JPS5044889A - - Google Patents

Info

Publication number
JPS5044889A
JPS5044889A JP48094170A JP9417073A JPS5044889A JP S5044889 A JPS5044889 A JP S5044889A JP 48094170 A JP48094170 A JP 48094170A JP 9417073 A JP9417073 A JP 9417073A JP S5044889 A JPS5044889 A JP S5044889A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48094170A
Other languages
Japanese (ja)
Other versions
JPS532755B2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9417073A priority Critical patent/JPS532755B2/ja
Priority to GB2323574*[A priority patent/GB1442507A/en
Priority to NLAANVRAGE7410276,A priority patent/NL180155C/xx
Priority to US495665A priority patent/US3909610A/en
Priority to DE2440120A priority patent/DE2440120A1/de
Priority to FR7428731A priority patent/FR2241785B1/fr
Publication of JPS5044889A publication Critical patent/JPS5044889A/ja
Publication of JPS532755B2 publication Critical patent/JPS532755B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
JP9417073A 1973-08-22 1973-08-22 Expired JPS532755B2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP9417073A JPS532755B2 (de) 1973-08-22 1973-08-22
GB2323574*[A GB1442507A (en) 1973-08-22 1974-07-26 Apparatus for displaying the energy distribution of a charged particle beam
NLAANVRAGE7410276,A NL180155C (nl) 1973-08-22 1974-07-31 Inrichting voor het weergeven van de energieverdeling van geladen deeltjes.
US495665A US3909610A (en) 1973-08-22 1974-08-08 Apparatus for displaying the energy distribution of a charged particle beam
DE2440120A DE2440120A1 (de) 1973-08-22 1974-08-21 Vorrichtung zur wiedergabe der energieverteilung eines aus geladenen teilchen bestehenden strahles
FR7428731A FR2241785B1 (de) 1973-08-22 1974-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9417073A JPS532755B2 (de) 1973-08-22 1973-08-22

Publications (2)

Publication Number Publication Date
JPS5044889A true JPS5044889A (de) 1975-04-22
JPS532755B2 JPS532755B2 (de) 1978-01-31

Family

ID=14102864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9417073A Expired JPS532755B2 (de) 1973-08-22 1973-08-22

Country Status (6)

Country Link
US (1) US3909610A (de)
JP (1) JPS532755B2 (de)
DE (1) DE2440120A1 (de)
FR (1) FR2241785B1 (de)
GB (1) GB1442507A (de)
NL (1) NL180155C (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3965351A (en) * 1974-10-30 1976-06-22 The United States Of America As Represented By The United States Energy Research And Development Administration Differential auger spectrometry
JPS5780649A (en) * 1980-11-10 1982-05-20 Hitachi Ltd Electron ray energy analyzer
NL8600685A (nl) * 1986-03-18 1987-10-16 Philips Nv Apparaat voor energie selectieve afbeelding.
DE3820549A1 (de) * 1988-06-16 1989-12-21 Fraunhofer Ges Forschung Verfahren und vorrichtung zur untersuchung von membranoberflaechen
JPH04264243A (ja) * 1991-02-20 1992-09-21 Jeol Ltd オージェ像計測におけるピークエネルギーシフト補正法
JPH1097836A (ja) * 1996-09-24 1998-04-14 Hitachi Keisokki Service Kk 走査形電子顕微鏡
DE59806059D1 (de) * 1997-07-04 2002-11-28 Deutsches Krebsforsch Verfahren zur detektion eines elementes in einer probe
CN104040681B (zh) * 2012-03-06 2017-04-26 盛达欧米科有限公司 用于粒子光谱仪的分析设备

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
US3812288A (en) * 1972-11-21 1974-05-21 Edax Int Inc Television display system

Also Published As

Publication number Publication date
DE2440120A1 (de) 1975-03-27
US3909610A (en) 1975-09-30
NL7410276A (nl) 1975-02-25
NL180155B (nl) 1986-08-01
FR2241785B1 (de) 1977-03-25
GB1442507A (en) 1976-07-14
JPS532755B2 (de) 1978-01-31
NL180155C (nl) 1987-01-02
FR2241785A1 (de) 1975-03-21

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