GB1461922A - Vapour-depositing apparatus - Google Patents

Vapour-depositing apparatus

Info

Publication number
GB1461922A
GB1461922A GB806774A GB806774A GB1461922A GB 1461922 A GB1461922 A GB 1461922A GB 806774 A GB806774 A GB 806774A GB 806774 A GB806774 A GB 806774A GB 1461922 A GB1461922 A GB 1461922A
Authority
GB
United Kingdom
Prior art keywords
wires
feb
devices
deposition apparatus
vapour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB806774A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19732309405 external-priority patent/DE2309405C3/en
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of GB1461922A publication Critical patent/GB1461922A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1461922 Vapour deposition apparatus ROBERT BOSCH GmbH 22 Feb 1974 [24 Feb 1973] 8067/74 Heading C7F A vapour deposition apparatus comprises one or more vapourizing devices, e.g. containers, spirals or wires 20; 22 with associated conductors 21, 23, and all the devices and conductors lie in the same plane, preferably a vertical one. The substrates may be mounted on a rotary drum or given a planetary motion. Elongate drip pans, Fig.6 (not shown), are provided under the wires, and wires may be associated with pivoted shutters, Fig.7 (not shown).
GB806774A 1973-02-24 1974-02-22 Vapour-depositing apparatus Expired GB1461922A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732309405 DE2309405C3 (en) 1973-02-24 Steaming arrangement

Publications (1)

Publication Number Publication Date
GB1461922A true GB1461922A (en) 1977-01-19

Family

ID=5873057

Family Applications (1)

Application Number Title Priority Date Filing Date
GB806774A Expired GB1461922A (en) 1973-02-24 1974-02-22 Vapour-depositing apparatus

Country Status (7)

Country Link
US (1) US3919525A (en)
JP (1) JPS571587B2 (en)
CH (1) CH584760A5 (en)
DD (1) DD111934A5 (en)
FR (1) FR2219244B3 (en)
GB (1) GB1461922A (en)
IT (1) IT1008257B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2213838A (en) * 1987-12-23 1989-08-23 Plessey Co Plc Environmental protection of superconducting thin films

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173821U (en) * 1985-04-17 1986-10-29

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2339613A (en) * 1942-02-27 1944-01-18 Bell Telephone Labor Inc Selenium rectifier and method of making it
US2373823A (en) * 1942-06-18 1945-04-17 Western Electric Co Method of coating
US3015587A (en) * 1958-09-05 1962-01-02 Technology Instr Corp Of Acton Rhodium germanium film resistor
US3068337A (en) * 1958-12-05 1962-12-11 Gen Electric Vaporizer and method for making the same
US3246626A (en) * 1960-12-16 1966-04-19 Gen Electric Metallizing filament
US3598957A (en) * 1968-09-13 1971-08-10 Tokyo Shibaura Electric Co Vacuum deposition apparatus
US3698946A (en) * 1969-11-21 1972-10-17 Hughes Aircraft Co Transparent conductive coating and process therefor
US3637980A (en) * 1970-07-13 1972-01-25 Motorola Inc Electrical and mechanical connections and support for evaporating boats
US3715234A (en) * 1970-12-28 1973-02-06 Gen Electric Non-rectifying composite contact for semiconductor devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2213838A (en) * 1987-12-23 1989-08-23 Plessey Co Plc Environmental protection of superconducting thin films

Also Published As

Publication number Publication date
JPS571587B2 (en) 1982-01-12
FR2219244B3 (en) 1976-10-15
DE2309405A1 (en) 1974-08-29
JPS49117372A (en) 1974-11-09
DE2309405B2 (en) 1977-01-13
IT1008257B (en) 1976-11-10
CH584760A5 (en) 1977-02-15
US3919525A (en) 1975-11-11
FR2219244A1 (en) 1974-09-20
DD111934A5 (en) 1975-03-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
746 Register noted 'licences of right' (sect. 46/1977)
PCNP Patent ceased through non-payment of renewal fee