US3919525A - Vaporizer apparatus for vapor deposition equipment - Google Patents

Vaporizer apparatus for vapor deposition equipment Download PDF

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Publication number
US3919525A
US3919525A US437318*A US43731874A US3919525A US 3919525 A US3919525 A US 3919525A US 43731874 A US43731874 A US 43731874A US 3919525 A US3919525 A US 3919525A
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United States
Prior art keywords
vaporizing
current
vaporizing means
vaporizer
leads
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Expired - Lifetime
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US437318*A
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English (en)
Inventor
Karl Kerner
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Robert Bosch GmbH
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Robert Bosch GmbH
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Priority claimed from DE19732309405 external-priority patent/DE2309405C3/de
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Definitions

  • vapor depo- 1 l 9/2 1 18/491; 219/275 sition vessel are arranged to lie in a vertical plane and Int. Cl.2 conecting pans are mounted on each urrent bus be- 1 Field 05 ch 21 /271, 2 118/48, neath each vaporizer.
  • a glow discharge electrode is 1 49-1, 1 107-1 also mounted in this vertical plane. Heating current is applied to one end of each vaporizer by an insulated 1 1 References Cited lead.
  • the other end of the vaporizer is connected rig- UNITED STATES PATENTS idly to the supporting bus which is grounded to the 2.339.613 1/1944 Becker et a1 118/49 x Vessel Wall The Vertical alrangeme"t one P111e 2.373.823 4/1945 Gold 118/49 x makes Possible 11 Wide effective angle Over which 3.015.587 1/1962 MacDonald 118/49 x p r po iti n is ffective. 3.068.337 12/1962 Kuebrich et a1. 219/275 X 3.246.626 4/1966 Betar 118/49 8 Clams, 7 Drawmg Flgures U.S. Patent Nov. 11,1975 Sheet1of2 3,919,525
  • VAPORIZER APPARATUS FOR VAPOR DEPOSITION EQUIPMENT This invention relates to vaporizing apparatus for use in the high vacuum vapor deposition process for depositing vaporizable material in layers covering a relatively large area.
  • the vaporizing apparatus which forms the actual source of the vapor in vapor deposition equipment, consists either of a row of smaller Vaporizers, usually in spiral shape or in the form of vaporizing boats, or else consists of a vaporizer wire running more or less along the axis of an elongated vacuum vessel. If two or more different layers are to be vapor deposited, a second and other additional vapor deposition apparatus can be disposed parallel to the first in the same vessel.
  • the known vaporizing apparatus for vapor deposition equipment have a number of disadvantages.
  • the usable solid angle in which the vaporizer is effective is relatively small because of unfavorable geometry of the arrangement and, furthermore, when two or more vaporizers for different materials are provided in a vessel, theydeposit material on each other.
  • both the vaporizer elements and the electric current leads necessary for their current supply are disposed parallel to the axis of the vacuum vessel used for vapor deposition and they are arranged to lie substantially in the same plane.
  • the plane in which the vaporizing means and their current leads are located is a vertical plane.
  • the vertical arrangement has the advantage that without the provision of additional supporting members and without reduction of the solid angle of vapor transfer a drip pan for catching loosened vaporizing material dropping off the vaporizer can also be provided in the same plane, preferably mounted on a current lead beneath the vaporizer.
  • the longitudinal wire typefof vaporizer element is preferred for the above-described apparatus because in this case the effective solid angle, including all the directions in which direct vapor transfer takes place, is the largest.
  • the glow discharge electrode can advantageously be aligned in the same plane, preferably a vertical plane, in which the vaporizer and its current lead, or two or more of each, lie.
  • the vapor deposition equipment requires two or more separate vaporizers, it is desirable in many cases to provide a baffle by which at least one of the vaporizers can be covered or screened off.
  • the baffle is mounted so that it can be swung so as to cover selectively either one of two vaporizers.
  • FIG. 1 is a diagrammatic perspective view of a cylindrical vessel with spiral type vaporizing apparatus, as known in the prior art
  • FIG. 2 is a diagrammatic perspective view of a cylindrical vessel with a wire type vaporizing apparatus aligned near the vessel axis, as known in the prior art;
  • FIG. 3 is a diagrammatic perspective view of a cylindrical vessl provided with two parallel wire type vaporizers, as known in the prior art;
  • FIG. 4 is a diagrammatic cross-section of vaporizer apparatus in a vacuum vessel corresponding to FIG. 3;
  • FIG. 5 is a diagrammatic cross-section of vaporizing apparatus according to the invention in a cylindrical vacuum vessel
  • FIG. 6 is a longitudinal view, mostly in section, of a vaporizer apparatus in accordance with the invention.
  • FIG. 7 is a diagrammatic cross-section showing the principle of construction of a longitudinal wire multiple vaporizer according to the invention provided with pivoted baffles.
  • FIGS. 1 to 3 shown known forms of vaporizer apparatus in vapor deposition equipment, in a diagrammtic fashion, FIG. 1 showing a vaporizing apparatus composed of a number of spiral shaped Vaporizers, FIG. 2 a longitudinal wire vaporizer aligned near the axis of the vacuum vessel and FIG. 3 two parallel longitudinal wire Vaporizers.
  • the arrangement of FIG. 3 is used if two or more different layers are to be vapor deposited.
  • the vaporizing apparatus in this equipment generally utilize a horizontally disposed cylindrical vacuum vessel evacuated to about 10" to 10 torr.
  • the vaporizer apparatus of such vapor deposition equipment is generally located in the neighborhood of the cylinder axis.
  • the articles to be coated by vapor deposition can, for example, be mounted on a drum (not shown) by which they can be moved circumferentially along the inner wall of the vacuum vessel. Better results are obtained by means (not shown) providing a planetary movement of the articles to be coated, in which case there is, in addition to the circular movement along the vacuum vessel wall, a rotation of the articles being coated on their own axes.
  • FIG. 4 shows a known form of vaporizing apparatus with two longitudinal vaporizer wires 10 and 11 lying in a horizontal plane passing close to the axis of the vacuum vessel.
  • a drip pan 12 Beneath the vaporizer wires 10 and 11 is a drip pan 12, below which are three current supply busses 13, 14 and 15.
  • a glow discharge electrode 16 consists of the electrode proper 17 and a shield structure 18 that is electrically and mechanically connected to the grounded current supply bus 15 on which the drip pan 12 is also supported.
  • the current bus 13 delivers the current for the vaporizer wire 10, while the current bus 14 provides the current for the vaporizer wire 11.
  • the usable solid angle more particularly the usable cross-sectional angle, the angle a for the wire 10 and the angle b for the wire 11, is relatively small and amounts to only a little over In the lower portion of the vacuum vessel 19 there is produced practically no vapor deposition and the obtainable layer thickness is limited both for this reason and on account of the limited capacity of the vaporizer wires for vapor deposition on the articles, particularly in the case of articles of considerable areas. Furthermore, in this type of arrangement the two Vaporizers I and 11 deposit material on each other, which can be prevented only by a supplementary baffle which would still further reduce theusuable cross-sectional angle of effective vapor deposition.
  • the vacuum vessel is again designated 19. Inside the vessel in this case are a first vaporizer wire 20, a first current lead or bus 21, a second vaporizer wire 22, a second current lead or bus 23 and a glow discharge electrode 24, all arranged vertically one below charge electrode 24.
  • a first vaporizer wire 20 Inside the vessel in this case are a first vaporizer wire 20, a first current lead or bus 21, a second vaporizer wire 22, a second current lead or bus 23 and a glow discharge electrode 24, all arranged vertically one below charge electrode 24.
  • FIG. 6 shows a longitudinal section of the vaporizing apparatus of the vapor deposition equipment.
  • An end wall 26 of the vessel 19 is shown, but otherwise the structure of the vessel 19 has been omitted for simplicity. Openings 27 and 28 are provided in the end wall 26 to provide an insulated feed-through andsupport for the leads 29 and 30 through which theelectric supply voltage is furnished to the Vaporizers.
  • Flexible current leads 31 and 32 are connected to the leads 29 and 30, respectively, and are connected at their other ends with clamping terminals 33 and 34, respectively, which are mounted with springs tending to stretch the vaporizer wires 20 and 22 that are clamped in the clamping terminals 33 and 34.
  • the other ends of the vaporizer wires 21 and 22 are respectively held in fixed clamping terminals 35 and 36 that are grounded to the vacuumvessel structure through the grounded current busses 21 and 23 to which the post 37 on which they are mounted is fastened.
  • the current supply leads 21 and 23 are rigid members also serving for mechanical support of the post 37 and the vaporizer wires and they are at ground plane results in an increased useful angle through which vapor deposition takes place, as well as a form of construction in which the drip pans are readily providedQsince they may be simply carried on top of the current supply busses 21 and 23.
  • baffle means 40 is composed of two halves 41 and 42, each having an L-shaped cross-section, mounted on axes passing through the points 43 and 44, so as to selectively cover one of the two vaporizing devices 20, 21 and 22, 23.
  • the baffle means 40 was left out so that the structure inside could be better shown.
  • Vaporizers in' longitudinal wire form it is of course possible to utilize vaporizers otherwise constructed, but, generally, other types of arrangements will involve complication in construction and increase of expense. It is nevertheless readily conceivable that the vaporizing apparatus instead of having one or two longitudinal vaporizer wires, could have one or two rows of spiral Vaporizers or vaporizing boats for vaporizing the material to be vaporized.
  • both vaporizing boats and spiral vaporizer elements, as well as a longitudinal wire are well suited for use as the upper vaporizer, but for the lower vaporizer only a row of spirals or a longitudinal wire come into question, and the alternative of a row of vaporizing boats practically drops out of consideration, since it does not vaporize well downwards and in the lower position would also be subject to some blocking out by the upper vaporizer apparatus.
  • the longitudinal wire form is preferred in a general way, the use of spiral elements or vaporizing boats can be advantageous in particular cases for vapor depositing layers of certain materials.
  • solid angle has been used to indicate angular spread of divergence in space in accordance with the usage in solid geometry.
  • Space angle, divergence angle or angle of diffusion are equivalent terms.
  • the cross-sectional or sectoral angle determines the spread of rectilinear vapor diffusion paths, and hence the extent of direct vapor diffusion from vaporizer to exposed substrates.
  • a vaporizer apparatus comprising at least two elongated vaporizing means capable of being heated by the passage of electric current therethrough (20, 22) and an elongated current return lead for each of said vaporizing means (21, 23), said vaporizing means and said current return leads being disposed parallel to the direction in which said vessel is elongagted and lying substantially in one plane.
  • Vaporizing apparatus as defined in claim 1 in which said vaporizing means (20, 22) and said current return leads (2 1, 23) lie substantially in a vertical plane and in which, further, elongated drip pan means (38, 39) are longitudinally disposed beneath each vaporizing means for substantially the full length thereof between the vaporizing means and its current return lead.
  • Vaporizing apparatus as defined in claim 2 in which there are two sets of a vaporizing means and a current lead disposed one above the other, each of said current leads (21, 23) of one of said sets being disposed beneath the vaporizing means of the set.
  • Vaporizing apparatus as defined in claim 4, in which one drip pan means (38, 39) is affixed on top of each of said current leads (21, 23) beneath one of said vaporizing means (20, 22).
  • Vaporizing apparatus as defined in claim 1, in which an elongated planar glow discharge electrode (24) is provided disposed edgewise beneath the lowermost of said current return leads substantially in the same plane as said vaporizing means (20, 22) and said current return leads (21, 23), in which further at least said lowermost of said current return leads has an end at ground potential and in which a substantially grounded electrode (25) spaced from and covering one side of said glow discharge electrode is disposed extending downward from said lowermost current return lead.
  • Vaporizing apparatus as defined in claim 4, in which baffle means (40) for screening off said vaporizing means are mounted in such a way as to be capable 'to said respective current return leads (21, 23) for holding one end of each vaporizing means and in which, further, spring tensioned clamping terminals (33, 34) are provided for the other ends of said vaporizing means and are insulatedly supported by said current return leads (21, 23) so as to exert tension on said vaporizing means, said spring tensioned clamping terminals being connected by flexible conductors (31, 32)

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
US437318*A 1973-02-24 1974-01-28 Vaporizer apparatus for vapor deposition equipment Expired - Lifetime US3919525A (en)

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Application Number Priority Date Filing Date Title
DE19732309405 DE2309405C3 (de) 1973-02-24 Bedampfungsanordnung

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US (1) US3919525A (enrdf_load_stackoverflow)
JP (1) JPS571587B2 (enrdf_load_stackoverflow)
CH (1) CH584760A5 (enrdf_load_stackoverflow)
DD (1) DD111934A5 (enrdf_load_stackoverflow)
FR (1) FR2219244B3 (enrdf_load_stackoverflow)
GB (1) GB1461922A (enrdf_load_stackoverflow)
IT (1) IT1008257B (enrdf_load_stackoverflow)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173821U (enrdf_load_stackoverflow) * 1985-04-17 1986-10-29
GB2213838A (en) * 1987-12-23 1989-08-23 Plessey Co Plc Environmental protection of superconducting thin films

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2339613A (en) * 1942-02-27 1944-01-18 Bell Telephone Labor Inc Selenium rectifier and method of making it
US2373823A (en) * 1942-06-18 1945-04-17 Western Electric Co Method of coating
US3015587A (en) * 1958-09-05 1962-01-02 Technology Instr Corp Of Acton Rhodium germanium film resistor
US3068337A (en) * 1958-12-05 1962-12-11 Gen Electric Vaporizer and method for making the same
US3246626A (en) * 1960-12-16 1966-04-19 Gen Electric Metallizing filament
US3598957A (en) * 1968-09-13 1971-08-10 Tokyo Shibaura Electric Co Vacuum deposition apparatus
US3637980A (en) * 1970-07-13 1972-01-25 Motorola Inc Electrical and mechanical connections and support for evaporating boats
US3698946A (en) * 1969-11-21 1972-10-17 Hughes Aircraft Co Transparent conductive coating and process therefor
US3715234A (en) * 1970-12-28 1973-02-06 Gen Electric Non-rectifying composite contact for semiconductor devices

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2339613A (en) * 1942-02-27 1944-01-18 Bell Telephone Labor Inc Selenium rectifier and method of making it
US2373823A (en) * 1942-06-18 1945-04-17 Western Electric Co Method of coating
US3015587A (en) * 1958-09-05 1962-01-02 Technology Instr Corp Of Acton Rhodium germanium film resistor
US3068337A (en) * 1958-12-05 1962-12-11 Gen Electric Vaporizer and method for making the same
US3246626A (en) * 1960-12-16 1966-04-19 Gen Electric Metallizing filament
US3598957A (en) * 1968-09-13 1971-08-10 Tokyo Shibaura Electric Co Vacuum deposition apparatus
US3698946A (en) * 1969-11-21 1972-10-17 Hughes Aircraft Co Transparent conductive coating and process therefor
US3637980A (en) * 1970-07-13 1972-01-25 Motorola Inc Electrical and mechanical connections and support for evaporating boats
US3715234A (en) * 1970-12-28 1973-02-06 Gen Electric Non-rectifying composite contact for semiconductor devices

Also Published As

Publication number Publication date
DE2309405B2 (de) 1977-01-13
JPS49117372A (enrdf_load_stackoverflow) 1974-11-09
CH584760A5 (enrdf_load_stackoverflow) 1977-02-15
DE2309405A1 (de) 1974-08-29
JPS571587B2 (enrdf_load_stackoverflow) 1982-01-12
FR2219244B3 (enrdf_load_stackoverflow) 1976-10-15
FR2219244A1 (enrdf_load_stackoverflow) 1974-09-20
IT1008257B (it) 1976-11-10
GB1461922A (en) 1977-01-19
DD111934A5 (enrdf_load_stackoverflow) 1975-03-12

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