JPS4829685A - - Google Patents
Info
- Publication number
- JPS4829685A JPS4829685A JP47082689A JP8268972A JPS4829685A JP S4829685 A JPS4829685 A JP S4829685A JP 47082689 A JP47082689 A JP 47082689A JP 8268972 A JP8268972 A JP 8268972A JP S4829685 A JPS4829685 A JP S4829685A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712141723 DE2141723B2 (de) | 1971-08-20 | 1971-08-20 | Vakuum-bedampfungsanlage zur kontinuierlichen bedampfung von baendern |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4829685A true JPS4829685A (https=) | 1973-04-19 |
| JPS5545632B2 JPS5545632B2 (https=) | 1980-11-19 |
Family
ID=5817265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8268972A Expired JPS5545632B2 (https=) | 1971-08-20 | 1972-08-18 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3854442A (https=) |
| JP (1) | JPS5545632B2 (https=) |
| DE (1) | DE2141723B2 (https=) |
| FR (1) | FR2150336A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5214587A (en) * | 1975-07-25 | 1977-02-03 | Citizen Watch Co Ltd | Continuous delivery mechanism of the device for foring vacuum coatings |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3046564A1 (de) * | 1979-12-10 | 1981-09-17 | Fuji Photo Film Co., Ltd., Minami-Ashigara, Kanagawa | "verfahren und vorrichtung zur vakuum-bedampfung" |
| US4403002A (en) * | 1979-12-10 | 1983-09-06 | Fuji Photo Film Co., Ltd. | Vacuum evaporating apparatus |
| US4681780A (en) * | 1983-12-01 | 1987-07-21 | Polaroid Corporation | Continuously cleaned rotary coating mask |
| JPS60258467A (ja) * | 1984-06-04 | 1985-12-20 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置における付着量分布制御法 |
| DE4203632C2 (de) * | 1992-02-08 | 2003-01-23 | Applied Films Gmbh & Co Kg | Vakuumbeschichtungsanlage |
| DE4207525C2 (de) * | 1992-03-10 | 1999-12-16 | Leybold Ag | Hochvakuum-Beschichtungsanlage |
| DE102012207172A1 (de) * | 2012-04-30 | 2013-10-31 | Osram Gmbh | Vorrichtung und verfahren zur oberflächenbehandlung eines substrats und verfahren zum herstellen eines optoelektronischen bauelements |
| TWI558663B (zh) * | 2013-05-16 | 2016-11-21 | Ｌｇ化學股份有限公司 | 用於製造ＳｉＯ之設備與方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2702760A (en) * | 1951-04-25 | 1955-02-22 | Western Electric Co | Method of applying metallic stripes to a web of paper |
| DE938644C (de) * | 1953-07-03 | 1956-02-02 | Hubert Mansfeld | Verfahren zur Aufbringung lichtempfindlicher Stoffe auf Schichttraeger |
| DE1288056B (de) * | 1956-06-06 | 1969-01-30 | Johnson & Johnson, New Brunswick, N.J. (V.St.A.) | Vorrichtung zum Herstellen einer flexiblen, textlien, ungewebten Faserstoffbahn |
| US2971862A (en) * | 1957-04-26 | 1961-02-14 | Nat Res Corp | Vapor deposition method and apparatus |
| US2996037A (en) * | 1959-01-26 | 1961-08-15 | Nat Res Corp | Vacuum coating apparatus |
| US3086889A (en) * | 1960-03-21 | 1963-04-23 | Stokes F J Corp | Method and apparatus for coating a continuous sheet of material |
| US3227132A (en) * | 1962-12-31 | 1966-01-04 | Nat Res Corp | Apparatus for depositing coatings of tin on a flexible substrate |
| US3531319A (en) * | 1963-09-16 | 1970-09-29 | Saint Gobain | Method and apparatus for the coating in vacuo of a moving ribbon |
-
1971
- 1971-08-20 DE DE19712141723 patent/DE2141723B2/de not_active Ceased
-
1972
- 1972-07-18 US US00272967A patent/US3854442A/en not_active Expired - Lifetime
- 1972-08-09 FR FR7228817A patent/FR2150336A1/fr not_active Withdrawn
- 1972-08-18 JP JP8268972A patent/JPS5545632B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5214587A (en) * | 1975-07-25 | 1977-02-03 | Citizen Watch Co Ltd | Continuous delivery mechanism of the device for foring vacuum coatings |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2141723A1 (de) | 1973-03-01 |
| FR2150336A1 (https=) | 1973-04-06 |
| DE2141723B2 (de) | 1976-03-04 |
| US3854442A (en) | 1974-12-17 |
| JPS5545632B2 (https=) | 1980-11-19 |