode frequency ratios in an eMaxTM processing chamber outfitted with a dual frequency cathode as described above with reference to FIG. 1 .
  • the first RF source was tuned to 13.56 MHz and the second RF source was tuned to 2 MHz.
  • the ratios of applied currents of the two RF drives were varied while keeping the total power to the cathode constant at 2,500 Watts.
  • the oxide and photoresist etch rates were measured as well as the uniformity of each layer.
  • FIG. 5 depicts a combined bar graph and line graph 500 depicting the etch rates and substrate uniformity for the processes described above.
  • the x-axis 502 of the graph depicts the ratio of the power supplied by the 13.56 Mhz source to the power supplied by the 2 Mhz source. (For example 0:2500 means 0 W of the 13.56 MHz source and 2,500 W of the 2 MHz source.)
  • the etch rate As can be seen from the bars 510 labeled OX ER (oxide etch rate) and the bars 512 labeled PR ER (photoresist etch rate), the etch rate (axis 504 ) remains relatively constant regardless of the mix of power levels at the different frequencies.
  • the substrate uniformity (axis 506 ) for both the oxide and the photoresist varied substantially over the power ratio mix.
  • the uniformity ranged somewhat linearly from about 60% (indicating center-fast etching) at 0 W 13.56 MHz and 2500 W 2 MHz, to about ⁇ 50% (indicating edge-fast etching) at 2500 W 13.56 MHz and 0 W 2 MHz, and near 0% with a fairly even ratio of the power of two frequencies.
  • the principles discussed herein apply to dissociation or ionization of bulk plasma, as well as modulation of the sheath properties of the plasma.
  • the chosen frequencies of 2 MHz and 13.56 MHz are illustrative only and not intended to define limitations of the invention. Both higher and lower frequencies may be utilized in the current invention.
  • drive frequencies may be grouped by their effect on the plasma, then selected as necessary to control the desired property.
  • high frequencies effect ionization and dissociation
  • lower frequencies effect sheath modulation.
  • the principles disclosed herein are not limited to control of standing waves. Additional reasons for frequency dependent propagation exist. For example, providing a frequency dependent termination to the transmission line, or a frequency dependent return path to ground in the chamber that can direct the RF waveform dependent upon its frequency.
  • Etch methods using dual frequency bias as discussed above have demonstrated a large extension to the process capability and operational window of appropriately configured etch chambers, such as discussed above with respect to FIG. 1 .
  • inventive etch processes are discussed in greater detail below with respect to FIG. 6 , which shows one illustrative embodiment of the substrate 114 having a substrate layer 620 with a material layer 622 formed thereover and having a patterned mask 624 deposited atop the material layer 622 .
  • the mask 624 may comprise photoresist, amorphous carbon, polysilicon, or the like.
  • the mask 624 may be from about 1,000-3,000 Angstroms thick. Alternatively, the mask 624 may be greater than 3,000 Angstroms thick.
  • an etch process window is advantageously widened by mixing a high frequency (e.g., 13.56 MHz and/or 60 MHz) and a low frequency (e.g., 2 MHz and/or other low frequency) bias RF signal with different mixing ratio in a wide total power range.
  • a high frequency e.g., 13.56 MHz and/or 60 MHz
  • a low frequency e.g., 2 MHz and/or other low frequency
  • etch processes such as oxide (SiO 2 ) etch processes
  • SiO 2 etch processes are a balance between polymer deposition and breakdown.
  • the etch chemistry and process conditions are controlled such that a fluorocarbon (C x F y ) polymer 604 is first deposited to a surface of a feature 602 being etched into the material layer 622 . Ions coming from the plasma body and accelerated by the sheath voltage bombard the polymer-covered surface with sufficient energy to break down the polymer 604 .
  • the polymer breakdown components provide the etchant for the reaction to etch the feature 602 .
  • the broken down polymer components react with the material layer 622 (e.g., oxide (SiO 2 )) to form volatile by-products (such as SiF 4 , CO, CO 2 ) which subsequently get pumped out of the process chamber.
  • the material layer 622 e.g., oxide (SiO 2 )
  • volatile by-products such as SiF 4 ,
  • the ratio of the power of the two bias frequencies can be advantageously utilized to control the ion energy distribution, thereby facilitating the flexibility to use the desired level of polymerization chemistry as required for a given process.
  • the ratio may be selected such that high energy ions generated by increasing the low frequency component of the bias power are able to break through a thicker layer of polymer deposited at the etch-front during the etch process.
  • a more polymerized chemistry may be utilized in a process, thereby resulting in higher photoresist selectivity.
  • FIG. 7 is a flow diagram of a method ( 700 ) of processing a semiconductor substrate in accordance with some embodiments of the invention.
  • that method may include forming a plasma of a polymer forming chemistry to etch a feature into a substrate disposed on a substrate support in a process chamber while depositing a polymer on at least portions of the feature being etched (as shown at 702 ).
  • a low frequency and a high frequency RF signal may be applied to an electrode disposed in the substrate support (as shown at 704 ).
  • the level of polymer formation on the substrate may be controlled, wherein controlling the level of polymer formation includes adjusting a power ratio of the high frequency to the low frequency RF signal (as shown at 706 ).
  • the gaseous mixture may be a highly polymerizing gas mixture comprising C x F y (where y/x ⁇ 2) or C x H y F z (where z/x ⁇ 2 and y ⁇ 0).
  • O 2 may optionally be provided to the chamber. In some embodiments, O 2 may be provided at a rate of about 100 sccm.
  • the substrate temperature may be maintained between about 0 and 110 degrees Celsius at a pressure in the process chamber 100 of between about 10 and 200 mTorr.
  • C x F y /O 2 ratio may be between about 0.5 to 4.
  • an inert dilution gas may be provided, such as argon (Ar).
  • a plasma may be formed in the chamber be providing a high frequency RF signal and a low frequency RF signal to an electrode in the process chamber (for example as shown in FIG. 1 ).
  • a high frequency signal is one having a frequency greater than or equal to about 13.56 MHz and a low frequency signal is one having a frequency of less than or equal to about 2 MHz.
  • the high frequency signal may be between 500 and 5000 Watts and between about 13 and 14 MHz, and the low frequency signal may be between 0 and 5000 Watts and between 1.8 and 2.2 MHz.
  • the mixing ratio may generally be any ratio.
  • the C x F y /O2 ratio may vary at different 13.56 MHz to 2 MHz power ratios and vice-versa due to the polymer/ion energy interaction described above. It is contemplated that other high and low frequencies may be utilized in accordance with the teachings provided herein.
  • a process for etching a layer of material on a substrate utilizing a polymer forming chemistry may be controlled using the teachings disclosed above.
  • a plasma of a polymer forming chemistry may be provided to etch a feature into a substrate.
  • the level of polymer formation may be monitored during at least a portion of the etch process.
  • a previous determination of the level of polymer formation for a given process may be utilized to determine a desired level of ion energy to be developed within the plasma proximate the substrate.
  • the power ratio of the high frequency to the low frequency RF signal may then be set to obtain the desired ion energy level as discussed above.
  • the process may be monitored and the power ratio controlled during processing to continually provide a dynamic desired ion energy level.
  • a higher ratio of low frequency power may provide additional advantages during an initial stage of a power on step of the recipe.
  • the power to gas flow ratio is low, resulting in high polymerization and sometimes etch rate slowing or stopping in large open area regions.
  • the addition of low frequency power and increasing the ratio of low frequency to high frequency power applied may be utilized to advantageously break through the polymer layer, thus reducing the etch rate slow/stop problem.
  • High energy ions generated by the low frequency component of the dual frequency bias power also advantageously provide more vertical and straight profiles for both contact holes and trenches, thereby facilitating a large bottom critical dimension (CD) (shown in FIG. 6 as CD 608 ), even for smaller feature sizes.
  • CD bottom critical dimension
  • the dual frequency bias power advantageously allows for increased ion energy due to the low frequency component and increased plasma density due to the high frequency component.
  • the higher ion energy makes it more difficult to bend the ion trajectory, thereby facilitating a straighter sidewall profile.
  • vertically traveling ions can reach a bottom corner 606 of the feature 602 being formed (i.e., contact hole or trench), thereby facilitating a larger bottom CD 608 (which is usually preferred due to smaller contact resistance).
  • This advantage can be extended to other processes in which the etch profile is dependent on incoming ion trajectory, such as where the reactive ions and/or neutrals contact and/or react with materials being etched.
  • O 2 or CO may optionally be provided to the chamber.
  • O 2 may be provided at a rate of about 100 sccm.
  • the substrate temperature may be maintained between about 0 and 110 degrees Celsius at a pressure in the process chamber 100 of between about 10 and 500 mTorr.
  • control of the magnitude of the high frequency bias RF signal may advantageously provide an improved sidewall profile.
  • the high frequency signal may be between 500 and 5000 Watts and between 13 and 14 MHz
  • the low frequency signal may be between 0 and 5000 Watts and between 1.8 and 2.2 MHz.
  • the mixing ratio may generally be any ratio. It is contemplated that other high and low frequencies may be utilized in accordance with the teachings provided herein.
  • the process as described above may further include monitoring of the sidewall profile of the feature being etched.
  • the ratio of the high and low frequency signals may then be controlled to provide an ion energy level as desired to control the sidewall profile within acceptable ranges.
  • a previously measured sidewall profile (or series of profiles) for a given process recipe may be utilized to determine a suitable range of acceptable ion energy levels expected for that process recipe which may then be obtained via the proper ratio between the low and high frequencies applied.
  • the high and low frequency bias powers can by mixed in varying ratios with other power signals coupled to the same or different electrodes, such as an electrode disposed above the substrate support 116 , to independently control the ion bombardment of the substrate with a wide tuning range of ion energy (using the dual frequency bias powers) and plasma density (using one or more other signals coupled to other electrodes).
  • a wide range of applications having different plasma requirements may be performed in a single chamber.
  • high aspect ratio oxide contact etch processes requires both high energy ion physical bombardment and high ion flux as compared to a nitride etch process which involves mostly the chemical etch and requires low physical bombardment (i.e., lower ion energy).
  • the bias power In a process chamber 100 having a capacitively coupled plasma source, the bias power generates a bias voltage due to charge redistribution between the plasma body 110 and the electrode 128 .
  • a higher bias power results in a higher the bias voltage.
  • Using an independent plasma source power, such as introduced from a top electrode 128 does not increase the bias voltage.
  • a process requiring a high plasma density does not necessarily require high bias voltage. In some cases, the process may require a lower bias voltage.
  • an independent plasma density control knob is provided. Combined with the advantages discussed above in sections A and B, power control flexibility of the process chamber is greatly improved as compared to single bias powered chambers.
  • a third RF signal may be provided to the chamber in addition to the dual frequencies.
  • the third RF signal may be coupled to the same electrode as the low and high frequency bias signals.
  • the third RF signal may be coupled to another electrode, such as the chamber wall, an electrode disposed over the substrate support, an antenna disposed in or above a ceiling of the chamber, or the like.
  • the third RF signal may be up to about 3000 Watts and have a frequency of between about 60 to 200 MHz.
  • the high frequency bias signal may be between 500 and 5000 Watts and between 13 and 14 MHz, and the low frequency bias signal may be between 0 and 5000 Watts and between 1.8 and 2.2 MHz.
  • the mixing ratio may generally be any ratio. It is contemplated that other frequencies may be utilized in accordance with the teachings provided herein.
  • a high density plasma may be formed using a first RF signal having a frequency greater than about 60 MHz.
  • a substrate bias voltage may be independently controlled by applying a second and third frequency (having high and low frequencies as described above) to an electrode in a substrate support.
  • the high and low frequency signals may be controlled as described above while independently controlling the plasma density utilizing the first frequency.
  • the plasma current is grounded at various locations of the chamber interior surface.
  • These variations may vary the etch behavior, e.g., the etch rate at the different region of the substrate, i.e., the center or the edge of the substrate. Therefore, in one embodiment, the etch rate uniformity tuning knob is added to the system and the tuning amount can also be varied by the frequency mixing ratio.
  • Grounding paths for the frequencies of RF powers on an electrode provided by the opposite electrode component redistribute the electric field in the chamber 100 when the RF power with those frequencies is turned on.
  • the new distribution of the electric field guides the plasma current with certain frequencies, which would otherwise be directed to the chamber wall to look for the RF ground, more vertically towards the opposite electrode, thereby reducing the radial variation of the plasma density and avoiding high plasma density at the substrate edge.
  • center-to-edge etch rate tunability and optimization of the etch rate uniformity is advantageously provided.
  • etch depth, or etch rate uniformity and etch profile (CD) uniformity are competing factors.
  • the etch rate uniformity mechanism described above with respect to the grounding path impedance has no effect on etch profile (CD) uniformity.
  • this mechanism may be used in combination with the ratio of the dual frequency bias components as discussed above for independent control of CD and center-edge etch rate uniformity.
  • the ratio between the high and low frequencies may be adjusted during an etch process in order to control the CD uniformity similar to as discussed above with respect to the control of vertical sidewall profiles.
  • top RF source power and magnetic field to provide extremely high plasma density, thereby facilitating processes that require high plasma density, such as plasma clean processes to clean the chamber interior.
  • Optical emission spectroscopy (OES) results for magnetic field (B-field) and source power unexpectedly reveals that the combined effect of these two inputs are much greater than their individual effects added together.
  • a magnetic field may be utilized in combination with the processes described above to provide a high plasma density while using the low frequency component of the dual frequency bias to facilitate a plasma with high energy ions.
  • the magnetic field advantageously increases the plasma density without decreasing mask selectivity.
  • a magnetic field may be provided to independently increase plasma density without decreasing mask selectivity.
  • the magnetic field may be uniform or sloped, static or rotated.
  • the combination of two RF bias powers e.g., 2 MHz and 13.56 MHz
  • combined with the magnetic field advantageously provides both of the benefits as discussed above in sections A, B, and G, thereby providing more flexible process tuning.
  • the combination of dual frequency bias powers with a high frequency signal applied to either the upper or lower electrodes and the application of a magnetic field to the plasma processing region of the chamber advantageously provides the benefits discussed above in each of sections C, F, and G, thereby providing more flexible process tuning and high plasma density.
  • the bias voltage can be harmful if it is not uniform across the substrate by inducing crosstalk between adjacent devices, thereby causing device damage.
  • the ratio of two RF bias powers may be used to control the DC voltage (Vdc) distribution across the substrate.
  • Vdc DC voltage
  • Instantaneous non-uniformity of the plasma density can form lateral difference of the electro potention to form a closed loop using part of the device structure on the substrate, which may induce current higher than the device is designed to handle.
  • the control of the plasma density uniformity described in sections D, E and G will therefore improve the Vdc uniformity thus reducing the incidence of plasma damage to the device.
  • uniform Vdc obtained from tuning the mixing ratio can optimize the charge-up uniformity over the substrate, thereby reducing the chance of damage to the substrate due to charge-up.
  • the bias voltage plays an important role. Higher bias voltage may be needed to increase the etch rate and etch stop margin while lower bias voltage may be preferred in some cases (such as when small corner facet and shoulder loss and less stop layer loss is required). While the low frequency bias power increases the ion energy distribution range at the high end to get the advantages described above, ability to select any high/low frequency power ratio allows the reactor to provide any optimized bias voltage value for a wide range of etch processes having different requirements.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
US11/947,663 2007-11-29 2007-11-29 Plasma control using dual cathode frequency mixing and controlling the level of polymer formation Expired - Fee Related US7736914B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US11/947,663 US7736914B2 (en) 2007-11-29 2007-11-29 Plasma control using dual cathode frequency mixing and controlling the level of polymer formation
PCT/US2008/084635 WO2009070562A1 (fr) 2007-11-29 2008-11-25 Commande de plasma utilisant un mélange de fréquences à cathode double
TW097146344A TWI373072B (en) 2007-11-29 2008-11-28 Plasma control using dual cathode frequency mixing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/947,663 US7736914B2 (en) 2007-11-29 2007-11-29 Plasma control using dual cathode frequency mixing and controlling the level of polymer formation

Publications (2)

Publication Number Publication Date
US20090142859A1 US20090142859A1 (en) 2009-06-04
US7736914B2 true US7736914B2 (en) 2010-06-15

Family

ID=40676141

Family Applications (1)

Application Number Title Priority Date Filing Date
US11/947,663 Expired - Fee Related US7736914B2 (en) 2007-11-29 2007-11-29 Plasma control using dual cathode frequency mixing and controlling the level of polymer formation

Country Status (3)

Country Link
US (1) US7736914B2 (fr)
TW (1) TWI373072B (fr)
WO (1) WO2009070562A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10395896B2 (en) 2017-03-03 2019-08-27 Applied Materials, Inc. Method and apparatus for ion energy distribution manipulation for plasma processing chambers that allows ion energy boosting through amplitude modulation
US20240170257A1 (en) * 2021-06-21 2024-05-23 Tokyo Electron Limited Plasma processing apparatus and plasma processing method

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI556309B (zh) * 2009-06-19 2016-11-01 半導體能源研究所股份有限公司 電漿處理裝置，形成膜的方法，和薄膜電晶體的製造方法
JP5442403B2 (ja) * 2009-11-18 2014-03-12 東京エレクトロン株式会社 基板処理装置及びそのクリーニング方法並びにプログラムを記録した記録媒体
US8658541B2 (en) * 2010-01-15 2014-02-25 Applied Materials, Inc. Method of controlling trench microloading using plasma pulsing
JP6045646B2 (ja) * 2010-08-23 2016-12-14 東京エレクトロン株式会社 プラズマエッチング方法
WO2012156062A1 (fr) * 2011-05-13 2012-11-22 Leybold Optics Gmbh Procédé de traitement au plasma d'un substrat dans un dispositif à plasma
CN102280342B (zh) * 2011-08-19 2013-08-21 中微半导体设备(上海)有限公司 等离子体处理装置
US20140202634A1 (en) * 2013-01-23 2014-07-24 Applied Materials, Inc. Radial transmission line based plasma source
US9824896B2 (en) * 2015-11-04 2017-11-21 Lam Research Corporation Methods and systems for advanced ion control for etching processes

Citations (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4579618A (en) 1984-01-06 1986-04-01 Tegal Corporation Plasma reactor apparatus
US4585516A (en) 1985-03-04 1986-04-29 Tegal Corporation Variable duty cycle, multiple frequency, plasma reactor
US4863549A (en) 1987-10-01 1989-09-05 Leybold Aktiengesellschaft Apparatus for coating or etching by means of a plasma
US5065118A (en) 1990-07-26 1991-11-12 Applied Materials, Inc. Electronically tuned VHF/UHF matching network
US5077499A (en) 1990-04-18 1991-12-31 Mitsubishi Denki Kabushiki Kaisha High-frequency feeding method for use in plasma apparatus and device for carrying out the method
EP0553704A1 (fr) 1992-01-30 1993-08-04 International Business Machines Corporation Système de traitement par plasma inductif radio-fréquence utilisant une bobine à champ uniforme
US5512130A (en) 1994-03-09 1996-04-30 Texas Instruments Incorporated Method and apparatus of etching a clean trench in a semiconductor material
US5534751A (en) 1995-07-10 1996-07-09 Lam Research Corporation Plasma etching apparatus utilizing plasma confinement
US5556501A (en) 1989-10-03 1996-09-17 Applied Materials, Inc. Silicon scavenger in an inductively coupled RF plasma reactor
US5570031A (en) 1993-11-11 1996-10-29 Frontec Incorporated Substrate surface potential measuring apparatus and plasma equipment
JPH08306659A (ja) 1995-04-27 1996-11-22 Sony Corp 誘導結合プラズマ処理装置および誘導結合プラズマ処理方法
US5643364A (en) 1994-11-30 1997-07-01 Applied Materials, Inc. Plasma chamber with fixed RF matching
US5698062A (en) 1993-11-05 1997-12-16 Tokyo Electron Limited Plasma treatment apparatus and method
US5817534A (en) 1995-12-04 1998-10-06 Applied Materials, Inc. RF plasma reactor with cleaning electrode for cleaning during processing of semiconductor wafers
US5985375A (en) 1998-09-03 1999-11-16 Micron Technology, Inc. Method for pulsed-plasma enhanced vapor deposition
US6089181A (en) 1996-07-23 2000-07-18 Tokyo Electron Limited Plasma processing apparatus
US6110287A (en) 1993-03-31 2000-08-29 Tokyo Electron Limited Plasma processing method and plasma processing apparatus
US6113731A (en) 1997-01-02 2000-09-05 Applied Materials, Inc. Magnetically-enhanced plasma chamber with non-uniform magnetic field
US6126778A (en) 1998-07-22 2000-10-03 Micron Technology, Inc. Beat frequency modulation for plasma generation
US6190496B1 (en) 1996-07-03 2001-02-20 Tegal Corporation Plasma etch reactor and method for emerging films
US6193855B1 (en) 1999-10-19 2001-02-27 Applied Materials, Inc. Use of modulated inductive power and bias power to reduce overhang and improve bottom coverage
US6218309B1 (en) * 1999-06-30 2001-04-17 Lam Research Corporation Method of achieving top rounding and uniform etch depths while etching shallow trench isolation features
US6350701B1 (en) 1995-07-29 2002-02-26 Semiconductor Energy Laboratory Co., Ltd Etching system
US6354240B1 (en) 1996-07-03 2002-03-12 Tegal Corporation Plasma etch reactor having a plurality of magnets
US20020039626A1 (en) 1995-09-13 2002-04-04 Nissin Electric Co., Ltd. Plasma CVD method and apparatus
US20020041160A1 (en) 2000-04-06 2002-04-11 Applied Materials, Inc. Method for controlling etch uniformity
US6411490B2 (en) 1998-11-12 2002-06-25 Lam Research Corporation Integrated power modules for plasma processing systems
US6433297B1 (en) 1999-03-19 2002-08-13 Kabushiki Kaisha Toshiba Plasma processing method and plasma processing apparatus
JP2002246368A (ja) 2001-02-14 2002-08-30 Anelva Corp ウェハー表面径方向均一プラズマを用いるウェハー処理システム
WO2003003405A1 (fr) 2001-06-29 2003-01-09 Lam Research Corporation Dispositif et procede de decouplage rf et de regulation de tension de polarisation dans un reacteur plasma
JP2003073836A (ja) 2001-08-28 2003-03-12 Canon Inc 真空処理方法及び真空処理装置
WO2003043061A1 (fr) 2001-11-13 2003-05-22 Lam Research Appareil et methode pour ameliorer l'uniformite d'une vitesse de gravure
US20030127319A1 (en) 2000-08-07 2003-07-10 Demaray Richard E. Planar optical devices and methods for their manufacture
US6642149B2 (en) 1998-09-16 2003-11-04 Tokyo Electron Limited Plasma processing method
US20040025791A1 (en) 2002-08-09 2004-02-12 Applied Materials, Inc. Etch chamber with dual frequency biasing sources and a single frequency plasma generating source
US20040045669A1 (en) 2002-02-06 2004-03-11 Tomohiro Okumura Plasma processing method and apparatus
US6706138B2 (en) 2001-08-16 2004-03-16 Applied Materials Inc. Adjustable dual frequency voltage dividing plasma reactor
US20040221958A1 (en) 2003-05-06 2004-11-11 Lam Research Corporation RF pulsing of a narrow gap capacitively coupled reactor
US20040255863A1 (en) 2001-12-13 2004-12-23 Tsutomu Higashiura Plasma process apparatus
US20050022933A1 (en) 2003-08-01 2005-02-03 Howard Bradley J. Multi-frequency plasma reactor and method of etching
US6872281B1 (en) 2000-09-28 2005-03-29 Lam Research Corporation Chamber configuration for confining a plasma
US20050241762A1 (en) 2004-04-30 2005-11-03 Applied Materials, Inc. Alternating asymmetrical plasma generation in a process chamber
US20080029385A1 (en) * 2006-08-03 2008-02-07 Tokyo Electron Limited Plasma processing apparatus and plasma processing method

Patent Citations (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4579618A (en) 1984-01-06 1986-04-01 Tegal Corporation Plasma reactor apparatus
US4585516A (en) 1985-03-04 1986-04-29 Tegal Corporation Variable duty cycle, multiple frequency, plasma reactor
US4863549A (en) 1987-10-01 1989-09-05 Leybold Aktiengesellschaft Apparatus for coating or etching by means of a plasma
US5556501A (en) 1989-10-03 1996-09-17 Applied Materials, Inc. Silicon scavenger in an inductively coupled RF plasma reactor
US5077499A (en) 1990-04-18 1991-12-31 Mitsubishi Denki Kabushiki Kaisha High-frequency feeding method for use in plasma apparatus and device for carrying out the method
US5065118A (en) 1990-07-26 1991-11-12 Applied Materials, Inc. Electronically tuned VHF/UHF matching network
EP0553704A1 (fr) 1992-01-30 1993-08-04 International Business Machines Corporation Système de traitement par plasma inductif radio-fréquence utilisant une bobine à champ uniforme
US6110287A (en) 1993-03-31 2000-08-29 Tokyo Electron Limited Plasma processing method and plasma processing apparatus
US5698062A (en) 1993-11-05 1997-12-16 Tokyo Electron Limited Plasma treatment apparatus and method
US5570031A (en) 1993-11-11 1996-10-29 Frontec Incorporated Substrate surface potential measuring apparatus and plasma equipment
US5512130A (en) 1994-03-09 1996-04-30 Texas Instruments Incorporated Method and apparatus of etching a clean trench in a semiconductor material
US5643364A (en) 1994-11-30 1997-07-01 Applied Materials, Inc. Plasma chamber with fixed RF matching
JPH08306659A (ja) 1995-04-27 1996-11-22 Sony Corp 誘導結合プラズマ処理装置および誘導結合プラズマ処理方法
US5534751A (en) 1995-07-10 1996-07-09 Lam Research Corporation Plasma etching apparatus utilizing plasma confinement
US6350701B1 (en) 1995-07-29 2002-02-26 Semiconductor Energy Laboratory Co., Ltd Etching system
US20020039626A1 (en) 1995-09-13 2002-04-04 Nissin Electric Co., Ltd. Plasma CVD method and apparatus
US5817534A (en) 1995-12-04 1998-10-06 Applied Materials, Inc. RF plasma reactor with cleaning electrode for cleaning during processing of semiconductor wafers
US6354240B1 (en) 1996-07-03 2002-03-12 Tegal Corporation Plasma etch reactor having a plurality of magnets
US6190496B1 (en) 1996-07-03 2001-02-20 Tegal Corporation Plasma etch reactor and method for emerging films
US6089181A (en) 1996-07-23 2000-07-18 Tokyo Electron Limited Plasma processing apparatus
US6113731A (en) 1997-01-02 2000-09-05 Applied Materials, Inc. Magnetically-enhanced plasma chamber with non-uniform magnetic field
US6309978B1 (en) 1998-07-22 2001-10-30 Micron Technology, Inc. Beat frequency modulation for plasma generation
US6312556B1 (en) 1998-07-22 2001-11-06 Micron Technology, Inc. Beat frequency modulation for plasma generation
US6126778A (en) 1998-07-22 2000-10-03 Micron Technology, Inc. Beat frequency modulation for plasma generation
US5985375A (en) 1998-09-03 1999-11-16 Micron Technology, Inc. Method for pulsed-plasma enhanced vapor deposition
US6642149B2 (en) 1998-09-16 2003-11-04 Tokyo Electron Limited Plasma processing method
US6411490B2 (en) 1998-11-12 2002-06-25 Lam Research Corporation Integrated power modules for plasma processing systems
US6433297B1 (en) 1999-03-19 2002-08-13 Kabushiki Kaisha Toshiba Plasma processing method and plasma processing apparatus
US6218309B1 (en) * 1999-06-30 2001-04-17 Lam Research Corporation Method of achieving top rounding and uniform etch depths while etching shallow trench isolation features
US6193855B1 (en) 1999-10-19 2001-02-27 Applied Materials, Inc. Use of modulated inductive power and bias power to reduce overhang and improve bottom coverage
US20020041160A1 (en) 2000-04-06 2002-04-11 Applied Materials, Inc. Method for controlling etch uniformity
US20030127319A1 (en) 2000-08-07 2003-07-10 Demaray Richard E. Planar optical devices and methods for their manufacture
US6872281B1 (en) 2000-09-28 2005-03-29 Lam Research Corporation Chamber configuration for confining a plasma
JP2002246368A (ja) 2001-02-14 2002-08-30 Anelva Corp ウェハー表面径方向均一プラズマを用いるウェハー処理システム
WO2003003405A1 (fr) 2001-06-29 2003-01-09 Lam Research Corporation Dispositif et procede de decouplage rf et de regulation de tension de polarisation dans un reacteur plasma
US6706138B2 (en) 2001-08-16 2004-03-16 Applied Materials Inc. Adjustable dual frequency voltage dividing plasma reactor
JP2003073836A (ja) 2001-08-28 2003-03-12 Canon Inc 真空処理方法及び真空処理装置
WO2003043061A1 (fr) 2001-11-13 2003-05-22 Lam Research Appareil et methode pour ameliorer l'uniformite d'une vitesse de gravure
US20030148611A1 (en) 2001-11-13 2003-08-07 Lam Research Corporation, A Delaware Corporation Etch rate uniformity
US20040255863A1 (en) 2001-12-13 2004-12-23 Tsutomu Higashiura Plasma process apparatus
US20040045669A1 (en) 2002-02-06 2004-03-11 Tomohiro Okumura Plasma processing method and apparatus
US20040025791A1 (en) 2002-08-09 2004-02-12 Applied Materials, Inc. Etch chamber with dual frequency biasing sources and a single frequency plasma generating source
US20040221958A1 (en) 2003-05-06 2004-11-11 Lam Research Corporation RF pulsing of a narrow gap capacitively coupled reactor
US20050022933A1 (en) 2003-08-01 2005-02-03 Howard Bradley J. Multi-frequency plasma reactor and method of etching
US20050241762A1 (en) 2004-04-30 2005-11-03 Applied Materials, Inc. Alternating asymmetrical plasma generation in a process chamber
US20080029385A1 (en) * 2006-08-03 2008-02-07 Tokyo Electron Limited Plasma processing apparatus and plasma processing method

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
Georgieva, V., et al., "Numerical study of Ar/CF4/N2 discharges in single- and dual-frequency capacitively coupled plasma reactors", Journal of Applied Physics, vol. 94, No. 6 (Sep. 15, 2003), 3748-3756.
International Search Report and Written Opinion mailed Feb. 25, 2009 for PCT Application No. PCT/US2008/084635.
Lieberman, M. A., et al., "Standing wave and skin effects in large-area, high-frequency capacitive discharges", Plasma Sources Sci. Technol., 11 (2002), 283-293.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10395896B2 (en) 2017-03-03 2019-08-27 Applied Materials, Inc. Method and apparatus for ion energy distribution manipulation for plasma processing chambers that allows ion energy boosting through amplitude modulation
US20240170257A1 (en) * 2021-06-21 2024-05-23 Tokyo Electron Limited Plasma processing apparatus and plasma processing method

Also Published As

Publication number Publication date
TWI373072B (en) 2012-09-21
TW200943410A (en) 2009-10-16
WO2009070562A1 (fr) 2009-06-04
US20090142859A1 (en) 2009-06-04

Similar Documents

Publication Publication Date Title
US7736914B2 (en) Plasma control using dual cathode frequency mixing and controlling the level of polymer formation
US7838430B2 (en) Plasma control using dual cathode frequency mixing
US20230317412A1 (en) Pulsed plasma chamber in dual chamber configuration
US6200651B1 (en) Method of chemical vapor deposition in a vacuum plasma processor responsive to a pulsed microwave source
KR101689916B1 (ko) 중력에 의한 가스 확산 분리(ｇｉｇｄｓ) 기술에 의해 제어되는 플라즈마 발생 시스템
US5300460A (en) UHF/VHF plasma for use in forming integrated circuit structures on semiconductor wafers
US8877080B2 (en) Using vacuum ultra-violet (VUV) data in microwave sources
TWI578408B (zh) 在增大的電漿處理系統中之電漿加強蝕刻
US7459100B2 (en) Methods and apparatus for sequentially alternating among plasma processes in order to optimize a substrate
US6767838B1 (en) Method and apparatus for treating surface of semiconductor
US7029594B2 (en) Plasma processing method
KR101679371B1 (ko) 드라이 에칭 방법
US20060021704A1 (en) Method and apparatus for etching Si
US6492277B1 (en) Specimen surface processing method and apparatus
US5824602A (en) Helicon wave excitation to produce energetic electrons for manufacturing semiconductors
JP2000332000A (ja) プラズマ処理装置及びプラズマ処理装置の制御方法
CN111937114B (zh) 用于在加工等离子体时控制离子能量分布的装置和方法
KR100249139B1 (ko) 반도체웨이퍼상에 집적회로 구조물을 형성하는데 사용되는vhf/uhf(초고주파/극초단파)플라즈마방법
US20040018741A1 (en) Method For Enhancing Critical Dimension Uniformity After Etch
US6037267A (en) Method of etching metallic film for semiconductor devices
US20210172062A1 (en) Methods and systems for etching silicon cyanide (sicn) with multi-color selectivity

Legal Events

Date Code Title Description
AS Assignment

Owner name: APPLIED MATERIALS, INC., CALIFORNIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:LIU, JINGBAO;PU, BRYAN Y.;REEL/FRAME:020178/0395

Effective date: 20071128

Owner name: APPLIED MATERIALS, INC.,CALIFORNIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:LIU, JINGBAO;PU, BRYAN Y.;REEL/FRAME:020178/0395

Effective date: 20071128

AS Assignment

Owner name: APPLIED MATERIALS, INC., CALIFORNIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SHIN, TAEHO;REEL/FRAME:021113/0599

Effective date: 20080322

Owner name: APPLIED MATERIALS, INC.,CALIFORNIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SHIN, TAEHO;REEL/FRAME:021113/0599

Effective date: 20080322

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20140615

FP Lapsed due to failure to pay maintenance fee

Effective date: 20180615