US3912372A - Photoelectric detector device - Google Patents

Photoelectric detector device Download PDF

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Publication number
US3912372A
US3912372A US465572A US46557274A US3912372A US 3912372 A US3912372 A US 3912372A US 465572 A US465572 A US 465572A US 46557274 A US46557274 A US 46557274A US 3912372 A US3912372 A US 3912372A
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US
United States
Prior art keywords
image
slit
signal
linear mark
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US465572A
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English (en)
Inventor
Shinya Sasayama
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Nikon Corp
Original Assignee
Nippon Kogaku KK
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Assigned to NIKON CORPORATION, 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, JAPAN reassignment NIKON CORPORATION, 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU, TOKYO, JAPAN CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). EFFECTIVE APR. 1, 1988 Assignors: NIPPON KOGAKU, K.K.
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/40—Optical focusing aids

Definitions

  • Oscillating means are provided for causing the image-forming light beam passing through the optical system and the plates to be oscillated relative to each other at a predetermined frequency so as to scan the image of the linear mark within a range containing at least the slits.
  • a processing circuit for taking the difference between the output signals from the two photoelectric converters derives from such difference signal a frequency component equal to the oscillation frequency of the oscillating means, thus providing either a positive or a negative signal indicating the position of the linear mark.
  • This invention relates to a photoelectric detector device for determining whether or not a body formed with a linear mark is positioned within a certain range.
  • a photoelectric detection device which is capable of determining whether or not the position of a body is within a certain set range.
  • the photoelectric detector device for determining whether or not a body formed with a linear mark lies within a predetermined set range comprises an imageforming optical system for forming an image of the linear mark.
  • a plate formed with a slit is disposed adjacent the plane in which the image of the linear mark is formed by the optical system.
  • the slit is positioned to correspond to one end of the set range and is parallel to the linear mark.
  • a second plate formed with a slit is disposed adjacent said plane. The second slit is positioned to correspond to the other end of the set range and is parallel to the linear mark.
  • a first photoelectric converter means is provided for converting into an electrical signal a light signal passed through the slit in the first plate
  • a second photoelectric converter means is provided for converting into an electrical signal a light signal passed through the slit in the second plate.
  • Oscillating means are provided for causing the image-forming light beam passing through the optical system and the first and second slit plates to be oscillated relative to each other at a predetermined frequency so as to scan the image of the linear mark within a range containing at least the slit portions of the first and second plates.
  • a processing circuit is provided for taking the difference between the output signals from the first and second photoelectric converter means and deriving from the difference a frequency component equal to the oscillation frequency of the oscillating means, thereby providing either a positive or a negative signal when the image of the linear mark lies within the set range, and providing either a negative or a positive signal when the image lies outside the set range.
  • a single slit plate may be employed instead of the two slit plates.
  • the single slit plate has a slit formed at a location thereof corresponding to one end of the set range and parallel to the linear mark and has a linear opaque portion formed at a location thereof corresponding to the other end of the set range and parallel to the linear mark.
  • the remainder of the slit plate is translucent.
  • the image-forming light passing through the optical system and the single slit plate are oscillated relative to each other at a predetermined frequency so as to scan the image of the linear mark within a range containing at least the slit and linear opaque portion of the slit plate.
  • a single photoelectric converter means may be employed instead of the two photoelectric converter means.
  • a synchronous rectifier circuit is provided for deriving from the output signal of the single photoelectric converter means a frequency component equal to the oscillation frequency of the oscillating means, thereby providing either a positive or a negative signal and either a negative or a positive signal in the same manner as described in respect of the first embodiment.
  • FIG. 1 is a diagrammatic representation of a photoelectric microscope according to the prior art
  • FIG. 2 is a graph illustrating the displacement-output characteristic of the photoelectric microscope shown in FIG. 1;
  • FIG. 3 is a diagrammatic representation of a first embodiment of the present invention.
  • FIGS. 4(a) and 4(b) are graphs illustrating the displacement-output characteristic of the embodiment of the present invention.
  • FIG. 5 is a perspective view illustrating a specific form of the scanning means
  • FIG. 6 illustrates diagrammatically a second embodiment of the present invention.
  • FIG. 7 is a sectional view of the slit plate used in the second embodiment.
  • a body 1 to be detected is formed with a linear mark 2, the image of which may be focused on a slit 4 by an objective lens 3 and the image-carrier light is received by a photoelectric converter 5 disposed behind the slit 4.
  • a scanning means6 Disposed forwardly of the slit 4 is a scanning means6 driven by an oscillator 7.
  • the scanning means 6 may be oscillated in a sine form and scan the image of the mark 2 perpendicularly to the slit 4 or perpendicularly to the light beam.
  • the scanning means 6 may be realized by utilizing an alternating field to rotate and oscillate a glass plate about its own axis.
  • the output of the photoelectric converter 5 is a signal modulated at a frequency equal to the scanning frequency of the scanning means 6.
  • Such output signal may be amplified by a preamplifier 8, and then synchronously rectified by a synchronous rectifier circuit 9 at a frequency equal to the scanning frequency. That is, the synchronous rectifier takes a frequency component equal to the scanning frequency out of the output signal from the preamplifier 8.
  • FIG. 2 shows the relationship between the position (displacement) of the image of the mark relative to the center of oscillation for the slit scanning and the output of the synchronous rectifier circuit.
  • the abscissa represents the displacement and the ordinate represents the output of the synchronous rectifier circuit.
  • the output is also zero.
  • the output is substantially proportional to the displacement so that the position of the mark can be detected by using a meter 10 to read the position where the output is zero.
  • the photoelectric microscope enables accurate detection of the position of the mark for zero displacement, whereas, as already stated, it cannot ensure accurate detection of the position of the mark for displacement in the vicinity of zero when the displacement-output characteristic is variable under the influence of such factors as width of thejmark, scanning amplitude, brightness of the illumination, etc.
  • a body 11 to be detected has a linear mark 12 formed on one surface thereof.
  • the linear mark 12 is focused through a lens 13 and a half-mirror 17 onto a first slit plate 14 and a second slit plate 18, respectively.
  • the first slit plate 14 is formed with a slit parallel to the linear mark 12 and at a location corresponding to one end of the set range which is off the optical axis of the lens 13.
  • the second slit plate 18 is formed with a slit parallel to the linear mark 12 and at a location corresponding to the other end of the set range which is off the optical axis of the lens 13.
  • a scanning means, designated by reference numeral 16 may be oscillated in a sine form and scan the image of the mark 12 perpendicularly to the first and second slits l4 and 18, and is constructed in the manner as shown in FIG. 5.
  • a glass member 29 having a coil 30 wound thereabout is disposed in the field of a magnet 31 and supported for oscillation by a steel wire 32.
  • Supply of an AC sine-wave current from an oscillator 21 to the coil 30 causes the glass member 29 to be oscillated in a sine form about the steel wire 32.
  • Such sine-form oscillation of the glass member may be utilized to oscillatorily scan the image of the mark 12 in a sine fashion and perpendicularly to the slits in the first and second slit plates 14 and 18, respectively.
  • photoelectric converters and 19 are provided for receiving light beams passed through the slits in the first and second slit plates 14 and 18 to convert such light beams into electrical signals.
  • a differential amplifier 20 is connected to receive the output signals from the photoelectric converters 15 and 19 through respective preamplifiers 8 to take the difference between the two output signals.
  • a synchronous rectifier circuit 22 is connected to take a frequency component equal to the scanning frequency of the scanning means 16 out ofthe output signal from the differential amplifier 20, in accordance with the signal from an oscillator 21, and the output of the synchronous rectifier circuit is connected to an indicating meter 23.
  • the output of the synchronous rectifier circuit 22 is zero in the set positions 27 and 28 of the slits and is positive and negative inside and outside the set positions respectively. Therefore, the positive or negative value of output indicated by the meter 23 determines whether or not the body to be detected lies within the set range.
  • FIG. 6 shows a second embodiment of the present invention wherein reference numerals similar to those in FIG. 3 designate similar elements.
  • a slit plate 33, a condenser lens 36, a photoelectric converter 15 and a preamplifier 8 respectively replace the half-mirror 17, the first and second slit plates 14 and 18, the photoelectric converters 15 and 19, the preamplifiers 8 and the differential amplifier 20 in the first embodiment.
  • the slit plate 33 as is shown in FIG. 7, comprises a slit portion 34 for fully passing light therethrough, a light-intercepting portion 35 for fully intercepting light, and a translucent portion 37 for half-passing light.
  • the condenser lens 36 is such that all light passed through the slit in plate 33 is passed through the condenser lens 36 to the photoelectric converter 15, which converts the light into an electrical signal.
  • the difference between the outputs of the two photoelectric converters has been taken and transmitted to the subsequent stage thereby to provide such displacement-output characteristic as shown in FIG. 4(b).
  • the output of the photoelectric converter 15 when the slit portion 34 of the plate 33 is being scanned and the output of the photoelectric converter 15 when the light-intercepting portion 35 of the slit plate is being scanned are in the opposite characteristic relations and therefore, the sum of these two outputs may provide the displacement-output characteristic as shown in FIG. 4(b).
  • the linear mark 12 in the body 11 to be detected lies within a certain range can be known in the same manner as that described with respect to the first embodiment.
  • the present invention can readily detect whether or not a body lies within a certain set range and this is useful in the fields of measurement, examination and so forth.
  • a photoelectric detector device for determining whether or not a body formed with a linear mark lies within a predetermined set range, comprising;
  • a first plate formed with a first slit and disposed adjacent one of said two different planes, said first slit positioned at a location corresponding to one end of the set range and parallel to said linear mark;
  • a second plate formed with a second slit and disposed adjacent the other of said two planes, said second slit positioned at a location corresponding to the other end of said set range and parallel to said linear mark;
  • first photoelectric converter means for converting into an electrical signal a light signal passed through said first slit in said first plate
  • a second photoelectric converter means for converting into an electrical signal a light signal passed through said second slit in said second plate
  • oscillating means for causing the image-forming light beam passing through said optical system and said first and second plates to be oscillated relative to each other at a predetermined frequency so as to scan the image of said mark within a range containing at least the slit portions of said first and second plates;
  • a processing circuit for taking the difference between the output signals from said first and second photoelectric converter means and deriving from said difference signal a frequency component equal to the oscillation frequency of said oscillating means, thereby providing either a positive or a negative signal when the image of said mark lies within said range and providing either a negative or a positive signal when said image lies outside said range.
  • a photoelectric detector device in which said image-forming optical system comprises, a lens for forming an image of said linear mark and a half-mirror disposed in the optical path of said lens for dividing said optical path into two optical paths, said first plate being disposed in one of the two optical paths and said second plate being disposed in the other of the two optical paths.
  • a photoelectric detector device wherein said oscillating means causes the imageforming light beam prior to its incidence on said halfmirror to be oscillated at a predetermined frequency.
  • a photoelectric detector device according to claim 1, wherein said oscillating means is adapted to cause the image-forming light beam passing through said optical system to be oscillated at a predetermined frequency.
  • a photoelectric detector device according to claim 1, wherein said processing circuit includes:
  • a differential amplifier circuit for deriving the difference between the output signals from said first and second photoelectric converter means
  • a synchronous rectifier circuit for deriving from the output signal of said differential amplifier circuit a frequency component equal to the oscillation frequency of said oscillating means.
  • a photoelectric detector device further comprising means connected to said synchronous rectifier circuit for providing an indication corresponding to either said positive or said negative signal.
  • a photoelectric detector device according to claim 1, further comprising means connected to said processing circuit for providing an indication corresponding to either said positive or said negative signal.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
US465572A 1973-05-10 1974-04-30 Photoelectric detector device Expired - Lifetime US3912372A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5118573A JPS5525602B2 (de) 1973-05-10 1973-05-10

Publications (1)

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US3912372A true US3912372A (en) 1975-10-14

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US465572A Expired - Lifetime US3912372A (en) 1973-05-10 1974-04-30 Photoelectric detector device

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US (1) US3912372A (de)
JP (1) JPS5525602B2 (de)
DE (1) DE2422866C3 (de)
GB (1) GB1465791A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0908709A2 (de) * 1997-09-16 1999-04-14 Polytec GmbH Vorrichtung zur berührungslosen Schwingungsmessung
US5926305A (en) * 1992-10-27 1999-07-20 Topcon Corporation Marking apparatus having feedback-controlled rotational laser beam

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5228339A (en) * 1975-08-29 1977-03-03 Nippon Kogaku Kk <Nikon> Differential slit
DE3135180A1 (de) * 1981-09-05 1983-04-14 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Einrichtung zum linearen fuehren eines abtasters
DE3214375C2 (de) * 1982-04-20 1986-09-04 Messerschmitt-Bölkow-Blohm GmbH, 8000 München Einrichtung zur Bestimmung der Lage eines Satelliten
JPS5941620U (ja) * 1982-09-10 1984-03-17 トヨタ自動車株式会社 ４バルブエンジンにおけるアイドル燃焼安定装置
JPS5991304A (ja) * 1982-11-16 1984-05-26 Matsushita Electric Ind Co Ltd 位置検出装置
DE3304864A1 (de) * 1983-02-12 1984-08-16 Bayer Ag, 5090 Leverkusen Adsorbate von prostaglandinen
JPS63221616A (ja) * 1987-03-11 1988-09-14 Toshiba Corp マスク・ウエハの位置合わせ方法
TWI404529B (zh) 2005-06-03 2013-08-11 Ono Pharmaceutical Co 神經再生及／或保護劑
CN1859858A (zh) * 2005-09-01 2006-11-08 株式会社三科 清洁刷
WO2013021935A1 (ja) 2011-08-05 2013-02-14 小野薬品工業株式会社 軟骨障害治療用化合物

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3540831A (en) * 1966-06-01 1970-11-17 Gca Corp Indicium locating apparatus
US3560097A (en) * 1967-05-03 1971-02-02 Anatoly Alexandrovich Gavrilki Photoelectric microscope
US3565532A (en) * 1967-06-24 1971-02-23 Leitz Ernst Gmbh Apparatus for determining the position of an edge
US3770353A (en) * 1971-08-25 1973-11-06 Us Navy Electro-optical sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3540831A (en) * 1966-06-01 1970-11-17 Gca Corp Indicium locating apparatus
US3560097A (en) * 1967-05-03 1971-02-02 Anatoly Alexandrovich Gavrilki Photoelectric microscope
US3565532A (en) * 1967-06-24 1971-02-23 Leitz Ernst Gmbh Apparatus for determining the position of an edge
US3770353A (en) * 1971-08-25 1973-11-06 Us Navy Electro-optical sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5926305A (en) * 1992-10-27 1999-07-20 Topcon Corporation Marking apparatus having feedback-controlled rotational laser beam
EP0908709A2 (de) * 1997-09-16 1999-04-14 Polytec GmbH Vorrichtung zur berührungslosen Schwingungsmessung
EP0908709A3 (de) * 1997-09-16 2001-09-26 Polytec GmbH Vorrichtung zur berührungslosen Schwingungsmessung

Also Published As

Publication number Publication date
JPS5525602B2 (de) 1980-07-07
GB1465791A (en) 1977-03-02
DE2422866C3 (de) 1980-04-24
DE2422866B2 (de) 1979-08-09
JPS503362A (de) 1975-01-14
DE2422866A1 (de) 1974-11-28

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Owner name: NIKON CORPORATION, 2-3, MARUNOUCHI 3-CHOME, CHIYOD

Free format text: CHANGE OF NAME;ASSIGNOR:NIPPON KOGAKU, K.K.;REEL/FRAME:004935/0584