US3858065A - Annular 3m class piezoelectric crystal transducer - Google Patents

Annular 3m class piezoelectric crystal transducer Download PDF

Info

Publication number
US3858065A
US3858065A US00274251A US27425172A US3858065A US 3858065 A US3858065 A US 3858065A US 00274251 A US00274251 A US 00274251A US 27425172 A US27425172 A US 27425172A US 3858065 A US3858065 A US 3858065A
Authority
US
United States
Prior art keywords
crystal
members
parallel
axis
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00274251A
Other languages
English (en)
Inventor
H Epstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Becton Dickinson Electronics Co
Baxter Healthcare Corp
Meggitt Orange County Inc
Original Assignee
Becton Dickinson and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Becton Dickinson and Co filed Critical Becton Dickinson and Co
Priority to US00274251A priority Critical patent/US3858065A/en
Priority to CH1688272A priority patent/CH559369A5/xx
Priority to JP12126172A priority patent/JPS5713807B2/ja
Priority to DK6473AA priority patent/DK140417B/da
Application granted granted Critical
Publication of US3858065A publication Critical patent/US3858065A/en
Assigned to ENDEVCO CORPORATION, A NJ CORP. reassignment ENDEVCO CORPORATION, A NJ CORP. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: BECTON, DICKINSON AND COMPANY
Assigned to BAXTER HEALTHCARE CORPORATION, A CORP. OF DE reassignment BAXTER HEALTHCARE CORPORATION, A CORP. OF DE ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: BAXTER INTERNATIONAL INC., A CORP. OF DE
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0655—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of cylindrical shape
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0915—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the shear mode type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

Definitions

  • ABSTRACT The transducer of this invention utilizes an annular 52 us. a sin/9.5, 252/629, 310/84, Crystal of the 3m class Operated in the shear mode 310/96, 310/97 with the Shearing surfaces and the axis of the accelera- 511 im.
  • This invention relates to electromechanical transducers and more particularly to an improved annular piezoelectric accelerometer free of any substantial pyroeiectric effects and substantially free of a cross axis sensitivity.
  • the invention also relates to such accelerometers which have high efficiency and is adapted to be operated over a wide range of temperatures including high temperatures above l,OOF.
  • the annular electromechanical tranducer of this invention makes use of a piezoelectric crystal of the 3m class cut to having an annular configuration with its cylindrical surfaces parallel to the Z axis.
  • the accelerometer has electrodes on the cylindrical surfaces and is operated in shear mode with the shearing forces acting in a direction parallel to the Z axis.
  • This arrangement makes optimum use of the characteristics of 3m crystal material when of annular configuration.
  • the invention is applicable to all known 3m crystals, including lithium niobate, lithium tantalate, and natural tourmaline. Of these materials lithium niobate is particularly advantageous to employ because it has a high Curie temperature of about l,200C.
  • Lithium niobate is also particularly advantageous to employ because it has the highest electromechanical coupling coefficient of the 3m crystalline materials known. For this reason, the invention will be described with reference to an annular accelerometer employing a crystal of the configuration described and composed of lithium niobate.
  • lithium niobate in monocrystalline form is piezoelectric and that its piezoelectric properties are preserved at high temperatures, such as at temperatures over l,400F., as well as at a low temperature, such as at temperatures of 60F.
  • the sensitivity of an accelerometer employing such a material depends in part on how the crystal is cut and how it is subjected to acceleration.
  • the best embodiment of the invention now known makes use of a lithium niobate crystal of annular configuration operated in the shear mode with the axis of maximum sensitivity parallel to the Z axis.
  • the electrodes are located on cylindrical surfaces parallel to the Z axis and the shearing forces are applied in directions parallel to the Z axis.
  • This accelerometer not only has high sensitivity at high temperatures, but is also substantially free of cross-axis sensitivity.
  • an accelerometer utilizing lithium niobate is provided for operating at such high temperatures over a long period of time.
  • This invention is particularly useful when employed as an accelerometer since the annular construction of the crystal of the best embodiment of this invention in creases the stiffness of the crystal to better resist bending. This provides an accelerometer which has a high resonant frequency. Furthermore, the annular construction of the inertial mass supports the crystal as a unit even if the crystal becomes fractured.
  • the accelerometer of this invention may be employed in detecting and measuring vibration and shock.
  • FIG. 1 is an elevational view, partly in cross-section, of an annular accelerometer of one embodiment constructed in accordance with this invention
  • FIG. 2 is a perspective view employed to explain the invention.
  • FIG. 3 is a plan schematic view of the crystal employed in the invention.
  • an accelerometer 8 comprising a housing formed partly by a base 10 and a case 12 providing a cylindrical hollow cavity 14 and comprising an annular acceleration sensing device 16 concentrically mounted on a post 18 projecting from the base 10 into the cavity 14.
  • the accelerometer 8 is rigidly secured to an object 9 undergoing test.
  • the base 10 has a flat mounting surface 11 on its lower side, which surface is normal to the acceleration axis A-A and the Z axis of the crystal.
  • the accelerometer is designed to have an axis A-A of maximum sensitivity parallel to the axis of the post 18 and perpendicular to the base 10. This maximum-sensitivity axis A-A coincides with the optical or Z axis ofthe crystal as is apparent from comparing FIG. 1 with FIG. 2.
  • the accelerometer will be described as if mounted to detect the component of acceleration along a vertical axis.
  • the acceleration sensing unit 16 includes a piezoelectric crystal 50 that is electrically connected in such a manner that the electrical signals generated by the crystal 50 in response to such acceleration are combined to supply signals to a utilization device 24 in the form of a charge amplifier 20 and recorder 22. These electrical signals are proportional to the acceleration of the object 9 in a direction parallel to the AA axis. They are conventionally employed in the study of the vibratory motion of the object 9 on which the accelerometer 8 is mounted.
  • the post 18 may be formed unitary with the base 10 or it may be threadably or otherwise secured thereto or it may be fixed thereon by brazing.
  • the casing or case 12 is firmly secured to the base 10 by a method such as by welding.
  • the casing is provided with a small perforation or channel 30 to provide communication between the cavity 14 and the external atmosphere, for a purpose to be described hereinafter.
  • the post 18 is provided with a smooth circular cylindrical surface 40 that extends vertically parallel to the acceleration axis AA.
  • the acceleration sensing unit 16 comprises a piezoelectric crystal 50 and an inertial mass 70.
  • the crystal 50 is provided with two smooth parallel concentric circular cylindrical faces or surfaces 52a and 52b (FIG. 2) which are coaxial with the Z axis of the crystal 50.
  • the surfaces 52a and 52b of the crystal 50 are coated with electrodes 54a and 54b.
  • Each electrode is formed of a thin inner layer LI of conductive material, such as evaporated or sputtered chromium, and a thin outer layer L of a non-corrosive, soft, malleable material, such as gold.
  • One surface 52a is in metallic contact with the cylindrical surface 40 of the post 18.
  • the other surface 52b is in metallic contact with the smooth inner cylindrical surface of the inertial member 70.
  • the two cylindrical surfaces 520 and 52b are concentric with the acceleration axis A-A of the accelerometer and the Z axis of the crystal.
  • the upper and lower surfaces of the crystal are clear, that is free of conductive material.
  • the piezoelectric element 50 is annular, being in the form of a cylindrical ring having a central bore extending therethrough.
  • the top and bottom walls of the element 50 are free of metallic material so that the two electrodes 54a and 54b are insulated from each other, thereby forming a capacitance in which the two plates provided by the electrodes are spaced apart by the dielectric material constituting the piezoelectric element 50.
  • the inner and outer faces of the crystal are cut and polished to an optical finish and the chromium and gold coatings are thin and of uniform thickness. Furthermore, the gold is sufficiently soft and malleable to assure complete even contact of those faces of the crystals with the post 18 and the inertial member 70.
  • Small platinum wires are bonded to the electrodes 54a and 54b by an electrically conductive adhesive, such as platinum-gold paste.
  • an electrically conductive adhesive such as platinum-gold paste.
  • the wire bonded to the electrode 5a has its other end bonded with platinum-gold paste to the post 18, and the wire bonded to electrode 541; has its other end bonded to mass '70.
  • These wires provide electrical communication between the crystal 50 and post 18 and between the crystal 50 and mass 70.
  • the crystal 50 is bonded to the post 18 and the inertial mass 70 is bonded to the crystal 50 by a temperature-resistive, electrically insulating adhesive, such as porcelain cement or the like.
  • the mechanical and electrical connections between the post 18 and the crystal 50 and between the crystal 50 and the mass 70 may be produced by brazing or the like.
  • the post 18 and the base It) of the accelerometer 8 are formed of a metal, such as Waspaloy, which expands with temperature slightly faster than the expansion of the crystal 50.
  • the inertial mass '70 is formed of a metal, such as Inconel, which expands less rapidly than the expansion of the crystal 50.
  • the accelerometer 8 is constructed so that the crystal 50 is held firmly between the post 18 and the mass 70 at the lowest temperature range of the accelerometer. This construction maintains the crystal 50 in a constant state of compression throughout the entire range ofoperation of the accelerometer in order to insure that the crystal will remain in place on the post and that the inertial mass will remain in place on the crystal at all times.
  • the acceleration sensing unit 16 is arranged concentrically on the post 18.
  • the inner face 520 of the crystal 50 is electrically connected to the outer conductor 64 of the coaxial connector 60.
  • the outer face 52b of the piezoelectric element 50 is electrically connected with the insulated hollow central inner conductor 62 of the cable connector 60.
  • the outer conductor 64 of the connector is in the form of a threaded fitting mounting the conductor 60 on the base 10. More particularly, the inner face 520 is in electrical communication with the outer conductor 64 through the coating 54a which is in conductive contact with the metallic post 18.
  • the connection of the outer face 52b with conductor 62 is effected by electrical communication of the electrode 54b with the metallic inertial member which in turn is electrically connected to the central conductor 62 of the connector 60 by means of a lightweight flexible electrical connector 80.
  • the piezoelectric element 50 is in the form of a single lithium niobate crystal cut with its top and bottom parallel faces parallel to a Z plane that is perpendicular to the Z axis of the crystal. (FIG. 2).
  • the crystal is oriented in the accelerometer with the positive Z axis towards the base 10, as shown in FIG. 2.
  • the positive portion of the other axes of this right-hand coordinate system are shown in FIGS. 2 and 3.
  • the accelerometer of this invention employing a crystal of the 3m type, generates an output signal which is proportional to the component of acceleration parallel to the Z axis and is insensitive to components of acceleration in directions perpendicular to the Z axis.
  • the accelerometer is also free of pryroelectric effects.
  • Lithium niobate crystals are of the crystal class that have symmetry properties belonging to the 3m group. As illustrated in FIG. 2, such a crystal has three mirror planes M that extend in directions parallel to the Z, or optical, axis. These planes intersect in pairs parallel to the optical or Z axis and they are separated by dihedral angles of The mirror planes are shown as if they originate in a common axis 2-2. In fact, of course, the planes extend indefinitely so that each plane intersects the angle between each of the other two planes, thus accounting for the 120 separation between the planes. Because of the 3-fold symmetry, each mirror plane M may be considered to include a corresponding Y axis, which is perpendicular to the Z axis. Furthermore, the X axis with respect to each plane of symmetry lies in a direction perpendicular to both the Y axis and the Z axis. Stated differently, an X axis is perpendicular to each corresponding mirror plane M.
  • a 3m crystal is characterized by eight piezoelectric coefficients of which four are mutually independent, as illustrated in the following matrix:
  • the values of the piezoelectric coefficients are given in units of picocoulombs per Newton (pC/N) for lithium niobate, lithium tantalate and tourmaline.
  • the first subscript of the term 0' refers to an electrode face of the crystal
  • the second subscript refers to the type and direction of stress.
  • the numbers I, 2, and 3 represent compressive stress in the X, Y, and Z directions respectively
  • the numbers 4, 5, 6 represent shear moments about the X, Y, and Z axes respectively.
  • the annular crystal can be thought of as divided in small segments as indicated in FIG. 3. If these imaginary segments are small enough, the circular walls become almost straight and each segment approximates a series of small cubes.
  • the piezoelectric coefficients discussed above apply to cubes and these coefficients can be employed to explain the annular crystals response to forces due to acceleration.
  • Segments located at positions 90 from the R and L segments operate similarly except that the r1 coefficient is employed to determine the charge, instead of the 1 coefficient.
  • the d and (1 coefficients are numerically equal.
  • Charges on segment pairs at other locations in the crystal are determined by employing components of both the (1 and (1 coefficients. All of the 52a surfaces of the individual segments are electrically connected together and all of the 52b segments of the individual segments are electrically connected together. Therefore, the transducer is sensitive to acceleration in a direction parallel to the 2-2 axis, with the sensitivity determined by the (1 and ti coefficients.
  • Acceleration in the negative Y direction parallel to the Y axis causes tensile stresses, or tension, in the segment R.
  • 0' is the coefficient employed to determine the charge on the R segment.
  • a charge is produced on the surface 52b and an opposite charge is produced on the surface 52a of the R segment.
  • segments R1 and R2 are each with a segment similar to the R segment discussed above. These segments are labeled R1 and R2 in FIG. 3. Because of the annular symmetry of design of the crystal, segments R1 and R2 will be subjected to compression forces due to the acceleration of the crystal in the negative Y direction parallel to the Y axis. But the magnitude of the forces along the respective Y1 and Y2 axes of segments 5 R1 and R2 are each one-half the total force applied to When the accelerometer is accelerated upward parallel to the Z-Z axis, there is an upward force on the crystals inside diameter and a downward force on the crystals outside diameter. For the segment R, this produces a positive shear couple about the X-axis and for the segment L, this produces a negative shear couple about the X-axis.
  • d is the coefficient employed to determine the charge on the segments R and L.
  • a positive charge is produced on the positive Y surface 52b of segment R and a negative charge is produced on the negative Y surface 520 of segment R.
  • a negative charge is produced onthe positive Y surface 52a of segment L and a positive charge is produced on the negative Y surface 52b of segment L.
  • the surfaces 520 of segments R and L are in electrical communication through electrode 54a so that their negative charges are added together.
  • the 52b surfaces of the segments R and L are electrically connected by electrode 54b so that their positive charges are added together.
  • segment R. -d is the coefficient employed to determine the charges on the segments R1 and R2 when they are subjected to compression.
  • the pyroelectric axis of lithium niobate is the Z axis. Temperature changes will produce charges due to primary and secondary pyroelectric effects on the Z faces of the crystal. But since, in this embodiment of the invention, there is no electric communication with the Z faces, the transducer is not sensitive to the primary pyroelectric effect. Also, there is no sensitivity to uniform thermal expansion of the annular parts of the accelerometer. This is because segment pairs, such as are illustrated in FIG. 3, produce opposite charges when subjected to such stresses, and, since the segments are in electrical communication, these charges cancel.
  • this invention provides an accelerometer which may be employed for a prolonged period at high temperatures; and when employing lithium niobate in the form shown, the invention provides an acan annular accelerometer because of the particular usefulness of the invention in such accelerometers.
  • this invention may also be employed in other types of force actuated transducers, such as pressure transducers.
  • a charge is generated celerometer which is capable of use at high temperabetween the electrodes 54a and 54b that is proportures for prolonged periods; and in particular provides tional to the acceleration, and when the accelerometer such an accelerometer of high sensitivity.
  • a charge is genaccelerometer of this invention is particularly suitable erated proportional to the component of acceleration for use at high temperatures, because of the fact that along the Z axis.
  • the crystal material possesses high electromechanical efficiency (ratio of electrical power generated to the Speclal Precaunons are taken for P hfe mechanical power applied to the crystal), it is also adof these accelerometcfs employmg hth'um mobate vantageous to employ the accelerometers at low temwhen they are used at high temperatures and low presperatures sures, or in the presence of slightly reducing atmo-
  • the invention claimed is: spheres. Such precautions are important because, as is 1.
  • annular piezoelectric element case 12 to provide a channel for ingress Of oxyg n f o 5 comprises a piezoelectric crystal of the 3m class having the outer atmosphere into the cavity within the case. its Z axis parallel to said surfaces.
  • the dielectric constant is the value in the to such surfaces in response to force applied to at least radial direction divided by the dielectric constant of one of said surfaces in said direction and in which free space and the shear modulus is the stress divided means are provided for conducting such electrical sigb h strain about h X i nal to a utilization device responsive thereto
  • the im- Examination of Table Ill shows that lithium niobate provement wherein said annular piezoelectric element preserves its piezoelectric properties to the highest comprises a lithium niobate crystal having its Z axis temperatures and also the highest electromechanical Parallel to Said Surfaces.
  • a transducer as defined in claim 3 comprising an accelerometer in which one of said two members constitutes an inertial member resiliently supported by said element from the other of said two members and wherein said electrical signal is developed in response to the acceleration of an object that is secured to said other of said two members.
  • one of said members has a base provided with a base surface attachable to the surface of said accelerating object, said base surface being normal to said Z-axis.
  • a transducer as defined in claim 3 in which said element has a central hole therein and one of said two members extends through said element, said two members being composed of metal.
  • a transducer as defined in claim 3 in which said element has a central hole therein, and one of said two members extends through said element, the other member being of annular configuration, and wherein said two members are composed of electrically conductive material, the parallel surfaces of said piezoelectric element being in electrically conductive relation with said respective members.
  • each said coating comprises an inner layer of electrically conductive material and an outer layer of noncorrosive, malleable, electrically conductive material.
  • annular piezoelectric element comprises lithium niobate having its Z axis parallel to said surfaces.
  • a transducer as defined in claim 10 including means to apply a force to at least one of said surfaces in said direction of movement.
  • a single crystal body comprising an annular crystal of the 3m class having two parallel cylindrical surfaces parallel to the Z axis of said crystal.
  • An article of manufacture comprising a crystal body as defined in claim 12 wherein said cylindrical surfaces have coatings of electrically conductive material on them.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
US00274251A 1970-12-31 1972-07-24 Annular 3m class piezoelectric crystal transducer Expired - Lifetime US3858065A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US00274251A US3858065A (en) 1970-12-31 1972-07-24 Annular 3m class piezoelectric crystal transducer
CH1688272A CH559369A5 (en) 1972-07-24 1972-11-20 Wide temp. range piezoelectric crystal transducer - uses annular crystal of 3m class
JP12126172A JPS5713807B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-07-24 1972-12-05
DK6473AA DK140417B (da) 1972-07-24 1973-01-05 Accelerometer.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10303670A 1970-12-31 1970-12-31
US00274251A US3858065A (en) 1970-12-31 1972-07-24 Annular 3m class piezoelectric crystal transducer

Publications (1)

Publication Number Publication Date
US3858065A true US3858065A (en) 1974-12-31

Family

ID=23047439

Family Applications (1)

Application Number Title Priority Date Filing Date
US00274251A Expired - Lifetime US3858065A (en) 1970-12-31 1972-07-24 Annular 3m class piezoelectric crystal transducer

Country Status (4)

Country Link
US (1) US3858065A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS5713807B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH (1) CH559369A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DK (1) DK140417B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3955109A (en) * 1974-11-29 1976-05-04 Bell Telephone Laboratories, Incorporated Crystal resonator of (yzw)θ orientation having a thickness to width ratio of less than one
DE2712359A1 (de) * 1976-03-29 1977-10-20 Brueel & Kjaer As Elektromechanisches beschleunigungs- messgeraet
EP0014744A1 (de) * 1979-02-20 1980-09-03 Kistler Instrumente AG Verfahren zum Herstellen eines piezoelektrischen Wandlerelementes
US4433399A (en) * 1979-07-05 1984-02-21 The Stoneleigh Trust Ultrasonic transducers
US4495433A (en) * 1983-11-22 1985-01-22 The United States Of America As Represented By The Secretary Of The Navy Dual capability piezoelectric shaker
US4583019A (en) * 1983-05-30 1986-04-15 Fujitsu Limited Piezoelectric resonator using 165° Y-cut LiNbO3
US4893049A (en) * 1986-05-29 1990-01-09 The United States Of America As Represented By The United States Department Of Energy Lithium niobate explosion monitor
US4924131A (en) * 1987-10-14 1990-05-08 Fujikura Ltd. Piezo-electric acceleration sensor
EP0450079A4 (en) * 1989-10-23 1992-04-29 Vsesojuznoe Khozraschetnoe Vneshneekonomicheskoe Obieddinenie "Tekhsnabexport" Piezoelectric accelerometer
WO1997014969A1 (en) * 1995-10-13 1997-04-24 A/S Brüel & Kjær Method and apparatus for measuring acceleration or mechanical forces
US5739626A (en) * 1991-04-27 1998-04-14 Ngk Spark Plug Co., Ltd. Piezoelectric sensor
US6597084B2 (en) * 2001-01-05 2003-07-22 The Hong Kong Polytechnic University Ring-shaped piezoelectric transformer having an inner and outer electrode
US6960864B2 (en) * 2001-12-25 2005-11-01 Matsushita Electric Works, Ltd. Electroactive polymer actuator and diaphragm pump using the same
WO2006018062A1 (de) * 2004-08-13 2006-02-23 Physik Instrumente (Pi) Gmbh & Co. Kg Miniaturisierbarer motor mit hohlzylindrischem piezooszillator
DE102017114667B3 (de) * 2017-06-30 2018-11-15 Physik Instrumente (Pi) Gmbh & Co. Kg Rotationsultraschallmotor
WO2021244815A1 (de) 2020-06-02 2021-12-09 Kistler Holding Ag Beschleunigungssensor und verwendung eines solchen beschleunigungssensors
CN115781946A (zh) * 2022-11-29 2023-03-14 山东大学 一种铌酸锂晶体的压缩式高温压电敏感切型及制备与应用
CN116046029A (zh) * 2023-03-27 2023-05-02 成都凯天电子股份有限公司 压电式力学传感器温度漂移补偿结构及其补偿方法
US20230157203A1 (en) * 2020-04-14 2023-05-25 Volta Robots S.R.L. Method for controlling a robotic lawnmower by processing vibrations
US12163976B2 (en) * 2020-11-02 2024-12-10 Kistler Holding Ag Acceleration transducer

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH619541A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-10-25 1980-09-30 Kistler Instrumente Ag
JPS5856595B2 (ja) * 1980-10-16 1983-12-15 サンスタ−化学工業株式会社 二液性接着剤

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3104334A (en) * 1959-09-15 1963-09-17 Endevco Corp Annular accelerometer
US3229128A (en) * 1962-10-16 1966-01-11 Electra Scient Corp Accelerometer and method of manufacture
US3307054A (en) * 1959-09-15 1967-02-28 Endevco Corp Accelerometer
US3735161A (en) * 1971-12-23 1973-05-22 Bell & Howell Co Piezoelectric transducer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3104334A (en) * 1959-09-15 1963-09-17 Endevco Corp Annular accelerometer
US3307054A (en) * 1959-09-15 1967-02-28 Endevco Corp Accelerometer
US3229128A (en) * 1962-10-16 1966-01-11 Electra Scient Corp Accelerometer and method of manufacture
US3735161A (en) * 1971-12-23 1973-05-22 Bell & Howell Co Piezoelectric transducer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Journal of the Acoustical Society of America, paper by Warner, Onoe and Coquin, Dec. 1967. *

Cited By (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3955109A (en) * 1974-11-29 1976-05-04 Bell Telephone Laboratories, Incorporated Crystal resonator of (yzw)θ orientation having a thickness to width ratio of less than one
DE2712359A1 (de) * 1976-03-29 1977-10-20 Brueel & Kjaer As Elektromechanisches beschleunigungs- messgeraet
EP0014744A1 (de) * 1979-02-20 1980-09-03 Kistler Instrumente AG Verfahren zum Herstellen eines piezoelektrischen Wandlerelementes
US4433399A (en) * 1979-07-05 1984-02-21 The Stoneleigh Trust Ultrasonic transducers
US4583019A (en) * 1983-05-30 1986-04-15 Fujitsu Limited Piezoelectric resonator using 165° Y-cut LiNbO3
US4495433A (en) * 1983-11-22 1985-01-22 The United States Of America As Represented By The Secretary Of The Navy Dual capability piezoelectric shaker
US4893049A (en) * 1986-05-29 1990-01-09 The United States Of America As Represented By The United States Department Of Energy Lithium niobate explosion monitor
US4924131A (en) * 1987-10-14 1990-05-08 Fujikura Ltd. Piezo-electric acceleration sensor
EP0450079A4 (en) * 1989-10-23 1992-04-29 Vsesojuznoe Khozraschetnoe Vneshneekonomicheskoe Obieddinenie "Tekhsnabexport" Piezoelectric accelerometer
US5739626A (en) * 1991-04-27 1998-04-14 Ngk Spark Plug Co., Ltd. Piezoelectric sensor
WO1997014969A1 (en) * 1995-10-13 1997-04-24 A/S Brüel & Kjær Method and apparatus for measuring acceleration or mechanical forces
US5996412A (en) * 1995-10-13 1999-12-07 A/S Bruel & Kjaer Method and apparatus for measuring acceleration or mechanical forces
US6597084B2 (en) * 2001-01-05 2003-07-22 The Hong Kong Polytechnic University Ring-shaped piezoelectric transformer having an inner and outer electrode
US6960864B2 (en) * 2001-12-25 2005-11-01 Matsushita Electric Works, Ltd. Electroactive polymer actuator and diaphragm pump using the same
WO2006018062A1 (de) * 2004-08-13 2006-02-23 Physik Instrumente (Pi) Gmbh & Co. Kg Miniaturisierbarer motor mit hohlzylindrischem piezooszillator
US20080297001A1 (en) * 2004-08-13 2008-12-04 Physik Instrumente (Pi) Gmbh & Co. Kg Miniaturizable Motor
US7795782B2 (en) 2004-08-13 2010-09-14 Physik Instrumente (Pi) Gmbh & Co. Kg Miniaturizable motor
DE102017114667B3 (de) * 2017-06-30 2018-11-15 Physik Instrumente (Pi) Gmbh & Co. Kg Rotationsultraschallmotor
US20230157203A1 (en) * 2020-04-14 2023-05-25 Volta Robots S.R.L. Method for controlling a robotic lawnmower by processing vibrations
WO2021244815A1 (de) 2020-06-02 2021-12-09 Kistler Holding Ag Beschleunigungssensor und verwendung eines solchen beschleunigungssensors
US12163976B2 (en) * 2020-11-02 2024-12-10 Kistler Holding Ag Acceleration transducer
CN115781946A (zh) * 2022-11-29 2023-03-14 山东大学 一种铌酸锂晶体的压缩式高温压电敏感切型及制备与应用
CN115781946B (zh) * 2022-11-29 2024-06-04 山东大学 一种铌酸锂晶体的压缩式高温压电敏感切型及制备与应用
CN116046029A (zh) * 2023-03-27 2023-05-02 成都凯天电子股份有限公司 压电式力学传感器温度漂移补偿结构及其补偿方法
CN116046029B (zh) * 2023-03-27 2023-07-14 成都凯天电子股份有限公司 压电式力学传感器温度漂移补偿结构及其补偿方法

Also Published As

Publication number Publication date
JPS5713807B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-03-19
DK140417C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-01-21
CH559369A5 (en) 1975-02-28
DK140417B (da) 1979-08-20
JPS4946472A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-04

Similar Documents

Publication Publication Date Title
US3858065A (en) Annular 3m class piezoelectric crystal transducer
US3727084A (en) Accelerometer utilizing shear responsive x-cut lithium niobate
US3349259A (en) Piezoelectric pressure transducer
US4127749A (en) Microphone capable of cancelling mechanical generated noise
US4075525A (en) Piezoelectric accelerometer transducer
US4503351A (en) Piezoelectric element for incorporation in pressure, force or acceleration transducers
US5052226A (en) Accelerometer with piezoelectric element
US8375793B2 (en) Accelerometer for high temperature applications
US3673442A (en) Temperature compensated piezoelectric accelerometer
US3104334A (en) Annular accelerometer
US5512794A (en) Shear accelerometer
US3141100A (en) Piezoelectric resonance device
CN109212262B (zh) 一种基于横向振动模式的高温压电加速度传感器
GB959452A (en) Improvements relating to piezo electric transducers
GB1231729A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB2158579A (en) Angular rate sensor system
US3025359A (en) Vibration-compensated pressure sensitive microphone
CN100594384C (zh) 正交环型压电加速度计
US4052628A (en) Dynamic, shear-mode piezoelectric pressure sensor
US4611490A (en) Angular acceleration sensor
US3060333A (en) High capacity accelerometer
DK169653B1 (da) Piezoelektrisk accelerometer af forskydningstypen
US3714476A (en) Compression accelorometer utilizing a lithium niobate piezoelectric crystal
GB1485739A (en) Piezo-electric generator
US3210993A (en) Electromechanical transducer utilizing poisson ratio effects

Legal Events

Date Code Title Description
AS Assignment

Owner name: ENDEVCO CORPORATION, A NJ CORP.

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:BECTON, DICKINSON AND COMPANY;REEL/FRAME:004810/0499

Effective date: 19870806

AS Assignment

Owner name: BAXTER HEALTHCARE CORPORATION, A CORP. OF DE

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:BAXTER INTERNATIONAL INC., A CORP. OF DE;REEL/FRAME:005622/0729

Effective date: 19900831