US3860444A - Coating of workpieces by vapor deposition - Google Patents

Coating of workpieces by vapor deposition Download PDF

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Publication number
US3860444A
US3860444A US330126A US33012673A US3860444A US 3860444 A US3860444 A US 3860444A US 330126 A US330126 A US 330126A US 33012673 A US33012673 A US 33012673A US 3860444 A US3860444 A US 3860444A
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United States
Prior art keywords
bath
wire
composition
coating
workpiece
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Expired - Lifetime
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US330126A
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English (en)
Inventor
Georges Henri Donckel
Dominique Thomas Franco Streel
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Cockerill SA
Cockerill Ougree Providence SA
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Cockerill SA
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Definitions

  • Our present invention relates to a method of and a system for coating sheet-metal strips and other workpieces, by vapor deposition in a vacuum, to form surface layers of thicknesses generally ranging between several tenths and several tens of microns.
  • the discontinuous or batch method is suitable mainly for the coating of relatively small and/or delicate articles, e.g., for the metallization of printed electronic circuits or for the application of thin metal films to optical elements; these discontinuous coating operations result in uniform and homogeneous deposits, without rough spots, even with relatively high-melting metals.
  • the second method involves the feeding of an elongate solid element of the desired composition, usually a metal wire with a diameter of a few millimeters, into the chamber for progressive immersion of the free end of the element into the bath. This latter technique is generally preferred for the vapor coating of articles of great or indefinite length, such as strips of sheet steel or the like.
  • the wire is preheated to a tem perature level which falls short of the bath temperature by not more than 1,000C, preferably by less than 800C.
  • the preheating of the wire may be carried out in a variety of ways known per se, advantageously electrically.
  • an electric heating current may be passed through the wire with the aid of a pair of electrodes contacting same, e.g., through the intermediary of a conductive guide roller acting as one of the electrodes.
  • Another, contactless way of generating such a heating current is by electromagnetic induction from a highfrequency source.
  • an electron gun is utilized as the preheating means.
  • the maintenance of the elevated bath temperature, with the aid of a heat source independent of the one used for preheating the wire, may also be achieved by electronic bombardment.
  • FIG. 1 is a diagrammatic view of a system for the vapondeposition coating of workpieces in accordance with our invention.
  • FIGS. 2 and 3 are fragmentary diagrammatic views showing partial modifications of the system of FIG. 1.
  • FIG. 1 we have shown a base and a bell jar 11 forming a closed chamber 3 in which a hard vacuum is maintained by an exhaust pump 12.
  • a workpiece 13 such as a strip of sheet steel, is passed through air locks 14, 15 in the chamber wall so as to be supported in a position in which both surfaces thereof are freely accessible to metallic vapors developed inside the chamber.
  • a refractory crucible 7 on base 10 contains a bath 16 of a metallic composition, e.g., nickel/chromium alloy, which is to be vapor-deposited on the workpiece 13 while the latter travels slowly through the chamber as indicated by an arrow A.
  • a metallic composition e.g., nickel/chromium alloy
  • Another air lock 17 forms an inlet for a wire 2 which is continuously uncoiled from a reel 1 and is advanced by a pair of driven feed rollers 18, 19.
  • Wire 2 is guided by several rollers 20, 21, 22, 23 so that its free end dips into the bath 16 which is held in a molten state by electron bombardment from an electron gun 8.
  • a source of direct current 4 has one of its terminals (here positive) connected to a sliding contact 24 inside the chamber 3, this contact engaging the advancing wire 2 just ahead of its point of immersion into the bath through the exposed surface of the latter.
  • Current from contact 24 passes longitudinally through the wire into guide roller 22 which is grounded at 6, the negative terminal of source 4 being also connected to ground.
  • This current flow preheats the wire 2 to preferably within 800C of the bath temperature to keep the melt 16 homogeneous and stable.
  • the rate of wire feed with the aid of a non-illustrated electric motor driving the rollers 18 and 19, may be remotecontrolled by an operator or varied automatically to let the supply of nickel/chromium alloy keep step with the depletion of the bath by evaporation.
  • Heat sources 4 and 8 may be thermostatically controlled, in a manner known per se and not illustrated, to maintain the desired temperature levels.
  • Contacts 22 and 24 may be adjustably mounted to slide along the path of wire 2 for establishing an optimum distance from the bath surface, as determined experimentally.
  • FIG. 2 we have shown a modified system in which a source 4' of high-frequency alternating current is connected across an electromagnetic coil 24 to induce a heating current in the wire.
  • a second electron gun 4" is trained upon the wire 2 to bombard same at a location just ahead of its immersion point, thereby preheating it for the purpose set forth.
  • a nickel/chromium alloy of composition 80:20 is to be vapor-deposited on a workpiece 13 of sheet steel in a vacuum of 10 Torr.
  • the crucible 7 has a capacity of 8 kg and a vaporization surface of 350 cm
  • the bath emits metal vapors at a rate of about 20 gr/min; fresh alloy is supplied at the same rate by the continuously advancing wire 2 of like composition.
  • the wire, entering the air lock 17 at an ambient temperature of 25C, has a diameter of 3 mm.
  • a length of wire of 10 cm, extending between contact 24 and grounded roller 22, is brought to red heat (upward of 800C) by the passage of a current therethrough as illustrated in FIG. 1; the heating current varies between 1 l5 and 180 amps for feed rates ranging between 10 and 25 gr/min.
  • feed rates on the order of 30 gr/min.
  • the preheating step is omitted, rough spots appear as soon as the feed rate exceeds 8 gr/min.
  • a method of coating workpieces by vapor deposition comprising the steps of:

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
US330126A 1972-02-08 1973-02-06 Coating of workpieces by vapor deposition Expired - Lifetime US3860444A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU64748 1972-02-08

Publications (1)

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US3860444A true US3860444A (en) 1975-01-14

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US330126A Expired - Lifetime US3860444A (en) 1972-02-08 1973-02-06 Coating of workpieces by vapor deposition

Country Status (10)

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US (1) US3860444A (fr)
JP (1) JPS4984930A (fr)
BE (1) BE795116A (fr)
CA (1) CA992811A (fr)
DE (1) DE2306035A1 (fr)
FR (1) FR2171085B1 (fr)
GB (1) GB1425095A (fr)
IT (1) IT977238B (fr)
LU (1) LU64748A1 (fr)
NL (1) NL7217377A (fr)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4336277A (en) * 1980-09-29 1982-06-22 The Regents Of The University Of California Transparent electrical conducting films by activated reactive evaporation
US4390571A (en) * 1981-06-30 1983-06-28 International Business Machines Corporation Boatless point source evaporation method
US4643131A (en) * 1984-09-28 1987-02-17 Nisshin Steel Company, Ltd. Combined continuous plating apparatus for hot-dip plating and vacuum deposition plating
US4674443A (en) * 1984-09-17 1987-06-23 Nisshin Steel Co., Ltd. Method and apparatus for vacuum deposition plating
US5000114A (en) * 1988-04-11 1991-03-19 Mitsubishi Jukogyo Kabushiki Kaisha Continuous vacuum vapor deposition system having reduced pressure sub-chambers separated by seal devices
US6159543A (en) * 1995-11-12 2000-12-12 Charmilles Technologies Sa Processes for manufacturing wires with a brass surface
US20010004557A1 (en) * 1999-12-15 2001-06-21 Wolfgang Scheideler Flat conductor ribbon cable
US6921552B1 (en) * 1997-05-06 2005-07-26 Unisearch Limited Fabrication of Zinc Oxide films on non-planar substrates and the use thereof
US20100272918A1 (en) * 2007-11-19 2010-10-28 Vandenbrande Pierre Method and system for galvanizing by plasma evaporation
EP2270253A1 (fr) * 2009-07-03 2011-01-05 Applied Materials, Inc. Appareil de flexion pour le fonctionnement homogène et lisse d'une source d'évaporation
US8920566B2 (en) 2010-12-30 2014-12-30 United Technologies Corporation Wire feed pressure lock system

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES1034476Y (es) * 1996-06-21 1997-06-01 Mecanismos Aux Ind Hembrilla perfeccionada para circuito impreso.
CN102485939A (zh) * 2010-12-02 2012-06-06 鸿富锦精密工业（深圳）有限公司 镀膜件及其制备方法
CN110153382B (zh) * 2019-06-14 2022-02-08 上海交通大学 在线式合金熔配方法与装置
DE102022105889A1 (de) 2022-03-14 2023-09-14 Thyssenkrupp Steel Europe Ag Verfahren zum Beschichten eines Substrats mit einer Metalllegierungsbeschichtung, die wenigstens zwei Metalle enthält

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2153786A (en) * 1936-07-17 1939-04-11 Alexander Process and apparatus for thermal deposition of metals
US2899528A (en) * 1959-08-11 Method and apparatus for supplying
US3467058A (en) * 1965-12-03 1969-09-16 United States Steel Corp Apparatus for vaporizing metal
US3562002A (en) * 1968-04-24 1971-02-09 Air Reduction Method and apparatus for vapor deposition
US3607222A (en) * 1968-11-26 1971-09-21 Air Reduction Method for evaporating alloy

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2899528A (en) * 1959-08-11 Method and apparatus for supplying
US2153786A (en) * 1936-07-17 1939-04-11 Alexander Process and apparatus for thermal deposition of metals
US3467058A (en) * 1965-12-03 1969-09-16 United States Steel Corp Apparatus for vaporizing metal
US3562002A (en) * 1968-04-24 1971-02-09 Air Reduction Method and apparatus for vapor deposition
US3607222A (en) * 1968-11-26 1971-09-21 Air Reduction Method for evaporating alloy

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4336277A (en) * 1980-09-29 1982-06-22 The Regents Of The University Of California Transparent electrical conducting films by activated reactive evaporation
US4390571A (en) * 1981-06-30 1983-06-28 International Business Machines Corporation Boatless point source evaporation method
US4674443A (en) * 1984-09-17 1987-06-23 Nisshin Steel Co., Ltd. Method and apparatus for vacuum deposition plating
US4676999A (en) * 1984-09-17 1987-06-30 Mitsubishi Jukogyo Kabushiki Kaisha Method for vacuum deposition plating steel strip
US4643131A (en) * 1984-09-28 1987-02-17 Nisshin Steel Company, Ltd. Combined continuous plating apparatus for hot-dip plating and vacuum deposition plating
US5000114A (en) * 1988-04-11 1991-03-19 Mitsubishi Jukogyo Kabushiki Kaisha Continuous vacuum vapor deposition system having reduced pressure sub-chambers separated by seal devices
US6159543A (en) * 1995-11-12 2000-12-12 Charmilles Technologies Sa Processes for manufacturing wires with a brass surface
US6921552B1 (en) * 1997-05-06 2005-07-26 Unisearch Limited Fabrication of Zinc Oxide films on non-planar substrates and the use thereof
US20010004557A1 (en) * 1999-12-15 2001-06-21 Wolfgang Scheideler Flat conductor ribbon cable
US20100272918A1 (en) * 2007-11-19 2010-10-28 Vandenbrande Pierre Method and system for galvanizing by plasma evaporation
US9222162B2 (en) * 2007-11-19 2015-12-29 Advanced Galvanisation Ag Method and system for galvanizing by plasma evaporation
US11268185B2 (en) 2007-11-19 2022-03-08 Neovac Gmbh Method and system for galvanizing by plasma evaporation
EP2270253A1 (fr) * 2009-07-03 2011-01-05 Applied Materials, Inc. Appareil de flexion pour le fonctionnement homogène et lisse d'une source d'évaporation
US20110003072A1 (en) * 2009-07-03 2011-01-06 Applied Materials, Inc. Bending fixture for homogenous and smooth operation of an evaporation source
US8920566B2 (en) 2010-12-30 2014-12-30 United Technologies Corporation Wire feed pressure lock system

Also Published As

Publication number Publication date
GB1425095A (en) 1976-02-18
DE2306035A1 (de) 1973-08-23
FR2171085A1 (fr) 1973-09-21
LU64748A1 (fr) 1973-02-19
BE795116A (fr) 1973-05-29
IT977238B (it) 1974-09-10
FR2171085B1 (fr) 1977-04-08
CA992811A (en) 1976-07-13
JPS4984930A (fr) 1974-08-15
NL7217377A (fr) 1973-08-10

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