US4593320A

US4593320A - Two-dimensional solid-state image pickup device

Info

Publication number: US4593320A
Application number: US06/714,677
Authority: US
Inventors: Jun-ichi Nishizawa; Takashige Tamamushi
Original assignee: Individual
Current assignee: Individual
Priority date: 1984-03-23
Filing date: 1985-03-21
Publication date: 1986-06-03
Anticipated expiration: 2005-03-21
Also published as: JPS60199277A; JPH0412675B2

Abstract

A two-dimensional solid-state image pickup device wherein, in order to make it possible to have a high light detecting sensitivity even to feeble lights and to stably and uniformly detect picture images, picture elements each formed of a static induction transistor having an optical gain of 10⁶ to 10⁸ and able to detect even such feeble lights as of about 10^-4 μW/cm² and a gate capacitor are arranged in a matrix to be a gate accumulating system capable of two-dimensional reading out, the source regions of the respective static induction transistors are connected to common source lines, the respective source lines are connected to the ground through parallelly connected source line selecting transistors and capacitors and the gates of the respective source line selecting transistors are connected respectively to vertical address lines so that, simultaneously with the selection of the vertical address lines, the source lines may be connected to the ground.

Description

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to a two-dimensional solid-state image pickup device of a gate accumulation system using static induction transistors.

2. Description of the Prior Art

Regarding the formation and signal detecting method of a conventional solid-state image pickup device by a gate accumulation system using static induction transistors (which shall be called SIT's hereinafter), various systems have been already suggested by the present inventors and are disclosed in Japanese patent applications Nos. 204656/1981, 217758/1982, 21688/1983 and 26932/1983. Further, the experiment results are published in "SIT Image Converter" by J. Nishizawa, T. Tamamushi and S. Suzuki in JARECT (Japan Annual Review in Electronics, Computers and Telecommunications) in Semiconductor Technologies Vol. 8 (October 1983) edited by J. Nishizawa (OHM & North Holland).

Further, a reading system utilizing a capacitor of a signal reading line in an X-Y address system as different from the formation and signal reading method of the conventional SIT image sensor have been already suggested by the present inventors and are discosed in Japanese patent application No. 208116/1983. Its formation and signal reading system shall be explained in the following with reference to FIGS. 1A to 2B.

In FIG. 1A, one picture elements C_ij is formed of a normally off SIT and gate capacitor C_G, an address gate line GL_j is connected to a gate 31 of the SIT through the gate capacitor C_G and a signal reading line SL_i is connected to a drain 30. Further, two switching transistors Q_P and Q_S are connected to the signal reading line SL_i, a video bias voltage V_DD is impressed onto a drain terminal (output terminal) 10 of the switching transistor Q_S through a load resistance R_L and a constant bias voltage V_DD ' is impressed also onto a drain terminal 20 of the switching transistor Q_P. Here, the parasitic capacitance of the signal reading line SL_i is indicated by C_SL. The information of the picture element C_ij, by a light input hν is accumulated in the gate of the SIT. Then, the reading operation shall be explained. As shown in FIG. 1B, in the case of reading out the light information of the picture element C_ij, first the switching transistor Q_P is made conductive by precharging pulses φ_P to charge the line SL_i with a predetermined voltage V_DD '-V_thp where V_thp represents a threshold voltage of the switching transistor Q_P. Then, when address gate pulses φ_Gj are impressed onto the address gate line GL_j and gate pulses are impressed on the gate part 31 of the SIT through the gate capacitor C_G of the picture element C_ij to make the SIT conductive, the impedance between the drain 30 and source 32 of the SIT will lower and therefore the voltage V_DD '-V_thp with which the capacitor C_SL has been charged will be discharged. At this time, the gate potential by a carrier as the light information accumulated in the gate 31 of the SIT will be raised by the address gate pulses φ_Gj added from outside and therefore the stronger the light intensity, the larger the discharge current following between the drain 30 and source 32 of the SIT.

If I_L represents an incident light current and I_S represents a reverse direction saturated current of a pin diode around the gate 31 of the SIT, a potential rise ΔV_G of the gate 31 of the SIT by a carrier generated by the light input hν will be given substantially by the following formula where k represents Boltzmann's constant, T represents an absolute temperature and q represents a unit charge amount: ##EQU1##

On the other hand, the relation between the gate voltage V_G and drain current I_D of the normally off SIT is an exponential function and is represented by ##EQU2## where η represents the rate of the gate voltage of SIT covering the intrinsic gate point.

On the other hand, in case the light intensity is weak, the light current I_L by the light input hμ will be proportional to the incident intensity P (μW/cm²). Therefore, in the above mentioned reading operation, the discharge current I_DC flowing between the drain 30 and source 32 of the SIT is represented by ##EQU3##

In the case of the normally off SIT, η may be η≈1. Therefore, the discharge current I_DC of the capacitor C_SL charged with V_DD '-V_thp is found to be proportional to the light current I_L or incident light intensity P (μW/cm²).

In FIG. 1B, V_SLi represents a voltage waveform at each end of the capacitor C_SL or a voltage variation of the signal reading line SL_i and varies as in the dotted line a, one-point chain line b or solid line c with the impression of the address gate pulse φ_Gj to be on a voltage level lower than the voltage represented by V_DD '-V_thp. The dotted line a corresponds to the case of a dark current state, the one-point chain line b corresponds to the case of an ordinary light intensity and the solid line c corresponds to the case of a saturated exposure state. This time constant of the discharge is determined substantially by the product of the on-resistance value R_on(SIT) between the drain and source of the SIT and the capacitance of the capacitor C_SL in the circuit in FIG. 1A. It is a desirable condition that, when a dark current is flowing, even if the address gate pulses φ_Gj are impressed as shown by the dotted line in FIG. 1B, the SIT will not be conductive, because, when a dark current is flowing, if the discharge of the capacitor C_SL occurs with only the impression of the address gate pulses φ_Gj, a dark current signal will appear on the output waveform and the S/N of the ordinary light signal will deteriorate.

When the capacitor C_SL is discharged by the impression of the address gate pulses φ_Gj as described above and is then recharged with the discharge amount, a recharge signal will appear at each end of the external resistance R_L.

When the transistor Q_S is made conductive by the impression of the reading address pulses φ_Si onto the gate of the switching transistor Q_S, the capacitor C_SL will be charged with a voltage value represented by V_DD -V_ths where V_ths represents a threshold voltage of the switching transistor Q_S. In this case, V_DD -V_ths is usually selected to be

V.sub.DD -V.sub.ths =V.sub.DD '-V.sub.thp                  ( 4).

In FIG. 1B, the waveform shown by V_SLi shows how the capacitor C_SL is recharged by the impression of the reading address pulses φ_Si. Simultaneously with this recharging, at each end of the load resistance R_L, a signal represented by V_out (enlarged waveform will be detected). The dotted line a corresponds to a dark current state, the one-point chain line b corresponds to the case of an ordinary light intensity and the solid line c corresponds to a saturated exposure state.

As evident from the above described explanation, in the conventional signal reading method, the parasitic capacitor C_SL of the signal reading line SL_i is utilized and the information of the inner picture element C_ij is taken out at the load resistance R_L after the process of charging-up the capacitor C_SL by the precharging transistor Q_P, the discharge proportional to the light information of the capacitor C_SL by the address gate pulses φ_Gj and the recharge of the capacitor C_SL through the switching transistor (transistor for selecting the signal reading line SL_i) Q_S. It is a feature in the sense of obtaining a stable and uniform signal that the gate pulses φ_Gj will be addressed when the line SL_i is charged with a predetermined potential always in reading out through the switching transistor Q_P and a constant voltage is set to be applied between the drain 30 and source 32 of the SIT. The discharge amount of the capacitor C_SL can be very easily read out through the switching transistor Q_S. In the case of the above described operation made with reference to FIGS. 1A and 1B, when the load resistance is represented by R_L, the on-resistance of the switching transistor Q_S is represented by R_ONS and the parasitic capacitance of the signal reading line SL_i is represented by C_SL, the time constant of the output waveform V_out at the output terminal 10 will be determined by (R_L +R_ONS).C_SL.

Now, the formation example and operating waveform example of a conventional two-dimensional solid-state image pickup device based on the operation principle explained with reference to FIGS. 1A and 1B shall be explained with reference to FIGS. 2A and 2B.

Each of the picture elements C_ij (C₁₁, C₁₂, . . . , C_1m ; C₂₁ , . . . C_2mj . . . ) arranged in the form of a matrix of m×n is formed of an SIT and gate capacitor C_G, the gates of the respective SIT's are connected to address gate lines GL₁, GL₂, GL₃, . . . GL_m respectively through the gate capacitors C_G and the drains of the respective SIT's are connected respectively to signal reading lines SL₁, SL₂, SL₃, . . . , SL_n. The sources of the respective SIT's are of earthed potentials common to all the picture elements. Further, a precharging transistor Q_P and two switching transistors Q_T and Q_S are connected on respective signal reading lines SL_i, the gate line 54 of the precharging transistors Q_P is made to be connected in common at the gates of the precharging transistors Q_P on the respective signal reading lines SL_i and the gate line 53 of the switching transistors Q_T is also made to be connected in common at the gates of the respective switching transistor Q_T on the respective signal reading lines SL_i. Signal reading line selecting pulse trains φ_S1, φ_S2, φ_S3, . . . φ_Sm from a horizontal shift register 50 are so formed to be impressed onto the gates of the respective switching transistors Q_S, the drain terminals of the respective switching transistors Q_S are connected in common to a video output line 51 and one load resistance R_L and video current source V_DD are connected on this video output line 51. A signal output is obtained from each end of the load resistance R_L. Address gate pulses φ_G1, φ_G2, φ_G3, . . . , φ_Gn are made to be impressed onto the respective address gate lines GL₁, GL₂, GL₃, . . . , GL_m from a vertical shift register 52. More particularly, the drain terminals of the respective precharging transistors Q_P are connected in common to a current source line 55 to which a precharging voltage V_DD, is given.

In FIG. 2A, the parasitic capacitors of the respective signal reading lines SL₁, SL₂, SL₃, . . . , SL_n are expressed as C_SL, the capacitor between the gate and drain of the switching transistor Q_T is expressed as C_T and the capacitor which the drain of the switching transistor Q_T and the source terminal of the switching transistor Q_S have for the earthed potential is expressed as C_SL '. In order to effectively take out the light information of each picture element onto the video line 51, the sizes of the respective capacitors are made as follows:

C.sub.G <C.sub.SL '≈C.sub.T ≲C.sub.SL      ( 5)

Further, the values of the respective current source voltages are so selected that, if the threshold value voltage of each precharging transistor Q_P is represented by V_thp, the threshold voltages of switching transistors Q_T and Q_s are represented respectively by V_tht and V_ths, the height of the precharging pulse φ_P is represented by V_DD ', the height of the transfer gate pulse φ_T is represented by V_DD ' and the heights of the respective horizontal shift pulses φ_S1, φ_S2 , . . . , φ_Sm are assumed to equal to V_DD, then

V.sub.DD '-V.sub.thp -V.sub.tht =V.sub.DD -V.sub.ths       ( 6).

Reversely speaking, reading under stable and uniform conditions is made by selecting the height V_DD ' of the transfer gate pulse φ_T, the height of the precharging pulse φ_P, the threshold value voltages V_thp and V_tht, the height of the transfer gate pulse φ_T, the threshold value voltage V_ths and the height of the horizontal shift pulses φ_Si (i =1˜n) so that the voltage level on which signal reading line SL_i is precharged and the capacitor C_SL ' is charged may be equal to the voltage level on which the capacitor C_SL ' is recharged by the conduction of the switching transistor Q_S. The source of the SIT's forming the respective picture elements is made common to all the picture elements by an n⁺ substrate or n⁺ embedded layer and further the SIT's forming the respective picture elements have the drains and gates separated from each other in the same semiconductor substrate so that the picture element signals may be separated from each other. Only the drains of the SIT's connected to the same signal reading line SL_i are made electrically common.

FIG. 2B shows examples of reading operation waveforms of the conventional two-dimensional solid-state image pickup device shown in FIG. 2A. The operation waveforms shown in FIG. 2B show reading operation waveforms in the case that the light informations of the picture elements arranged in the form of a matrix of m×n are read out in turn as (C₁₁, C₂₁, C₂₂, . . . , C_n1), (C₁₂, C₂₂, C₃₂, . . . , C_n2), . . . (C_1j, C_2j, C_3j, . . . , C_nj), (C_1j+1, C_2j+1, C_3j+1, . . . , C_nj+1), . . . (C_1m, C_2m, . . . C_nm). There is an improved type wherein the reading signal lines are scanned by skipping each line by applying an operating principle utilizing charging and discharging the parasitic capacitors C_SL of the same signal reading line but the essential part is shown in FIG. 2B. Further, there is also a method of improving the operating waveforms in FIG. 2B. For example, there is a method wherein a function of adding onto the same gate address line GL_j such pulses higher than the pulse height of the address gate pulses φ_Gj as, for example, refreshed pulses of more than 2.5 V and a pulse width within several μ sec. in a horizontal retracing period existing for only several μsec. after one horizontal reading period is added to the respective address gate pulses φ_Gi. In the signal reading system shown in FIGS. 2A and 2B, as the address gate pulses φ_Gi are added, the light informations of the respective picture elements will move to the capacitors C_SL and C_SL ' within a short time within the pulse width (less than several μsec.), the address gate pulses φ_Gi (of a height of 2 V and pulse width within several μsec.) will be added at the time of the address gate and refreshed pulses (of more than 2.5 V and within several μsec.) higher than the address gate pulses φ_Gi on the same line will be added in the horizontal retracing period substantially after the lapse of one horizontal period or just after the pulses of the transfer gate pulses φ_T are cut and the capacitors C_SL and C_SL ' are separated from each other. However, most simply, if address gate pulses of a pulse height of more than 2.5 V and pulse width within several μsec. are used for the address gate pulses φ_Gj as shown in FIG. 2B, at the time of addressing the address gate pulses φ_Gj, substantially all the carriers accumulated in the gate will be refreshed and therefore it will be no longer necessary to add the refreshed gate pulses in the horizontal retracing period or just after the pulses of the transfer gate pulses φ_T are cut. The higher the pulse height of the gate, the larger the spike noise accompanying the switching. Therefore, in case the switching spike noise is a problem, the function of controlling the height of the address gate pulses φ_Gj to be within 2 V and adding refreshed pulses in one horizontal retracing period or just after the pulses of the transfer gate pulses φ_T are cut will become effective. Therefore, here the simplest operating waveform is shown in FIG. 2B.

The operation of the above mentioned device shall be explained on the basis of FIG. 2B. The difference of the formation in FIG. 2A from the formation in FIGS. 1A and 1B is that the switching transistors Q_T are added on the signal reading lines SL_i (i =1 ˜n). This is for the following reasons. The m SIT's are connected to the same signal reading lines SL_i. In the light detecting state, the light will be irradiated to the respective SIT's, carriers will be accumulated in the gates, therefore the height of the potential barrier existing within the channel between the source and drain of each SIT will reduce and therefore the impedance between the signal reading line SL_i and the ground will gradually reduce with the integrated amount of the light. When the impedance between the signal reading line SL_i and the ground reduces, the potential with which the capacitor (C_SL +C_SL ') has been charged will be discharged. This discharged amount will correspond to the sum of light informations for one train. Of what picture element the light information will be unable to be specified. On the other hand, the light informations will be accumulated in the gate of each SIT and therefore will not be lost even if the potential of the signal reading line SL_i fluctuates. The time after the horizontal shift pulses φ_Si are added until the horizontal shift pulses φ_Sn are added is substantially equal to one horizontal retracing period and is about 60 μsec. in the TV signal. Therefore, with the formation shown in FIGS. 1A and 1B as it is, in the period after the signal reading line SL_i (i =1 ˜n) is precharged by the precharging signal, the same signal line GL_j is addressed and the first picture element C_1j is read out by the horizontal shift pulses φ_S1 until the picture element C_nj is read out by the horizontal shift pulses φ_Sn, the precharged voltage level will be easier to discharge in the later signal reading lines. Particularly, the precharged potential of the signal reading line SL_n must be kept constant for about 60 μsec. until the picture element C_nj is read out by the horizontal shift pulses φ_Sn. Meanwhile, the influence of the light received by the other picture elements connected to the same signal reading line SL_i must by controlled as much as possible. However, as evident from experiments, the more the picture elements arranged on one horizontal line SL_i, the lower the impedance between the horizontal line SL_i and the ground with the integrated amount of the light. Thus, even one horizontal retracing period of about 60 μsec. can not be neglected. Therefore, there has been worked in the conventional example a system wherein the switching transistor Q_T shown in FIG. 2A is inserted, the parasitic capacitor (C_SL +C_L ') is charged in precharging the signal reading line, then the address gate pulses φ_Gj are immediately impressed, the light informations of the respective picture elements C_1j, C_2j, C_3j, . . . C_nj are accumulated as discharged amounts of the parasitic capacitors (C_SL +C_SL ') of the respective signal reading lines SL₁, SL₂, SL₃, . . SL_n, then the switching transistor Q_T is immediately switched off and the informations of the respective picture elements are accumulated only in the capacitor C_SL ' and are taken out in the output line irrespectively of the discharged amount of the capacitor C_SL by the horizontal shift pulses φ_S1, φ_S2, . . . , φ_Sn FIG. 2B shows the operation waveforms of the conventional system over two horizontal periods.

At the time t₁, the transfer gate pulses φ_T are impressed and the switching transistors Q_T on the respective signal reading lines are simultaneously made conductive and, at the time t₂, the precharging pulses φ_P are impressed, the precharging transistors on the respective signal reading lines are simultaneously made conductive and the capacitors (C_SL +C_SL ') of the respective signal reading lines are charged to the predetermined precharged voltage level. Then, at the time t₃, the respective SIT's of the picture elements C_1j, C_2j, C_3j, . . . C_nj are simultaneously made conductive by the address gate pulses φ_Gj, the light informations accumulated in the gates of the respective SIT's are moved onto the respective signal reading lines SL₁, SL₂, . . . SL_n as discharged amounts of the parasitic capacitors (S_SL +C_SL ') and then immediately, at the time t₄, the switching transistor Q_T is switched off and the capacitors C_SL and C_SL ' are separated from each other. Then, at the times t₅, t₆, t₇, . . . , the horizontal shift pulses φ_S1, φ_S2, φ_S3, . . . , φ_Sn are added in turn to the gates of the switching transistors Q_S on the respective signal reading lines and the respective capacitors C_SL ' are recharged with the discharged amounts from the video voltage V_DD so that the output voltage V_out can be obtained at each end of the load resistance R_L. In the same manner, in the next horizontal period, the next picture elements C_1j+1, C_2j+1, C_3j+1, . . . C_nj+1 are read out.

The actually used numerical time values shall be described. In the case of TV signals, the number of picture elements must be about 500×500 and therefore one horizontal reading period will be about 65 μsec. In this case, the reading time constant of one picture element will be easily realized to be several 10 n sec. in the area sensor of the SIT and the pulse width of the transfer gate pulse φ_T which is about the sum of the pulse width of the precharging pulse φ_P and the pulse width of the address gate pulse φ_Gj will be sufficient with less than 5 μsec. Therefore, if the reading system by the system shown in FIGS. 2A and 2B is used, the picture image informations of about 500×500 elements will be easily read out by using TV signals. In the case of this conventional system, the time constant in the case that they are read out by the pulses of the horizontal shift pulses φ_S will be the time constant of charging the capacitor C_SL ' as described above, the capacitor (C_SL +C_SL ') will not be charged, therefore the speed will be easily made higher and the time constant of about several 10 n sec. will be easily realized. In order to make the velocity higher, the parasitic capacitance and effective resistance of the video output line 51 are reduced.

However, in the formation of the two-dimensional solid-state image pickup device shown in FIGS. 2A and 2B, the source zones of the SIT's forming the respective picture elements C_ij are electrically common over all the picture elements, the drain zones of the respective picture elements C_il, C_i2, . . . , C_im arranged on the same signal reading line SL_i are commonly connected to the signal reading line SL_i and therefore normally off SIT's must be used for the SIT's forming the respective picture elements C_ij. Further, for the normally off SIT's, devices in which the leakage current between the drain and source in the dark current state is so little as to be less than 10^-13 (A) at the time of zero gate bias with a cell size of dimensions, for example, of 50μ×50μ must be uniformly arranged. The photosensitivity of such normally off SIT is close to the photosensitivity of a bipolar transistor, is of an optical gain of about 10² to 10³ and is not so high. In the formation in FIGS. 2A and 2B, m picture elements are arranged on one signal reading line SL_i and ideally the current corresponding to the light intensity may flow through only the picture element selected by the gate pulses φ_Gj but, in fact even in the (m-1) picture elements not selected, the leakage current will flow between the drain and source when not selected. In order to control this current, the SIT must be normally off. Now, in the case of the worst condition that such strong light as of a saturated exposure amount enters all the picture elements not selected, when the leak current between the drain and source flowing through the respective picture elements gate-biased by the light is represented by I', this current will flow through the capacitor (C_SL +C_SL ') for the time t_pt after the precharged pulses φ_P are cut until the transfer gate pulses φ_T are cut, and the total amount Q' of the electric charge flowing out of the capacitor (C_SL +C_SL ') will be approximately

Q'=(m=1)I't.sub.pt                                         ( 7).

The potential variation V' at both ends of the capacitor (C_SL +C_SL ') by this electric charge will be ##EQU4## As the maximum value of the potential variation at both ends of the capacitor (C_SL +C_SL ') is substantially the video voltage level V_DD, the ratio of the potential variation V' to the video voltage level V_DD will be ##EQU5## If V_DD =1 V, C_SL +C_SL '=1pF and t_pt =1 μsec. as the most practical numerical values, the value of I' required to control V'/V_DD to be less than 0.1% will be required to be so small that,

when m=500, I'<2×10^-12 (A) and

when m=1000, I'<1×10^-12 (A).

The reason why such small leaking currrent is required is that the drains and sources of the SIT's forming the picture elements C_i1, C_i2, C_im on the same signal reading line are made respectively electrically common. In the case of the conventional example, the condition for controlling the amount of discharge throught the unselected picture elements during the time t_pt after the precharging pulses φ_P are cut until the transfer gate pulses φ_T are cut is considerably severe as described above.

Therefore, it has been found that, if the source regions of the respective SIT's forming the picture elements C_i1, C_i2, C_i3, . . . , C_im on the same signal reading lines are connected to the respectively separate source lines BL₁, BL₂, BL₃, . . . , BL_m which are made to have a constant capacitor C_BL in the unselected state to control the discharge through the SIT's and the selected source line is earthed only when selected to discharge the precharged level of the capacitor (C_SL +C_SL ') through the SIT, the crosstalk between both picture elements will be solved.

Generally, the photosensitivity of an SIT image sensor of a gate accumulating system having as a fundamental formation of one picture element the formation consisting of an SIT and gate capacitor C_G corresponds just to the photosensitivity of the SIT when the gate is opened. When the gate is opened, the optical gain of the SIT will greatly depend on the gate structure of the SIT. If the height of a potential barrier within an n^- channel as seen from a source n⁺ region is represented by V_biG*S and the diffused potential between a p⁺ gate and n⁺ source region is represented by V_biGS, the maximum value of the direct current optical gain G_max will be approximately represented by ##EQU6## where n_S, P_G, V_n, V_P, q, k and T represent respectively an electron density of the source region, positive hole density of the gate region, average velocity of electrons at the intrinsic gate point, diffusing velocity of the positive holes of the gate into the source region, unit electric charge, Boltzmann's constant and absolute temperature. There is a feature that the weaker the light intensity, the larger the optical gain. The formula (10) is of a value of the light intensity at the minimum. The term of exp q/kT (V_biGS -V_biG*S) in the formula (10) relates to the difference between the height of the potential barrier of the positive holes accumulated in the gate and the height of the potential barrier of electrons at the source and is about 10⁷ to 10⁸. In the case of a device having such high V_biG*S as V_biGs ≈V_biG*S among the normally off SIT's, the optical gain will be about 10² to 10³. For the normally off SIT forming the picture element of the two-dimensional solid-state image pickup shown in FIGS. 2A and 2B, the leakage current in the dark current state between the drain and source must be made less than 10^-13 a device of a cell size, for example, of 50μ×50μ. Thus, the devcie in which the leakage current between the drain and source is little must be designed so that the height V_biG*S of the potential barrier within the channel may be necessarily high and does not well utilize the intrinsic high photosensitivity of the SIT. The great reason for this is the signal crosstalk between the picture elements when arranged in the form of a matrix as described above. In the conventional example in FIGS. 2A and 2B, the drain and source regions of the SIT's forming the respective picture elements on the same signal reading lines SL_i (i=1˜n) are respectively electrically common. The photosensitivity of the SIT forming the picture element in the case of the conventional example in FIGS. 2A and 2B is about 10² to 10³ but, as the same n⁺ substrate or n⁺ buried layer can be utilized, the formation of the two-dimensional arrangement is simple and the reading method is also simple.

In the conventional example explained with reference to FIGS. 2A and 2B, in the SIT's forming the picture elements, all the picture elements are electrically common and, in the SIT's arranged on the same signal reading lines, the source regions and drain regions are common. Therefore, when the light enters the picture element in which the gate is not selected and the impedance between the source and drain of the SIT reduces, the current flowing as a discharged current from the capacitor (C_SL +C_SL ') will be likely to be detected as a false signal. In order to control such false signal to be below 0.1% of such saturated output as, for example, V_DD =1 V, the current flowing through the picture element when the gate is biased with the light when not selected must be less than 2×10^-12 (A) in the matrix of 500×500 picture elements and must be considerably characteristic of being normally off. Further, as explained with the formula (10), as the value of the height V_biG*S of the potential barrier within the channel becomes closer to the potential difference V_biGS between the gate and source, the photosensitivity of such SIT will not become so high. In the case of the conventional example, in case there is a faulty picture element (short-circuited) in the matrix, even the other picture elements connected to the same signal reading line will be considered to be short-circuited and the influence on the adjacent picture elements will be large.

SUMMARY OF THE INVENTION

A primary object of the present invention is to provide a solid-state image pickup device having a high detecting sensitivity even to a feeble light.

Another object of the present invention is to provide a solid-state image pickup device able to operate at a high velocity in spite of a low power consumption and having a large capacity (a large number of picture elements).

A further object of the present invention is to provide a solid-state image pickup device which can stably and uniformly detect picture images.

According to the present invention, these objects are attained by a formation wherein picture elements formed of SIT's (static induction transistors) each having a optical gain of 10⁶ to 10⁸ and able to detect such feeble light as of about 10^-4 μW/cm² are arranged in a matrix, a gate accumulating system able to detect a two-dimensional reading, the source regions of the respective SIT's are connected to common source lines, the respective source lines have source line selecting transistors connected between them and the ground and the gates of the respective source line selecting transistors are connected respectively to vertical gate address lines, whereby, simultaneously with the selection of the vertical gate address lines, the source lines will be connected to the ground.

According to the two-dimensional solid-state image pickup device of the present invention, for a normally off SIT, an element through which a current between a drain and source of about 10^-9 (A) to 10^-6 (A) can be made to flow with a cell size of 50μ×50μ at the time of zero gate bias can be used as a formation of one picture element and further the problem of a crosstalk between the picture elements can be solved. Further, the optical gain of the SIT showing such characteristics is so high as to be about 10⁶ to 10⁸. Further, if the two-dimensional formation by the present invention is used, even if a specific picture element is short-circuited, there will be no influence on the other adjacent picuture elements.

These and other objects of the present invention will become more apparent during the course of the following detailed description and appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a view of a circuit formation of one picture element for explaining the principle of a conventional reading system.

FIG. 1B is a view of the formation of a conventional two-dimensional solid-state image pickup device.

FIG. 2A is a view of the formation of a conventional two-dimensional solid-state image pickup device.

FIG. 2B is a view of the signal reading operation waveforms (for 2H) of the conventional device.

FIG. 3A is a view for explaining the principle of one picture element part of a two-dimensional solid-state image pickup device according to the present invention.

FIG. 3B is a view of the operation waveforms of the same.

FIG. 4A is a view of an embodiment of the formation of the two-dimensional solid-state image pickup device according to the present invention.

FIG. 4B is a view of the reading operation waveforms of the same.

FIG. 5 is a view of another embodiment of the formation of the two-dimensional solid-state image pickup device of the present invention.

FIG. 6 is a view of another embodiment of the formation of the two-dimensional solid-state image pickup device according to the present invention.

FIG. 7A is a sectioned view of the structure of one picture element part of the two-dimensional solid-state image pickup device according to the present invention.

FIG. 7B is a view of circuits by a 2×2 matrix.

FIG. 7C is an another view of circuits by a 2×2 matrix.

FIG. 8 is a view of another embodiment of the formation of the two-dimensional solid-state image pickup device according to the present invention, particularly showing a formation made by developing the circuits in FIG. 7C.

FIG. 9 is a diagram showing a comparison of the photoelectric conversion characteristics of the two-dimensional solid-state image pickup device according to the present invention and the two-dimensional solid-state image pickup device of the conventional example (in FIG. 2A), wherein the curves (a) to (c) represent experiment results relating to the present invention and the curves (d) represents experiment results in the conventional example.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention relates to the formation of a two-dimensional solid-state image pickup device well utilizing the intrinsic high photosensitivity of SIT's characterized in that the source regions of SIT's forming respective picture elements C_1j, C_2j, . . . , C_nj on vertical gate address lines GL_j (j=1 to m) are connected to common source lines BL_j, the respective source lines BL_j (j=1 to m) have source line selecting transistors Q_B connected between them and the ground, the gates of respective transistors Q_S are connected to respective vertical gate address lines GL_i so that, simultaneously with the selection of the vertical gate address lines GL_j, the source lines BL_j may be connected to the ground.

Respective signal reading lines SL_i (i=1 to n) have capacitors (C_SL +C_SL ') between them and the ground and the capacitors (C_SL +C_SL ') of the respective signal reading lines SL_i (i=1 to n) are precharged simultaneously with making precharging transistors Q_P conductive by precharging pulses φ_P from a current source V_DD '. The respective picture element trains C_1j, C_2j, . . . , C_nj on the vertical gate address lines GL_j are simultaneously selected by vertical address pulses φ_Gj from a vertical shift register and the potential levels with which the respective capacitors (C_SL +C_SL ') have been charged are discharged to the ground through the source lines BL_j and source line selecting transistors Q_B through the respective SIT's in response to the light informations accumulated in the gates of the SIT's which are the respective picture elements. The same as in the conventional example, the discharged amounts of the respective capacitors (C_SL +C_SL ') are detected as discharged amounts of only the capacitors C_SL ' by cutting transfer pulses φ_T to switch off a transfer register Q_T. The discharged amounts, that is, the light informations of the respective capacitors C_SL ' are detected as the signal variations of a load R.sub. L on a common video line through switching transistors Q_S selected in turn by reading line selecting pulses φ_S1, φ_S2, . . . , φ_Sn from a horizontal shift register. Or the light informations from the capacitors C_SL ' may be simultaneously put into a shift register CCD or the like and may be taken out as a CCD output the same as in the conventional example.

If the two-dimensional solid-state image pickup device of such formation as is described above is used, SIT's having an optical gain of 10⁶ to 10⁸ and able to detect such feeble light as of about 10^-4 μW/cm² will be able to be used for the formation of respective picture elements and the crosstalk between the respective picture elements will be able to be positively controlled. The difference from the conventional example in the arrangement of the two-dimensional matrix is that, as described above, the source region of the SIT's which are respective picture elements arranged on the vertical gate address lines GL_j (j=1 to m) are connected to the common BL_j (j=1 to m) and the source region of the SIT's which are respective picture elements arranged on the same signal reading lines SL_i (i=1 to n) are connected to separate source lines BL₁, BL₂, . . . BL_m.

The characteristic of the normally off SIT's forming the respective picture elements of the two-dimensional solid-state image pickup device according to the present invention is that the SIT's in which the value of the leakage current between the drain and source in a dark current state is about 10^-9 to 10^-6 (A) with a cell size, for example, of 50μ×50μ can be arranged while positively controlling the crosstalk. It has become experimentally evident that the photosensitivity of such SIT is of a value of 10⁶ to 10⁸. It is found from the formula (10) that, in case the value of the height V_biG*S of the potential barrier within the channel is lower by about 0.3 to 0.5 eV than the value of V_biGS, the value of exp q/kT (V_biGS -V_biG*S) will be about 10⁶ to 10⁸.

FIG. 3A is a principle explaining view of one picture element part of the two-dimensional solid-state image pickup device according to the present invention. FIG. 3B shows its reading operation waveforms. In FIG. 3A, one picture element C_ij is formed of a normally off SIT and gate capacitor C_G, the drain 40 of the SIT is connected to the signal reading line SL_i, the gate 41 is connected to the vertical gate address line GL_i through a gate capacitor C_G and the source 42 is connected to the source line BL_j. A precharging transistor Q_P and transfer transistor Q_T are connected to the signal reading line SL_i. The drain of the transfer transistor Q_T is connected to a video voltage V_DD through a switching transistor Q_S and load resistance R_L.

The difference from the conventional example in FIG. 1A is that the source 42 of the SIT is not connected to the ground but is connected to the ground through a source line selecting transistor Q_B. The source line selecting transistor Q_B is selected simultaneously with the selection of the SIT with the selecting pulses φ_Gj of the vertical signal address line GL_j. In FIG. 3A, the capacitor held by the signal reading line SL_i between it and the ground is represented by C_SL, the capacitor between the gate and drain of the transfer transistor Q_T is represented by C_T and the capacitor held by the drain part of the transfer transistor Q_T and source part of the switching transistor Q_S between them and the ground is represented by C_SL '. Further, the capacitor held by the source line BL_i between it and the ground is represented by C_BL.

The operation of the device shown in FIG. 3A shall be explained in the following with reference to FIG. 3B. Assuming the case that the light is being continuously radiated, the operation waveforms at the time of a reading operation in the case of reading out at a constant light integrating time T_L1 are shown in FIG. 3B. In the case of reading out the light information of the picture element C_ij, first the transfer transistor Q_T is made conductive by the transfer pulses φ_T to the gate of the transfer transistor Q_T and the capacitor C_SL ' is connected to the capacitor C_SL of the signal reading line SL_i. The pulse width of the transfer pulse φ_T is within several μ sec. While the transfer pulses φ_T are impressed, precharging pulses φ_P are impressed on the switching transistor Q_P, the capacitor (C_SL +C_SL ') is charged to the level of V_DD '-V_thp from the precharging voltage source V_DD' then address gate pulses φ_Gj on the gate of the source line selecting transistor Q_B, the transistor Q_B is made conductive, the source line BL is connected to the ground and, at the same time, a discharge current corresponding to the light information by holes accumulated in the gate flows between the drain and source of the picture element C_ij. The manner of the potential variation of the capacitor C_SL ' is shown by the waveform of V_TL. The dotted line a corresponds to a dark current state, the one-point chain line b corresponds to an ordinary light radiating state and the solid line c corresponds to a state that a saturated exposure amount of light is radiated. Then, even if the transfer pulses φ_T are cut and the transfer transistor Q_T is switched off, the discharging state of the capacitor C_SL ' will not vary. When the capacitor C_SL' is recharged with the discharged amount through the switching transistor Q_S, a light signal of the picture element C_ij corresponding to the discharged amount of the capacitor C_SL ' will be detected from both ends of the load resistance R_L. The relations of the precharging voltage source V_DD ', video voltage source V_DD, threshold value voltage V_thp of the precharging transistor Q_P and threshold value voltage V_ths of the switching transistor Q_S are selected usually to be as in the formula (6). Also, in order to effectively take out the light information of the picture element C_ij into the video output line, the sizes of the capacitors of the respective parts are made to be as in

C.sub.G <C.sub.SL '≈C.sub.T ≃C.sub.SL ≈C.sub.BL                                         (11)

FIG. 4A shows an embodiment of the two-dimensional solid-state image pickup device according to the present invention. FIG. 4B shows its reading operation waveforms. The difference from the conventional example in FIG. 2A is that the source regions of the picture elements C_1j, C_2j, C_3j, . . . , C_nj (C₁₁, C₂₁, . . . C_n1 ; C₁₂, C₂₂, . . . , C_2n ; . . . C_1m, C_2m, . . . C_nm) connected respectively to the vertical address gate lines GL_j (GL₁, GL₂, GL₃, . . . , GL_m) are connected to common source lines BL_j and separate source line selecting transistors Q_B are connected between them and the ground to the respective source lines BL_j. The drain regions of the SIT's forming the picture elements C_i1, C_i2, C_i3, . . . , C_im (C₁₁, C₁₂, . . . , C_1m ; C₂₁, C₂₂, . . . , C_2m ; . . . C_n1, C_n2, . . . C_nm) on the same signal reading lines SL_i (SL₁, SL₂, . . . SL_n) are connected to the signal reading lines SL_i (SL₁, SL₂, . . . , SL_n) but the source regions are connected to separate source lines BL₁, BL₂, BL₃, . . . , BL_m. The source line selecting transistors Q_B are connected between them and the ground to the respective source lines BL_j (j=1 to m) so that, when the vertical gate address lines GL_j (j=1 to m) are not selected, the source line selecting transistors Q_B will be switched off. The respective source lines BL_j (j=1 to m) have capacitors C_BL so that, only when the address lines GL_j (j=1 to m) select the picture elements, the source line selecting transistors will be conductive, the source lines BL_j will be connected to the ground, the SIT's forming the picture elements C_1j, C_2j, C_3j, . . . , C_nj selected by the address lines GL_j will be also conductive in response to the light informations accumulated in the gates of the respective picture elements and the capacitors C_SL on the separate signal reading lines will be respectively discharged. In FIG. 4A, 400 and 401 represent respectively a horizontal shift register and vertical shift register, 402 represents a video output line, 403 represents a common line of the gates of the transfer transistors Q_T for simultaneously impressing transfer pulses φ_T, 404 represents a common line of the gates of the precharging transistors Q_P for simultaneously impressing precharging pulses φ_P and 405 represents a precharging voltage source line. In FIG. 4B, the operation waveforms in FIG. 4A are shown on two horizontal periods and the timing periods, pulse heights, pulse widths and positions of the respective pulses are all the same as in the conventional example shown in FIG. 2B. In the address pulse waveforms φ_Gj and φGj+1, V_g represents the height of the address pulse and V_R represents the height of the refreshed pulse. Thus, it is the same as in the conventional example that the refreshed pulses may be added.

FIG. 5 is of another embodiment of the two-dimensional solid-state image pickup device according to the present invention. Therein, 500 and 501 represent respectively a horizontal shift register and vertical shift register and 502, 503, 504 and 505 represent respectively a video output line, transfer pulse φ_T impressing line, precharging pulse φ_p impressing gate line and precharging voltage source line. The difference from the embodiment shown in FIG. 4A is that the transistors connected between the respective source lines BL₁, BL₂, BL₃, . . . , BL_m and the ground are static induction transistors (SIT's). Usually the respective source lines BL₁, BL₂, BL₃, . . . , BL_m are made of n⁺ embedded layers (See FIG. 7A). Therefore, in the case of making them by integration, if SIT's are used for the source line selecting transistors Q_B, the integration will be easy. That is to say, as the gates of the transistors Q_B are connected to the source lines GL_j (j=1 to m), the picture element trains C_1j, C_2j, C_3j, . . . , C_nj (C₁₁, C₁₂, . . . , C_1m ; C₂₁, C₂₂, . . . , C_2m ; . . . ; C_n1, C_n2, . . . , C_nm) formed of SIT's having gate capacitors C_G and SIT's as the transistors Q_B are adapted to be manufactured by integration. The other formations and operating methods in the embodiment in FIG. 5 are all the same as in the embodiment in FIGS. 4A and 4B.

FIG. 6 shows further another embodiment of the secondary solid-state image pickup device according to the present invention. In this embodiment, as a method of detecting the discharged amount of the capacitor C_SL ', gate pulses φ_S are impressed simultaneously onto the gate line 602 of the switching transistors Q_S and, at the same time, the light informations accumulated as the discharged amounts of the respective capacitors C_SL ' are put into the accumulating region of a horizontal signal transferring CCD and are taken out as a CCD output. The CCD 600 operates with 2-phase clock pulses φ_H1 and φ_H2. 606 represents a buffer amplifier and 607 represents an output terminal. 601 represents a vertical shift register, 603 represents a transfer pulse φ_T impressing line, 604 represents a precharging pulse φ_P impressing line and 605 represents a precharging current source line. MOS transistors are connected as switching transistors Q_B between the respective source lines BL₁, BL₂, BL₃, . . . , BL_m and the ground. The switching transistors Q_B may be SIT's. As a reading operation, after the transfer pulses φ_T are cut, gate pulse φ_S may be simultaneously impressed onto the gates of all the switching transistors Q_S, the light informations accumulated as discharged amounts in the respective capacitors C_SL may be transferred to the accumulating regions by potential wells within the CCD 600 and then n signal outputs may be taken out to the output terminal within one horizontal period.

FIG. 7A shows a sectioned structure of one picture element part of the two-dimensional solid-state image pickup device according to the present invention. FIGS. 7B and 7C are circuit diagrams for explaining that there are two matrix forming methods by both upright and inverted operations of the SIT by exemplifying a matrix of 2×2.

FIG. 7A shows static induction transistors (SIT's) and gate capacitors made as integrated within a semiconductor substrate. Therein, 701 represents a p-type substrate, the n⁺ buried

layers

704 and 705 correspond to the common source lines BL_j and BL_j+1 of the adjacent picture element trains (C_1j, C_2j, . . . , C_nj) and (C_1j+1, C_2j+1, . . . , C_nj+1), the region 719 is an isolation region separating from each other the

channel regions

715 and 716 formed of n^-, p^- or i layers. The p region 718 is a diffusing region for insulating from each other the p⁺ gate regions 706 and 707 of the adjacent picture elements. The surface n⁺ regions 713-1, 713-2 and 713-3 represent drain regions of the SIT forming one picture element. The drain regions 713-1, 713-2 and 713-3 are electrically connected through an n⁺ polysilicon electrode 711 or the like in the part not shown on the paper surface. That is to say, in the embodiment shown in FIG. 7A, the SIT forming one picture element has three channel regions. Such multichannels are to gain the current. In case it is required to make the cell size of one picture element small, a single channel will do. In such case, the current will be 7/8. The thin insulating film 710 formed of an Si₃ N₄ film, SiO₂ film or the like is formed on all the surface above the p⁺ gate region 706 enclosing the n⁺ drain regions 713-1, 713-2 and 713-3. 708 represents a transparent electrode. 702 represents an Al contact line with the transparent electrode 708. The n⁺ region 714-1 is an n⁺ drain region of the SIT of the adjacent picture element. The n^-, p^- or i layer 716 is a channel region of the SIT of the adjacent picture element. 709 represents the same transparent electrode as the transparent electrode 708. 703 represents an Al contact line with the transparent electrode 709. The

Al contact lines

702 and 703 are respectively address gate lines GL_j and GL_j+1 to the adjacent picture element trains (C_1j, C_2j, C_3j, . . . , C_nj) and (C_1j+1, C_2j+1 , C_3j+1, . . . , C_nj+1). The

n polysilicon electrodes

711 and 712 are connected to the same signal reading line SL_i. The signal reading line SL_i is wired with an Al electrode or the like (not illustrated) so as to intersect rectangurarly with the address gate lines GL_j and GL_j+1 above the isolation region 719. The region 717 is an insulating layer. The light hv is radiated from the device surface. The gate capacitor C_G is formed of an MIS capacitor consisting of the transparent electrode 708, thin insulator layer 710 and p⁺ gate region 706. The source line 704 is formed in parallel with the address gate line 702 and therefore it is easy to form an SIT as the switching transistor Q_B in a part not shown in the drawing.

FIG. 7B shows a matrix formation in the case of forming the surface n⁺ regions 713-1, 713-2 and 713-3 as drain regions and the n⁺ buried layer 704 as a source region in the same manner as in the matrix formation in the embodiments shown in FIGS. 4A to 6. FIG. 7C shows a matrix formation in the case of forming the surface n⁺ regions 713-1, 713-2 and 713-3 as source regions and the n⁺ buried layer 704 as a drain layer. In this case, the buried layer lines BL_j and BL_j+1 will be signal reading lines, the lines SL_i and SL_i+1 connected in common with the source region will be source lines and the address lines GL_j and GL_j+1 will intersect rectangularly with the signal reading lines BL_j and BL_j+1. The source line selecting transistors Q_B connected between the respective source lines SL_i, SL_i+1 and others and the ground are connected between the source line SL_i to which the surface n⁺ source regions 713, 714 and others are connected and the ground as different from the case of the above described FIGS. 7A and 7B and therefore need not particularly be SIT's. FIG. 7B is of a matrix formation in the case that an inverted SIT is made a component of one picture element, the same as in the embodiments in FIGS. 4A to 6. On the other hand, FIG. 7C corresponds to the case that an upright SIT is made a component of one picture element.

An embodiment applying the forming method in FIG. 7C to the two-dimensional solid-state image pickup device is shown in FIG. 8. The picture elements C_ij in FIG. 8 are formed of upright SIT's and gate capacitors C_G and are arranged in the form of a matrix of m×n. 800 represents a horizontal shift register, 801 represents a vertical shift register, 802 represents a video output line, 803 represents an address line to the transfer transistor Q_T, 804 represents an address line to the precharging transistor Q_P and 805 represents a precharging current source line. The source region of the SIT forming the picture element C_ij is connected to the source line SL_i, the drain region is connected to the reading signal line BL_j and the gate region is connected to the address line GL_i through the gate capacitor C_G. Further, the switching transistor Q_B is connected to the source line between it and the ground and the address line GL_i is connected to the gate of the transistor Q_B so that, simultaneously with the selection of the address line G_Li, by the address pulses φ_Gi, any of the picture element trains (C_i1, C_i2, C_i3, . . . , C_in) will be selected, the switching transistor Q_B will be conductive and the source line SL_i will be connected to the ground. On the signal reading line BL_j, the precharging transistor Q_P is connected with the precharging current source V_DD '. Further, the transfer transistor Q_T and switching transistor Q_S are connected in series to the signal reading line BL_j between them and the video output line 802. The respective signal reading lines BL_j (j=1 to n) have capacitors C_BL between them and the ground. Further, the capacitor C'_BL is connected between the drain of the transfer transistor Q_T and source zone of the switching transistor Q_S and the ground. The capacitance between the gate and drain of the transfer transistor Q_T is expressed by C_T. In case the switching transistor Q_B is off, the respective source lines SL_i (i=1 to m) will have the capacitors C_SL. Address pulses φ_Gi (i=1 to m) will be impressed in turn onto the respective address lines GL_i (i=1 to m) from the vertical shift register 801, horizontal shift pulses φ_Sj (j=1 to n) will be impressed in turn onto the gates of the switching transistors Q_S on the respective signal reading lines BL_j (j=1 to n) from the horizontal shift register 800 and the output signal will be detected from both ends of the load resistance R_L between the video line 802 and video current source V_DD. As an upright operating SIT can be used for the SIT forming the picture element of the two-dimensional solid-state image pickup device in FIG. 8, the photosensitivity will be higher than in the embodiments in FIGS. 4A to 6. This is because, as evident from the sectioned structure in FIG. 7A, as the surface n⁺ regions 713-1, 713-2, 713-3, 714-1, . . . are used for the source regions and the embedded n⁺ regions 704 and 705 are used for the drain regions, in the device operation, the rate of arrival at the drain of electrons injected from the source will be able to be made higher than in the case of the reverse operation (inverted operation). The value of the rate of variation (G_m) to the current between the source and drain of the gate potential variation can be taken to be high. The reading operation of the two-dimensional solid-state image pickup device in FIG. 8 is fundamentally the same as in the embodiment shown in FIG. 4A. That is to say, transfer pulses φ_T having a width of several μ sec. are added, precharging pulses φ_P are impressed onto the precharging transistor Q_P within the pulse period and the capacitors (C_BL +C'_BL) on all the signal reading lines are precharged up to the level of V_DD '-V.sub. thp. After the precharging pulses φ_P are cut, address pulses φ_Gi are immediately impressed onto the address line GL_i, the picture element trains C_i1, C_i2, C_i3, . . . , C_in on the address line GL_i are selected, the source line selecting transistor Q_B is made conductive and the capacitors (C_BL +C'_BL) are discharged in response to the accumulation of positive holes as light informations accumulated in the gates of the respective picture elements through the SIT's of the respective picture elements. Then, if the address pulses φ_Gi and transfer pulses φ_T are simultaneously cut, the light informations of the picture element trains C_i1, C_i2, . . . , C_in will appear only in the capacitors C'_BL. Therefore, over one horizontal period, if the horizontal shift pulses φ_S1, φ_S2, . . . , φ_Sn are added in turn to the gates of the respective switching transistors Q_S and the capacitors C'_BL are recharged from the video voltage V_DD with the discharged part, the output signals V_out will be serially obtained. In the next horizontal period, when the transfer pulses φ_T are added, the precharging pulses φ_P are added and, in the same manner, the address pulses φ_Gi+1 are added, the light informations of the adjacent picture element trains C_i+11, C_i+12, C_i+13, . . . , C_i+1n will be read out in the same manner. The respective pulse widths and pulse heights are the same as in the conventional example or the embodiment in FIG. 4B and the formula (6) holds. The sizes of the capacitances of the respective parts are related as represented by

C.sub.G <C'.sub.BL ≈C.sub.T ≦C.sub.BL ≈C.sub.SL (12)

the same as in the formula (11).

FIG. 9 shows the comparison of the photoelectric conversion characteristics of one picture element part read out by using the formation of the two-dimensional solid-state image pickup device according to the present invention shown in FIG. 8 and the formation of the conventional two-dimensional solid-state image pickup device shown in FIG. 2. The dimensions of one picture element are 50μ×50μ in both. The video voltage V_DD =1V and R_L =1KΩ and the light integrating time is 20 msec. A light of a wave length of 6550Å is irradiated. The abscissa represents the incident light intensity P (μW/cm²) and the ordinate represents the value obtained by subtracting the peak value of the output signal obtained from both ends of the load R_L from the dark current level. The saturation level of the output is lower than the video voltage of 1V because it is reduced by the threshold value of the switching MOS transistor. Here the explanation shall be made by using the curves (a) to (d). The curves (a) to (c) represent the experiment results of the formation by the present invention and the curve (d) represents the experiment results of the conventional example shown in FIG. 2. The characteristics of the curves (a) to (c) are different because the picture elements having SIT's different in the heights of the potential barriers V_biG*S within the channel were measured. In the curves (a), (b) and (c), the potential barriers V_biG*S become higher to approach V_biGS. Further, the SIT of the picture element of the curve (d) uses such small element that the leakage current between the drain and source is less than 10^-13 (A) in the dark current state. As described above, in the formation of the conventional example, only such photoelectric conversion characteristic as in the curve (d) has been obtained but, if the formation by the present invention is used, the sensitivity to feeble lights will be improved by about three orders. Particularly, such extremely feeble light as of 10^-4 (μW/cm²) can be detected, the sensitivity is very high and the dynamic range is wide. Also, the capacitor of the signal reading line in the X-Y address system is used and is charged always to a fixed precharging level at the time of reading out and then the light information is detected as a discharged amount. Thus, the operation is stable and the picture image is uniformly detected. As no system of detecting direct currents is used, the operation is perfectly dynamic and the power consumption is low. The reading velocity is as high as in the conventional example.

In the formation of the two-dimensional solid-state image pickup device according to the present invention, the high photosensitivity of the SIT can be well utilized, the light of an intensity, for example, of 10^-4 μW/cm² is detected with a light integrating time of 20 m sec. and the characteristic of the SIT tube (silicon intensified target tube) said to be the highest in the sensitivity of conventional image pickup tubes is aoproached.

The two-dimensional solid-state image pickup device according to the present invention is characterized by the detection of very feeble lights and is high in the industrial value.

Claims

What is claimed is:

1. A two-dimensional solid-state image pickup device comprising a plurality of picture elements each comprising a normally off static induction transistor and a gate capacitor connected to the gate of said static induction transistor, a plurality of vertical address gate lines connected in common to the respective gate capacitors of said picture elements arranged along respective lines, a plurality of signal reading lines connected in common to the drains of the respective static induction transistors forming said picture elements arranged along the respective lines, a plurality of precharging transistors connected to each of said plurality of signal reading lines, a voltage source connected in common to said plurality of signal reading lines through said precharging transistors, a plurality of first capacitors connected between each of said plurality of signal reading lines and the ground, a video output line connected in common to each of said plurality of signal reading lines through a transfer transistor and first switching transistor connected in series and connected to the ground through a load resistance and video voltage source, a transfer pulse address gate line connected in common to the gates of said respective transfer transistors, a second capacitor connected between the gates and drains of said respective transfer transistors, a third capacitor connected between the drain of said respective transfer transistors and the ground, a plurality of source lines connected in common to the sources of the respective static induction transistors forming said picture elements connected respectively to said respective vertical address gate lines a plurality of second switching transistors connected respectively between said respective source lines and the ground and having the respective gates connected to said respective vertical address gate lines a plurality of fourth capacitors in case said respective second switching transistor is in the off-state connected respectively between said respective source lines and the ground and a plurality of second capacitors connected respectively between said respective source lines and the ground, in order to arrange said plurality of picture elements in the form of a matrix, said plurality of vertical gate address lines and said plurality of source lines being arranged in parallel with each other and said plurality of signal reading lines being arranged so as to intersect rectangularly with said plurality of vertical address gate lines and said plurality of signal reading lines and, in order to make an X-Y address, vertical shift pulses, which are generated from a vertical shift resistor being impressed onto said respective vertical address gate lines and horizontal shift pulses, which are generated from a horizontal shift register being impressed onto the gates of said respective first switching transistors and, when the capacitance of said gate capacitor is represented by C_G, the capacitance of said first capacitor is represented by C_SL, the capacitance of said second capacitor is represented by C_T, the capacitance of said third capacitor is represented by C_SL ' and the capacitance of said fourth capacitor is represented by C_BL, the relation of C_G <C_SL '≈C_T ≃C_SL ≈C_BL being satisfied.

2. A two-dimensional solid-state image pickup device according to claim 1 wherein said static induction transistor is of an upright type.

3. A two-dimensional solid-state image pickup device according to claim 1 wherein said static induction transistor is of an inverted type.

4. A two-dimensional solid-state image pickup device according to claim 1 wherein said second switching transistor is a static induction transistor.

5. A two-dimensional solid-state image pickup device according to claim 1 wherein said second switching transistor is an MOS transistor.

6. A two-dimensional solid-state image pickup device comprising a plurality of picture elements each comprising a normally off static induction transistor and a gate capacitor connected to the gate of said static induction transistor, a plurality of vertical address gate lines connected in common to the respective gate capacitors of said picture elements arranged along respective lines, a plurality of signal reading lines connected in common to the drains of the respective static induction transistors forming said picture elements arranged along the respective lines, a plurality of precharging transistors connected to each of said plurality of signal reading lines, a voltage source connected in common to said plurality of signal reading lines through said precharging transistors, a plurality of first capacitors connected between each of said plurality of signal reading lines and the ground, a horizontal signal transferring CCD having an accumulating zone connected to each of said plurality of signal reading lines through a transfer transistor and first switching transistor connected in series, a transfer pulse address gate line connected in common to the gates of said respective transfer transistors, a second capacitor connected between the gates and drains of said respective transfer transistors, a third capacitor connected between the drains of said respective transfer transistors and the ground, a plurality of source lines connected in common to the sources of the respective static induction transistors forming said picture elements connected respectively to said respective vertical address gate lines, a plurality of fourth capacitors connected respectively between said respective source lines and the ground, a plurality of second switching transistors connected respectively between said respective source lines and the ground and having the respective gates connected to said respective vertical address gate lines and a plurality of second capacitors connected respectively between said respective source lines and the ground, when the capacitance of said gate capacitor is represented by C_G, the capacitance of said first capacitor is represented by C_SL, the capacitance of said second capacitor is represented by C_T, the capacitance of said third capacitor is represented by C_SL ' and the capacitance of said fourth capacitor is represented by C_BL, the relation of C_G <C_SL '≈C_T ≃C_SL ≈C_BL being satisfied and, whenever vertical shift pulses are impressed onto said respective vertical address lines, picture image informations from the train of picture elements along the vertical address gate lines onto which the vertical shift pulses which are generated by a vertical shift register have been impressed being put in parallel into said CCD in turn by switching on and off said transfer transistor and first switching transistor to complete the transfer of the train of picture elements within one horizontal period and to thereby obtain picture image informations in turn from the output terminal of said CCD.