US3878419A - Precision base mercury vapor lamp - Google Patents

Precision base mercury vapor lamp Download PDF

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Publication number
US3878419A
US3878419A US425384A US42538473A US3878419A US 3878419 A US3878419 A US 3878419A US 425384 A US425384 A US 425384A US 42538473 A US42538473 A US 42538473A US 3878419 A US3878419 A US 3878419A
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United States
Prior art keywords
envelope
mounting base
base
lamp
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US425384A
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English (en)
Inventor
Carlo F Lafiandra
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Individual
Original Assignee
Individual
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Publication date
Application filed by Individual filed Critical Individual
Priority to US425384A priority Critical patent/US3878419A/en
Priority to DE2458360A priority patent/DE2458360C2/de
Priority to JP49143565A priority patent/JPS604539B2/ja
Priority to CA216,204A priority patent/CA1033336A/en
Priority to GB54500/74A priority patent/GB1491897A/en
Application granted granted Critical
Publication of US3878419A publication Critical patent/US3878419A/en
Priority to US05916278 priority patent/USRE30315F1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/50—Means forming part of the tube or lamps for the purpose of providing electrical connection to it

Definitions

  • a mounting base secured to one end of the envelope has a configuration which is geometrically unique with respect to the position and spatial orientation of the plasma cavity.
  • a mounting block and clamping arrangement have a configuration complementary to that of the lamp base so as to receive and releasably secure the lamp base and, therefore, the plasma cavity in a fixed predetermined position and orientation relative to its operating environment.
  • the lamp is energized by means of an electrical potentional applied to electrodes in the plasma cavity or by reactance coupling an r-f power source to the cavity.
  • Gaseous discharge lamps are well-known in the art and are utilized in a wide variety of applications.
  • the particular structure and configuration of the lamps also vary with the particular use for which they are adapted but, in general, all comprise a sealed transparent or translucent envelope containing a gas or vapor and include means for energizing the lamp. exciting the gaseous substance to form a radiation-emitting plasma.
  • the energizing means most often takes the form of a pair of spaced electrodes in the envelope to which an operating voltage is applied
  • lamps of this type are also energized by means of radio frequency electric power reactance-coupled to the lamp without the need for electrodes as such.
  • the present invention relates particularly to lamps of the type containing a metallic vapor.
  • a metallic vapor such as a mercury vapor
  • a further object is to provide a novel gaseous discharge lamp having a mounting base which enables the replacement of lamps in their operating environments without significant deviation in the locus of the plasma relative to such environment.
  • Another object is the provision of a gaseous discharge lamp fulfilling the preceding objects which is quickly and easily replaceable and which automatically positions itself so that its luminous plasma occupies essentially the exact same position occupied by it predecessor.
  • the invention contemplates a gaseous discharge lamp having a sealed, radiation-transparent envelope defining an elongate plasma-containing cavity of capillary cross-section and arcuate configuration.
  • the cavity contains a gaseous substance and potential coupling means are associated with the envelope to energize the lamp, exciting the gaseous substance to generate a radiation-emitting plasma
  • a rigid mounting base is fixedly secured to one end of the envelope, the base having a configuration which is geometrically unique with respect to a predetermined position and spatial orientation of said envelope whereby installation of the lamp in its operating environment automatically and reproducibly places the envelope and, concomitantly, the plasma cavity of the lamp. in a predetermined position and spatial orientation relative to said environment.
  • FIG. I is a longitudinal sectional view, on an enlarged scale. of a gaseous discharge lamp in accordance with the instant invention.
  • FIG. 2 is a sectional view of a mounting fixture in accordance with the invention with the base portion of the FIG. 1 lamp mounted therein, the lamp base being shown in a slightly modified form.
  • FIG. 3 is a sectional view on line 3-3 of FIG. 2 looking in the direction of the arrows;
  • FIG. 4 is a fragmentary sectional view of the base portion of a gaseous discharge lamp exemplifying an alternative embodiment of the invention.
  • FIG. 1 a mercury vapor lamp 10 of a particular arcuate configuration adapting it for use as the light source in an apparatus such as described in the aforementioned application Ser. No. 339,860 for photoresist exposure in the production of semiconductor devices.
  • Lamp 10 comprises a tubular envelope 12 of glass or other radiation-transmitting material.
  • the mid-section of envelope 12, which emits the major part of the useful illumination, is of an arcuate form.
  • the arcuate mid-section of envelope 12 subtends an arc of 85 with a radius of about 0.55 inches.
  • neither the length of the arcuate section nor the sharpness of the bend are critical except to the particular apparatus in which the lamp is employed.
  • the interior of envelope 12 is a bore or plasma cavity 14 of capillary dimensions, e.g., a diameter of 2 mm in the lamp being described.
  • envelope 12 terminates in respective solid cylindrical stubs 16, 18 of slightly smaller diameter than the main body of the envelope.
  • Cavity l4 terminates short of the end stubs l6, l8 and at each end is provided with a respective electrode 20, 22.
  • Electrode 20 is electrically connected by a conductor, now shown, to a highly flexible connection lead 24 mechanically secured to stub 16 at one end and carrying a connection fitting, such as a banana plug 26, at its free end.
  • connection fitting such as a banana plug 26
  • electrodes 20, 22 would be omitted and other potentialcoupling means provided in accordance with known techniques of the electrodeless discharge lamp art.
  • the opposite end stub 18 of envelope 12 is provided with a rigid mounting base 28 having a configuration which is geometrically unique with respect to the position and spatial orientation of the envelope.
  • base 28 takes the form of a rightangular regular hexagonal prism containing a concentric axial bore 30 closed at one end by a flat surface 32 perpendicular to the common axes of the hexagonal prism and the internal bore.
  • the diameter and length of the bore 30 are such as to receive end stub 18 with sufficient clearance to enable longitudinal, lateral and angular positional adjustment of the stub relative to the base.
  • the spatial relation and orientation of these two members can be precisely established as by use of a suitable jig or fixture and, when established, is maintained by securing the base to the envelope stub with solder 34 or by other suitable means.
  • lamp base 28 is fabricated of copper, brass or other electrically-conductive material and is electrically connected to electrode 22. Where R-F energization is used, base 28 might preferably be formed of an electrically non-conductive material.
  • lamp is wholly conventional; when energized by application of a suitable high voltage on electrodes 20, 22 mercury vapor conducts current between the electrodes forming a luminous plasma conforming to the shape of capillary cavity 14.
  • the configuration of the base and its known and fixedrelationship to the envelope enables the installation of the lamp with the plasma occupying a precisely established position, which position is reproducible when it is necessary to install a new lamp.
  • FIGS; 2 and 3 there is illustrated a mounting block 36 which constitutes a fixed member on, or portion of, the apparatus employing lamp 10.
  • the lamp in FIGS. 2 and 3 has a base 28 which is a modification of that shown in FIG. 1. Instead of being a complete hexagonal prism, base 28 has a cylindrical exterior except for enlarged end portions 29, 31 which are hexagonal in cross section. It will be appreciated that the specific forms of lamp bases 28 and 28' are interchangeable insofar as to mounting block 36 is concerned.
  • Block 36 carries locating faces which accommodate the lamp base and secure it in a manner which precisely locates the envelope and, of particular importance, the luminous plasma of the operating lamp. To this end.
  • block 36 has a pair of planar locating faces 38, 40 intersecting at an angle of 60, i.e., one-half the angle between the faces of a regular hexagon, so that faces 38, 40 are complementary to and mate with two non-adjacent non-parallel faces 42, 44 of the hexagonal ends of base 28'.
  • a clamp assembly 46 engages a third nonadjacent non-parallel face non-adjacent, of base 28' thus maintaining the base against rotational and lateral translational displacement.
  • a locating stop member 50 in abutment with the end face 32 of mounting base 28 establishes the axial position of the base.
  • Clamp assembly 46 consists of clamping plate 52 having one edge disposed on an elongated rib 54 on block 36 which extends parallel to the intersection of faces 38, 40.
  • Rib 54 extends above the surface of block 36 by an amount at least approximately equal to that which the hexagonal portions of lamp mounting base 28' extend above the same surface when faces 42 and 44 are in abutment with faces 38 and 40, respectively.
  • the edge of plate 52 remote from rib 54 extends over and parallel to the lamp base axis and makes surface contact with faces 48 of the base 28'.
  • a machine screw 56 extending through an aperture (not shown) in clamping plate 52 is threaded into block 36.
  • the head 58 of machine screw bears on the upper surface of plate 52 so that tightening of the screw clamps lamp base 28' in the preset position.
  • a coil spring 60 is disposed around the shank of screw 56 and compressed between block 36 and the underside of plate 52.
  • a lamp may be installed with its plasma-containing region in a precise position relative to block 36, and therefore the apparatus comprising block 36, by simply inserting the lamp with the appropriate faces of its base in abutment with faces 38 and 40 and its end surface 32 against stop 50 and tightening screw 56".
  • gross positioning is obviously performed by the operator.
  • connection of flexible connection lead 24 (FIG. 1) to the power supply.
  • the high flexibility of lead 24 insures that no stress such as would deflect or deform the lamp envelope is transmitted to the envelope.
  • FIG. 4 there is illustrated an alternative construction of the lamp base designated 28" which has substantially the same external configuration as base 28'.
  • the stub 18 of envelope 12 is positioned and secured within bore 30 by means of a plurality of set screws 62, 64, 66, 68, and others not appearing in .the drawing.
  • Set screws 62, 64, 66 and 68 are threaded lateral adjustment of the position of stub 18 and screw.
  • FIG. 4 also illustrates an alternative mode of clamping the lamp base in the mounting block, viz., a modified clamping plate 52 is provided, dimensioned and positioned to bear on the cylindrical mid-portion of base 28" intermediate hexagonal ends 29', 31'.
  • a modified clamping plate 52 is provided, dimensioned and positioned to bear on the cylindrical mid-portion of base 28" intermediate hexagonal ends 29', 31'.
  • a gaseous discharge lamp comprising:
  • a radiation-transmitting tubular envelope defining a plasma cavity of arcuate configuration and capillary cross-section containing an ionizable gaseous substance
  • a rigid mounting base fixedly secured to one end of said envelope having a configuration which is geometrically unique with respect to a predetermined position and spatial orientation of said envelope whereby installation of the lamp in its operating environment automatically and reproducibly places the envelope and. concomitantly. the plasma cavity of the lamp in a predetermined position and spatial orientation relative to said environment;
  • c. means for coupling the lamp to a power source for applying an operating potential to said plasma cavity.
  • a gaseous discharge lamp according to claim 3 wherein said base contains a co-axial bore and said one end of the envelope terminates in a cylindrical stub of significantly smaller axial and radial dimensions than said bore, said stub being disposed and secured in said bore in a position such as to establish a predetermined spatial relation and orientation between the envelope and the prism faces of said base.
  • a mounting block having locating faces complementary to and in mating relationship with selected ones of said planar faces of the mounting base;
  • a removable clamping assembly maintaining the planar faces of the mounting base pressed firmly against the locating faces of the mounting fixture.
  • a gaseous discharge lamp according to claim 1 and a mounting fixture therefore comprising:
  • a mounting block having a configuration complementary to and adapted to receive said mounting base in a fixed position defined by its co-action with the configuration of said mounting base;

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Fastening Of Light Sources Or Lamp Holders (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
US425384A 1973-12-17 1973-12-17 Precision base mercury vapor lamp Expired - Lifetime US3878419A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US425384A US3878419A (en) 1973-12-17 1973-12-17 Precision base mercury vapor lamp
DE2458360A DE2458360C2 (de) 1973-12-17 1974-12-07 Gasentladungslampe
JP49143565A JPS604539B2 (ja) 1973-12-17 1974-12-16 ガス放電ランプ
CA216,204A CA1033336A (en) 1973-12-17 1974-12-17 Mercury vapor lamp mountable in precise position and orientation
GB54500/74A GB1491897A (en) 1973-12-17 1974-12-17 Precision base lamp
US05916278 USRE30315F1 (en) 1973-12-17 1978-06-16 Precision base mercury vapor lamp

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US425384A US3878419A (en) 1973-12-17 1973-12-17 Precision base mercury vapor lamp

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US05916278 Reissue USRE30315F1 (en) 1973-12-17 1978-06-16 Precision base mercury vapor lamp

Publications (1)

Publication Number Publication Date
US3878419A true US3878419A (en) 1975-04-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
US425384A Expired - Lifetime US3878419A (en) 1973-12-17 1973-12-17 Precision base mercury vapor lamp

Country Status (5)

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US (1) US3878419A (enrdf_load_stackoverflow)
JP (1) JPS604539B2 (enrdf_load_stackoverflow)
CA (1) CA1033336A (enrdf_load_stackoverflow)
DE (1) DE2458360C2 (enrdf_load_stackoverflow)
GB (1) GB1491897A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4056751A (en) * 1976-03-22 1977-11-01 Gte Sylvania Incorporated Metal halide discharge lamp having optimum electrode location
DE2742488A1 (de) * 1976-09-22 1978-03-23 Perkin Elmer Corp Beleuchtungssystem zur beleuchtung eines ringfeldes
US4241390A (en) * 1978-02-06 1980-12-23 The Perkin-Elmer Corporation System for illuminating an annular field
EP0045051A1 (en) * 1980-07-24 1982-02-03 The Perkin-Elmer Corporation Compression base lamp
US4340264A (en) * 1979-07-05 1982-07-20 The Perkin-Elmer Corporation Manufacture of glass base lamp
US4482842A (en) * 1980-10-01 1984-11-13 Hitachi, Ltd. Curved tube type ultra high pressure mercury arc discharge lamp device
US20070139630A1 (en) * 2005-12-19 2007-06-21 Nikon Precision, Inc. Changeable Slit to Control Uniformity of Illumination

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5743339A (en) * 1980-08-29 1982-03-11 Hitachi Ltd Manufacture of bent discharge tube
JPS5763759A (en) * 1980-10-01 1982-04-17 Hitachi Ltd Discharge lamp holding device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117248A (en) * 1961-05-18 1964-01-07 Gen Electric Low pressure mercury vapor discharge lamp for direct current operation
US3156841A (en) * 1960-12-28 1964-11-10 Gen Electric Electric lamp base end structure

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2705310A (en) * 1954-04-19 1955-03-29 Gen Electric Metal sleeve base terminal
DE1165166B (de) * 1960-02-16 1964-03-12 Claude Paz Visseaux Vakuumdichte Durchfuehrung eines oder mehrerer Leiter durch eine Glaswand
US3267275A (en) * 1963-11-29 1966-08-16 Sylvania Electric Prod Incandescent lamp and fixture
FR1585032A (enrdf_load_stackoverflow) * 1968-05-22 1970-01-09
DE2410924A1 (de) * 1973-03-09 1974-09-26 Perkin Elmer Corp Vorrichtung zur fotografischen belichtung einer oberflaeche

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3156841A (en) * 1960-12-28 1964-11-10 Gen Electric Electric lamp base end structure
US3117248A (en) * 1961-05-18 1964-01-07 Gen Electric Low pressure mercury vapor discharge lamp for direct current operation

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4056751A (en) * 1976-03-22 1977-11-01 Gte Sylvania Incorporated Metal halide discharge lamp having optimum electrode location
DE2742488A1 (de) * 1976-09-22 1978-03-23 Perkin Elmer Corp Beleuchtungssystem zur beleuchtung eines ringfeldes
US4241390A (en) * 1978-02-06 1980-12-23 The Perkin-Elmer Corporation System for illuminating an annular field
US4340264A (en) * 1979-07-05 1982-07-20 The Perkin-Elmer Corporation Manufacture of glass base lamp
EP0045051A1 (en) * 1980-07-24 1982-02-03 The Perkin-Elmer Corporation Compression base lamp
US4482842A (en) * 1980-10-01 1984-11-13 Hitachi, Ltd. Curved tube type ultra high pressure mercury arc discharge lamp device
US20070139630A1 (en) * 2005-12-19 2007-06-21 Nikon Precision, Inc. Changeable Slit to Control Uniformity of Illumination

Also Published As

Publication number Publication date
GB1491897A (en) 1977-11-16
DE2458360A1 (de) 1975-06-19
JPS5094783A (enrdf_load_stackoverflow) 1975-07-28
CA1033336A (en) 1978-06-20
JPS604539B2 (ja) 1985-02-05
DE2458360C2 (de) 1984-08-09

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