US7301233B2 - Semiconductor chip package with thermoelectric cooler - Google Patents
Semiconductor chip package with thermoelectric cooler Download PDFInfo
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- US7301233B2 US7301233B2 US11/169,615 US16961505A US7301233B2 US 7301233 B2 US7301233 B2 US 7301233B2 US 16961505 A US16961505 A US 16961505A US 7301233 B2 US7301233 B2 US 7301233B2
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Definitions
- the present invention relates to a semiconductor device and, more particularly, to a semiconductor device having a thermoelectric cooler (TEC).
- TEC thermoelectric cooler
- Multi-chip packages include a plurality of semiconductor chips in a single package. MCPs manufactured by such techniques are advantageous in size, weight and mounting area over those including a plurality of packaged semiconductor chips.
- FIG. 1 is a cross-sectional view of one example of a conventional semiconductor chip package.
- a semiconductor chip package 910 may be a multi-chip package including a plurality of semiconductor chips 911 and 913 .
- Each of the semiconductor chips 911 and 913 may be an edge-pad-type semiconductor chip package. Bonding pads 912 and 914 may be arranged along the edges of the semiconductor chips 911 and 913 , respectively.
- the semiconductor chips 911 and 913 may be stacked on a substrate 921 .
- the semiconductor chips 911 and 913 may be connected to, for example, terminals 93 on the substrate 921 by wires 931 .
- a spacer 917 may be formed between the semiconductor chips 911 and 913 .
- the spacer 917 may establish the height of the wire loop of the wire 931 of the semiconductor chip 911 .
- An encapsulant 961 may seal the semiconductor chips 911 and 913 , the wires 931 and a connection portion.
- the encapsulant 961 may be formed of epoxy molding compound (EMC).
- Solder balls 971 may be formed on the bottom surface of the substrate 921 .
- the solder balls 971 may be used as external connection terminals.
- the conventional semiconductor chip package may have several disadvantages caused by thermal stresses. For example, in case of a multi-chip package having a spacer between semiconductor chips, release of heat between the chips may be difficult to realize. In some instances, heat may accumulate between chips, which is referred to as the heat trapping phenomenon. As a result heat transfer from a semiconductor chip to a substrate through solder balls may be reduced.
- the junction temperature of internal circuits of a semiconductor chip may increase, which may lead to an increased amount of heat generation. If the increased amount of generated heat is released poorly, in the case of electronic equipment using a semiconductor chip package such as a mobile product, characteristics of the semiconductor chip package such as refresh characteristics, operating speed and cycle life may decrease.
- An exemplary embodiment of the present invention is directed to a semiconductor chip package which may release heat generated from a semiconductor chip to the external environment.
- An exemplary embodiment of the present invention is directed to a semiconductor chip package which may prevent heat being trapped between semiconductor chips to improve thermal performance.
- An exemplary embodiment of the present invention is directed to a semiconductor chip package which may enhance thermal performance corresponding to increased operating speed and high integration.
- a semiconductor chip package with a thermoelectric cooler in accordance with an exemplary embodiment of the present invention may comprise a substrate, at least one semiconductor chip, and a thermoelectric cooler.
- the substrate may have circuit patterns, and substrate pads connected to the circuit patterns.
- the semiconductor chip may be mounted on the substrate.
- the thermoelectric cooler may include a P-type material plate and an N-type material plate. A portion of the P-type material plate may be connected with a portion of the N-type material plate on the semiconductor chip.
- the P-type and N-type material plates may be electrically connected to the circuit patterns of the substrate to be provided with direct current (DC) power.
- DC direct current
- the semiconductor chip may have bonding pads arranged along the edges thereof.
- the P-type and N-type material plates of the thermoelectric cooler may be formed clear of the bonding pads of the semiconductor chip.
- the P-type and N-type material plates of the thermoelectric cooler may be arranged in the same or different directions, for example at 90 degrees, relative to the semiconductor chip.
- the semiconductor chip package may include a plurality of semiconductor chips.
- the semiconductor chips may be stacked vertically on a substrate.
- the P-type and N-type material plates may be interconnected between adjacent semiconductor chips.
- the semiconductor chip package may include a plurality of semiconductor chips.
- the semiconductor chips may be arranged horizontally on a substrate.
- At least one of the semiconductor chips may have an associated thermoelectric cooler.
- a portion of at least one of the P-type and N-type material plates forming the thermoelectric cooler may be attached on at least one semiconductor chip.
- the P-type and N-type material plates may be connected with the substrate pad of the substrate directly or by a wire.
- At least one of the P-type material plate or the N-type material plate may have a comb shaped portion.
- the comb shaped portion may be located on the semiconductor chip.
- the P-type and N-type material plates may have a plurality of individual parts. The individual parts of the P-type and N-type material plates may be connected in series. The connection may be made by a conductive material plate.
- the semiconductor chip package may have a single semiconductor chip flip-chip bonded to the substrate.
- a portion of the thermoelectric cooler may be attached to the semiconductor chip.
- the N-type material plate may be attached to the semiconductor chip and the P-type material plate may be attached to the N-type material plate.
- the N-type material plate may be connected to the anode and the P-type material plate may be connected to the cathode.
- the P-type material plate may be attached to the semiconductor chip and the N-type material plate may be attached to the P-type material plate.
- the N-type material plate may be connected to the cathode and the P-type material plate may be connected to the anode.
- the semiconductor chip package may include two semiconductor chips stacked vertically.
- One of the N-type and P-type material plates may be attached to the lower semiconductor chip and the other may be attached to the upper semiconductor chip.
- the semiconductor chip package may include three or more semiconductor chips stacked vertically.
- a thermoelectric cooler may be formed between each adjacent pair of semiconductor chips.
- the P-type and N-type material plates of each cooler may be respectively stacked on the same type material plates.
- an N-type material plate may be stacked on another N-type material plate and a P-type material plate may be stacked on another P-type material plate.
- a semiconductor chip package in accordance with another exemplary embodiment of the present invention may include a module-type package having a plurality of semiconductor chip packages mounted on a substrate. At least one semiconductor chip package may have a thermoelectric cooler with P-type and N-type plates. The P-type and N-type material plates may be electrically connected with circuit patterns of the substrate to be provided with DC power.
- a semiconductor chip package with a thermoelectric cooler in accordance with still another exemplary embodiment of the present invention may include a module-type package having a plurality of semiconductor chip packages mounted on a substrate.
- Each semiconductor chip package may comprise a semiconductor chip, a substrate and an encapsulant.
- the semiconductor chip may be mounted on the substrate.
- the substrate may have circuit patterns.
- the encapsulant may protect the semiconductor chip.
- At least one semiconductor chip package may have a P-type material plate and an N-type material plate thereon. A portion of one of the P-type and N-type material plates may be attached to the encapsulant.
- the P-type and N-type material plates may be electrically connected with circuit patterns of the substrate to be provided with DC power.
- a method of forming a semiconductor package includes mounting a semiconductor chip on a substrate, and mounting a thermoelectric cooler having an N-type material plate and a P-type material plate on the semiconductor chip such that portions of the N-type and P-type material plates extend from the semiconductor chip and electrically connect circuit patterns of the substrate.
- FIG. 1 is a cross-sectional view of one example of a conventional semiconductor chip package
- FIG. 2 is a schematic view of a typical thermoelectric cooler
- FIG. 3 is a cross-sectional view of a semiconductor chip package in accordance with a first exemplary embodiment of the present invention
- FIG. 4 is a perspective view of a semiconductor chip package before a molding process in accordance with a first exemplary embodiment of the present invention
- FIGS. 5A through 5C are views of various thermoelectric cooler structures in accordance with an exemplary embodiment of the present invention.
- FIG. 6 is a cross-sectional view of a semiconductor chip package in accordance with a second exemplary embodiment of the present invention.
- FIG. 7 is a cross-sectional view of a semiconductor chip package in accordance with a third exemplary embodiment of the present invention.
- FIG. 8A is a cross-sectional view of a semiconductor chip package in accordance with a fourth exemplary embodiment of the present invention.
- FIG. 8B is a plan view of a semiconductor chip package before a molding process in accordance with a fourth exemplary embodiment of the present invention.
- FIG. 9 is a cross-sectional view of a semiconductor chip package in accordance with a fifth exemplary embodiment of the present invention.
- FIG. 10 is a plan view of a semiconductor chip package before a molding process in accordance with a sixth exemplary embodiment of the present invention.
- FIG. 11 is a plan view of a semiconductor chip package in accordance with a seventh exemplary embodiment of the present invention.
- FIG. 2 is a schematic view of a typical thermoelectric cooler.
- thermoelectric cooler 1 may be based on the Peltier Effect. According to the Peltier Effect, when DC power is applied to two different materials, heat may be absorbed at the junction of the materials.
- a thermoelectric cooler 1 may include a P-type semiconductor 5 and an N-type semiconductor 6 .
- the P-type and N-type semiconductors 5 and 6 may be formed between opposing electrical insulators 2 and opposing electrical conductors 3 a and 3 b .
- the electrical insulator 2 may have a good thermal conducting property but a poor electrical conducting property.
- the N-type semiconductor 6 may have excessive electrons while the P-type semiconductor 5 may have insufficient electrons.
- thermoelectric cooler 1 may serve as an electric heat pump to transfer heat from the heat source 8 to the heat sink 9 .
- FIG. 3 is a cross-sectional view of a semiconductor chip package in accordance with a first exemplary embodiment of the present invention.
- FIG. 4 is a perspective view of a semiconductor chip package before a molding process in accordance with a first exemplary embodiment of the present invention.
- FIGS. 5A through 5C are views of various thermoelectric cooler structures in accordance with an exemplary embodiment of the present invention.
- a semiconductor chip package 10 may be a multi-chip package having semiconductor chips 11 and 13 .
- the semiconductor chips 11 and 13 may be stacked on a substrate 21 .
- the semiconductor chip 11 may be hereinafter referred to as a first semiconductor chip and the semiconductor chip 13 may be hereinafter referred to as a second semiconductor chip.
- a thermoelectric cooler 51 may be formed between the first and second semiconductor chips 11 and 13 .
- the first and second semiconductor chips 11 and 13 may be electrically connected with the substrate 21 by wires 31 and 33 .
- An encapsulant 61 may protect the first and second semiconductor chips 11 and 13 , the wires 31 and 33 and a connection portion from the external environment.
- Solder balls 71 may be formed as external connection terminals on the substrate 21 .
- the substrate 21 may have circuit patterns (not shown) and substrate pads 23 and 25 connected with the circuit patterns.
- the substrate 21 may include a printed circuit board and a tape wiring substrate.
- the first and second semiconductor chips 11 and 13 may be of the same kind of semiconductor chips as each other or different.
- the first and second semiconductor chips 11 and 13 may be edge-pad-type semiconductor chips, on which bonding pads are arranged along the edges.
- the first and second semiconductor chips 11 and 13 may be mounted on one surface of the substrate 21 such that the bonding pad-forming surfaces may face upward.
- the bonding pads 12 and 14 of the semiconductor chips 11 and 13 may be connected with corresponding substrate pads 23 of the substrate 21 by the wires 31 and 33 , respectively.
- the semiconductor chips 11 and 13 may be attached using a well known epoxy resin adhesive.
- the thermoelectric cooler 51 may be formed between the first and second semiconductor chips 11 and 13 .
- the thermoelectric cooler 51 may include an N-type material plate 52 and a P-type material plate 53 .
- a portion of the N-type material plate 52 may be joined to a portion of the P-type material plate 53 .
- the N-type material plate 52 may be attached to the first semiconductor chip 11 and the P-type material plate 53 may be attached to the second semiconductor chip 13 .
- the N-type material plate 52 may use an N-type semiconductor and the P-type material plate 53 may use a P-type semiconductor.
- the N-type material plate 52 and the P-type material plate 53 may be joined using an electrical conductive adhesive.
- the N-type and P-type material plates 52 and 53 of the thermoelectric cooler 51 may be arranged clear of the wires 31 and 33 and bonding pads 12 and 14 of the semiconductor chips 11 and 13 . Portions of the N-type material plate 52 and the P-type material plate 53 may be bent suitably to be attached on the substrate 21 .
- the N-type and P-type material plates 52 and 53 may be electrically connected with the substrate pads 25 of the substrate 21 to be provided with DC power.
- the N-type material plate 52 may be connected with an anode and the P-type material plate 53 may be connected with a cathode.
- a joint portion between the N-type and P-type material plates 52 and 53 may be a cold side.
- a joint portion between the N-type and P-type material plates 52 and 53 and the substrate 21 may be a hot side.
- heat energy may be absorbed at the cold side while it may concentrate on and be released at the hot side.
- the heat energy may be transferred to the solder balls 71 through the substrate 21 .
- the thickness of the thermoelectric cooler 51 may be sufficient to establish the height of the wire loop of the wire 31 of the first semiconductor chip 11 .
- the N-type and P-type material plates 52 and 53 may be formed in the shape of rectangular plates.
- the N-type and P-type material plates 52 and 53 may be connected over the entire surface between the semiconductor chips 11 and 13 , shown in FIG. 5A .
- the N-type and P-type material plates 52 a and 53 a may have an irregular portion, as shown in FIG. 5B .
- FIG. 5B shows the N-type and P-type material plates 52 a and 53 a may each have a comb shape interdigitating with one another.
- the N-type and P-type material plates 52 and 53 may include individual parts as shown in FIG. 5C .
- thermoelectric cooler 51 of FIGS. 5B and 5C may adjust the location and area of the joint portion between the N-type and P-type material plates 52 and 53 . Therefore, the temperature may be controlled at these portions.
- a joint portion may be located at a heat generating portion of a semiconductor chip, and heat may be released at the heat generating portion of the semiconductor chip because of the joint's location, thereby maintaining a uniform temperature.
- the N-type material plate 52 may be attached to the first semiconductor chip 11 and the P-type material plate 53 may be attached to the second semiconductor chip 13 .
- the P-type material plate 53 may be connected with an anode and the N-type material plate 52 may be connected with a cathode.
- the encapsulant 61 may seal the first and second semiconductor chips 11 and 13 , the wires 31 and 33 and a connection portion to protect them from the external environment.
- the encapsulant 61 may be formed of EMC.
- the solder balls 71 may be connected with the substrate pads 25 of the substrate 21 .
- the solder balls 71 may serve as external connection terminals.
- FIG. 6 is a cross-sectional view of a semiconductor chip package in accordance with a second exemplary embodiment of the present invention.
- a semiconductor chip package 110 may have the same structure as that of the first exemplary embodiment except for that the N-type and P-type material plates 52 and 53 are wire-bonded to substrate pads 25 of a substrate 21 .
- This exemplary embodiment shows a modification in a structure to connect the N-type and P-type material plates 52 and 53 with the substrate pads 25 of the substrate 21 .
- FIG. 7 is a cross-sectional view of a semiconductor chip package in accordance with a third exemplary embodiment of the present invention.
- a semiconductor chip package 210 may have three semiconductor chips 11 , 13 and 15 .
- This exemplary embodiment shows a multi-chip package structure having two or more semiconductor chips.
- thermoelectric cooler 251 a may be formed between adjacent semiconductor chips 11 and 13 and a thermoelectric cooler 251 b may be formed between adjacent semiconductor chips 13 and 15 .
- N-type material plate 252 a and P-type material plate 253 a may be formed between the first and second semiconductor chips 11 and 13 and N-type material plate 252 b and P-type material plate 253 b may be formed between the second and third semiconductor chips 13 and 15 .
- Heat may be transferred from the semiconductor chips 11 , 13 and 15 to solder balls 71 through the substrate 21 by the thermoelectric coolers 251 a and 251 b.
- thermoelectric coolers 251 a and 251 b may be stacked outside the semiconductor chips 11 , 13 and 15
- the thermoelectric coolers 251 a and 251 b may be separated outside the semiconductor chips 11 , 13 and 15 . This may allow control of DC power to each thermoelectric cooler 251 a and 251 b separately, thereby individually maintaining the operating temperature of the semiconductor chips 11 , 13 and 15 .
- the temperature of each semiconductor chip may be separately controllable.
- FIG. 8A is a cross-sectional view of a semiconductor chip package in accordance with a fourth exemplary embodiment of the present invention.
- FIG. 8B is a plan view of a semiconductor chip package before a molding process in accordance with a fourth exemplary embodiment of the present invention.
- a semiconductor chip package 310 may be a multi-chip package having two semiconductor chips 311 and 313 .
- the semiconductor chip package 310 may be different from that of the first exemplary embodiment in that N-type and P-type material plates 352 and 353 may be arranged 90 degrees with respect to one another.
- This exemplary embodiment shows free arrangement of a hot side of a thermoelectric cooler.
- the N-type and P-type material plates 352 and 353 may be arranged at a good heat release portion of a substrate 321 .
- the N-type and P-type material plates 352 and 353 may be arranged in the same direction as well as in different directions.
- bonding pads 314 of the semiconductor chips 311 and 313 may be arranged clear of the N-type and P-type material plates 352 and 353 .
- Bonding pads 314 may be wire bonded to substrate pads 323 , while the N-type and P-type material plates 352 and 353 may be connected to substrate pads 325 . Portions of the N-type and P-type material plates 352 and 353 outside of the semiconductor chip 313 may be sized and spaced so as not to be in contact.
- FIG. 9 is a cross-sectional view of a semiconductor chip package in accordance with a fifth exemplary embodiment of the present invention.
- a semiconductor chip package 410 may have a semiconductor chip 411 flip-chip bonded to a substrate 421 .
- the semiconductor chip 411 may be electrically connected to the substrate 421 by bumps 412 .
- An N-type material plate 452 may be attached to the semiconductor chip 411 .
- a P-type material plate 453 may be attached to the N-type material plate 452 . Portions of the N-type and P-type material plates 452 and 453 may be attached to substrate pads 425 on the substrate 421 to be provided with DC power.
- FIG. 10 is a plan view of a semiconductor chip package before a molding process in accordance with a sixth exemplary embodiment of the present invention.
- a semiconductor chip package 510 may have a plurality of semiconductor chips 511 , 513 and 515 .
- the semiconductor chips 511 , 513 and 515 may be arranged horizontally on a substrate 521 .
- the semiconductor chip 511 may be hereinafter referred to as a first semiconductor chip.
- the semiconductor chip 513 may be hereinafter referred to as a second semiconductor chip.
- the semiconductor chip 515 may be hereinafter referred to as a third semiconductor chip.
- the third semiconductor chip 515 may have a thermoelectric cooler 551 . This exemplary embodiment shows thermal interference, which may occur between the semiconductor chips 511 , 513 and 515 , may be prevented.
- the third semiconductor chip 515 may have a higher operating temperature than the first and second semiconductor chips 511 and 513 .
- An N-type material plate 552 may be attached on the third semiconductor chip 515 .
- a P-type material plate 553 may be attached on the N-type material plate 552 . Portions of the N-type and P-type material plates 552 and 553 may be attached to the substrate 521 .
- Heat, which may occur during operation of the third semiconductor chip 515 may influence adjacent semiconductor chips 511 and 513 .
- the thermoelectric cooler 551 may reduce the temperature during normal operation of the third semiconductor chip 515 and release the generated heat.
- FIG. 11 is a plan view of a semiconductor chip package in accordance with a seventh exemplary embodiment of the present invention.
- a semiconductor chip package 710 may be a memory module having a plurality of semiconductor chip packages 711 , 713 and 715 .
- the semiconductor chip packages 711 , 713 and 715 may be mounted on a substrate 721 .
- a specific semiconductor chip package 715 may have higher operating temperature than the other semiconductor chip packages 711 and 713 .
- the semiconductor chip package 715 may have a thermoelectric cooler 751 .
- the thermoelectric cooler 751 may reduce the operating temperature of the semiconductor chip package 715 .
- the thermoelectric cooler 751 may prevent the thermal interference which may occur between adjacent semiconductor chip packages 711 , 713 and 715 . Heat may be released through the substrate 721 , thereby allowing stable operating characteristics of the semiconductor chip packages 711 and 713 .
- a semiconductor chip package in accordance with exemplary embodiments of the present invention includes a thermoelectric cooler that may release heat, thereby improving thermal characteristics of the package.
- the semiconductor chip package may prevent heat being trapped between semiconductor chips. Further, the semiconductor chip package may enhance thermal performance corresponding to increased operating speed and high integration.
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Abstract
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KR20060002254A (en) | 2006-01-09 |
US20060001140A1 (en) | 2006-01-05 |
KR100629679B1 (en) | 2006-09-29 |
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