FR2150336A1 - - Google Patents

Info

Publication number
FR2150336A1
FR2150336A1 FR7228817A FR7228817A FR2150336A1 FR 2150336 A1 FR2150336 A1 FR 2150336A1 FR 7228817 A FR7228817 A FR 7228817A FR 7228817 A FR7228817 A FR 7228817A FR 2150336 A1 FR2150336 A1 FR 2150336A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7228817A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOSCH
Original Assignee
BOSCH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOSCH filed Critical BOSCH
Publication of FR2150336A1 publication Critical patent/FR2150336A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
FR7228817A 1971-08-20 1972-08-09 Withdrawn FR2150336A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712141723 DE2141723B2 (de) 1971-08-20 1971-08-20 Vakuum-bedampfungsanlage zur kontinuierlichen bedampfung von baendern

Publications (1)

Publication Number Publication Date
FR2150336A1 true FR2150336A1 (fr) 1973-04-06

Family

ID=5817265

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7228817A Withdrawn FR2150336A1 (fr) 1971-08-20 1972-08-09

Country Status (4)

Country Link
US (1) US3854442A (fr)
JP (1) JPS5545632B2 (fr)
DE (1) DE2141723B2 (fr)
FR (1) FR2150336A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5214587A (en) * 1975-07-25 1977-02-03 Citizen Watch Co Ltd Continuous delivery mechanism of the device for foring vacuum coatings
DE3046564A1 (de) * 1979-12-10 1981-09-17 Fuji Photo Film Co., Ltd., Minami-Ashigara, Kanagawa "verfahren und vorrichtung zur vakuum-bedampfung"
US4403002A (en) * 1979-12-10 1983-09-06 Fuji Photo Film Co., Ltd. Vacuum evaporating apparatus
US4681780A (en) * 1983-12-01 1987-07-21 Polaroid Corporation Continuously cleaned rotary coating mask
JPS60258467A (ja) * 1984-06-04 1985-12-20 Mitsubishi Heavy Ind Ltd 真空蒸着装置における付着量分布制御法
DE4203632C2 (de) * 1992-02-08 2003-01-23 Applied Films Gmbh & Co Kg Vakuumbeschichtungsanlage
DE4207525C2 (de) * 1992-03-10 1999-12-16 Leybold Ag Hochvakuum-Beschichtungsanlage
DE102012207172A1 (de) * 2012-04-30 2013-10-31 Osram Gmbh Vorrichtung und verfahren zur oberflächenbehandlung eines substrats und verfahren zum herstellen eines optoelektronischen bauelements
CN104854027B (zh) * 2013-05-16 2017-07-18 Lg化学株式会社 用于制备SiO的设备与方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2702760A (en) * 1951-04-25 1955-02-22 Western Electric Co Method of applying metallic stripes to a web of paper
DE938644C (de) * 1953-07-03 1956-02-02 Hubert Mansfeld Verfahren zur Aufbringung lichtempfindlicher Stoffe auf Schichttraeger
DE1288056B (de) * 1956-06-06 1969-01-30 Johnson & Johnson, New Brunswick, N.J. (V.St.A.) Vorrichtung zum Herstellen einer flexiblen, textlien, ungewebten Faserstoffbahn
US2971862A (en) * 1957-04-26 1961-02-14 Nat Res Corp Vapor deposition method and apparatus
US2996037A (en) * 1959-01-26 1961-08-15 Nat Res Corp Vacuum coating apparatus
US3086889A (en) * 1960-03-21 1963-04-23 Stokes F J Corp Method and apparatus for coating a continuous sheet of material
US3227132A (en) * 1962-12-31 1966-01-04 Nat Res Corp Apparatus for depositing coatings of tin on a flexible substrate
US3531319A (en) * 1963-09-16 1970-09-29 Saint Gobain Method and apparatus for the coating in vacuo of a moving ribbon

Also Published As

Publication number Publication date
US3854442A (en) 1974-12-17
JPS5545632B2 (fr) 1980-11-19
JPS4829685A (fr) 1973-04-19
DE2141723B2 (de) 1976-03-04
DE2141723A1 (de) 1973-03-01

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Legal Events

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ST Notification of lapse