JPS571587B2 - - Google Patents

Info

Publication number
JPS571587B2
JPS571587B2 JP2100974A JP2100974A JPS571587B2 JP S571587 B2 JPS571587 B2 JP S571587B2 JP 2100974 A JP2100974 A JP 2100974A JP 2100974 A JP2100974 A JP 2100974A JP S571587 B2 JPS571587 B2 JP S571587B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2100974A
Other versions
JPS49117372A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19732309405 external-priority patent/DE2309405C3/de
Application filed filed Critical
Publication of JPS49117372A publication Critical patent/JPS49117372A/ja
Publication of JPS571587B2 publication Critical patent/JPS571587B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP2100974A 1973-02-24 1974-02-21 Expired JPS571587B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732309405 DE2309405C3 (de) 1973-02-24 Bedampfungsanordnung

Publications (2)

Publication Number Publication Date
JPS49117372A JPS49117372A (ja) 1974-11-09
JPS571587B2 true JPS571587B2 (ja) 1982-01-12

Family

ID=5873057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2100974A Expired JPS571587B2 (ja) 1973-02-24 1974-02-21

Country Status (7)

Country Link
US (1) US3919525A (ja)
JP (1) JPS571587B2 (ja)
CH (1) CH584760A5 (ja)
DD (1) DD111934A5 (ja)
FR (1) FR2219244B3 (ja)
GB (1) GB1461922A (ja)
IT (1) IT1008257B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173821U (ja) * 1985-04-17 1986-10-29

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2213838A (en) * 1987-12-23 1989-08-23 Plessey Co Plc Environmental protection of superconducting thin films

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2339613A (en) * 1942-02-27 1944-01-18 Bell Telephone Labor Inc Selenium rectifier and method of making it
US2373823A (en) * 1942-06-18 1945-04-17 Western Electric Co Method of coating
US3015587A (en) * 1958-09-05 1962-01-02 Technology Instr Corp Of Acton Rhodium germanium film resistor
US3068337A (en) * 1958-12-05 1962-12-11 Gen Electric Vaporizer and method for making the same
US3246626A (en) * 1960-12-16 1966-04-19 Gen Electric Metallizing filament
US3598957A (en) * 1968-09-13 1971-08-10 Tokyo Shibaura Electric Co Vacuum deposition apparatus
US3698946A (en) * 1969-11-21 1972-10-17 Hughes Aircraft Co Transparent conductive coating and process therefor
US3637980A (en) * 1970-07-13 1972-01-25 Motorola Inc Electrical and mechanical connections and support for evaporating boats
US3715234A (en) * 1970-12-28 1973-02-06 Gen Electric Non-rectifying composite contact for semiconductor devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173821U (ja) * 1985-04-17 1986-10-29

Also Published As

Publication number Publication date
FR2219244B3 (ja) 1976-10-15
DE2309405A1 (de) 1974-08-29
JPS49117372A (ja) 1974-11-09
GB1461922A (en) 1977-01-19
DE2309405B2 (de) 1977-01-13
IT1008257B (it) 1976-11-10
CH584760A5 (ja) 1977-02-15
US3919525A (en) 1975-11-11
FR2219244A1 (ja) 1974-09-20
DD111934A5 (ja) 1975-03-12

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