JPS49117372A - - Google Patents

Info

Publication number
JPS49117372A
JPS49117372A JP49021009A JP2100974A JPS49117372A JP S49117372 A JPS49117372 A JP S49117372A JP 49021009 A JP49021009 A JP 49021009A JP 2100974 A JP2100974 A JP 2100974A JP S49117372 A JPS49117372 A JP S49117372A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49021009A
Other languages
Japanese (ja)
Other versions
JPS571587B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19732309405 external-priority patent/DE2309405C3/de
Application filed filed Critical
Publication of JPS49117372A publication Critical patent/JPS49117372A/ja
Publication of JPS571587B2 publication Critical patent/JPS571587B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP2100974A 1973-02-24 1974-02-21 Expired JPS571587B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732309405 DE2309405C3 (de) 1973-02-24 Bedampfungsanordnung

Publications (2)

Publication Number Publication Date
JPS49117372A true JPS49117372A (enrdf_load_stackoverflow) 1974-11-09
JPS571587B2 JPS571587B2 (enrdf_load_stackoverflow) 1982-01-12

Family

ID=5873057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2100974A Expired JPS571587B2 (enrdf_load_stackoverflow) 1973-02-24 1974-02-21

Country Status (7)

Country Link
US (1) US3919525A (enrdf_load_stackoverflow)
JP (1) JPS571587B2 (enrdf_load_stackoverflow)
CH (1) CH584760A5 (enrdf_load_stackoverflow)
DD (1) DD111934A5 (enrdf_load_stackoverflow)
FR (1) FR2219244B3 (enrdf_load_stackoverflow)
GB (1) GB1461922A (enrdf_load_stackoverflow)
IT (1) IT1008257B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173821U (enrdf_load_stackoverflow) * 1985-04-17 1986-10-29
GB2213838A (en) * 1987-12-23 1989-08-23 Plessey Co Plc Environmental protection of superconducting thin films

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2339613A (en) * 1942-02-27 1944-01-18 Bell Telephone Labor Inc Selenium rectifier and method of making it
US2373823A (en) * 1942-06-18 1945-04-17 Western Electric Co Method of coating
US3015587A (en) * 1958-09-05 1962-01-02 Technology Instr Corp Of Acton Rhodium germanium film resistor
US3068337A (en) * 1958-12-05 1962-12-11 Gen Electric Vaporizer and method for making the same
US3246626A (en) * 1960-12-16 1966-04-19 Gen Electric Metallizing filament
US3598957A (en) * 1968-09-13 1971-08-10 Tokyo Shibaura Electric Co Vacuum deposition apparatus
US3698946A (en) * 1969-11-21 1972-10-17 Hughes Aircraft Co Transparent conductive coating and process therefor
US3637980A (en) * 1970-07-13 1972-01-25 Motorola Inc Electrical and mechanical connections and support for evaporating boats
US3715234A (en) * 1970-12-28 1973-02-06 Gen Electric Non-rectifying composite contact for semiconductor devices

Also Published As

Publication number Publication date
DE2309405B2 (de) 1977-01-13
CH584760A5 (enrdf_load_stackoverflow) 1977-02-15
US3919525A (en) 1975-11-11
DE2309405A1 (de) 1974-08-29
JPS571587B2 (enrdf_load_stackoverflow) 1982-01-12
FR2219244B3 (enrdf_load_stackoverflow) 1976-10-15
FR2219244A1 (enrdf_load_stackoverflow) 1974-09-20
IT1008257B (it) 1976-11-10
GB1461922A (en) 1977-01-19
DD111934A5 (enrdf_load_stackoverflow) 1975-03-12

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