DE2309405B2 - STEAM ARRANGEMENT - Google Patents

STEAM ARRANGEMENT

Info

Publication number
DE2309405B2
DE2309405B2 DE19732309405 DE2309405A DE2309405B2 DE 2309405 B2 DE2309405 B2 DE 2309405B2 DE 19732309405 DE19732309405 DE 19732309405 DE 2309405 A DE2309405 A DE 2309405A DE 2309405 B2 DE2309405 B2 DE 2309405B2
Authority
DE
Germany
Prior art keywords
steam arrangement
steam
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19732309405
Other languages
German (de)
Other versions
DE2309405A1 (en
DE2309405C3 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority claimed from DE19732309405 external-priority patent/DE2309405C3/en
Priority to DE19732309405 priority Critical patent/DE2309405C3/en
Priority to FR7345859A priority patent/FR2219244B3/fr
Priority to CH95074A priority patent/CH584760A5/xx
Priority to US437318*A priority patent/US3919525A/en
Priority to DD176670A priority patent/DD111934A5/xx
Priority to IT48491/74A priority patent/IT1008257B/en
Priority to JP2100974A priority patent/JPS571587B2/ja
Priority to GB806774A priority patent/GB1461922A/en
Publication of DE2309405A1 publication Critical patent/DE2309405A1/en
Publication of DE2309405B2 publication Critical patent/DE2309405B2/en
Publication of DE2309405C3 publication Critical patent/DE2309405C3/en
Application granted granted Critical
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source
DE19732309405 1973-02-24 1973-02-24 Steaming arrangement Expired DE2309405C3 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
DE19732309405 DE2309405C3 (en) 1973-02-24 Steaming arrangement
FR7345859A FR2219244B3 (en) 1973-02-24 1973-12-20
CH95074A CH584760A5 (en) 1973-02-24 1974-01-24
US437318*A US3919525A (en) 1973-02-24 1974-01-28 Vaporizer apparatus for vapor deposition equipment
DD176670A DD111934A5 (en) 1973-02-24 1974-02-19
IT48491/74A IT1008257B (en) 1973-02-24 1974-02-20 VAPORIZATION ARRANGEMENT
JP2100974A JPS571587B2 (en) 1973-02-24 1974-02-21
GB806774A GB1461922A (en) 1973-02-24 1974-02-22 Vapour-depositing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732309405 DE2309405C3 (en) 1973-02-24 Steaming arrangement

Publications (3)

Publication Number Publication Date
DE2309405A1 DE2309405A1 (en) 1974-08-29
DE2309405B2 true DE2309405B2 (en) 1977-01-13
DE2309405C3 DE2309405C3 (en) 1977-09-01

Family

ID=

Also Published As

Publication number Publication date
FR2219244B3 (en) 1976-10-15
CH584760A5 (en) 1977-02-15
GB1461922A (en) 1977-01-19
JPS571587B2 (en) 1982-01-12
JPS49117372A (en) 1974-11-09
US3919525A (en) 1975-11-11
DE2309405A1 (en) 1974-08-29
FR2219244A1 (en) 1974-09-20
DD111934A5 (en) 1975-03-12
IT1008257B (en) 1976-11-10

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
EF Willingness to grant licences
8339 Ceased/non-payment of the annual fee