US4989338A - V-shaped groove inspecting and working method - Google Patents
V-shaped groove inspecting and working method Download PDFInfo
- Publication number
- US4989338A US4989338A US07/413,683 US41368389A US4989338A US 4989338 A US4989338 A US 4989338A US 41368389 A US41368389 A US 41368389A US 4989338 A US4989338 A US 4989338A
- Authority
- US
- United States
- Prior art keywords
- shaped grooves
- shaped
- circle
- groove
- working
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
Definitions
- This invention relates to a method of inspecting and working V-shaped grooves, for example, those as formed in a substrate of an optical fiber connector with high accuracy of the order of submicrons.
- connectors In order to accurately connect optical fibers having a diameter of approximately 100 ⁇ m whose center axes are aligned with each other, connectors have been developed in which the optical fibers are embraced between a pair of chips formed in their surfaces with V-shaped grooves.
- Such chips are made of a hard material such as ceramics, glass ceramics and quenched steel.
- the V-shaped grooves are formed by means of a rotating grinding wheel having a sharpened periphery edge. As any worked errors in the worked V-shaped grooves will directly cause deflections of axes or the optical fibers, the V-shaped grooves must be inspected to ensure high accuracy.
- V-shaped grooves are on the order of 100 ⁇ m depth and 150 ⁇ m width, the measurement of surface roughness determined in ISO is not applicable to the inspection of the grooves. Even if a surface roughness tester is used, significant measured values can not be obtained.
- a master gauge 2 having a diameter equal to those of optical fibers to be used is arranged in a V-shaped groove 1 and a height of the master gauge 2 is measured by means of a stylus 3. A position and accuracy of the optical fiber in an actually used state are presumed with the aid of the measured value.
- a method of inspecting V-shaped grooves comprises the steps of measuring coordinates of more than 20 points per V-shaped groove on surfaces of a substrate formed with the V-shaped grooves by moving a stylus of a contacting type shape tester in directions perpendicular to a longitudinal direction of the V-shaped grooves, removing measured data obtained within distances at least 10 ⁇ m from each edge and the bottom of each of the V-shaped grooves from all data obtained in the previous step so as to obtain effective measuring segments between each edge and the bottom of each of the V-shaped grooves, and calculating shapes formed by straight lines on the basis of the remaining measured data using the effective measuring segments by using only those effective measuring segments which have a length of more than 40 ⁇ m.
- a method of working V-shaped grooves comprises the steps of drawing a circle having a diameter substantially equal to that of an element to be supported in the V-shaped groove so that the circle is inscribed in an interior of a V-shaped groove calculated by the inspecting method as set forth, and working the V-shaped groove of a substrate while feeding back errors in center position of the circle into the working process of the V-shaped groove of the substrate to compensate for depths and pitches of the V-shaped groove being worked.
- FIG. 1 is a front elevation for explaining an inspecting method of the prior art
- FIG. 2 is a front elevation for explaining another inspecting method of the prior art.
- FIG. 3 is a perspective view for explaining the inspecting method according to the invention.
- a stylus 3 is moved on surfaces 4 formed with V-shaped grooves 1 along the dotted lines in a direction perpendicular to a longitudinal direction of the V-shaped grooves 1 to measure coordinates for points on the surfaces 4 more than 20 per groove.
- the stylus 3 is preferably a contacting type shape tester such as Form Talysurf available from Rank Tailor Hobson Co.
- a width (W) and a depth (M) of the V-shaped groove 1 are for example of the order of 150 ⁇ m and 100 ⁇ m, respectively.
- a pitch (L) of the V-shaped grooves 1 is on the order of 250 ⁇ m.
- An opening angle ( ⁇ ) of the V-shaped groove 1 is more than 70°.
- a stylus 3 having a tip end angle of 60° and a tip radius of 2 ⁇ m may be used.
- the coordinates of more than 20 points are measured, while the tip end of the stylus moves on the broken lines.
- measured data within distances more than 10 ⁇ m at edges 5 and groove bottoms 6 of the grooves s as shown in FIG. 3 are removed from the data to provide effective measuring segments in order to avoid unstability in measured data.
- Remaining data of the effective measuring segments having a length of more than 40 ⁇ m are used to calculate shapes formed by straight lines with the aid of a calculating method such as the method of least squares or the like.
- the reason why measured points per V-shaped groove are more than 20 is that errors in measurement may increase if the measured points are less than 20.
- the measured data within the distances more than 10 ⁇ m from the edges and the bottom of the V-shaped grooves are excluded from all the measured data for the reason that the chipping, breaking off, caulking and the like are likely to occur within the portions in working and it is therefore difficult to cause the stylus 3 to follow along the lines exactly.
- only the measured data on the portions of the V-shaped grooves having the effective measuring segments having a length or more than 40 ⁇ m are used for the calculations since high accuracy can only be obtained from such data.
- the V-shaped grooves can be inspected with an accuracy of the order of 0.2 ⁇ m.
- a circle 7 having a diameter D equal to those of bodies (optical fibers) to be supported in the V-shaped grooves is drawn so as to be inscribed in an interior of a V-shaped groove whose coordinates were obtained in the calculation above described. Thereafter, any shifting distance during working of a center 0 of the circle 7 from a set position of the center 0 is detected and a compensation thereof is then fed-back to a working process.
- a relative position between a rotating grinding wheel and a chip is determined according to the fed-back signals, and a depth Z from the surface of the tip to the center 0 of the circle 7 and a pitch L of the V-shaped grooves are thus compensated.
- V-shaped grooves and the like can be accurately detected.
- V-shaped grooves can be worked with a high accuracy of 0.3-0.5 ⁇ m.
- the invention it is possible to accurately inspect with accuracy on the order of submicrons, fine V-shaped grooves which would be impossible to be measured by usual surface roughness testers in view of measuring lengths and cut-off values, and it is also possible to work such grooves with the aid of results of the inspection. Therefore, the method according to the invention can inspect and work with high accuracy fine V-shaped grooves of connector substrates, jigs for welding optical fibers, and jigs for assembling various kinds of sensors, for example, to prove great effectiveness in presumption of optical transmission losses and improvement of positioning accuracy. Accordingly, the invention greatly contributes to development of the inspection and working methods industries by eliminating all the difficulties in the prior art.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Coupling Of Light Guides (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63-248797 | 1988-10-01 | ||
JP63248797A JPH0679098B2 (ja) | 1988-10-01 | 1988-10-01 | V型溝の検査方法及び加工方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
US4989338A true US4989338A (en) | 1991-02-05 |
Family
ID=17183539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US07/413,683 Expired - Lifetime US4989338A (en) | 1988-10-01 | 1989-09-28 | V-shaped groove inspecting and working method |
Country Status (4)
Country | Link |
---|---|
US (1) | US4989338A (de) |
EP (1) | EP0363101B1 (de) |
JP (1) | JPH0679098B2 (de) |
DE (1) | DE68908828T2 (de) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5501017A (en) * | 1994-02-07 | 1996-03-26 | Kabushiki Kaisha Topcon | Method and apparatus for measuring a frame configuration |
US20040047938A1 (en) * | 1997-04-25 | 2004-03-11 | Hiroyuki Kosuga | Mold and method of producing the same |
US20040087614A1 (en) * | 2003-07-28 | 2004-05-06 | Leslie Baumann | Method for treating damaged skin |
US20040086231A1 (en) * | 2002-03-29 | 2004-05-06 | Ngk Insulators, Ltd. | Optical device and method of producing the same |
US20050041907A1 (en) * | 2002-03-29 | 2005-02-24 | Ngk Insulators, Ltd. | Optical device and method of manufacturing same |
US20050238279A1 (en) * | 2002-12-20 | 2005-10-27 | Ngk Insulators, Ltd. | Optical device |
US20050238280A1 (en) * | 2002-12-20 | 2005-10-27 | Ngk Insulators, Ltd. | Optical device |
US20050244106A1 (en) * | 2002-12-20 | 2005-11-03 | Ngk Insulators, Ltd. | Optical device |
US20050259912A1 (en) * | 2003-01-27 | 2005-11-24 | Ngk Insulators, Ltd. | Optical device |
US20060098912A1 (en) * | 2003-06-02 | 2006-05-11 | Ngk Insulators, Ltd. | Optical device |
US20060156566A1 (en) * | 2005-01-18 | 2006-07-20 | General Electric Company | Methods and system for inspection of fabricated components |
US20230358690A1 (en) * | 2022-05-05 | 2023-11-09 | Intel Corporation | Inspection tool and inspection method |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101519554B1 (ko) * | 2013-12-16 | 2015-05-13 | 주식회사 제씨콤 | 원통형 피지지물을 위한 지지 유니트 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3481043A (en) * | 1967-12-12 | 1969-12-02 | Bendix Corp | Gaging machine |
US4164694A (en) * | 1976-09-25 | 1979-08-14 | Rolls-Royce Limited | Means for indicating the profile of a workpiece |
JPS5710411A (en) * | 1980-06-23 | 1982-01-20 | Tokyo Seimitsu Co Ltd | Measuring device for profile |
JPS5756701A (en) * | 1980-09-20 | 1982-04-05 | Fujitsu Ltd | Method for measuring v groove |
US4324049A (en) * | 1979-11-05 | 1982-04-13 | Hydril Company | Gaging system and method |
US4337580A (en) * | 1979-07-14 | 1982-07-06 | Toyo Kogyo Co., Ltd. | Method for inspecting gear contact patterns |
FR2498106A1 (fr) * | 1981-01-21 | 1982-07-23 | Lemoine Cie Ets | Procede de reperage de cotes d'un objet et appareillage pour sa mise en oeuvre |
JPS5871047A (ja) * | 1981-10-22 | 1983-04-27 | Enshu Ltd | 表面倣いにおけるピツクフイ−ト方式 |
JPS61182502A (ja) * | 1985-02-08 | 1986-08-15 | Kawasaki Heavy Ind Ltd | 寸法誤差測定方法 |
JPS61244449A (ja) * | 1985-04-23 | 1986-10-30 | Fanuc Ltd | 輪郭ならい方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52102060A (en) * | 1976-02-24 | 1977-08-26 | Hitachi Ltd | Method and device for detecting shapes of beveling and bead |
DE3543906A1 (de) * | 1985-12-12 | 1987-06-25 | Hommelwerke Gmbh | Einrichtung zur messung der gestalt einer oberflaeche entlang einer abtastlinie |
US4768010A (en) * | 1987-09-11 | 1988-08-30 | A. B. Chance Company | Latch and pivot mechanism for electronic sectionalizer mounting structure |
-
1988
- 1988-10-01 JP JP63248797A patent/JPH0679098B2/ja not_active Expired - Lifetime
-
1989
- 1989-09-28 US US07/413,683 patent/US4989338A/en not_active Expired - Lifetime
- 1989-09-29 DE DE89309985T patent/DE68908828T2/de not_active Expired - Lifetime
- 1989-09-29 EP EP89309985A patent/EP0363101B1/de not_active Expired - Lifetime
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3481043A (en) * | 1967-12-12 | 1969-12-02 | Bendix Corp | Gaging machine |
US4164694A (en) * | 1976-09-25 | 1979-08-14 | Rolls-Royce Limited | Means for indicating the profile of a workpiece |
US4337580A (en) * | 1979-07-14 | 1982-07-06 | Toyo Kogyo Co., Ltd. | Method for inspecting gear contact patterns |
US4324049A (en) * | 1979-11-05 | 1982-04-13 | Hydril Company | Gaging system and method |
JPS5710411A (en) * | 1980-06-23 | 1982-01-20 | Tokyo Seimitsu Co Ltd | Measuring device for profile |
JPS5756701A (en) * | 1980-09-20 | 1982-04-05 | Fujitsu Ltd | Method for measuring v groove |
FR2498106A1 (fr) * | 1981-01-21 | 1982-07-23 | Lemoine Cie Ets | Procede de reperage de cotes d'un objet et appareillage pour sa mise en oeuvre |
JPS5871047A (ja) * | 1981-10-22 | 1983-04-27 | Enshu Ltd | 表面倣いにおけるピツクフイ−ト方式 |
JPS61182502A (ja) * | 1985-02-08 | 1986-08-15 | Kawasaki Heavy Ind Ltd | 寸法誤差測定方法 |
JPS61244449A (ja) * | 1985-04-23 | 1986-10-30 | Fanuc Ltd | 輪郭ならい方法 |
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5501017A (en) * | 1994-02-07 | 1996-03-26 | Kabushiki Kaisha Topcon | Method and apparatus for measuring a frame configuration |
US20040047938A1 (en) * | 1997-04-25 | 2004-03-11 | Hiroyuki Kosuga | Mold and method of producing the same |
US7123798B2 (en) | 2002-03-29 | 2006-10-17 | Ngk Insulators, Ltd. | Optical device and method of producing the same |
US20040086231A1 (en) * | 2002-03-29 | 2004-05-06 | Ngk Insulators, Ltd. | Optical device and method of producing the same |
US20050041907A1 (en) * | 2002-03-29 | 2005-02-24 | Ngk Insulators, Ltd. | Optical device and method of manufacturing same |
US7174062B2 (en) | 2002-03-29 | 2007-02-06 | Ngk Insulators, Ltd. | Optical device and method of manufacturing same |
US7308174B2 (en) | 2002-12-20 | 2007-12-11 | Ngk Insulators, Ltd. | Optical device including a filter member for dividing a portion of signal light |
US7321703B2 (en) | 2002-12-20 | 2008-01-22 | Ngk Insulators, Ltd. | Optical device |
US20050244106A1 (en) * | 2002-12-20 | 2005-11-03 | Ngk Insulators, Ltd. | Optical device |
US7195402B2 (en) | 2002-12-20 | 2007-03-27 | Ngk Insulators, Ltd. | Optical device |
US20050238279A1 (en) * | 2002-12-20 | 2005-10-27 | Ngk Insulators, Ltd. | Optical device |
US20050238280A1 (en) * | 2002-12-20 | 2005-10-27 | Ngk Insulators, Ltd. | Optical device |
US7287915B2 (en) | 2003-01-27 | 2007-10-30 | Ngk Insulators, Ltd. | Optical device |
US20050259912A1 (en) * | 2003-01-27 | 2005-11-24 | Ngk Insulators, Ltd. | Optical device |
US20060098912A1 (en) * | 2003-06-02 | 2006-05-11 | Ngk Insulators, Ltd. | Optical device |
US7324729B2 (en) | 2003-06-02 | 2008-01-29 | Ngk Insulators, Ltd. | Optical device |
US20040087614A1 (en) * | 2003-07-28 | 2004-05-06 | Leslie Baumann | Method for treating damaged skin |
US20060156566A1 (en) * | 2005-01-18 | 2006-07-20 | General Electric Company | Methods and system for inspection of fabricated components |
US7346999B2 (en) | 2005-01-18 | 2008-03-25 | General Electric Company | Methods and system for inspection of fabricated components |
US20230358690A1 (en) * | 2022-05-05 | 2023-11-09 | Intel Corporation | Inspection tool and inspection method |
Also Published As
Publication number | Publication date |
---|---|
DE68908828D1 (de) | 1993-10-07 |
EP0363101A2 (de) | 1990-04-11 |
JPH0679098B2 (ja) | 1994-10-05 |
DE68908828T2 (de) | 1994-04-14 |
JPH0296609A (ja) | 1990-04-09 |
EP0363101A3 (en) | 1990-12-19 |
EP0363101B1 (de) | 1993-09-01 |
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Legal Events
Date | Code | Title | Description |
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AS | Assignment |
Owner name: NGK INSULATORS, LTD., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:TSUJI, HIROYUKI;NOMOTO, SUSUMU;OTA, TAKASHI;REEL/FRAME:005174/0184 Effective date: 19890929 |
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