US4613971A - Transversely excited gas laser - Google Patents

Transversely excited gas laser Download PDF

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Publication number
US4613971A
US4613971A US06/599,179 US59917984A US4613971A US 4613971 A US4613971 A US 4613971A US 59917984 A US59917984 A US 59917984A US 4613971 A US4613971 A US 4613971A
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main
electrodes
auxiliary
gas laser
auxiliary electrodes
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Gerhard Brumme
Ludger Grage
Hinrich Heynisch
Erwin Hubner
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Siemens AG
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Siemens AG
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
    • H01S3/09713—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation
    • H01S3/09716—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited with auxiliary ionisation, e.g. double discharge excitation by ionising radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0384—Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor

Definitions

  • the invention relates to a transversely excited gas laser, especially a TEA laser, including an elongated gas-filled discharge chamber, having two optical elements which are located at the two end faces of the chamber and lie along a common axis or optical axis, two electrodes, such as a main cathode and a main anode, which are disposed in the interior of the chamber and extended along the optical axis in such a manner that the axis extends in the space or main discharge space between the main cathode and the main anode, at least two further electrodes or auxiliary electrodes, extended in vicinity of one of the two open sides of the main discharge space parallel to the optical axis, each auxiliary electrode being formed of a conductor surrounded by a dielectric shell maintained at a breakdown distance from all of the other electrodes, a driving unit through which the main cathode and the main anode and connected to different potentials in such a way that an electric discharge or main discharge takes place between them, during the operation of the gas laser, and
  • Such a laser is known from German Published, Non-Prosecuted Application DE-OS No. 30 35 730.
  • TE Transversely Excited
  • lasers attain their full output only if a large-volume homogeneous discharge occurs between the two electrodes which extend parallel to the optical axis. Accordingly, care must be taken above all to ensure that field concentrations cannot develop in the discharge space and to ensure that a sufficiently large amount of free electrons are already present prior to every discharge.
  • Two elongated, solid, main electrodes are curved forward toward their respective counter electrodes and are each provided at their outer flanks or sides with a rod-shaped dielectrically enclosed auxiliary electrode.
  • the apparatus is constructed in such a way that during the operation of the laser, a corona discharge first takes place between the main electrodes and the auxiliary electrodes associated with them. This discharge generates UV-light which in turn ionizes the gas filling and thereby initiates the main discharge.
  • Such an electrode configuration can be constructed in a relatively simple manner, but requires corresponding electrodes to be exactly matched as to shape and position. It has furthermore been found that the ionizing effect is not always sufficient to reliably preclude an arc discharge even at increased gas pressures and relatively low voltages.
  • the auxiliary electrode could be placed closer to the apex of the curved main electrode surface, as discussed in U.S. Pat. No. 4,240,044 and in addition, it could be placed into a tray-like depression in the main electrode.
  • narrow limits apply to these attempts since the conditions for the main discharge must not be substantially worsened.
  • auxiliary electrodes in the form of plates which terminate the two open sides of the space defined by the main electrodes (the main discharge space) and are covered on the inside thereof by a further insulating plate, as seen in the publication: Optics Communications, vol. 44 (1982), page 125.
  • a corona discharge covers the entire plate surface and thus forms a large-area UV source.
  • the optimum plate thickness depends upon and is sensitive to the geometry of the main electrodes and, in addition, depends upon the kind and pressure of the gas.
  • a transversely excited gas laser especially a TEA laser, comprising:
  • main cathode electrode and a main anode electrode extended along the optical axis in the discharge chamber defining a main discharge space between the main cathode and main anode electrodes through which the optical axis extends, the main electrodes bordering or closing off two sides of the main discharge space leaving two other sides open;
  • each of the auxiliary electrodes including a conductor and a dielectric shell or jacket surrounding the conductor, each of the auxiliary electrodes being spaced from all of the other electrodes by a set breakdown distance;
  • a driving or triggering unit connected to the electrodes, the driving unit supplying different potentials to the main cathode and main anode electrodes producing a main electric discharge therebetween during operation of the gas laser, and the driving unit supplying different potentials to the pairs of auxiliary electrodes causing a corona discharge preionizing the gas in the main discharge space to take place therebetween across the given distance during operation of the gas laser, i.e. the auxiliary electrodes approach each other to such a degree and the potentials supplied thereto are different to such a degree as to cause the corona discharge.
  • the auxiliary electrode part of a laser according to the invention operates largely autonomously because first of all the corona discharge does not burn toward one of the main electrodes, but instead takes place directly between the auxiliary electrodes.
  • the pairs of auxiliary electrodes can be placed in such a way that vigorous ionization takes place in all important regions of the main discharge chamber and the subsequent main discharge can take place homogeneously. This is particularly true if several auxiliary electrode pairs are provided on both sides of the optical axis, and more specifically outside the main discharge space. This is because in this case, the UV light is generated in extensive, advantageously positioned areas and, in addition, the electric field at the edges of the main discharge path is influenced positively.
  • the auxiliary electrodes which are located on one respective side of the main discharge space, can be combined structurally in a single easy-to-assemble part and may, if required, be integrated without a problem into the wall of the vessel as well.
  • the circuitry required may also be kept to a minimum:
  • the power supply for the main and auxiliary electrodes comes from one source and it is generally sufficient to connect the auxiliary electrodes in parallel with the main electrodes.
  • the energy content of the corona discharge is determined in this case solely by the structure of the pairs of auxiliary electrodes.
  • a sealed-off laser constructed in accordance with the invention has a relatively constant output power and in addition, permits a high pulse repetition frequency since the discharge space can communicate with the ballast space over its entire length and over a large area and thus ensures a rapid regeneration of the gas of the discharge path, which is an essential condition for short pulse spacings.
  • the present gas laser is particularly recommended for laser distance measuring equipment for mobile use.
  • two optical elements each being disposed at a respective end of the discharge chamber along a common optical axis.
  • a first two of the auxiliary electrodes are electrically connected to one of the main electrodes and a second two of the auxiliary electrodes are electrically connected to the other of the main electrodes.
  • one of the auxiliary electrodes of each pair is electrically connected to one of the main electrodes and the other of the auxiliary electrodes of each pair is electrically connected to the other of the main electrodes.
  • one of the auxiliary electrodes of each pair is disposed relatively closer to or facing toward the main cathode electrode and is connected to the main anode electrode and the other of the auxiliary electrodes of each pair is disposed relatively farther from or facing away from the main cathode electrode and is connected to the main cathode electrode.
  • the one auxiliary electrodes are sufficiently close to the main cathode electrode to produce a corona discharge therebetween, and the other auxiliary electrodes are sufficiently close to the main anode electrode to produce a corona discharge therebetween.
  • the auxiliary electrodes include at least one auxiliary anode and at least one auxiliary cathode disposed in vicinity of each respective open side.
  • the auxiliary electrodes are disposed outside of the main discharge space.
  • the dielectric shells of the auxiliary electrodes disposed on at least one of the open sides are combined to form a common dielectric shell.
  • the common dielectric shell has a concave profile facing the main discharge space.
  • the discharge chamber has a side wall and the auxiliary electrodes are integrated into the side wall.
  • auxiliary electrodes are disposed in vicinity of each respective open side, and the auxiliary electrodes are alternating auxiliary cathode and auxiliary anode electrodes.
  • each of the auxiliary electrodes are electrically connected directly to a respective one of the main electrodes.
  • another discharge chamber forming a folded or doubled over gas laser including another main cathode electrode and another main anode electrode disposed adjacent the respective first-mentioned main cathode and main anode electrodes, another main discharge space, and at least one other pair of auxiliary electrodes disposed between the adjacent main electrodes for preionizing the gas in both of the main discharge spaces.
  • the main electrodes are mirror-symmetrical to each other with respect to a first plane
  • the auxiliary electrodes are mirror-symmetrical to each other with respect to a second plane perpendicular to the first plane.
  • FIG. 1 is a diagrammatic, cross-sectional view of a first embodiment of the invention
  • FIG. 2 is a schematic circuit diagram of the operating circuit of the embodiment of FIG. 1;
  • FIG. 3 is a view similar to FIG. 1 of another embodiment of the invention.
  • FIG. 4 is a cross-sectional view of a third embodiment of the invention.
  • FIG. 1 there is seen a pulsed TE gas laser which could be used, for instance, in distance measurement.
  • the gas laser contains a cylindrical discharge vessel or chamber 1 which is terminated at both ends thereof by non-illustrated resonator mirrors. The two mirrors define the optical axis of the laser which is symbolized in the figure by a point 2. Electrodes in the form of a main cathode 3 and a main anode 4 are disposed above and below the axis 2. The electrodes occupy almost the entire length of the laser tube and are extended parallel to each other with a predetermined spacing therebetween.
  • Electrodes 5, 6 which are brought through the vessel wall, connect the electrodes to a circuit which is not shown in FIG. 1.
  • Auxiliary cathodes 7, 8 and auxiliary anodes 9, 10 are located to the left and to the right of the axis 2.
  • Each of these auxiliary electrodes is in the form of a hollow dielectric cylinder 11 which is extended parallel to the axis 2, and an electric conductor 12 lining the inner wall of the cylinder.
  • the cavity enclosed by the discharge vessel 1 is filled with a laser gas mixture.
  • the vessel 1 is formed of A1 2 O 3 , it has a length of about 25 cm and an inside diameter of about 10 cm.
  • the two main electrodes are formed of CrNi steel.
  • the auxiliary electrodes 7, 8, 9 and 10 may be formed of A1 2 O 3 sections which are metallized on the inside thereof.
  • the gas components for a CO 2 gas laser may be CO 2 , N 2 and He, for instance, mixed in a ratio of 15:15:70, with a total pressure of 1000 mbar.
  • FIG. 2 illustrates the structure of an operating circuit including a driving or triggering unit for the laser, in a particularly simple manner.
  • a capacitor 13 is connected to the main electrodes 3 and 4 through a triggerable spark gap 15.
  • the auxiliary electrodes 7-10 are connected in parallel with the main electrodes 3, 4.
  • a resistor 14 serves as a potential connection.
  • FIGS. 3 and 4 show modified embodiments of the invention.
  • the laser of FIG. 3 differs from the embodiment of FIG. 1 primarily by the features that two auxiliary electrode pairs are disposed on each side of the optical axis; that the two pairs each have a common dielectric envelope 16, 17; and that the vessel 1 and the dielectric envelopes 16, 17 together form one shaped piece 19.
  • Adjacent auxiliary electrodes are alternatingly in contact with the main cathode and the main anode, respectively. More specifically, the two uppermost conductors 12 are led to the lower main electrode 4 and the two lowermost conductors 12 are led to the upper main electrode 3.
  • the laser of FIG. 4 has an optical axis 2', 2" which is doubled back or folded one time.
  • two pairs of main electrodes 3', 4' and 3", 4" are disposed side by side and separated from each other by a partition defining two discharge chambers.
  • Two pairs of auxiliary electrodes are integrated into the partition as well as into each of the two opposite outer walls of the discharge chambers.
  • the auxiliary electrodes of the partition generate corona discharges at both wall sides.
  • the invention is not limited to the embodiments shown. Since the object of the invention is primarily to bring about usable corona discharges in the auxiliary electrode elements, considerable latitude remains above all, with respect to the mechanical construction. Thus it is possible, for instance, to provide other profiles for the main electrodes, to make the auxiliary electrodes of solid material, to use an electrically conductive material for the discharge vessel, or to bring asymmetry to the apparatus, without difficulty. Apart from this, one of ordinary skill in the art may expand the discharge switching circuit by using simple means such as an L-C member, in such a way that the main discharge is delayed in a defined manner relative to the preceding corona discharge. Otherwise, other types of lasers such as Excimer lasers, can also be considered.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Lasers (AREA)
US06/599,179 1983-04-15 1984-04-11 Transversely excited gas laser Expired - Fee Related US4613971A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19833313811 DE3313811A1 (de) 1983-04-15 1983-04-15 Transversal angeregter gaslaser
DE3313811 1983-04-15

Publications (1)

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US4613971A true US4613971A (en) 1986-09-23

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US (1) US4613971A (enrdf_load_stackoverflow)
EP (1) EP0122597B1 (enrdf_load_stackoverflow)
JP (1) JPS59200480A (enrdf_load_stackoverflow)
CA (1) CA1231424A (enrdf_load_stackoverflow)
DE (2) DE3313811A1 (enrdf_load_stackoverflow)
NO (1) NO169146C (enrdf_load_stackoverflow)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4703490A (en) * 1984-10-15 1987-10-27 Siemens Aktiengesellschaft Transversely excited gas laser and method for the operation thereof
US4847853A (en) * 1988-11-17 1989-07-11 United Technologies Corporation CO2 tea laser having isolated preionization compartments
US4905250A (en) * 1987-11-13 1990-02-27 The European Atomic Energy Community Pre-ionizing electrode arrangement for a gas discharge laser
US5067135A (en) * 1989-05-06 1991-11-19 Haraeus Holding Gmbh Gas laser apparatus
US5090021A (en) * 1989-05-17 1992-02-18 Mitsubishi Denki K.K. Discharge exciting pulse laser device
US5293403A (en) * 1992-09-30 1994-03-08 The Unites States Of America As Represented By The Secretary Of The Navy Pulse discharge laser with passive arc protection
US5426661A (en) * 1993-11-09 1995-06-20 Hughes Aircraft Company Pulsed laser discharge stabilization
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6618422B2 (en) 1999-02-10 2003-09-09 Lambda Physik Ag Preionization arrangement for a gas laser
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6763048B2 (en) * 2000-06-19 2004-07-13 Lambda Physik Ag Line narrowing of molecular fluorine laser emission
US20070091972A1 (en) * 2005-09-27 2007-04-26 Cymer, Inc. Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
US20080279247A1 (en) * 2005-05-23 2008-11-13 Ltb-Lasertechnik Berlin Gmbh Electrically Excited Gas Discharge Laser for Generating High-Repetition Frequency Light Pulses and Method for the Production Thereof

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3546210A1 (de) * 1985-12-27 1987-07-02 Gugg Anton Dipl Ing Fh Laserentfernungsmesser
DE3644004C2 (de) * 1986-06-23 1995-08-03 Lambda Physik Gmbh Schaltung für die Vorionisierung und Hauptentladung eines gepulsten Gaslasers
DE3732135A1 (de) * 1987-09-24 1989-04-13 Deutsche Forsch Luft Raumfahrt Entladungskanal fuer hochleistungslaser

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4240044A (en) * 1979-07-16 1980-12-16 Gte Products Corporation Pulsed laser electrode assembly
EP0048407A1 (de) * 1980-09-22 1982-03-31 Kraftwerk Union Aktiengesellschaft Hochenergielaser des TEA-Typs mit laser-achsparallel angeordneten Vorionisierungsstäben
GB2098389A (en) * 1981-05-13 1982-11-17 Battelle Institut E V Apparatus for producing laser radiation
GB2098791A (en) * 1981-04-23 1982-11-24 United Technologies Corp Sealed-off CO2 laser
US4380079A (en) * 1980-09-12 1983-04-12 Northrop Corp. Gas laser preionization device
US4503542A (en) * 1981-07-03 1985-03-05 Kraftwerk Union Aktiengesellschaft High-energy laser of the TE-type

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE757366A (fr) * 1969-10-21 1971-04-13 Comp Generale Electricite Generateur laser
US4088965A (en) * 1976-07-12 1978-05-09 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Charge transfer reaction laser with preionization means
JPS5983064U (ja) * 1982-11-26 1984-06-05 日本電気株式会社 紫外線予備電離ガスレ−ザ装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4240044A (en) * 1979-07-16 1980-12-16 Gte Products Corporation Pulsed laser electrode assembly
US4380079A (en) * 1980-09-12 1983-04-12 Northrop Corp. Gas laser preionization device
EP0048407A1 (de) * 1980-09-22 1982-03-31 Kraftwerk Union Aktiengesellschaft Hochenergielaser des TEA-Typs mit laser-achsparallel angeordneten Vorionisierungsstäben
GB2098791A (en) * 1981-04-23 1982-11-24 United Technologies Corp Sealed-off CO2 laser
GB2098389A (en) * 1981-05-13 1982-11-17 Battelle Institut E V Apparatus for producing laser radiation
US4503542A (en) * 1981-07-03 1985-03-05 Kraftwerk Union Aktiengesellschaft High-energy laser of the TE-type

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Publication: Optics Communication, vol. 44 (1982), p. 125, Author: Gerald J. Ernst. *

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4703490A (en) * 1984-10-15 1987-10-27 Siemens Aktiengesellschaft Transversely excited gas laser and method for the operation thereof
US4905250A (en) * 1987-11-13 1990-02-27 The European Atomic Energy Community Pre-ionizing electrode arrangement for a gas discharge laser
US4847853A (en) * 1988-11-17 1989-07-11 United Technologies Corporation CO2 tea laser having isolated preionization compartments
US5067135A (en) * 1989-05-06 1991-11-19 Haraeus Holding Gmbh Gas laser apparatus
US5090021A (en) * 1989-05-17 1992-02-18 Mitsubishi Denki K.K. Discharge exciting pulse laser device
US5293403A (en) * 1992-09-30 1994-03-08 The Unites States Of America As Represented By The Secretary Of The Navy Pulse discharge laser with passive arc protection
US5426661A (en) * 1993-11-09 1995-06-20 Hughes Aircraft Company Pulsed laser discharge stabilization
US6618422B2 (en) 1999-02-10 2003-09-09 Lambda Physik Ag Preionization arrangement for a gas laser
US6757315B1 (en) 1999-02-10 2004-06-29 Lambda Physik Ag Corona preionization assembly for a gas laser
US6456643B1 (en) 1999-03-31 2002-09-24 Lambda Physik Ag Surface preionization for gas lasers
US6763048B2 (en) * 2000-06-19 2004-07-13 Lambda Physik Ag Line narrowing of molecular fluorine laser emission
US6671302B2 (en) 2000-08-11 2003-12-30 Lambda Physik Ag Device for self-initiated UV pre-ionization of a repetitively pulsed gas laser
US20080279247A1 (en) * 2005-05-23 2008-11-13 Ltb-Lasertechnik Berlin Gmbh Electrically Excited Gas Discharge Laser for Generating High-Repetition Frequency Light Pulses and Method for the Production Thereof
US7672354B2 (en) 2005-05-23 2010-03-02 Ltb-Lasertechnik Berlin Gmbh Electrically excited gas discharge laser for generating high-repetition frequency light pulses and method for the production thereof
US20070091972A1 (en) * 2005-09-27 2007-04-26 Cymer, Inc. Thermal-expansion tolerant, preionizer electrode for a gas discharge laser
US7542502B2 (en) * 2005-09-27 2009-06-02 Cymer, Inc. Thermal-expansion tolerant, preionizer electrode for a gas discharge laser

Also Published As

Publication number Publication date
JPS59200480A (ja) 1984-11-13
CA1231424A (en) 1988-01-12
EP0122597A3 (en) 1986-04-16
NO169146B (no) 1992-02-03
DE3484112D1 (de) 1991-03-28
NO169146C (no) 1992-05-13
EP0122597B1 (de) 1991-02-20
DE3313811A1 (de) 1984-10-18
NO841491L (no) 1984-10-16
EP0122597A2 (de) 1984-10-24
JPH0460356B2 (enrdf_load_stackoverflow) 1992-09-25

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