US3783231A - Apparatus for vacuum-evaporation of metals under the action of an electric arc - Google Patents

Apparatus for vacuum-evaporation of metals under the action of an electric arc Download PDF

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Publication number
US3783231A
US3783231A US00237083A US3783231DA US3783231A US 3783231 A US3783231 A US 3783231A US 00237083 A US00237083 A US 00237083A US 3783231D A US3783231D A US 3783231DA US 3783231 A US3783231 A US 3783231A
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cathode
evaporable
electric arc
electromagnet
magnetic field
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US00237083A
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English (en)
Inventor
E Goldiner
K Kirshfeld
V Usov
L Sablev
J Dolotov
L Getman
V Gorbunov
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation

Definitions

  • ABSTRACT A method for vacuum-evaporation of metals under the action of an electric arc and using a magnetic field is characterized by the fact that for retaining a cathode spot of an electric are, a constant magnetic field is substituted by a pulsed magnetic field whose intensity reaches a maximum when the cathode spot is shifted to a non-evaporable cathode surface.
  • a device for carrying out the method employs a sensor to take up the effect of electric arc, which is so arranged as to straddle the non-evaporable cathode surface and takes up the effect of electric are only when the cathode spot is found on the non-evaporable cathode surface; the device is simple in design, smaller in size, and features a simplified-construction of an electromagnet that needs less power to be operated as compared to the prior-art devices used for vacuum-evaporation of metals under the effect of an electric are.
  • the present invention relates to methods of and devices for vacuum-evaporation of metals, and has particular reference to methods of vacuum-evaporation of metals by means of an electric arc and to devices for carrying said methods into effect.
  • Vacuum-evaporation of metals in particular, under the efi'ect of an electric arc, is used for applying metallic coatings or films to metal and dielectrics, as well as in sorption pumps.
  • a tendency of the cathode spot to move in a magnetic field from an obtuse angle towards an acute angle made up by the cathode surface and the direction of the lines of magnetic force is used to return the cathode spot onto the evaporable cathode surface in case of its spontaneous shifting onto the non-evaporable cathode surface.
  • the afore-discussed method is employed in widely used devices which includes a vacuum chamber accommodating a coneor spherical-shaped cathode and an anode, both being made of the metal being evaporated and connected to a D.C. voltage source; permanent magnets located outside the vacuum chamber establish a constant homogeneous magnetic field at the cathode surface so as to retain the cathode spot on the evaporable cathode surface.
  • An acute angle made up by the lines of magnetic force and the non-evaporable cathode surface is provided due to the abovesaid shape of the cathode.
  • an electric arc is struck across the cathode and the anode by momentarily contacting the cathode by a movable electrode.
  • the arc burns in the vapours of the metal being evaporated while randomly moving over the cathode surface.
  • the magnetic field causes the cathode spot to return onto the evaporable cathode surface.
  • a disadvantage inherent in said method of arcevaporation of metals under vacuum resides in the presence of a magnetic field while the cathode spot of the electric arc is found on the evaporable cathode surface.
  • the magnetic field be established only when the cathode spot drifts and gets onto the non'evaporable cathode surface.
  • a device for carrying into effect the method of evaporating metals as set forth hereinabove which is essentially a vacuum chamber accommodating a cathode made of the metal to be evaporated and an anode between which an electric arc is struck to evaporate metal from the evaporable cathode surface, and the cathode spot is retained on the evaporable cathode surface, by means of an electromagnet that establishes a magnetic field whose lines of force make up an acute angle with the non-evaporable cathode surface
  • provision is made for a sensor to sense and take up the effect of the electric arc, said sensor being so arranged with respect to the cathode as to take up the effect of the electric are only when the cathode spot drifts to and is found on the non-evaporable cathode surface.
  • the senor adapted to sense and take up the effect of the electric arc when the cathode spot is found on the non-evaporable cathode surface comprises an electrode which is under the anode potential and straddles the non-evaporable cathode surface.
  • a method for an arc-evaporation of metals and a device for carrying said method into effect wherein the construction of electromagnet is substantially simplified, at the same time ensuring a uniform cathode evaporation, the stability of the electric are remaining unaffected.
  • Such a simplified construction of the electromagnet is attained due to the fact that the herein proposed method does not require homogeneity of the magnetic field effective on the evaporable cathode surface.
  • the herein-disclosed invention enables also the shape of the cathode to be simplified which makes possible, with the commensurable size of the device, an increase the stock of the evaporable cathode metal.
  • the invention also makes possible the use of a cathode with large-area evaporable surface and provides vacuumevaporation devices of practically unlimited production capacity.
  • FIG. 1 illustrates a device for vacuum-evaporation of metals, made according to the present invention with particular reference to devices for sorption evacuation of active gases;
  • FIG. 2 illustrates a device for vacuum-evaporation of metal, made according to the present invention with particular reference to devices for obtaining fine films on metal and dielectric work-pieces;
  • FIG. 3 illustrates a modified device for evaporation of metals with particular reference to obtaining uniform metallic films on flat-shaped work-pieces
  • FIG. 4 shows an oscillogram of the current of an electromagnet that establishes a pulsed magnetic field in the device of FIG. 2.
  • a device for sorption evacuation of active gases as shown in FIG. 1, is designed as follows.
  • a pump housing 1 made of a non-magnetic material is connected to the flange of a space 2 to be evacuated by bolts 3 and is packed with a rubber seal 4.
  • the housing 1 itself serves as a anode accommodates a cathode 7 made of the metal being to be evaporated; the cathode is placed on a water-cooled copper bed 5 which is insulated from the housing 1 by means of an insulator 6.
  • the cathode 7 which is expediently shaped as a disk is tightly forced against the cooled bed 5 with studs 8.
  • a cylindrical non-evaporable surface 9 of the cathode 7 is embraced with an electrode 10 which is in fact a sensor adapted to sense and pick up the effect of an electric arc when the cathode spot is found on the non-evaporable surface 9 of the cathode 7;
  • the electrode 10 is fixed to the cooled bed 5 through insulators (not shown) and has a recess 11 for a movable electrode 12 to strike an electric arc.
  • the movable electrode 12 is held through an insulator 13 to an armature 14 located inside a tube 15 which is made of a non-magnetic material.
  • a coil 16 of the electromagnet is adapted to break the gap cathode movable electrode by compressing a spring 17.
  • an electromagnet 18 capable of establishing a magnetic field whose lines of force pass at an acute angle to the non-evaporable surface 9 of the cathode 7.
  • a fore-pumping system incorporating a mechanical pump and a high-vacuum evacuation system which comprises a vapour-oil diffusion pump (not shown) connected to a flange 20.
  • the cathode 7 made of an evaporable metal, viz.
  • titanium is connected through a wire conductor 21 to one of the ends of the coil of the electromagnet 16, while the other end of the electromagnet 16 is connected via a wire conductor 22 to the negative pole of a power source 23.
  • the positive pole of the power source 23 is connected to the pump housing 1 via a wire conductor 24.
  • the electrode 10 is electrically connected to the housing 1 via a wire conductor 25 passing through the vacuum-tight insulator 6 and a resistor 26.
  • the movable electrode 12 is connected to the pump housing I through a resistor 30 and by means of a flexible conductor 27 and a wire conductor 28 passing through a vacuum-tight insulator 29.
  • the coil of the electromagnet 18 is connected via wire conductors 31 and 32 to the output of an amplifier 33 at whose input is delivered a signal taken from the resistor 26 via wire conductors 34 and 35.
  • the high-vacuum electric-arc sorption pump illustrated in FIG. I operates as follows. Upon pumping out gas from the space 2 being evacuated and from the chamber 19 by means of the fore-pumping system till a pressure of 1.10 to 5.10 mm Hg is reached, the movable electrode 12 is used to strike an electric arc on the non-evaporable surface 9 of the cathode 7 at a cathode spot. The arc burns across the surface 9 of the cathode 7 and the electrode 10 which are connected via the resistor 26 to the housing 1, i.e., the anode. A voltage drop effective across the resistor 26 is impressed upon the input of the amplifier 33 to whose output is connected the electromagnet 18.
  • a current flows along the coil of the electromagnet R8 to establish a magnetic field which expels the cathode spot of the electric arc onto an evaporable surface 36 of the cathode 7.
  • the cathode spot 37 causes metal to evaporate, whereupon the evaporated metal is deposited upon the inner walls of the housing 1 (anode).
  • titanium deposited upon the walls of the housing 1 effects evacuation of active gases.
  • the cathode 7 grows hot; to cool down the cathode 7 a coolant is made to flow liquid along a passageway 38 made in the cooling bed 5.
  • a coolant is made to flow liquid along a passageway 38 made in the cooling bed 5.
  • the fore-pumping system is disconnected and the highvacuum evacuation system is engaged to evacuate an active gas (viz., argon) remaining in the space 2 to be evacuated.
  • the cathode spot 37 of the electric arc While performing randomwise motion over the evaporable surface 36 of the cathode 7, the cathode spot 37 of the electric arc periodically drifts and gets onto the non-evaporable surface 9, thus closing the circuit comprising the surface 9, the electrode 10, the wire conductor 25, the resistor 26 and the housing 1 thereby energizing the electromagnet 18 via the amplifier 33; as a result, the electromagnet 18 establishes a magnetic field that expels the cathode spot onto the evaporable surface 36.
  • the magnetic field is established only when the cathode spot is found on the non-evaporable surface 9 of the cathode 7.
  • FIG. 2 illustrates a device for a vacuum-deposition of fine films.
  • the cathode 7 made of the metal being evaporated is disk-shaped, while the work pieces 39 on which metal is to be deposited are located oppositely to the cathode on the surface of an imaginary sphere 40 tangential to the evaporable surface 36 of the cathode 7.
  • a cover 41 is made of a non-magnetic material, whereas an electromagnet 4?. establishing a magnetic field, is mounted on the cover 41 and is electrically connected through a wire conductor 43 to the cover 41 and through a wire conductor 44, thence to a housing 45 which serves as an anode.
  • the cover 41 serves as a sensor to pick up the effect of electric are when the cathode spot is found on the nonevaporable surface 9 of the cathode 7.
  • the cathode 7 is fixed to a cooled bed 46 by the studs 8.
  • the cooled bed has a passageway 47 for the coolant liquid to pass; the latter is let in and out through pipe connectors 48 and 49.
  • the cooled bed 46 is vacuumtightly attached to the cover 41 made of a nonmagnetic material, by means of an insulator 50.
  • the cover 41 is fixed on a housing 45 by bolts 51 and nuts 52 and is insulated therefrom with an insulating gasket 53, the rubber seals 4, an insulating bush 54 and insulating washers fitted onto the bolt 51.
  • a movable electrode 56 is fixed on the armature 14 through the insulator l3.
  • Gas-evacuation procedure occurs through the use of the systems of fore-pumping and high-vacuum evacuation (not shown in FIG. 2).
  • the device operates as follows. Upon reaching the degree of operating vacuum inside the space of the housing 45, lower than 1.10" mm Hg, preferably to 10 mm Hg, the power source 23 is switched on to energize an electric arc. As a result, current starts flowing along the circuit comprising the wire conductor 22, the magnet coil 16, the wire conductor 21, the cooling bed 46, the cathode 7, the movable electrode 56, the wire conductor 57, the resistor 58, the wire conductor 59, the housing 45 (anode), and the wire conductor 24, thereby inducing current in the magnet coil 16 with the result that the armature 14 gets pulled thereinto. An electric arc is thus struck across the evaporable surface 36 of the cathode 7 and the movable electrode 56.
  • the oscillogram of the current of the electromagnet 42 is taken with the diameter of the titanium cathode 7 equal to 50 mm and a mean arc-discharge current of A.
  • a modofication of the device for evaporation of metals serves for making uniform coatings or films on flat-shaped work pieces 60.
  • a cathode 61 of the metal being evaporated is shaped as a flat ring and is disposed on a cooled bed 62.
  • Non-evaporable surfaces 63 and 64 of the cathode 61 are embraced by electromagnets 65 and 66.
  • Turns 67 and 68 of the coils of the electromagnets 65 and 66 have a clearance with the non-evaporable sur' faces 63 and 64 of the cathode 61, whereas turns 69 and 70 are connected through wire conductors 71 and 72 to the housing 45 and a cover 73.
  • the entire cathode unit is mounted on the cover 73 of the housing 45.
  • the cathode spot of electric arc while randomly travelling over an evaporable surface 74 of the cathode 61, periodically gets into the gap between the non-evaporable surface 63 or 64 and the turns 67 or 68, with the result that aredischarge current starts flowing along the electromagnet 65 or 66, creating a magnetic field whose lines of force make up an acute angle with the non-evaporable surface 63 and 64, and the cathode spot of electric are returns onto the evaporable surface 74 of the cathode 61.
  • a device for vacuum-evaporation of metals under the effect of an electric arc comprising a cathode having an evaporable and a non-evaporable surface, said cathode being made of a solid metal to be evaporated by the cathode spot of said electric are randomly moving over the evaporable surface of said cathode; an anode; means for generating said electric are between said cathode and said anode; an electromagnet disposed so that at least one turn of said electromagnet facing the non-evaporable surface of said cathode forms a gap with said non-evaporable surface at the side of said evaporable surface of said cathode, the size of said gap being such that when said cathode spot shifts on to said non-evaporable surface said electric arc strikes at least partially between said nonevaporable surface and said turn of said electromagnet, said electromagnet being connected to said anode so that electric current flows in the turn of said electromagnet when said electric arc strikes between said nonevapor
  • a device for vacuum-evaporation of metals under the effect of an electric arc comprising a cathode having an evaporable and a non-evaporable surface, said cathode being made of a solid metal to be evaporated by the cathode spot of said electric are randomly moving over the evaporable surface of said cathode; an anode; means for generating said electric arc between said cathode and said anode; an electrode arranged so of said cathode.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
US00237083A 1972-03-22 1972-03-22 Apparatus for vacuum-evaporation of metals under the action of an electric arc Expired - Lifetime US3783231A (en)

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Cited By (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4448659A (en) * 1983-09-12 1984-05-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization including initial target cleaning
US4448799A (en) * 1983-04-21 1984-05-15 Multi-Arc Vacuum Systems Inc. Arc-initiating trigger apparatus and method for electric arc vapor deposition coating systems
FR2545840A1 (fr) * 1983-05-09 1984-11-16 Vac Tec Syst Appareil perfectionne pour la stabilisation d'un arc servant a la vaporisation d'une matiere solide
US4512867A (en) * 1981-11-24 1985-04-23 Andreev Anatoly A Method and apparatus for controlling plasma generation in vapor deposition
DE3413701A1 (de) * 1983-10-14 1985-05-02 Multi-Arc Vacuum Systems Inc., Saint Paul, Minn. Elektroden-halterungsbaugruppe fuer eine bedampfungsmaschine
WO1985003954A1 (en) * 1984-03-02 1985-09-12 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
US4551221A (en) * 1980-06-25 1985-11-05 Axenov Ivan I Vacuum-arc plasma apparatus
US4559121A (en) * 1983-09-12 1985-12-17 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization for permeable targets
US4559125A (en) * 1983-09-12 1985-12-17 Vac-Tec Systems, Inc. Apparatus for evaporation arc stabilization during the initial clean-up of an arc target
US4600489A (en) * 1984-01-19 1986-07-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
US4622452A (en) * 1983-07-21 1986-11-11 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition electrode apparatus
US4724058A (en) * 1984-08-13 1988-02-09 Vac-Tec Systems, Inc. Method and apparatus for arc evaporating large area targets
US4734178A (en) * 1986-11-06 1988-03-29 Vsesojuzny Naucho-Issledovatelsky Instrumentalny Institut Process for deposition of a wear-resistant coating onto a cutting tool made from a carbon-containing material
US4839245A (en) * 1985-09-30 1989-06-13 Union Carbide Corporation Zirconium nitride coated article and method for making same
JPH0214851A (ja) * 1988-06-30 1990-01-18 Nippon Sheet Glass Co Ltd 多色系熱線遮へい板の製造方法
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture
US4929322A (en) * 1985-09-30 1990-05-29 Union Carbide Corporation Apparatus and process for arc vapor depositing a coating in an evacuated chamber
US4936960A (en) * 1989-01-03 1990-06-26 Advanced Energy Industries, Inc. Method and apparatus for recovery from low impedance condition during cathodic arc processes
US4943325A (en) * 1988-10-19 1990-07-24 Black & Veatch, Engineers-Architects Reflector assembly
US5026466A (en) * 1987-06-29 1991-06-25 Hauzer Holding B.V. Method and device for coating cavities of objects
US5037522A (en) * 1990-07-24 1991-08-06 Vergason Technology, Inc. Electric arc vapor deposition device
US5215640A (en) * 1987-02-03 1993-06-01 Balzers Ag Method and arrangement for stabilizing an arc between an anode and a cathode particularly for vacuum coating devices
US5380421A (en) * 1992-11-04 1995-01-10 Gorokhovsky; Vladimir I. Vacuum-arc plasma source
US5458754A (en) 1991-04-22 1995-10-17 Multi-Arc Scientific Coatings Plasma enhancement apparatus and method for physical vapor deposition
US5480527A (en) * 1994-04-25 1996-01-02 Vapor Technologies, Inc. Rectangular vacuum-arc plasma source
US5656091A (en) * 1995-11-02 1997-08-12 Vacuum Plating Technology Corporation Electric arc vapor deposition apparatus and method
DE19724996C1 (de) * 1997-06-13 1998-09-03 Fraunhofer Ges Forschung Verfahren zum plasmaaktivierten Elektronenstrahlverdampfen und Einrichtung zur Durchführung des Verfahrens
US5895559A (en) * 1996-04-08 1999-04-20 Christy; Ronald Cathodic arc cathode
US5932078A (en) * 1997-08-30 1999-08-03 United Technologies Corporation Cathodic arc vapor deposition apparatus
US5972185A (en) * 1997-08-30 1999-10-26 United Technologies Corporation Cathodic arc vapor deposition apparatus (annular cathode)
US5997705A (en) * 1999-04-14 1999-12-07 Vapor Technologies, Inc. Rectangular filtered arc plasma source
US6007879A (en) * 1995-04-07 1999-12-28 Advanced Energy Industries, Inc. Adjustable energy quantum thin film plasma processing system
US6009829A (en) * 1997-08-30 2000-01-04 United Technologies Corporation Apparatus for driving the arc in a cathodic arc coater
US6036828A (en) * 1997-08-30 2000-03-14 United Technologies Corporation Apparatus for steering the arc in a cathodic arc coater
US6103074A (en) * 1998-02-14 2000-08-15 Phygen, Inc. Cathode arc vapor deposition method and apparatus
US6350356B1 (en) 1997-11-26 2002-02-26 Vapor Technologies, Inc. Linear magnetron arc evaporation or sputtering source
US20030230483A1 (en) * 2002-02-28 2003-12-18 Sunthankar Mandar B. Coating method and apparatus
US20040261311A1 (en) * 2003-06-13 2004-12-30 Mike Mattlage Fishing hook
US20070251816A1 (en) * 2006-05-01 2007-11-01 Vapor Technologies, Inc. Bi-directional filtered arc plasma source
US20090065045A1 (en) * 2007-09-10 2009-03-12 Zenith Solar Ltd. Solar electricity generation system
US7867366B1 (en) 2004-04-28 2011-01-11 Alameda Applied Sciences Corp. Coaxial plasma arc vapor deposition apparatus and method
US8038858B1 (en) 2004-04-28 2011-10-18 Alameda Applied Sciences Corp Coaxial plasma arc vapor deposition apparatus and method
DE102004054092B4 (de) * 2003-11-18 2012-03-29 Oerlikon Trading Ag, Trübbach Zündvorrichtung
US9153422B2 (en) 2011-08-02 2015-10-06 Envaerospace, Inc. Arc PVD plasma source and method of deposition of nanoimplanted coatings
US9893223B2 (en) 2010-11-16 2018-02-13 Suncore Photovoltaics, Inc. Solar electricity generation system

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DE3152736C2 (de) * 1981-02-23 1984-04-05 Leonid Pavlovič Sablev Selbstverzehrende Kathode f}r einen Lichtbogen-Metallverdampfer
FR2556373B1 (fr) * 1983-12-07 1989-09-08 Vac Tec Syst Procede ameliore et appareil pour la stabilisation d'un arc de pulverisation de cibles non permeables a l'aide d'un anneau d'arret permeable
BG49771A1 (en) * 1989-07-13 1992-02-14 T I Vakuumni Sistemi Electric- bow evaparator
JPH08505437A (ja) * 1992-12-30 1996-06-11 ナウチノ−プロイズボドストヴェノーエ・プレドプリェティエ・“ノヴァテク” 下地の真空プラズマ処理のための装置
RU2279938C2 (ru) * 2004-09-06 2006-07-20 Елена Евгеньевна Никитина Способ транспортировки длинномерных объектов через вакуумную камеру и устройство для его осуществления

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Cited By (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4551221A (en) * 1980-06-25 1985-11-05 Axenov Ivan I Vacuum-arc plasma apparatus
US4512867A (en) * 1981-11-24 1985-04-23 Andreev Anatoly A Method and apparatus for controlling plasma generation in vapor deposition
US4448799A (en) * 1983-04-21 1984-05-15 Multi-Arc Vacuum Systems Inc. Arc-initiating trigger apparatus and method for electric arc vapor deposition coating systems
DE3413728A1 (de) * 1983-04-21 1984-10-25 Multi-Arc Vacuum Systems Inc., Saint Paul, Minn. Triggereinrichtung und verfahren zur lichtbogenzuendung fuer elektrische lichtbogen-bedampfungssysteme
FR2544953A1 (fr) * 1983-04-21 1984-10-26 Multi Arc Vacuum Syst Appareil de declenchement d'arc et procede pour des systemes de revetement par depot en phase vapeur a l'arc electrique
FR2545840A1 (fr) * 1983-05-09 1984-11-16 Vac Tec Syst Appareil perfectionne pour la stabilisation d'un arc servant a la vaporisation d'une matiere solide
NL8400053A (nl) * 1983-05-09 1984-12-03 Vac Tec Syst Werkwijze voor verdampingsboogstabilisatie en inrichting voor het toepassen van deze werkwijze.
US4622452A (en) * 1983-07-21 1986-11-11 Multi-Arc Vacuum Systems, Inc. Electric arc vapor deposition electrode apparatus
US4559125A (en) * 1983-09-12 1985-12-17 Vac-Tec Systems, Inc. Apparatus for evaporation arc stabilization during the initial clean-up of an arc target
GB2148329A (en) * 1983-09-12 1985-05-30 Vac Tec Syst Improved method and apparatus for evaporation arc stabilization including initial target cleaning
US4559121A (en) * 1983-09-12 1985-12-17 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization for permeable targets
US4448659A (en) * 1983-09-12 1984-05-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization including initial target cleaning
DE3413701A1 (de) * 1983-10-14 1985-05-02 Multi-Arc Vacuum Systems Inc., Saint Paul, Minn. Elektroden-halterungsbaugruppe fuer eine bedampfungsmaschine
US4600489A (en) * 1984-01-19 1986-07-15 Vac-Tec Systems, Inc. Method and apparatus for evaporation arc stabilization for non-permeable targets utilizing permeable stop ring
WO1985003954A1 (en) * 1984-03-02 1985-09-12 Regents Of The University Of Minnesota Controlled vacuum arc material deposition, method and apparatus
US4724058A (en) * 1984-08-13 1988-02-09 Vac-Tec Systems, Inc. Method and apparatus for arc evaporating large area targets
US4929322A (en) * 1985-09-30 1990-05-29 Union Carbide Corporation Apparatus and process for arc vapor depositing a coating in an evacuated chamber
US4839245A (en) * 1985-09-30 1989-06-13 Union Carbide Corporation Zirconium nitride coated article and method for making same
US4895765A (en) * 1985-09-30 1990-01-23 Union Carbide Corporation Titanium nitride and zirconium nitride coating compositions, coated articles and methods of manufacture
AU585086B2 (en) * 1986-11-06 1989-06-08 Vsesojuzny Nauchno-Issledovatelsky Instrumentalny Institut Process for deposition of a wear-resistant coating onto a cutting tool from a carbon-containing material
US4734178A (en) * 1986-11-06 1988-03-29 Vsesojuzny Naucho-Issledovatelsky Instrumentalny Institut Process for deposition of a wear-resistant coating onto a cutting tool made from a carbon-containing material
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FR2182747A1 (nl) 1973-12-14
DE2214590A1 (de) 1973-10-04
DE2214590B2 (de) 1976-07-01
GB1342560A (en) 1974-01-03
FR2182747B1 (nl) 1976-06-11

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