US4417386A - Method for mounting a semiconductor device in a housing - Google Patents

Method for mounting a semiconductor device in a housing Download PDF

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Publication number
US4417386A
US4417386A US06/218,498 US21849880A US4417386A US 4417386 A US4417386 A US 4417386A US 21849880 A US21849880 A US 21849880A US 4417386 A US4417386 A US 4417386A
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United States
Prior art keywords
adhesive
housing
layer
semiconductor body
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
US06/218,498
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English (en)
Inventor
Klaus D. Exner
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Siemens AG
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Siemens AG
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Application filed by Siemens AG filed Critical Siemens AG
Assigned to SIEMENS AKTIENGESELLSCHAFT, A CORP. OF GERMANY reassignment SIEMENS AKTIENGESELLSCHAFT, A CORP. OF GERMANY ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: EXNER, KLAUS D.
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/52—Mounting semiconductor bodies in containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • H01L23/4827—Materials
    • H01L23/4828—Conductive organic material or pastes, e.g. conductive adhesives, inks
    • H—ELECTRICITY
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    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001—Core members of the layer connector
    • H01L2224/29099—Material
    • H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/29101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
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    • H01L2224/29001—Core members of the layer connector
    • H01L2224/29099—Material
    • H01L2224/29198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/29199—Material of the matrix
    • H01L2224/2929—Material of the matrix with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001—Core members of the layer connector
    • H01L2224/29099—Material
    • H01L2224/29198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/29298—Fillers
    • H01L2224/29299—Base material
    • H01L2224/293—Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/29338—Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/29339—Silver [Ag] as principal constituent
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    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
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    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H—ELECTRICITY
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    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00013—Fully indexed content
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    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
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    • H01L2924/01013—Aluminum [Al]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2924/01—Chemical elements
    • H01L2924/01014—Silicon [Si]
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    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2924/0102—Calcium [Ca]
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    • H01L2924/01—Chemical elements
    • H01L2924/01024—Chromium [Cr]
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    • H01L2924/01033—Arsenic [As]
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    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
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    • H01L2924/06—Polymers
    • H01L2924/078—Adhesive characteristics other than chemical
    • H01L2924/0781—Adhesive characteristics other than chemical being an ohmic electrical conductor
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    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/102—Material of the semiconductor or solid state bodies
    • H01L2924/1025—Semiconducting materials
    • H01L2924/10251—Elemental semiconductors, i.e. Group IV
    • H01L2924/10253—Silicon [Si]
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    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits

Definitions

  • a method of mounting a semiconductor device in a housing which comprises first providing a metallization on a part of the surface of the semiconductor body of the semiconductor device to be connected to the housing, subsequently permanently connecting the semiconductor body to a part of the housing being in the form of a substrate with an organic adhesive to which metal particles have been added, and connecting electrodes of the semiconductor device to terminals disposed in the housing.
  • the substrate is in the form of a heat-conducting material
  • the metal particles added to the adhesive are silver
  • the adhesive is hardenable by heat treatment.
  • the single FIGURE is a cross section of a semiconductor mounted in a housing in accordance with the method of this invention.
  • the plate-shaped semiconductor body of the semiconductor device 4 which is formed particularly of monocrystalline silicon and is to be mounted, is taken down on the rear or lower side thereof which is to be connected to the substrate 1. This is done by grinding so far that a total thickness of about 180 ⁇ m remains.
  • a silver layer 6 being approximately 1 ⁇ m thick is vapor-deposited on the chromium layer 5. It should be noted here that sufficiently good results are still obtained even with thinner silver layers, for instance with an Ag layer 6 being 0.5 ⁇ m thick. Because of constraints of size, the relative thicknesses of the layers in the drawing are not to scale.
  • the silver layer may be used as a metallization on the body without requiring the chromium layer.
  • the vapor deposition rates, and thereby the roughness of the finally obtained surface of the metallization must be matched to the size of the metal particles 7 provided in the adhesive 8 in such a manner that good area 1 contact is ensured between the surface of the silver metallization on the back of the chip and the metal particles provided in the adhesive. It is accordingly advantageous to use an adhesive to which metal particles that are as uniform as possible have been added. These are especially cylindrical or spherical conductive silver particles, the particle size being matched to the surface roughness of the silver layer 6.
  • the metal content of the adhesive may be equal to or more than 50 volume percent.
  • the chromium layer 5 serves as an adhesion substrate for the silver layer 6.

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Die Bonding (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
US06/218,498 1980-01-17 1980-12-22 Method for mounting a semiconductor device in a housing Expired - Fee Related US4417386A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3001613 1980-01-17
DE3001613A DE3001613C2 (de) 1980-01-17 1980-01-17 Befestigung eines, eine monolithisch integrierte Halbleiterschaltung enthaltenden Halbleiterkörpers aus Silicium an einer Unterlage mit einem entsprechenden Verfahren hierzu

Publications (1)

Publication Number Publication Date
US4417386A true US4417386A (en) 1983-11-29

Family

ID=6092314

Family Applications (1)

Application Number Title Priority Date Filing Date
US06/218,498 Expired - Fee Related US4417386A (en) 1980-01-17 1980-12-22 Method for mounting a semiconductor device in a housing

Country Status (4)

Country Link
US (1) US4417386A (fr)
EP (1) EP0032728B1 (fr)
JP (1) JPS56105643A (fr)
DE (1) DE3001613C2 (fr)

Cited By (24)

* Cited by examiner, † Cited by third party
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US4535350A (en) * 1981-10-29 1985-08-13 National Semiconductor Corporation Low-cost semiconductor device package and process
US4884649A (en) * 1986-09-18 1989-12-05 Mitsubishi Denki Kabushiki Kaisha Cruise control apparatus
US5103283A (en) * 1989-01-17 1992-04-07 Hite Larry R Packaged integrated circuit with in-cavity decoupling capacitors
US5569956A (en) * 1995-08-31 1996-10-29 National Semiconductor Corporation Interposer connecting leadframe and integrated circuit
US6452260B1 (en) 1997-09-02 2002-09-17 Silicon Light Machines Electrical interface to integrated circuit device having high density I/O count
US20040008399A1 (en) * 2001-06-25 2004-01-15 Trisnadi Jahja I. Method, apparatus, and diffuser for reducing laser speckle
US6707591B2 (en) 2001-04-10 2004-03-16 Silicon Light Machines Angled illumination for a single order light modulator based projection system
US6712480B1 (en) 2002-09-27 2004-03-30 Silicon Light Machines Controlled curvature of stressed micro-structures
US6714337B1 (en) 2002-06-28 2004-03-30 Silicon Light Machines Method and device for modulating a light beam and having an improved gamma response
US6728023B1 (en) 2002-05-28 2004-04-27 Silicon Light Machines Optical device arrays with optimized image resolution
US6764875B2 (en) 1998-07-29 2004-07-20 Silicon Light Machines Method of and apparatus for sealing an hermetic lid to a semiconductor die
US6767751B2 (en) 2002-05-28 2004-07-27 Silicon Light Machines, Inc. Integrated driver process flow
US6782205B2 (en) 2001-06-25 2004-08-24 Silicon Light Machines Method and apparatus for dynamic equalization in wavelength division multiplexing
US6801354B1 (en) 2002-08-20 2004-10-05 Silicon Light Machines, Inc. 2-D diffraction grating for substantially eliminating polarization dependent losses
US6800238B1 (en) 2002-01-15 2004-10-05 Silicon Light Machines, Inc. Method for domain patterning in low coercive field ferroelectrics
US6806997B1 (en) 2003-02-28 2004-10-19 Silicon Light Machines, Inc. Patterned diffractive light modulator ribbon for PDL reduction
US6813059B2 (en) 2002-06-28 2004-11-02 Silicon Light Machines, Inc. Reduced formation of asperities in contact micro-structures
US6822797B1 (en) 2002-05-31 2004-11-23 Silicon Light Machines, Inc. Light modulator structure for producing high-contrast operation using zero-order light
US6829092B2 (en) 2001-08-15 2004-12-07 Silicon Light Machines, Inc. Blazed grating light valve
US6829077B1 (en) 2003-02-28 2004-12-07 Silicon Light Machines, Inc. Diffractive light modulator with dynamically rotatable diffraction plane
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
US6956878B1 (en) 2000-02-07 2005-10-18 Silicon Light Machines Corporation Method and apparatus for reducing laser speckle using polarization averaging
US6987600B1 (en) 2002-12-17 2006-01-17 Silicon Light Machines Corporation Arbitrary phase profile for better equalization in dynamic gain equalizer
US20090302429A1 (en) * 2006-05-19 2009-12-10 Osram Opto Semiconductors Gmbh Electrically Conducting Connection with Insulating Connection Medium

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US4454529A (en) * 1981-01-12 1984-06-12 Avx Corporation Integrated circuit device having internal dampening for a plurality of power supplies
CA1222071A (fr) * 1984-01-30 1987-05-19 Joseph A. Aurichio Ruban conducteur avec adhesif de retention pour pouces d'electronique
US5049434A (en) * 1984-04-30 1991-09-17 National Starch And Chemical Investment Holding Corporation Pre-patterned device substrate device-attach adhesive transfer system
DE3444699A1 (de) * 1984-12-07 1986-06-19 Telefunken electronic GmbH, 7100 Heilbronn Elektrisches leistungsbauteil
EP0264635B1 (fr) * 1986-09-25 1991-08-21 Siemens Aktiengesellschaft Adhésif conducteur de l'électricité pour grand intervalle de température
JPS63278236A (ja) * 1987-02-18 1988-11-15 Mitsubishi Electric Corp 半導体装置
DE4132947C2 (de) * 1991-10-04 1998-11-26 Export Contor Ausenhandelsgese Elektronische Schaltungsanordnung
DE59812923D1 (de) 1997-07-23 2005-08-18 Infineon Technologies Ag Vorrichtung und verfahren zur herstellung einer chip-substrat-verbindung

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US2809332A (en) * 1953-07-29 1957-10-08 Rca Corp Power semiconductor devices
US3617821A (en) * 1970-09-17 1971-11-02 Rca Corp High-voltage transistor structure having uniform thermal characteristics
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US3794517A (en) * 1965-12-15 1974-02-26 Philips Corp Electric circuit elements and methods of manufacturing such elements
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US4127424A (en) * 1976-12-06 1978-11-28 Ses, Incorporated Photovoltaic cell array
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DE1514668B2 (de) * 1966-01-19 1977-05-12 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von chrom- silber-kontakten auf halbleiterbauelementen
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DE2619433A1 (de) * 1976-05-03 1977-11-10 Siemens Ag Elektrisches bauelement
DE2743773A1 (de) * 1976-10-04 1978-04-06 Owens Illinois Inc Elektrische vorrichtung

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US2809332A (en) * 1953-07-29 1957-10-08 Rca Corp Power semiconductor devices
US3794517A (en) * 1965-12-15 1974-02-26 Philips Corp Electric circuit elements and methods of manufacturing such elements
US3617821A (en) * 1970-09-17 1971-11-02 Rca Corp High-voltage transistor structure having uniform thermal characteristics
US3770565A (en) * 1972-01-05 1973-11-06 Us Navy Plastic mounting of epitaxially grown iv-vi compound semiconducting films
US3828227A (en) * 1973-04-09 1974-08-06 Sprague Electric Co Solid tantalum capacitor with end cap terminals
US4127424A (en) * 1976-12-06 1978-11-28 Ses, Incorporated Photovoltaic cell array
US4293587A (en) * 1978-11-09 1981-10-06 Zilog, Inc. Low resistance backside preparation for semiconductor integrated circuit chips

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Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4535350A (en) * 1981-10-29 1985-08-13 National Semiconductor Corporation Low-cost semiconductor device package and process
US4884649A (en) * 1986-09-18 1989-12-05 Mitsubishi Denki Kabushiki Kaisha Cruise control apparatus
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Also Published As

Publication number Publication date
EP0032728B1 (fr) 1984-05-23
JPS56105643A (en) 1981-08-22
DE3001613C2 (de) 1986-04-03
EP0032728A3 (en) 1981-08-12
EP0032728A2 (fr) 1981-07-29
DE3001613A1 (de) 1981-07-23

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