US3854442A - Vapor-deposition apparatus - Google Patents

Vapor-deposition apparatus Download PDF

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Publication number
US3854442A
US3854442A US00272967A US27296772A US3854442A US 3854442 A US3854442 A US 3854442A US 00272967 A US00272967 A US 00272967A US 27296772 A US27296772 A US 27296772A US 3854442 A US3854442 A US 3854442A
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United States
Prior art keywords
web
compartment
opening
vaporization
communication opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00272967A
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English (en)
Inventor
H Adam
A Ortlieb
E Traub
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Robert Bosch GmbH
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Robert Bosch GmbH
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Publication date
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Definitions

  • a vapor-deposition arrangement comprises a housing Germany defining a vaporization compartment and an additlonal compartment communicating with the vaporiza- 1 Filed! y 1972 tion compartment via a communication opening.
  • a [21] APP] NO: 272,967 drive unit moves a ribbon-like web of material, to be coated by vapor-deposition, across the communication opening, obstructing the opening and substantially Foreign Application Priority Data separating the compartments from each other.
  • Said member being of a non uni- 3,086.889 4/1963 Strong 118/49 X form peripheral surface whereby to facilitate said es- 3,227.l32 [/1966 Clough 8i. ill. 118/49 cape of [he volatilized 5ub5tance 3.531.319 9/l970 Martorana 118/48 X 6 Claims, 6 Drawing Figures 1 VAPOR-DEPOSITION APPARATUS BACKGROUND OF THE INVENTION
  • the present invention relates to vapor-deposition arrangements.
  • the invention relates to the vapordeposition coating of continuously moving webs, for instance ribbon-like webs which are unrolled from a pay-out reel, passed through a vaporization compartment, and then rolled up on a take-up reel.
  • Vapor-deposition arrangements of this kind usually comprise a vaporization compartment having an entry and an exit for a continuously driven ribbon-like web.
  • a vaporizing unit within the vaporization compartment vaporizes a material, for instance a metal such as aluminum, and creates a stream of vaporized material directed towards the moving web.
  • An evacuating unit maintains an extremely low pressure within the vaporization compartment.
  • the ribbon-like web to be coated travels from a pay-out reel through one or more air-locks, then into and through the vaporization compartment where material is deposited onto one face of the web, then out of the vaporization compartment and through one or more further ai'rlocks, and finally onto a take-up reel.
  • the air-locks are provided in the prior art to preserve the underpressure within the vaporization chamber, and also to prevent the entrance thereinto of undesired substances. The only undesired substances permitted to enter the vaporization chamber will be those expelled or released from the moving ribbon-like web itself.
  • the web as it enters the vaporization chamber may carry certain vaporizable or other substances which are vaporized due to the condensation heat liberated upon condensation of the vapor-deposited material.
  • the vaporizable substance is water.
  • the liberated condensation heat vaporizes the inherent moisture of the web, and the water vapor escapes, for example, from the side of the web not being coated by vapor-deposition. It is of course desirable to limit the vapors present in the vaporization compartment to those actually involved in the vapordeposition, and accordingly such water vapor and/or other substances, must continuously be evacuated from the vaporization compartment.
  • a vapordeposition arrangement which comprises a housing defining a vaporization compartment and an additional compartment communicating with the vaporization compartment via a communication opening.
  • Moving means moves a web to be coated across the communication opening in a sense obstructing the opening and substantially separating the compartments from each other.
  • Evacuating means creates an underpressure in the compartments.
  • Vaporizing means within the vaporization compartment creates a stream of vaporized material directed towards the communication opening for condensation upon the side of the web facing the vaporization compartment. Any volatile substance which, due to the liberated heat of such condensation, escapes from the web at the side thereof facing said additional compartment, enters such additional compartment, and is substantially prevented by the presence of the web itself from passing into the vaporization compartment through the aforementioned communication opening.
  • FIG. 1 is a somewhat schematic view of a vapordeposition arrangement according to the invention
  • FIG. 2 is a section through the arrangement of FIG. 1, taken on line II-II of FIG. 1, and as seen in direction of the arrows at the end of line ll-Il;
  • FIG. 3 is a somewhat schematic view of another vapor-deposition arrangement according to the invention.
  • FIGS. 4-6 are partial sectional views, taken on line IV-IV of FIG. 3, showing three different forms of the guide roller 33 of FIG. 3.
  • the vapor-deposition arrangement shown in FIG. 1 has a generally cylindrical housing including a separating wall 18 which divides the interior of the housing into a vaporization compartment 12 and an additional compartment 11. Compartments 11 and 12 communicate with each other via communication opening 18a in separating wall 18.
  • Moving means in FIG. 1 includes a pay-out reel 14, a take-up or drive reel 17, and guide rollers 15 and 16.
  • drive reel 17 is driven by a nonillustrated motor, or the like.
  • Moving means 14-17 is operative for driving an elongated ribbon-like web 13 across the communication opening 18a in a sense completely obstructing the opening 180, and thus separating vaporization compartment 12 from additional compartment 11. Accordingly, it is necessary that the web carrier means 14-17 be adapted to carry a web having a breadth sufficient to cover the opening 18a, and thereby seal compartments l1 and 12 from each other. This is particularly evident from FIG. 2, where the communication opening 18a is indicated in dotted lines.
  • Evacuating means E serve to evacuate compartments 11, 12 via evacuation passages 11a, 12a, so as to maintain the necessary underpressure in the compartments.
  • the vaporization compartment 12 and additional compartment 11 are separately evacuated.
  • a vaporizing means 20 Located within vaporization compartment 12 is a vaporizing means 20, which may be a simple crucible arrangement or any other type of conventional vaporizing arrangement. Vaporizing means 20 vaporizes a body of material 20, for instance a metal such as aluminum, and creates a stream of vaporized material 21 directed towards communication opening 18a, and thus towards the portion of web 13 passing across the communication opening. The vaporized material 20 is deposited upon that side of the web facing the vaporization compartment. As the vaporized material 20 condenses upon the surface of web 13, the temperature of such condensing material, and in particular the liberated heat of condensation, effects vaporization of the moisture within ribbon-like web 13.
  • the substance in question is not moisture-Le, water--but another substance instead of or in addition to water.
  • gaseous or other material within the carrier may be expelled from the carrier when the carrier is contacted on one side by the very hot vapor-deposited material 20.
  • the water vapor, or other substance is symbolized in FIG. 1 by three parallel arrows, and in fact passes out of the carrier from that side thereof facing the additional compartment 11, and passes into the additional compartment itself.
  • the moving web 13 completely obstructs communication opening 18a, and separates comparts l1 and 12 from each other, the presence of web 13 will all but completely prevent the escaping vapors 22 from finding entry into vaporization compartment 12.
  • the vapors within compartment 12 will be virtually exclusively those of the substance 20 to be vapordeposited, and the need for evacuating other undesirable vapors from compartment 12 is obviated.
  • the vapors 22 passing into additional compartment 11 are withdrawn therefrom by the respective evacuating means E.
  • a cooling trap 23 (indicated in broken lines in FIG. 1) at the side of the web 13 facing the additional compartment 1 l, and in the vicinity of the communication opening 18a. If such cooling trap is provided, the escaping vapors 22 will be condensed upon such trap, and can accordingly be withdrawn from compartment 11 in liquid form, if desired.
  • the obstruction of communication opening 18a by web 13 has the further advantage that the compartments ll, 12 are pneumatically separated from each other quite effectively, and thus in each compartment an underpressure need be maintained only to the degree actually necessary, since the underpressures in the two compartments will not be equalized.
  • FIG. 3 The vapor-deposition arrangement of FIG. 3 is similar to that of FIG. 1.
  • a generally cylindrical housing 30 has a separating wall 37 which divides the interior of the housing into a vaporization compartment 301 and an additional compartment 35.
  • Vaporizing means 39 is located within vaporization compartment 301, and serves to generate and direct a stream of vaporized material 40 in direction towards communication opening 36 in separating wall 37.
  • the moving means of FIG. 3 differs somewhat from that of FIG. 1.
  • the moving means includes a pay-out reel 32, a take-up or drive reel 34 and a generally cylindrical guide roller 33.
  • a ribbon-like web 31 passes from the compartment 35, over roller 33 into compartment 301, and thence back into compartment 35.
  • vaporized material 40 is deposited on and condenses upon that side of web 31 facing vaporization compartment 301.
  • water vapor is released from the other side of web 31, namely that side facing additional compartment 35.
  • such released water vapor passes into additional compartment 35, instead of into vaporization compartment 301.
  • the vapor passes into compartment 35 from the back of web 31, despite the fact that the back of web 31 is being supported on the surface of guide roller 33.
  • FIG. 6 illustrates a roller 33c having a plurality of generally cylindrical supporting surfaces 44 which engage the back side of web 31.
  • the roller 330 also has a plurality of circumferentially extending inwardly recessed channels 43, which permit the back side of web 31 to communicate, via such channels, with additional compartment 35.
  • vapors released from the back side of web 31 pass circumferentially along such channels and into additional compartment 35, but are prevented by the presence of the web itself from passing freely into vaporization compartment 301.
  • FIG. 4 illustrates a guide roller 33a having the same function, but having a generally cylindrical peripheral surface with a plurality of recessed portions arranged in waffle-like grid formation.
  • FIG. 5 illustrates another such guide roller 33b which is hollow, and which has a generally cylindrical peripheral support surface including a plurality of apertures, which permit the gases released from the back side of web 31 to pass into the additional compartment 35.
  • a vapor-deposition arrangement comprising, in combination, housing means defining a vaporization compartment and an additional compartment communicating with said vaporization compartment via a communication opening; moving means for moving a web to be coated across said communication opening along a predetermined path so oriented with respect to said communication opening that a web moved by said moving means across said opening and along said path blocks said opening and separates said compartments from each other; evacuating means for establishing subatmospheric pressure in said compartments; and vaporizing means within said vaporization compartment for creating a stream of vaporized material directed towards said communication opening for condensation upon the one side of the web facing said vaporization compartment, whereby any volatile substance which, due to the liberated heat of said condensation, escapes from the web at other side thereof and into said additional compartment will substantially be prevented by the presence of the web from passing into said vaporization compartment through said communication opening, and wherein said moving means includes a generally cylindrical guide roller interposed between said compartments substantially closing said opening and adapted to guide and support a ribbon-like web at the side
  • peripheral surface of said roller is inwardly recessed at a plurality of portions, whereby to accommodate any volatile substances escaping from said other side of said web.
  • peripheral surface of said roller includes a plurality of recessed portions arranged in waffle-like grid formation.
  • roller is hollow and wherein said has a peripheral surface includes a plurality of apertures.
  • peripheral surface includes a plurality of inwardly recessed circumferentially extending channels.
  • a vapor-deposition arrangement comprising, in combination, housing means defining a vaporization compartment and an additional compartment communicating with said vaporization compartment via a communication opening; moving means for moving a web to be coated across said communication opening along a predetermined path so oriented with respect to said communication opening that a web moved by said moving means across said opening and along said path blocks said opening and separates said compartments from each other; evacuating means for establishing subatmospheric pressure in said compartments; and vaporizing means within said vaporization compartment for creating a stream of vaporized material directed towards said communication opening for condensation upon the one side of the web facing said vaporization compartment, whereby any volatile substance which, due to the liberated heat of said condensation, escapes from the web at the other side thereof and into said additional compartment will substantially be prevented by the presence of the web from passing into said vaporization compartment through said communication opening, and wherein said moving means includes a guide member interposed between said compartments substantially closing said opening and adapted to guide and support a ribbon-like web at the side of

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
US00272967A 1971-08-20 1972-07-18 Vapor-deposition apparatus Expired - Lifetime US3854442A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712141723 DE2141723B2 (de) 1971-08-20 1971-08-20 Vakuum-bedampfungsanlage zur kontinuierlichen bedampfung von baendern

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JP (1) JPS5545632B2 (https=)
DE (1) DE2141723B2 (https=)
FR (1) FR2150336A1 (https=)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3046564A1 (de) * 1979-12-10 1981-09-17 Fuji Photo Film Co., Ltd., Minami-Ashigara, Kanagawa "verfahren und vorrichtung zur vakuum-bedampfung"
US4454836A (en) * 1979-12-10 1984-06-19 Fuji Photo Film Co., Ltd. Vacuum evaporating apparatus utilizing multiple rotatable cans
US4612206A (en) * 1984-06-04 1986-09-16 Nisshin Steel Company, Ltd. Method of controlling deposition amount distribution in a vacuum deposition plating
US4681780A (en) * 1983-12-01 1987-07-21 Polaroid Corporation Continuously cleaned rotary coating mask
US5254169A (en) * 1992-03-10 1993-10-19 Leybold Aktiengesellschaft High-vacuum coating apparatus
US5302208A (en) * 1992-02-08 1994-04-12 Leybold Aktiengesellschaft Vacuum coating installation
US10046973B2 (en) * 2013-05-16 2018-08-14 Lg Chem, Ltd. Apparatus and method for manufacturing SiO

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5214587A (en) * 1975-07-25 1977-02-03 Citizen Watch Co Ltd Continuous delivery mechanism of the device for foring vacuum coatings
DE102012207172A1 (de) * 2012-04-30 2013-10-31 Osram Gmbh Vorrichtung und verfahren zur oberflächenbehandlung eines substrats und verfahren zum herstellen eines optoelektronischen bauelements

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2702760A (en) * 1951-04-25 1955-02-22 Western Electric Co Method of applying metallic stripes to a web of paper
US2945771A (en) * 1953-07-03 1960-07-19 Mansfeld Hubert Formation of light-sensitive layers on photographic films
US2971862A (en) * 1957-04-26 1961-02-14 Nat Res Corp Vapor deposition method and apparatus
US2996037A (en) * 1959-01-26 1961-08-15 Nat Res Corp Vacuum coating apparatus
US3002849A (en) * 1956-06-06 1961-10-03 Chicopee Mfg Corp Method and apparatus for forming nonwoven fabric
US3086889A (en) * 1960-03-21 1963-04-23 Stokes F J Corp Method and apparatus for coating a continuous sheet of material
US3227132A (en) * 1962-12-31 1966-01-04 Nat Res Corp Apparatus for depositing coatings of tin on a flexible substrate
US3531319A (en) * 1963-09-16 1970-09-29 Saint Gobain Method and apparatus for the coating in vacuo of a moving ribbon

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2702760A (en) * 1951-04-25 1955-02-22 Western Electric Co Method of applying metallic stripes to a web of paper
US2945771A (en) * 1953-07-03 1960-07-19 Mansfeld Hubert Formation of light-sensitive layers on photographic films
US3002849A (en) * 1956-06-06 1961-10-03 Chicopee Mfg Corp Method and apparatus for forming nonwoven fabric
US2971862A (en) * 1957-04-26 1961-02-14 Nat Res Corp Vapor deposition method and apparatus
US2996037A (en) * 1959-01-26 1961-08-15 Nat Res Corp Vacuum coating apparatus
US3086889A (en) * 1960-03-21 1963-04-23 Stokes F J Corp Method and apparatus for coating a continuous sheet of material
US3227132A (en) * 1962-12-31 1966-01-04 Nat Res Corp Apparatus for depositing coatings of tin on a flexible substrate
US3531319A (en) * 1963-09-16 1970-09-29 Saint Gobain Method and apparatus for the coating in vacuo of a moving ribbon

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3046564A1 (de) * 1979-12-10 1981-09-17 Fuji Photo Film Co., Ltd., Minami-Ashigara, Kanagawa "verfahren und vorrichtung zur vakuum-bedampfung"
US4454836A (en) * 1979-12-10 1984-06-19 Fuji Photo Film Co., Ltd. Vacuum evaporating apparatus utilizing multiple rotatable cans
US4681780A (en) * 1983-12-01 1987-07-21 Polaroid Corporation Continuously cleaned rotary coating mask
US4612206A (en) * 1984-06-04 1986-09-16 Nisshin Steel Company, Ltd. Method of controlling deposition amount distribution in a vacuum deposition plating
US5302208A (en) * 1992-02-08 1994-04-12 Leybold Aktiengesellschaft Vacuum coating installation
US5254169A (en) * 1992-03-10 1993-10-19 Leybold Aktiengesellschaft High-vacuum coating apparatus
GB2264955B (en) * 1992-03-10 1995-07-05 Leybold Ag A high-vacuum coating apparatus
US10046973B2 (en) * 2013-05-16 2018-08-14 Lg Chem, Ltd. Apparatus and method for manufacturing SiO

Also Published As

Publication number Publication date
DE2141723A1 (de) 1973-03-01
FR2150336A1 (https=) 1973-04-06
DE2141723B2 (de) 1976-03-04
JPS4829685A (https=) 1973-04-19
JPS5545632B2 (https=) 1980-11-19

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