JPS5710411A - Measuring device for profile - Google Patents
Measuring device for profileInfo
- Publication number
- JPS5710411A JPS5710411A JP8498780A JP8498780A JPS5710411A JP S5710411 A JPS5710411 A JP S5710411A JP 8498780 A JP8498780 A JP 8498780A JP 8498780 A JP8498780 A JP 8498780A JP S5710411 A JPS5710411 A JP S5710411A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- fulcrum
- measured
- profile
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
PURPOSE:To enable the measurement of the profile of even a long-sized object to be measured, by a method wherein a device is constituted such that the point of a probe of a profile measuring device is positioned below or above a fulcrum of a lever. CONSTITUTION:The device is constituted such that the point of a probe 25 is positioned below a fulcrum 24, a straight line, connecting together the point of the probe 25 and the fulcrum 24, is not in parallel to a reference surface 22, and as a result, a Y direction detector 21 is prevented from colliding with an object 20 to be measured. The probe 25 moves upward and downward in correspondence to the configuration of the object 20 to be measured. The X direction error amount is added to or substracted from the output of the X direction detector to input the result to an X direction of an X-Y recorder, and this enables to draw an enlarged recording figure wherein an X direction error is corrected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8498780A JPS5710411A (en) | 1980-06-23 | 1980-06-23 | Measuring device for profile |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8498780A JPS5710411A (en) | 1980-06-23 | 1980-06-23 | Measuring device for profile |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5710411A true JPS5710411A (en) | 1982-01-20 |
JPS6359444B2 JPS6359444B2 (en) | 1988-11-18 |
Family
ID=13845967
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8498780A Granted JPS5710411A (en) | 1980-06-23 | 1980-06-23 | Measuring device for profile |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5710411A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5930003A (en) * | 1982-08-12 | 1984-02-17 | Matsutani Seisakusho:Kk | Method and apparatus for measuring configuration of cutting tool |
JPS60154809U (en) * | 1984-03-24 | 1985-10-15 | 三菱重工業株式会社 | Pulverized material layer thickness measuring device in roller mill |
EP0363101A2 (en) * | 1988-10-01 | 1990-04-11 | Ngk Insulators, Ltd. | V-shaped groove inspecting and working method |
US6516528B1 (en) * | 2000-10-24 | 2003-02-11 | Advanced Micro Devices, Inc. | System and method to determine line edge roughness and/or linewidth |
JP2016145771A (en) * | 2015-02-09 | 2016-08-12 | 株式会社ミツトヨ | Test indicator |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5132351A (en) * | 1974-09-11 | 1976-03-18 | Mitsutoyo Seisakusho | SETSUSHOKU GATAKEIJOSOKUTEIKI |
JPS5180254A (en) * | 1975-01-07 | 1976-07-13 | Mitsutoyo Seisakusho | Keijosokuteikino enkogosahoseihoshiki |
JPS51105848A (en) * | 1975-03-14 | 1976-09-20 | Tokyo Seimitsu Co Ltd | KEIJOSOKUTEIHOHO |
JPS5249859A (en) * | 1975-10-17 | 1977-04-21 | Kosaka Kenkyusho:Kk | Device for measuring shape using electrical correction |
JPS5421271A (en) * | 1977-07-19 | 1979-02-17 | Mitsubishi Electric Corp | Pattern forming method |
JPS5426387A (en) * | 1977-07-29 | 1979-02-27 | Roi Oosuchin Robaato | Apparatus for producing carbonated water |
-
1980
- 1980-06-23 JP JP8498780A patent/JPS5710411A/en active Granted
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5132351A (en) * | 1974-09-11 | 1976-03-18 | Mitsutoyo Seisakusho | SETSUSHOKU GATAKEIJOSOKUTEIKI |
JPS5180254A (en) * | 1975-01-07 | 1976-07-13 | Mitsutoyo Seisakusho | Keijosokuteikino enkogosahoseihoshiki |
JPS51105848A (en) * | 1975-03-14 | 1976-09-20 | Tokyo Seimitsu Co Ltd | KEIJOSOKUTEIHOHO |
JPS5249859A (en) * | 1975-10-17 | 1977-04-21 | Kosaka Kenkyusho:Kk | Device for measuring shape using electrical correction |
JPS5421271A (en) * | 1977-07-19 | 1979-02-17 | Mitsubishi Electric Corp | Pattern forming method |
JPS5426387A (en) * | 1977-07-29 | 1979-02-27 | Roi Oosuchin Robaato | Apparatus for producing carbonated water |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5930003A (en) * | 1982-08-12 | 1984-02-17 | Matsutani Seisakusho:Kk | Method and apparatus for measuring configuration of cutting tool |
JPH0553361B2 (en) * | 1982-08-12 | 1993-08-09 | Matsutani Seisakusho | |
JPS60154809U (en) * | 1984-03-24 | 1985-10-15 | 三菱重工業株式会社 | Pulverized material layer thickness measuring device in roller mill |
EP0363101A2 (en) * | 1988-10-01 | 1990-04-11 | Ngk Insulators, Ltd. | V-shaped groove inspecting and working method |
US4989338A (en) * | 1988-10-01 | 1991-02-05 | Ngk Insulators, Ltd. | V-shaped groove inspecting and working method |
US6516528B1 (en) * | 2000-10-24 | 2003-02-11 | Advanced Micro Devices, Inc. | System and method to determine line edge roughness and/or linewidth |
JP2016145771A (en) * | 2015-02-09 | 2016-08-12 | 株式会社ミツトヨ | Test indicator |
Also Published As
Publication number | Publication date |
---|---|
JPS6359444B2 (en) | 1988-11-18 |
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