US3909610A - Apparatus for displaying the energy distribution of a charged particle beam - Google Patents

Apparatus for displaying the energy distribution of a charged particle beam Download PDF

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Publication number
US3909610A
US3909610A US495665A US49566574A US3909610A US 3909610 A US3909610 A US 3909610A US 495665 A US495665 A US 495665A US 49566574 A US49566574 A US 49566574A US 3909610 A US3909610 A US 3909610A
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Prior art keywords
energy
specimen
axis
analyzer
signal generator
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Expired - Lifetime
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US495665A
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English (en)
Inventor
Yasushi Kokubo
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Jeol Ltd
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Jeol Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Definitions

  • This invention relates to an improved apparatus for displaying the energy distribution of a charged particle beam.
  • the plasma loss the energy loss of the electron beam due to plasma oscillation at the crystal grain boundary. Since the plasma loss varies according to the constituent components and phase of the alloy in question, the plasma loss and plasma shift values can be measured and the characteristics of the alloy can be ascertained by analyzing the energy of an electron bcam transmitted through a thin foil alloy specimen at a plurality of irradiating points of the high speed, uniform energy electron beam, and comparing the energy distribution at each irradiating point positioned, for example, along a line intersecting the grain boundary.
  • This invention relates to an improvement in an imag ing device comprising means for scanning a high energy beam over a specimen in a raster in the X and Y directions by X and Y axis deflecting devices, for example, a scanning electron microscope.
  • a detector detects a signal indicative of the interaction of the high energy beam and the specimen and modulates the beam of a C.R.T., the deflection devices of which are in synchronism with the high energy beam scanning device. In this way, a specimen image is produced.
  • an energy analyzer for detecting the distribution of energies of the high energy beam after interaction with the specimen.
  • the specimen imaging apparatus is disabled and a step signal generator stepwise applies a signal to the X deflection device of the high energy beam to cause it to advance stepwise over the specimen.
  • the energy levels detected by the energy analyzer are swept by a sawtooth signal applied thereto by a sawtooth gen erator.
  • the detector of the energy analyzer detects a signal indicative of a range of energies for each point on a specimen.
  • the output of the step signal generator and the energy analyzer are added and applied to the Y axis of the deflection device of the C.R.T.
  • the sawtooth output of the sawtooth generator which is synchronized with the step signal generator is applied to the X axis deflection device of the C.R.T.
  • FIG. 1 is a schematic diagram showing one embodiment according to this invention.
  • FIGS. 2a and 2b are schematic drawings for explaining the function of the embodiment shown in FIG. 1;
  • FIG. 3 is a schematic diagram showing the electron beam irradiating positions near grain boundary of the specimen.
  • FIG. 4 is a schematic drawing showing energy distribution on the display screen of the embodiment shown in FIG. 1.
  • an electron beam 1 generated by an electron gun 2 is finely converged by condenser lenses 3 and 4 so as to irradiat e a specimen 5.
  • Deflection coils 6X and 6Y are arranged between the condenser lenses 3 and 4, the magnetic field produced by said deflection coils serving to deflect the electron beam I and therefore vary the specimen irradiating position.
  • Switches S, and S are arranged so as to connect the deflection coils 6X and 6Y to the X and Y signals ofa sawtooth waveform generator 7 or the DC. voltage ofa DC. voltage source 8 and the Y signal of a step signal generator 9.
  • a portion of the X and Y signals from the sawtooth waveform generator 7 are fed into the X-axis deflection coil 10X and the Y-axis deflection coil l0Y of a cathode-ray tube 11 via switches S3 and S4.
  • a secondary or reflection electron detector 12 is arranged in the vicinity of the specimen 5 and the output of said detector is applied to the grid of the cathode-ray tube 11 via an amplifier l3 and a switch S
  • An energy analyzer 14 for energy analyzing the electrons transmitted through the specimen 5 is arranged below said specimen beyond which a slit 1S and a second detector 16 are provided.
  • a sweep signal generator 17 generates a sawtooth wave signal as shown in FIG.
  • switch S in synchronism with the signal generated by the sweep signal generator 17.
  • switch S is positioned at T so that said step signal is fed into deflection coil 6Y and the electron beam is shifted stepwise as indicated by points p p p p in FIG. 3.
  • the wavy line 0-0 shows the grain boundary.
  • the A and B represent the grain constituting the alloy, and line P shows the direction of the said points p Pg, 2 p, crossing the grain boundary OO'. Since switches S, 5,, are interlocked, when they are positioned at T the electron beam 1 scans the specimen 5 over a specific area of the specimen surface and the secondary electrons etc.
  • a scanning image of the specimen is displayed on the screen of the cathode-ray tube 11.
  • the portion or portions of the image where it is desired to measure the plasma loss is/are then selected and adjusted (i.e., focused and centered) with the appropriate controls.
  • the electrons having undergone an energy loss thereat are analyzed in the energy analyzer l4 and detected by detector 16.
  • the detected signal is then added to the step signal in the adding circuit 19 and the added output of said circuit 19 is applied to coil IOY of the cathode-ray tube 11.
  • the energy analyzer is swept by the sweep signal generator 17 through a fixed energy range, the signal generated by said generator 17 also being applied to coil 10X of the cathode-ray tube 11.
  • an energy distribution waveform C. as shown in FIG. 4 is displayed on the screen of the cathode-ray tube 11.
  • the electron beam irradiates point p in FIG. 3.
  • the shift of the plasma loss in the vicinity of the grain boundary of compound metals can be measured within a very short period of time, moreover, said shift can be displayed as a function of the distance from the grain boundary. Furthermore, since the ratio of the size of the signal supplied to deflection coil 6Y by the step signal generator 9 and the size of the signal applied to coil 10Y of the cathode-ray tube 11 (Le, the magnification) can be precisely ascertained in advance, the distance from the grain boundary can be accurately ascertained by measuring the distance between the scanning image magnification and the base line of C,, C C As clearly shown in FIG. 4, not only the shift of the plasma loss, but the intensity variation of the distribution waveforms can be compared and ascertained, thereby making plasma loss measurement extremely useful.
  • this invention is not lim ited to the above-described embodiment.
  • Application possibilities are extremely wide.
  • this invention can be applied to a spectroscopic analyzing de vice in which an electron beam or X-ray beam etc. irradiates a specimen from which characteristic X-rays are secondarily generated in the same way as in the above described embodiment.
  • the energy analyzer would need to be replaced by a goniometer equipped with a spectroscopic crystal or a non dispersive solid detector (S.S.D).
  • this invention can be applied to an E.S.C.A. (electron spectroscopy for chemical analysis) or an Auger electron analyzer.
  • the im' provement comprising an energy analyzer positioned relative to the specimen to detect the distribution of energies of the beam after interaction with the specimens as the analyzer is swept by a sawtooth signal which varies the energy level detected and means associated therewith comprising a step signal generator for stepwise application of deflection signals to the beam deflection device and a sawtooth generator in synchronism with the step signal generator for simultaneously sweeping the X-axis C.R T. deflection device and the energy analyzer, means for adding the output of the energy analyzer and the step signal generator and applying to the Y-axis C.R.T. deflection device such that en ergy distribution curves for spaced points on a specimen are displayed on the CRT. separated by Y-axis shifts.
  • a display apparatus for displaying the energy dis tribution of charged particles, said display apparatus incorporating a means for irradiating a specimen with a primary charged particle beam, a deflecting means for varying the irradiating point on the specimen, an analyzer for analyzing the energy of the secondary charged particles emitted from the specimen or the energy loss of the primary charged particles transmitted through the specimen, and a display means in which the display point in the XY plane is determined by the X- axis control means and the Y-axis control means con trolled by the output signal of said analyzer, characterized in that a step signal generator output signal controls said deflecting means digitally, said step signal being applied to Y-axis control means of said display means, and the output signal of sweep signal generator synchronized with said step signal generator controls said analyzer and X-axis control means of said display means.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
US495665A 1973-08-22 1974-08-08 Apparatus for displaying the energy distribution of a charged particle beam Expired - Lifetime US3909610A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9417073A JPS532755B2 (de) 1973-08-22 1973-08-22

Publications (1)

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US3909610A true US3909610A (en) 1975-09-30

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US (1) US3909610A (de)
JP (1) JPS532755B2 (de)
DE (1) DE2440120A1 (de)
FR (1) FR2241785B1 (de)
GB (1) GB1442507A (de)
NL (1) NL180155C (de)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3965351A (en) * 1974-10-30 1976-06-22 The United States Of America As Represented By The United States Energy Research And Development Administration Differential auger spectrometry
US4480220A (en) * 1980-11-10 1984-10-30 Hitachi, Ltd. Electron energy analyzing apparatus
US4789780A (en) * 1986-03-18 1988-12-06 U.S. Philips Corporation Apparatus for energy-selective visualization
US5231287A (en) * 1991-02-20 1993-07-27 Jeol Ltd. Method and apparatus for obtaining two-dimensional energy image, using charged-particle beam
US5874735A (en) * 1996-09-24 1999-02-23 Hitachi Instruments Service Co., Ltd. Scanning electron microscope
US6586735B1 (en) * 1997-07-04 2003-07-01 Deutsches Krebsforschungszentrum Stiftung des öffentlichen Rechts Method for detecting an element in a sample
US20160336166A1 (en) * 2012-03-06 2016-11-17 Scienta Omicron Ab Analyser arrangement for particle spectrometer

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3820549A1 (de) * 1988-06-16 1989-12-21 Fraunhofer Ges Forschung Verfahren und vorrichtung zur untersuchung von membranoberflaechen

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
US3812288A (en) * 1972-11-21 1974-05-21 Edax Int Inc Television display system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
US3812288A (en) * 1972-11-21 1974-05-21 Edax Int Inc Television display system

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3965351A (en) * 1974-10-30 1976-06-22 The United States Of America As Represented By The United States Energy Research And Development Administration Differential auger spectrometry
US4480220A (en) * 1980-11-10 1984-10-30 Hitachi, Ltd. Electron energy analyzing apparatus
US4789780A (en) * 1986-03-18 1988-12-06 U.S. Philips Corporation Apparatus for energy-selective visualization
US5231287A (en) * 1991-02-20 1993-07-27 Jeol Ltd. Method and apparatus for obtaining two-dimensional energy image, using charged-particle beam
US5874735A (en) * 1996-09-24 1999-02-23 Hitachi Instruments Service Co., Ltd. Scanning electron microscope
US6586735B1 (en) * 1997-07-04 2003-07-01 Deutsches Krebsforschungszentrum Stiftung des öffentlichen Rechts Method for detecting an element in a sample
US20160336166A1 (en) * 2012-03-06 2016-11-17 Scienta Omicron Ab Analyser arrangement for particle spectrometer
US9978579B2 (en) * 2012-03-06 2018-05-22 Scienta Omicron Ab Analyser arrangement for particle spectrometer

Also Published As

Publication number Publication date
FR2241785A1 (de) 1975-03-21
JPS5044889A (de) 1975-04-22
NL180155C (nl) 1987-01-02
JPS532755B2 (de) 1978-01-31
DE2440120A1 (de) 1975-03-27
GB1442507A (en) 1976-07-14
FR2241785B1 (de) 1977-03-25
NL180155B (nl) 1986-08-01
NL7410276A (nl) 1975-02-25

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