US5121118A - Method and apparatus for achieving controlled supplemental signal processing during analog-to-digital signal conversion - Google Patents

Method and apparatus for achieving controlled supplemental signal processing during analog-to-digital signal conversion Download PDF

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US5121118A
US5121118A US07/435,418 US43541889A US5121118A US 5121118 A US5121118 A US 5121118A US 43541889 A US43541889 A US 43541889A US 5121118 A US5121118 A US 5121118A
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analog
digital
signal
integrator
converter
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Jurgen Hermann
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EM Microelectronic Marin SA
Divertronic AG
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/02—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation
    • G01D3/022—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation having an ideal characteristic, map or correction data stored in a digital memory
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the disclosure concerns a process and a device for compensating for, or correcting, measurement errors, and/or signal shaping of analog measurement signals, especially for sensors such as piezo-resistive sensors, in which a transformation of analog measurement signals into digital values is undertaken.
  • Sensors to include also piezo-resistive sensors, have been completely integrated into modern technology and form an indispensable component for a measurement, control and/or regulatory circuit. By their use, precise measurement values can be obtained and then be further processed.
  • the problem certainly arises that, for example, the measurement signal picked off at a measurement bridge can be contaminated with many measurement errors.
  • traditional sensors can be employed in association with microprocessors only by means of expensive switching, as a result of which, in any case, the measurement signal obtained from the analog measurement circuit must first of all be subjected to an analog-digital transformation.
  • U.S. Pat. No. 4,192,005 discloses that a measurement value compensation switch can be provided downstream from the measurement point, in order to at least compensate for the errors arising from the influence of temperature in the analog measurement signal. But even this analog temperature compensation is imperfect, based on results.
  • U.S. Pat. No. 4,192,005 discloses how to digitize an analog signal measurement signal of a piezo-resistive sensor and process it digitally, through an analog-digital converter. This leads to an extreme loss of analog-digital converter resolution, since the sensitivity and offset compensation cannot be set from the start. In other words, with this known device, the entire measurement signal, including all errors, will be digitized from the outset. In this situation, the resolution can, at the maximum, openly reflect the individual digital steps.
  • the measurement processing and the corresponding device set forth in this document for the accomplishment of measurement processing includes a compensation circuit working in digitized form.
  • the measurement signals, received in analog form are further processed in analog form in the course of which an analog measurement signal is digitized only in a regulatory circuit, in order to then call up a corresponding prestored compensation or signal-shaping value based on a calibration and feed it back into the measurement switch.
  • the power supply for the measurement bridge and/or the amplification curve in the operational amplifier connected downstream from the measurement bridge can be influenced.
  • a possible measurement error concerns the "null-point displacement and scattering of the measurement value," which is caused by varying resistance values in the two arms of the measurement bridge, so that even without pressure being applied to the pressure sensor, a null-point error pressure signal appears.
  • a further error is caused by the "sensitivity distributions" of the sensor cells, which are conditioned by production tolerances, as a result of which the individual cells display different sensitivities, for which reason the measurement circuit has to be appropriately balanced.
  • a measurement signal can be received with the highest precision and exactness and then can be subjected to signal shaping in the desired direction with the inclusion of an appropriate desired signal error compensation and correction, with which one or more of the above-named error signals can be cumulatively compensated and corrected. And this is to be accomplished with a relatively simple construction.
  • the analog measurement signal must be further digitized in the process, in order to permit additional processing by means of a microprocessor.
  • the disclosed device represents, in addition, the connection between the sensor cells and a microprocessor, since no other component is required for conversion of the analog into digital values.
  • the problem of compensation reduces itself to the program level, so that in individual cases, specific hardware add-ons and modifications are not necessary.
  • the essence of the disclosure lies in the fact that the compensation relating to the signal errors in the measurement signal and the appropriate signal shaping is undertaken neither before nor after the conversion of the analog signal into a digital signal, but during the analog signal conversion.
  • the compensation relating to the signal errors in the measurement signal and the appropriate signal shaping is undertaken neither before nor after the conversion of the analog signal into a digital signal, but during the analog signal conversion.
  • the sensor and the measurement bridge (when a piezo-resistive sensor is employed) can be driven by a power supply of about 200 uA. This is, by way of example, 10 times smaller than possible under the current state of the art with an analog measurement signal refinement with digital correction processing. This is because here, as in the previous state of the art, measurement bridge power supplied of at least 2 mA are necessary, in order to get a sufficiently strong signal for further processing through the OP[operations] amplifier, which leads to the above-mentioned undesired measurement error contamination.
  • the disclosure can therefore be employed with an analog-digital converter, which is constructed and operated according to the so-called counter process, i.e. the "sawtooth process.”
  • Known sawtooth processes work according to the so-called single- or dual-slope processes. Three- and four-slope processes re also possible as derivations of the single-and double-slope processes.
  • a U(i)/f converter as well as a quantized-feedback or charge-balancing converter can also be employed.
  • a dual slope integration process will be executed. This process will permit problem-free compensation of: null-point displacement, individual fluctuations in sensor sensitivity, temperature influences, as well as linear errors and also hysteresis errors.
  • the dual-slope process is particularly well-suited, since a three-fold compensation can be accomplished, that is to say, in the neutral phase through a level shift, in the negative slope phase through a preselected adjustment and transformation of the phase length T of the input signal integration, and in the adjoining positive slope phase through preselected adjustment and transformation of the reference voltage to be integrated.
  • an EEPROM as a switchable module. This is programmable with low power, and serves for reading out from storage all adjustment values and parameters of the signal processor.
  • the preferred design of the device follows the form of a microchip, which is connected to a computer through a microbus interface.
  • the programmed compensation values stored in the EEPROM can be called up through the internal bus, processed, and then the programmable analog-digital converter signal-fitting device (PADCAS) can be switched on, which in turn automatically undertakes the signal compensation during the analog-digital conversion.
  • PIDCAS programmable analog-digital converter signal-fitting device
  • FIG. 1 A schematic diagram of the device for measurement error compensation, signal-shaping and/or processing.
  • FIG. 2 A block diagram of the device portrayed in FIG. 1.
  • FIG. 3 An example of a temperature time profile, and an example of a pressure-time for plotting norms and calibration values.
  • FIGS. 1 and 2 display a general block diagram with the related schematic.
  • the device consists of a signal processing switch 1, which is formed as a semi-conductor chip.
  • An electrical erasable and programmable storage unit for constants, EEPROM 4 is connected to this through interface 2.
  • Signal-processing switch 1 is further connectable through an additional interface 3 to an external microprocessor or microbus.
  • the connections and/or switches designated by alpha-numeric combinations in FIG. 1 are listed and explained further in the tables provided in the annex, to which reference is made.
  • Two sensors can be connected to the switch shown in FIG. 1.
  • the sensors can be operated alternatively or even interlocked, and thus simultaneously, in staggered fashion, e.g., with a reference pressure measure.
  • the main power supply V cc is connected to the input VDDA/VDDD as well as to the potential connection GNDA/GNDD.
  • the sensor bridge voltage feed can be preselected and adjusted, through a 4-bit register decoder, 9, and a down-stream power source step-selector, 11, in 16 programmable discrete steps, which are selectively applied to the respective measurement bridges of the first or second sensor, 5 and/or 7, through an internal power source 12 and the first multiplexer 13.
  • These 16 discrete programmable power levels are also used to adjust the sensor in an 8-bit analog-digital range, when the temperature at the measurement bridge is measured by digital-analog comparison.
  • the programmable power source is used, in addition, for adjusting the sensor signal with reference to the desired output voltage range.
  • the voltages at the sensors 5 and 7 respectively will be connected to the bridge through the TS1 or TS2 (Top of Sensor) connections and the opposite potential connection.
  • the measurement signal coming across the measurement bridge is leg through the CH1H (Channel 1 High) connection and CH1L (Channel 1 Low) to the first multiplexer 13, and through a further multiplexer 15, to a buffer 17, as an intermediate storage.
  • an integrator step 21, followed by a comparator step 23 are added successively to form an analog-digital converter (abbreviated ADC).
  • ADC analog-digital converter
  • AD converters Although on principle a variety of AD [analog-digital] converters can be employed, in the examples illustrated, an AD converter will be used which works in the so-called dual-slope integration mode.
  • the input of integrator 21 is connected to the output of buffer 17 through an input resistance 22 (in the example, 27 KOhm). Between the input and output of the OP-amplifier 21, is a condenser 24 (in the example 33 nF). The output of the integrator leads to a comparison circuit, whose output is connected to a master control logic 25, referred to hereafter by the abbreviation MCL.
  • MCL master control logic
  • the signal processing switch 1 Since the further construction of the signal processing switch 1 is not hard-wired, but is constructed in a programmable fashion to achieve a great range of adaptability, a 4-bit wide bidirectional microbus is provided in the example, so that the bits can be cyclically displaced through the 4-bit register.
  • a connection is possible from the internal bus of signal processing switch 1 through interface 3 to an external microprocessor or to an external device for further data processing, by means of microprocessor connection 27 as input-output connection through D0-D3 channel 29.
  • Interface 3 is also assigned to the address register of the release impulse ALE (ALE-STROBE), the read-input impulse (Read Strobe) for bus read, and the write input impulse WR (Write Strobe) for bus write.
  • ALE-STROBE the read-input impulse
  • WR Write Strobe
  • the suitable output signal is applied to D0-D3 channel 29 through an appropriate activation of the D-storage at its output.
  • Two 4-bit instruction registers are also provided as internal logic in signal processing switch 1. These registers are described with a 4-bit logic control word, LCW.
  • the 4-bit LCW words are then decoded by two, 4-bit command word decoders, 31, and converted into output signals which switch individual control components of the mCL master control logic, 25. Each LCW control word remains unchanged, until a further change occurs.
  • the DA converter, 33 is not only used for temperature measurement but also as a supplement in signal compensation, i.e. once for automatic "null-point compensation" and then for gross adjustment of the full scale range in the first neutral phase and positive slope phase.
  • An additional programmable ADC counter, 35 is used to augment this 8-bit DA converter, 33, in order to adjust the length of the time signal T during the integration of the negative slope phase, and to undertake a precision full scale balance with 12 bits.
  • the ADC counter, 35, and two 8-bit registers (in box 36), used for null-point and gross sensitivity adjustments are connected with the input of the DA converter, 33, through three 8-bit multiplexers (in box 38).
  • the programmable 12-bit counter 35 is used in order to be able to select between 8-, 10-, or 12-bit resolution, in which the clock input is used in the manner of a frequency splitter and the length of the positive phase, corresponding to the binary equivalent of the A-D converted sensor signal, is measured.
  • the 12-bit counter is used to transform the 8-bit digital-analog signal, until the comparator, 23, cuts off the counting process by means of the MCL logic, 25, upon reaching the measurement bridge voltage. At this moment, the counter position corresponds to the 8-bit binary equivalent of the temperature.
  • a five-volt power supply, 50 is provided for the supply of EEPROM 4, which determines the adaptation level of the interface 26.
  • the read and write process of EEPROM 4 is accomplished through LCWs which are loaded in instruction register 31, and are operated and connected through the signal processing switch, 1.
  • the EEPROM includes, as an example, two internal 8-bit registers. Each register can include two sets of 4-bit registers, which are accessible through the 4-bit bus. By pressure on the input EEMUX it is possible that the addresses and data can be multiplexed to EEPROM 4.
  • the external EEPROM 4 is connected to the internal bus by means of an interface file, 26, a data address multiplexer, 28; two 4-bit input and 8-bit output registers, 30; and an additional 8-bit input and two 4-bit output registers, 32.
  • a temperature compensation 41 is provided for this purpose for the microprocessor interface 3.
  • an automatic adaptation is provided, e.g., from -20° to 70° C., in which the temperature compensation switch displays a temperature coefficient of 14 mV/° C.
  • a three volt power supply is produced.
  • the external potential GMD as well as the microprocessor LCD drive, etc. need only be connected to the V-UP peg, and the TMPC peg depressed. The withdrawal of the TMPC pin shuts off the temperature compensation switch circuit.
  • LED [light emitting diode] driver circuits, 49 can be provided, in order to activate different LEDs, corresponding to different functions, with differing flash frequencies, but this will not be addressed in further detail below.
  • a sensor-on switch circuit which compares the value at the external ONS peg with an internal 600 KObm resistance. Any resistance value below 550 KObm switches the sensor-on switch circuit 45 to its anticipated value.
  • This switch circuit 45 can be programmed to be turned on or off through an appropriate LCW command word.
  • the signal processing circuit 1 is operated in the so-called master mode.
  • a commutator can be used in power-down operation in which, e.g., the switch circuit only requires 0.5 uA. The switch can be reactivated by the previously mentioned sensor-on switch 45.
  • the crystal oscillator 47 abbreviated XTAL, is stopped and the microprocessor potential port and all other outputs set at power supply levels, with the exception of the sensor-on switch which remains activated.
  • the switch circuit 45 With a resistance of less than 500 KObm, the switch circuit 45 is reactivated, as mentioned, so that the crystal oscillator 47 begins to oscillate. Also, the other alternations are canceled.
  • the sensor-on switch, 45 has a hysteresis of 50 kObm. This permits switching on by bypassing the ONS pin and the GDS pin (potential pin) through moisture detectors or in employment as a water sensor.
  • FIG. 2 a voltage doubler, 49, is shown, a negative voltage is created in a direction opposite to that of the power supply, The effectiveness lies at 95° or better.
  • the negative port, V-EE, for the EEPROM power supply used this negative voltage, in order to provide a 5 volt power supply between the positive and negative ports VDD and V-EE (EEPROM power supply 50).
  • An initial bias voltage switching circuit, 45 includes several reflex voltage switches. Each of the initial bias voltage circuits can create all the power levels necessitated during operation and can carry the coarse power impulse through to supply the sensors.
  • the already-mentioned crystal oscillator, 47 is connected to an oscillator circuit, 53, through two ports, XTALI and XTAZLO.
  • a scanning impulse generator, 55, and a clock frequency generator, 57 are also operated by these.
  • An externally-grounded condenser 59 in connection with an internal 1 MObm 60 (PONR circuit 58) supplies a specified output to all registers, outputs of the internal logic circuits, and the internal power supply and performs the automatic reset function in initial power loading.
  • PONR circuit 58 in connection with an internal 1 MObm 60 (PONR circuit 58) supplies a specified output to all registers, outputs of the internal logic circuits, and the internal power supply and performs the automatic reset function in initial power loading.
  • a power down switch is possible, with which everything is turned off, with the exception of the sensor-on switch 45, and the signal processing switch 1 uses less than 1 uA of power, dependent upon resistance 60 which is connected to the PONS pin.
  • a resistance of 10 MObm leads to 0.6 uA power consumption, and 20 MObm to 0.3 power consumption.
  • the so-called master or slave mode various operational modes are possible with the signal processing circuit 1, i.e., the so-called master or slave mode.
  • the subordinate slave mode is made possible by withdrawal of the M/S peg.
  • the signal processing switch 1 is controlled through the circuits of the CE release. As long as the CE peg is depressed, the output bus remains in the three conditions, and does not react to the ALE, RD or WR impulses. Through series and simultaneous switching of several signal processing switches 1, the so-called slave mode can be executed.
  • the master mode serves first to minimize the energy consumption of the microprocessor instruments. For this reason, the device described here switches the power supplies of the remaining components by software commands whereby external switch circuits between the general VDD power supply and the V-UP pin are switched as general GND potentials.
  • the internal FET switch for the power adjustment at the V-UP power supply has an internal On-resistance of less than 100 Obm and cna control external circuits of up to 5 mA at 3V.
  • the so-called master mode is made possible by depressing the M/S pin and by withdrawing the CE pin.
  • the first step concerns the so-called calibration phase, in which the compensation and signal processing values are obtained and stored.
  • the second phase concerns the actual pressure signal measurement and processing, with regard to error compensation.
  • the calibration phase will be explained by reference to FIG. 3.
  • the measurement switch with the connected sensor e.g. the first sensor 5
  • a time-pressure curve as shown in FIG. 3.
  • a temperature-time curve is executed as is shown in FIG. 3.
  • Naturally other temperature/pressure/time profiles are possible, in order to undertake linear corrections and curve-fitting.
  • a feed voltage compensation is also provided.
  • the feed power oscillates, for whatever reason. This kind of oscillation of the feed power supply would cause a corresponding contamination of the measurement results.
  • the automatic power supply compensation functions so that voltage oscillations of up to 1 volt are automatically compensated through the IC [integrated chip]. An even larger voltage fluctuation could be compensated in a fashion analogous to the temperature compensation.
  • a V CC input as well as a potential connection is provided in the second multiplexer 15.
  • the compensation follows in a fashion analogous to temperature compensation, where the feed voltage in the calibration phase is turned into binary equivalents and then e.g. during the measurement phase, it taken into account by computer processing to attain the compensation by interpolation.
  • null-point or neutral phase In the first, or so-called null-point or neutral phase, only internal voltage displacements, long-term instabilities, or other errors or deviations of the internal circuitry are corrected, but above all, the start point of the integrator is raised to a previously-measured and programmed voltage level, through which the sensor bridge deviation voltage (S o ) is eliminated.
  • the appropriate positive or negative compensation voltage is created through the 8-bit DAC, by means of a program.
  • the sum of all deviations is loaded into the null-point correction condenser 61 and applied to the positive input port of the ADC integrator 21 as a virtual null-point voltage U z .
  • a commutator, 71 which is introduced into the circuit between the plus input indicator, 21, and the output of comparator 23 is required in order to set the indicator at "null" in the first phase.
  • the previously mentioned connective circuits can be switched on/off by means of the commutator 71. During the first indication phase the switch stands at “off,” while in successive indication phases it is switched to "on.”
  • the voltage difference, U e between the unknown sensor input signal, S e , and the sensor bridge signal deviation signal, S o , is integrated for a preprogrammed period.
  • the appropriate period is created by the programmable 12-bit counter 35.
  • the 12l-bit counter is determined by means of a 10l-bit word, a negative slope phase with a time period variation of between 4.096 and 3.072 clock periods is possible. By this means, the counter cycle N is varied.
  • the programming of the time period of the negative slope phase is synonymous with a fine-tuning of the full-scale range, in that (for this example) 25% of the maximum negative phase length is adjusted and transformed.
  • the second phase is followed directly by the third phase with a positive slope, the length of which is variable.
  • a reference voltage U r is again applied to the input port of the integrator, 21, in place of the sensor input signal difference U e .
  • the variable positive slope phase determines the final ADC output signal with a view to a coarse adjustment of the scale range for adjustment to a desired measurement range.
  • the preprogrammed reference voltage U r is integrated upwards to the input voltage U e .
  • the appropriate reference voltage U r is created by the internal 8-bit DAC 33 under control of the program, and automatically applied to the plus input pot of the integrator during the positive phase.
  • the internal counter is stopped by the comparator 23 when the output of the integrator has once more reached the virtual null voltage U z .
  • the counter output is read into the ADC output register 39 and the end-conversion signal (CC-conversion complete) is given. If the counter should reach 100% of the preprogrammed full-scale value (maximum clock period count), before the integrator reaches U z , then the conversion overflow signal COV is produced and the integration is stopped.
  • the COV and CC signals can be called up from the status output register.
  • the status of the On-sensor signal is also brought to the status output register, and it too can be called up from the status output register.
  • ADCOUT ADC output value
  • FS nominal value for the ADC output at FS (nominal full scale value)
  • OS nominal value for the ADC output at LS (nominal value for the offset check)
  • OFSSRD ADC output value at LS (offset signal for mathematical adaptation).
  • signal processing switch 1 is adaptable to the most varied and manifold tasks.
  • a signal shaping precision that has not been considered attainable can be reached with minimum energy expenditure by signal processing and compensation during analog-digital conversion.
  • an internal bus unit By use of an internal bus unit, further problem-free signal processing can take place by means of an external microprocessor or microbus connected to an interface.
  • numbers on diagonal lines indicate the number of separate circuits or, in the case of a bus, the number of circuits included in the bus.

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US6032109A (en) * 1996-10-21 2000-02-29 Telemonitor, Inc. Smart sensor module
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US6467329B1 (en) * 1999-02-15 2002-10-22 Showa Corporation Neutral point voltage adjuster of torque sensor
US20050059373A1 (en) * 2003-08-28 2005-03-17 Takahiro Nakamura Frequency generator and communication system using the same
DE19846461B4 (de) * 1997-10-08 2006-05-11 Hitachi, Ltd. Sensoreinstellschaltung
DE10131229B4 (de) * 2000-06-28 2009-05-14 Denso Corp., Kariya-shi Eine physikalische Größe erfassender Sensor
GB2493837A (en) * 2011-08-15 2013-02-20 Pgs Geophysical As Piezoelectric sensors for geophysical streamers
US9784632B2 (en) 2013-09-30 2017-10-10 Denso Corporation Sensor signal detection device

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DE10131229B4 (de) * 2000-06-28 2009-05-14 Denso Corp., Kariya-shi Eine physikalische Größe erfassender Sensor
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EP0357616A1 (fr) 1990-03-14
JPH03500571A (ja) 1991-02-07
JP2553178B2 (ja) 1996-11-13
WO1989008819A1 (fr) 1989-09-21
DE3889725D1 (de) 1994-06-30

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