US4989338A - V-shaped groove inspecting and working method - Google Patents

V-shaped groove inspecting and working method Download PDF

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Publication number
US4989338A
US4989338A US07/413,683 US41368389A US4989338A US 4989338 A US4989338 A US 4989338A US 41368389 A US41368389 A US 41368389A US 4989338 A US4989338 A US 4989338A
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United States
Prior art keywords
shaped grooves
shaped
circle
groove
working
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Expired - Lifetime
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US07/413,683
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English (en)
Inventor
Hiroyuki Tsuji
Susumu Nomoto
Takashi Ota
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NGK Insulators Ltd
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NGK Insulators Ltd
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Assigned to NGK INSULATORS, LTD. reassignment NGK INSULATORS, LTD. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: NOMOTO, SUSUMU, OTA, TAKASHI, TSUJI, HIROYUKI
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile

Definitions

  • This invention relates to a method of inspecting and working V-shaped grooves, for example, those as formed in a substrate of an optical fiber connector with high accuracy of the order of submicrons.
  • connectors In order to accurately connect optical fibers having a diameter of approximately 100 ⁇ m whose center axes are aligned with each other, connectors have been developed in which the optical fibers are embraced between a pair of chips formed in their surfaces with V-shaped grooves.
  • Such chips are made of a hard material such as ceramics, glass ceramics and quenched steel.
  • the V-shaped grooves are formed by means of a rotating grinding wheel having a sharpened periphery edge. As any worked errors in the worked V-shaped grooves will directly cause deflections of axes or the optical fibers, the V-shaped grooves must be inspected to ensure high accuracy.
  • V-shaped grooves are on the order of 100 ⁇ m depth and 150 ⁇ m width, the measurement of surface roughness determined in ISO is not applicable to the inspection of the grooves. Even if a surface roughness tester is used, significant measured values can not be obtained.
  • a master gauge 2 having a diameter equal to those of optical fibers to be used is arranged in a V-shaped groove 1 and a height of the master gauge 2 is measured by means of a stylus 3. A position and accuracy of the optical fiber in an actually used state are presumed with the aid of the measured value.
  • a method of inspecting V-shaped grooves comprises the steps of measuring coordinates of more than 20 points per V-shaped groove on surfaces of a substrate formed with the V-shaped grooves by moving a stylus of a contacting type shape tester in directions perpendicular to a longitudinal direction of the V-shaped grooves, removing measured data obtained within distances at least 10 ⁇ m from each edge and the bottom of each of the V-shaped grooves from all data obtained in the previous step so as to obtain effective measuring segments between each edge and the bottom of each of the V-shaped grooves, and calculating shapes formed by straight lines on the basis of the remaining measured data using the effective measuring segments by using only those effective measuring segments which have a length of more than 40 ⁇ m.
  • a method of working V-shaped grooves comprises the steps of drawing a circle having a diameter substantially equal to that of an element to be supported in the V-shaped groove so that the circle is inscribed in an interior of a V-shaped groove calculated by the inspecting method as set forth, and working the V-shaped groove of a substrate while feeding back errors in center position of the circle into the working process of the V-shaped groove of the substrate to compensate for depths and pitches of the V-shaped groove being worked.
  • FIG. 1 is a front elevation for explaining an inspecting method of the prior art
  • FIG. 2 is a front elevation for explaining another inspecting method of the prior art.
  • FIG. 3 is a perspective view for explaining the inspecting method according to the invention.
  • a stylus 3 is moved on surfaces 4 formed with V-shaped grooves 1 along the dotted lines in a direction perpendicular to a longitudinal direction of the V-shaped grooves 1 to measure coordinates for points on the surfaces 4 more than 20 per groove.
  • the stylus 3 is preferably a contacting type shape tester such as Form Talysurf available from Rank Tailor Hobson Co.
  • a width (W) and a depth (M) of the V-shaped groove 1 are for example of the order of 150 ⁇ m and 100 ⁇ m, respectively.
  • a pitch (L) of the V-shaped grooves 1 is on the order of 250 ⁇ m.
  • An opening angle ( ⁇ ) of the V-shaped groove 1 is more than 70°.
  • a stylus 3 having a tip end angle of 60° and a tip radius of 2 ⁇ m may be used.
  • the coordinates of more than 20 points are measured, while the tip end of the stylus moves on the broken lines.
  • measured data within distances more than 10 ⁇ m at edges 5 and groove bottoms 6 of the grooves s as shown in FIG. 3 are removed from the data to provide effective measuring segments in order to avoid unstability in measured data.
  • Remaining data of the effective measuring segments having a length of more than 40 ⁇ m are used to calculate shapes formed by straight lines with the aid of a calculating method such as the method of least squares or the like.
  • the reason why measured points per V-shaped groove are more than 20 is that errors in measurement may increase if the measured points are less than 20.
  • the measured data within the distances more than 10 ⁇ m from the edges and the bottom of the V-shaped grooves are excluded from all the measured data for the reason that the chipping, breaking off, caulking and the like are likely to occur within the portions in working and it is therefore difficult to cause the stylus 3 to follow along the lines exactly.
  • only the measured data on the portions of the V-shaped grooves having the effective measuring segments having a length or more than 40 ⁇ m are used for the calculations since high accuracy can only be obtained from such data.
  • the V-shaped grooves can be inspected with an accuracy of the order of 0.2 ⁇ m.
  • a circle 7 having a diameter D equal to those of bodies (optical fibers) to be supported in the V-shaped grooves is drawn so as to be inscribed in an interior of a V-shaped groove whose coordinates were obtained in the calculation above described. Thereafter, any shifting distance during working of a center 0 of the circle 7 from a set position of the center 0 is detected and a compensation thereof is then fed-back to a working process.
  • a relative position between a rotating grinding wheel and a chip is determined according to the fed-back signals, and a depth Z from the surface of the tip to the center 0 of the circle 7 and a pitch L of the V-shaped grooves are thus compensated.
  • V-shaped grooves and the like can be accurately detected.
  • V-shaped grooves can be worked with a high accuracy of 0.3-0.5 ⁇ m.
  • the invention it is possible to accurately inspect with accuracy on the order of submicrons, fine V-shaped grooves which would be impossible to be measured by usual surface roughness testers in view of measuring lengths and cut-off values, and it is also possible to work such grooves with the aid of results of the inspection. Therefore, the method according to the invention can inspect and work with high accuracy fine V-shaped grooves of connector substrates, jigs for welding optical fibers, and jigs for assembling various kinds of sensors, for example, to prove great effectiveness in presumption of optical transmission losses and improvement of positioning accuracy. Accordingly, the invention greatly contributes to development of the inspection and working methods industries by eliminating all the difficulties in the prior art.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Coupling Of Light Guides (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
US07/413,683 1988-10-01 1989-09-28 V-shaped groove inspecting and working method Expired - Lifetime US4989338A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63-248797 1988-10-01
JP63248797A JPH0679098B2 (ja) 1988-10-01 1988-10-01 Ｖ型溝の検査方法及び加工方法

Publications (1)

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US4989338A true US4989338A (en) 1991-02-05

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US07/413,683 Expired - Lifetime US4989338A (en) 1988-10-01 1989-09-28 V-shaped groove inspecting and working method

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US (1) US4989338A (de)
EP (1) EP0363101B1 (de)
JP (1) JPH0679098B2 (de)
DE (1) DE68908828T2 (de)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5501017A (en) * 1994-02-07 1996-03-26 Kabushiki Kaisha Topcon Method and apparatus for measuring a frame configuration
US20040047938A1 (en) * 1997-04-25 2004-03-11 Hiroyuki Kosuga Mold and method of producing the same
US20040087614A1 (en) * 2003-07-28 2004-05-06 Leslie Baumann Method for treating damaged skin
US20040086231A1 (en) * 2002-03-29 2004-05-06 Ngk Insulators, Ltd. Optical device and method of producing the same
US20050041907A1 (en) * 2002-03-29 2005-02-24 Ngk Insulators, Ltd. Optical device and method of manufacturing same
US20050238279A1 (en) * 2002-12-20 2005-10-27 Ngk Insulators, Ltd. Optical device
US20050238280A1 (en) * 2002-12-20 2005-10-27 Ngk Insulators, Ltd. Optical device
US20050244106A1 (en) * 2002-12-20 2005-11-03 Ngk Insulators, Ltd. Optical device
US20050259912A1 (en) * 2003-01-27 2005-11-24 Ngk Insulators, Ltd. Optical device
US20060098912A1 (en) * 2003-06-02 2006-05-11 Ngk Insulators, Ltd. Optical device
US20060156566A1 (en) * 2005-01-18 2006-07-20 General Electric Company Methods and system for inspection of fabricated components
US20230358690A1 (en) * 2022-05-05 2023-11-09 Intel Corporation Inspection tool and inspection method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101519554B1 (ko) * 2013-12-16 2015-05-13 주식회사 제씨콤 원통형 피지지물을 위한 지지 유니트

Citations (10)

* Cited by examiner, † Cited by third party
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US3481043A (en) * 1967-12-12 1969-12-02 Bendix Corp Gaging machine
US4164694A (en) * 1976-09-25 1979-08-14 Rolls-Royce Limited Means for indicating the profile of a workpiece
JPS5710411A (en) * 1980-06-23 1982-01-20 Tokyo Seimitsu Co Ltd Measuring device for profile
JPS5756701A (en) * 1980-09-20 1982-04-05 Fujitsu Ltd Method for measuring v groove
US4324049A (en) * 1979-11-05 1982-04-13 Hydril Company Gaging system and method
US4337580A (en) * 1979-07-14 1982-07-06 Toyo Kogyo Co., Ltd. Method for inspecting gear contact patterns
FR2498106A1 (fr) * 1981-01-21 1982-07-23 Lemoine Cie Ets Procede de reperage de cotes d'un objet et appareillage pour sa mise en oeuvre
JPS5871047A (ja) * 1981-10-22 1983-04-27 Enshu Ltd 表面倣いにおけるピツクフイ−ト方式
JPS61182502A (ja) * 1985-02-08 1986-08-15 Kawasaki Heavy Ind Ltd 寸法誤差測定方法
JPS61244449A (ja) * 1985-04-23 1986-10-30 Fanuc Ltd 輪郭ならい方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52102060A (en) * 1976-02-24 1977-08-26 Hitachi Ltd Method and device for detecting shapes of beveling and bead
DE3543906A1 (de) * 1985-12-12 1987-06-25 Hommelwerke Gmbh Einrichtung zur messung der gestalt einer oberflaeche entlang einer abtastlinie
US4768010A (en) * 1987-09-11 1988-08-30 A. B. Chance Company Latch and pivot mechanism for electronic sectionalizer mounting structure

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3481043A (en) * 1967-12-12 1969-12-02 Bendix Corp Gaging machine
US4164694A (en) * 1976-09-25 1979-08-14 Rolls-Royce Limited Means for indicating the profile of a workpiece
US4337580A (en) * 1979-07-14 1982-07-06 Toyo Kogyo Co., Ltd. Method for inspecting gear contact patterns
US4324049A (en) * 1979-11-05 1982-04-13 Hydril Company Gaging system and method
JPS5710411A (en) * 1980-06-23 1982-01-20 Tokyo Seimitsu Co Ltd Measuring device for profile
JPS5756701A (en) * 1980-09-20 1982-04-05 Fujitsu Ltd Method for measuring v groove
FR2498106A1 (fr) * 1981-01-21 1982-07-23 Lemoine Cie Ets Procede de reperage de cotes d'un objet et appareillage pour sa mise en oeuvre
JPS5871047A (ja) * 1981-10-22 1983-04-27 Enshu Ltd 表面倣いにおけるピツクフイ−ト方式
JPS61182502A (ja) * 1985-02-08 1986-08-15 Kawasaki Heavy Ind Ltd 寸法誤差測定方法
JPS61244449A (ja) * 1985-04-23 1986-10-30 Fanuc Ltd 輪郭ならい方法

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5501017A (en) * 1994-02-07 1996-03-26 Kabushiki Kaisha Topcon Method and apparatus for measuring a frame configuration
US20040047938A1 (en) * 1997-04-25 2004-03-11 Hiroyuki Kosuga Mold and method of producing the same
US7123798B2 (en) 2002-03-29 2006-10-17 Ngk Insulators, Ltd. Optical device and method of producing the same
US20040086231A1 (en) * 2002-03-29 2004-05-06 Ngk Insulators, Ltd. Optical device and method of producing the same
US20050041907A1 (en) * 2002-03-29 2005-02-24 Ngk Insulators, Ltd. Optical device and method of manufacturing same
US7174062B2 (en) 2002-03-29 2007-02-06 Ngk Insulators, Ltd. Optical device and method of manufacturing same
US7308174B2 (en) 2002-12-20 2007-12-11 Ngk Insulators, Ltd. Optical device including a filter member for dividing a portion of signal light
US7321703B2 (en) 2002-12-20 2008-01-22 Ngk Insulators, Ltd. Optical device
US20050244106A1 (en) * 2002-12-20 2005-11-03 Ngk Insulators, Ltd. Optical device
US7195402B2 (en) 2002-12-20 2007-03-27 Ngk Insulators, Ltd. Optical device
US20050238279A1 (en) * 2002-12-20 2005-10-27 Ngk Insulators, Ltd. Optical device
US20050238280A1 (en) * 2002-12-20 2005-10-27 Ngk Insulators, Ltd. Optical device
US7287915B2 (en) 2003-01-27 2007-10-30 Ngk Insulators, Ltd. Optical device
US20050259912A1 (en) * 2003-01-27 2005-11-24 Ngk Insulators, Ltd. Optical device
US20060098912A1 (en) * 2003-06-02 2006-05-11 Ngk Insulators, Ltd. Optical device
US7324729B2 (en) 2003-06-02 2008-01-29 Ngk Insulators, Ltd. Optical device
US20040087614A1 (en) * 2003-07-28 2004-05-06 Leslie Baumann Method for treating damaged skin
US20060156566A1 (en) * 2005-01-18 2006-07-20 General Electric Company Methods and system for inspection of fabricated components
US7346999B2 (en) 2005-01-18 2008-03-25 General Electric Company Methods and system for inspection of fabricated components
US20230358690A1 (en) * 2022-05-05 2023-11-09 Intel Corporation Inspection tool and inspection method

Also Published As

Publication number Publication date
DE68908828D1 (de) 1993-10-07
EP0363101A2 (de) 1990-04-11
JPH0679098B2 (ja) 1994-10-05
DE68908828T2 (de) 1994-04-14
JPH0296609A (ja) 1990-04-09
EP0363101A3 (en) 1990-12-19
EP0363101B1 (de) 1993-09-01

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