US3632398A - Process for the treatment of internal surfaces of recesses - Google Patents

Process for the treatment of internal surfaces of recesses Download PDF

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Publication number
US3632398A
US3632398A US735299A US3632398DA US3632398A US 3632398 A US3632398 A US 3632398A US 735299 A US735299 A US 735299A US 3632398D A US3632398D A US 3632398DA US 3632398 A US3632398 A US 3632398A
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Prior art keywords
internal surfaces
beamed
workpiece
recesses
recess
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English (en)
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Dieter Konig
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Messer Griesheim GmbH
Allied Steel and Wire Ltd
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Dieter Konig
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Assigned to MESSER GRIESHEIM GMBH, A COMPANY OF GERMANY reassignment MESSER GRIESHEIM GMBH, A COMPANY OF GERMANY ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: STEIGERWALD STRAHLTECHNIK GMBH
Assigned to ALLIED STEEL AND WIRE LIMITED, A BRITISH CORP. reassignment ALLIED STEEL AND WIRE LIMITED, A BRITISH CORP. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: F.A. POWER LIMITED
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/081—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing particle radiation or gamma-radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/08—Removing material, e.g. by cutting, by hole drilling
    • B23K15/085—Boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B23K26/389—Removing material by boring or cutting by boring of fluid openings, e.g. nozzles, jets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
    • B26F1/00—Perforating; Punching; Cutting-out; Stamping-out; Apparatus therefor
    • B26F1/26—Perforating by non-mechanical means, e.g. by fluid jet
    • B26F1/31—Perforating by non-mechanical means, e.g. by fluid jet by radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/16—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/16—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating
    • B29C59/165—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating of profiled articles, e.g. hollow or tubular articles
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening
    • C21D1/09—Surface hardening by direct application of electrical or wave energy; by particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0838—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using laser
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0866—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation
    • B29C2035/0877—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using particle radiation using electron radiation, e.g. beta-rays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2007/00—Flat articles, e.g. films or sheets
    • B29L2007/008—Wide strips, e.g. films, webs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2023/00—Tubular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2031/00—Other particular articles
    • B29L2031/737—Articles provided with holes, e.g. grids, sieves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/04—Electric heat

Definitions

  • ABSTRACT Process for the treatment of the internal sur- C23c 13/00 faces of recesses including slots, depressions, bores and the 1 17/933, like of any required cross-sectional configuration in which the treatment is carried out by means of beam energy which is in- 156 HE troduced into the recess.
  • the present invention concerns a process for the treatment of internal surfaces of recesses of any cross-sectional shape such as, for example, depressions, slots, blind holes or continuous bores.
  • the object is attained in accordance with the invention by a process of the kind referred to above, which is characterized by the feature that the treatment is effected by beam energy which is introduced in the recess.
  • Beam energy for example, in the form of light, laser or electron beams, has the advantage that it can be proportioned and directed with considerable accuracy and is controllable substantially without inertia. Moreover, very high performance densities may be obtained with beam energy, so that, with extremely short period actions, the required treatment effects are thus obtainable only if required over closely defined surface regions and penetration depths.
  • treatment is to apply in this case to any required operation with which a permanent or temporary change of the properties required of the surface regions concerned can be obtained.
  • the treatment may take place during and/or directly after producing the recesses; the workpiece may thus be left in one and the same processing or treatment device.
  • the process in accordance with the invention may be carried out without difficulties and also in such a manner that the internal surface of the recess may be treated difi'erently in regions.
  • a blind hole serving as axial hearing it may be required to harden the end face to a high degree, or it may be required to provide a region of particular wear resistance in a slot or a groove.
  • By accordingly controlling the direction of the beam energy used for the treatment it is readily possible, in accordance with the process of the invention, for only predetermined regions of the internal surface of a recess to be treated.
  • a particularly simple embodiment of the process in accordance with the invention consists in that for the internal surfaces to be treated an energy beam at least is used which also serves to produce the recess. It is known by using energy beams such as electron beams, to carry out cutting operations and to produce recesses of optional shape; in accordance with the invention it is possible by way of one and the same energy beam, to produce the recess and also to treat its surface in a manner required.
  • the transition from production to treatment may, for example, be effected after the recess has been produced by varying the intensity and/or the distribution of power density of the energy beam.
  • the diameter of the energy beam may also be changed after the recess has been produced.
  • Such measures enable the recess to be first produced without difficulty with a high power density and then with reduced power density in which no longer any material reduction occurs; the surface is treated in the required manner, for example, surface hardened, smoothed or annealed.
  • an alternative embodiment of the process in accordance with the invention may be expedient and it is characterized by the feature that for producing the recess and for the treatment a beam energy of varying quality is used.
  • a recess may be produced with one kind of beam and subsequently the surface of the recess produced treated with an alternative kind of beam which is absorbed with diminished quality so that a uniform transition is obtained of the material properties changed by the treatment from the surface of the recess inwardly into the depth of the material.
  • a further particularly advantageous embodiment of the process in accordance with the invention is characterized by the feature that during the treatment an auxiliary material is supplied to the recess.
  • an auxiliary material allows numerous further methods of treatment to be realized such as the formation of a surface layer, a cooling effect, a smoothing, roughening and so forth.
  • an auxiliary material which, with the internal surface of the recess, causes a reaction thus changing the internal surface.
  • an auxiliary substance which chemically attacks the workpiece of the material concerned, the internal surface of the recess can be roughened in this manner.
  • An alternative possibility consists in that by suitably selecting auxiliary materials, oxide, carbide or other surface coatings may be produced on the internal surface of the recess; such embodiments are characterized by the feature that the internal surface of the recess is partially or wholly coated with the auxiliary material or a reaction product of the auxiliary material.
  • auxiliary material which enters an energy exchange with the internal surface of the recess.
  • Such an energy exchange for example, is then obtained when an auxiliary material is used which acts as a coolant, thus especially a solid or liquid auxiliary material which has a considerable evaporation heat.
  • auxiliary material Localized use of an auxiliary material is provided in a further embodiment of the invention in a simple manner in that the auxiliary material is arranged in the action region of the beam energy and caused to enter the recess by the beam energy introduced in the recess.
  • a particularly simple possibility of this kind is provided in accordance with the invention, in that the workpiece containing the recess to be treated has the auxiliary material inserted therein in a finely distributed form or as a coating. In this way, without any special measures, the auxiliary material comes into action only at the position where the energy beam impacts thematerial and releases and activates the auxiliary material.
  • An auxiliary material arranged in the action region of the beam energy can also be brought into action according to a further embodiment of the process in accordance with the invention in which the energy beam after producing in known manner the recess by means of an alternative and if required, different energy beam, is introduced in the recess; the timed interval from the end of the production operation being so selected that the temperature of the internal surface of the recess drops below a predetermined value.
  • This method of operation is particularly expedient when the auxiliary material is to be vapor deposited on the internal wall surface of the recess and therefore a certain cooling-off of the internal wall is required.
  • the process in accordance with the invention may, as evident, also be carried out in connection with processed and perforated workpieces.
  • An expedient further embodiment of the process in accordance with the invention may consist in that the energy beam triggering the treatment of the internal surfaces may have a different and especially a smaller diameter than the energy beam used to produce the recess.
  • auxiliary material in accordance with the process of the invention may further be so effected that the auxiliary material is provided on the side of the workpiece remote from the beam in a solid or liquid state adapted to evaporate under the action of the energy beam.
  • a foil sheet or panel may be fed comprised partially or wholly of the auxiliary material or containing the auxiliary material.
  • This process may be used both in completed continuous recesses, passages, ducts or perforation holes, as also in the case in which the continuous recess has first to be formed in the workpiece by action of the beam energy.
  • a further alternative embodiment of the process in accordance with the invention is characterized by the feature that the auxiliary material is provided on the side of the workpiece facing the beam in a solid or liquid state adapted to evaporate with the action of the energy beam.
  • the auxiliary material is fed in liquid or gaseous form through a porous gas-permeable mass arranged on the workpiece.
  • the auxiliary material may be released from a porous mass which is placed in position on the side of the workpiece remote from the beam; to enable the available quantity of auxiliary material to be increased it is possible in accordance with the invention for the pores to be closed and have an elongated shape in the direction of the beam.
  • the action of the energy beam and/or the temperature increase occurring during the action of the energy beam causes the auxiliary material to be released from the porous mass, possibly by the destruction of pores.
  • auxiliary material which evaporates without trace.
  • auxiliary material which when subjected to the action of the beam energy generates a large quantity of vapor; this is particularly expedient if it is desired to ensure substantial removal of waste material during processing or treatment.
  • an auxiliary material may be formed of a plurality of components, especially such in which at least two components are selected so that, subject to the action of the beam energy or conditions prevailing at the treatment point, they react with one another or at least to one reaction product and assists the required treatment.
  • the application of the process in accordance with the invention is particularly advantageous when perforating panel or sheetlike workpieces. Since the beam energy supplies extremely high power densities and can be closely localized and controlled substantially without inertia, a large number of closely adjacent bores may be produced within a short period of time and their internal surfaces treated.
  • a load carrier beam is preferably used as beam energy and more particularly an electron beam or a considerably focused electromagnetic energy beam, especially a light or laser beam.
  • FIG. 1 shows by way of a schematic perspective view, one embodiment of the process
  • FIG. 2 shows by way of a similar embodiment as FIG. I, the workpiece in section
  • FIG. 3 shows schematically the treatment of a cylindrical blind hole
  • FIG. 4 shows schematically the regional treatment of a cylindrical hole
  • FIG. 5 shows by way of a schematic sectional view, a further embodiment
  • FIGS. 6 and 7 are schematic views of possible intensity courses of an energy beam during treatment
  • FIGS. 8 to 12 show by way of schematic sectional views, possible methods of keeping the auxiliary material in readiness
  • FIG. 13 shows in section an apparatus for carrying out the process of the invention
  • FIG. 14 shows schematically the method of operation of an alternative embodiment of the process of the invention.
  • FIG. 15 shows schematically the working sequence of a per forating operation in accordance with the invention.
  • FIG. 1 shows a workpiece I with a recess 2 to be treated and in the form of a continuous groove of rectangular cross section.
  • energy beams for example electron beams
  • An energy beam 4a is shown which extends substantially in the longitudinal direction of the recess 2 and which, when suitably focused, generates its energy along a path extending in the workpiece 1 against the sidewalls of the grooves 2.
  • FIG. 2 shows, by way of a sectional view the workpiece of FIG. I, that with an inclined beaming of a suitably wide energy beam 4 it is possible to treat the whole depth of one sidewall of the recess 2.
  • FIG. 3 the base of a cylindrical recess 2 is treated by means of a bundle 4 of energy beams of suitably large cross section.
  • a beam having a smaller cross section could also be used and moved over the surface of the base.
  • FIG. 4 shows a workpiece l in which a recess 2 is provided in the form of a continuous bore.
  • a slender energy beam 4 is so beamed into the bore that only a region of the cylindrical internal surface of the recess 2 is impacted and treated by the beam; it is readily seen that by suitable relative movements between workpiece l and beam 4 any regions of the internal surface can be treated.
  • FIG. 5 shows schematically a section through a workpiece l, in which recesses in the form of bores are to be produced and the internal surfaces of the bores are to be treated with an auxiliary material.
  • a completed bore 2 is shown, the internal surface 3 of which has a coating 6 which has been produced by the action of an auxiliary material on the heated material of the workpiece 1.
  • the auxiliary material is placed in position in the form of a layer or panel 5 on the side of the workpiece l remote from the beam 4,
  • FIG. 5 there is shown schematically, the production of a bore with the aid of the energy beam 4.
  • the beam 4 at the stage shown has not yet penetrated the full thickness of the workpiece I so that the internal surface of the bore produced has as yet not been treated.
  • the beam acts on the auxiliary material so as to cause it to evaporate and to flow through the bore 2 just produced.
  • the desired action of the auxiliary material 5 against the internal wall surface of the bore 2 occurs.
  • the internal surface of the bore is to be coated by evaporation with a layer of the auxiliary material, it is expedient to reduce the beam cross section after penetrating the full thickness of the workpiece, so that the internal surface 3 of the bore 2 can become somewhat cooler.
  • FIG. 7 shows a possibility of allowing a certain time lapse T between the production of the recess in the time section 2, and the treatment by means of the auxiliary material in the time section t to allow the internal surface 3 of the bore to cool 05 to a predetermined temperature.
  • Similar twoor multistage controls of the intensity and/or the beam cross section are often advantageous also when carrying out treatment without auxiliary material.
  • the energy beam used to produce the bore simultaneously serves to bring about the desired treatment of the internal surface of the bore.
  • This is not compulsive in any way.
  • internal surfaces of bores may also be treated which have already been produced by way of any method in the workpiece. Possibilities are known, especially when using an electron beam as energy beam, to conduct the energy beam so over the workpiece that it automatically seeks the bores and, when engaging a bore, permeates it long enough to carry out the desired treatment operation in the interior of the bore.
  • electrically nonconductive workpieces it is possible for example to provide on the side remote from the beam of the workpiece (in FIG.
  • each control impulse can be tapped when the beam conducted in a search over the workpiece is incident in a bore.
  • Such an apparatus may also be used for the purpose of indicating the complete perforation of the workpiece when producing bores.
  • FIG. 8 indicates the possibility of arranging the auxiliary material 5 in distribution in the material of the workpiece 1; this possibility is provided particularly in workpieces made of plastics material.
  • FIG. 9 illustrates, by way of a similar sectional view as FIG. 8, the possibility of inserting the auxiliary material 5 at least in the form of a layer in the workpiece material 1.
  • auxiliary material in a liquid or gaseous state to the workpiece by means of a permeable porous mass placed against the workpiece and, this is shown in FIG. 10.
  • a short pipe 7 of relatively large cross-sectional area is mounted so as to abut and hermetically seal the workpiece surface.
  • a feed pipe 8 as connected to the pipe 7 for a gaseous or liquid auxiliary material.
  • the pipe 7 is filled with a permeable porous mass 9 which sets up a high flow resistance against the auxiliary material supplied so that only a correspondingly small proportion of the entire auxiliary material, fed via the pipe 8, can escape.
  • FIGS. 11 and 12 each illustrate by way of similar sectional views as FIGS. 5, 8, 9 and 10, an alternative possibility in accordance with the invention.
  • the auxiliary material is released from a porous mass 10 which is placed in position on the side of the workpiece l remote from the beam (the lower side in FIG. 11); the pores ll of the mass being substantially closed and enclosing an auxiliary material.
  • By action of an energy beam incident through a bore 2 at least one pore in the vicinity of the bore to be treated is opened and the auxiliary material contained in the pore flows through the bore concemed; the treatment operation resulting in the desired manner.
  • a porous mass 10 without closed pores for example, a fibrous mass which is saturated with the auxiliary substance. Accordingly it is also possible for the method of operation shown in FIG. 10 to be so modified that the short pipe socket 7 is provided without the feed pipe 8, thus, with the exception of the top being closed on all sides, the porous mass 9 contained in the pipe 7 can then also be saturated with a liquid or solid auxiliary substance.
  • FIG. 12 shows a further possibility in which the pores 11 of the mass 10 are elongated in the direction of the beam so that they are able to absorb a larger quantity of the normally gaseous auxiliary substance.
  • the pore density relative to the surface density of the bores in the workpiece 1 must be large enough to enable the energy beam incident through a bore 2 to open at least one pore ll.
  • the use of solid or liquid auxiliary substances permits at the given action point the development of a relatively large volume of vapor or gas.
  • auxiliary substance which per unit of volume or weight supplies a large quantity of vapor or gas.
  • auxiliary substances which evaporate without trace, for example, monomers or polymers of unsubstituted or halogenated hydrocarbons, alcohols and the like nonresidual compounds.
  • the process in accordance with the invention may also be used with advantage for cooling when perforating panels or sheetlike workpieces, the auxiliary substance entering the bore acting as coolant.
  • cooling effects can be obtained which, for example, can be used to enable a considerably greater processing power per surface unit of the workpiece to be employed and thus, when perforating, more holes per time and surface unit to be produced. Cooling as such may also be advantageous, e.g. for hardening.
  • FIG. 13 illustrates schematically a possible embodiment of an apparatus for carrying out the process in accordance with the invention.
  • the perforating of a panellike or sheetlike workpiece l is shown with its lower side remote from the beam 4 the workpiece abutting against a porous mass 10 which contains the auxiliary substance, such as gas.
  • a porous mass 10 which contains the auxiliary substance, such as gas.
  • the treatment chamber 12 is connected via a socket 16 to a pump (not shown).
  • a pump not shown
  • the gas flow entering the treatment chamber from the porous mass 10 via the bores 2 already produced is determined by the flow resistance of the porous mass 10 and the number of bores produced and situated in the treatment chamber; if necessary the free underside of the mass 10 may be provided with a sealing layer. It is seen that a certain connection exists between the performance of the pump (not shown) connected to the socket l6 and the gas pressure maintained in the treatment chamber 12. Suitable dimensioning of the cross section of the lower constricting section of the treatment chamber 12 allows the size of the gas or vapor quantity inflowing through the bores 2 already produced to be influenced within a wide range.
  • the processing apparatus is moved relative to the workpiece 1 in accordance with the arrow 17.
  • the backing mass 10 it is also possible for the backing mass 10 to be moved with the treatment apparatus relative to the workpiece so that one support suffices and which is considerably smaller than the whole workpiece. In this case the support must be so fashioned that it is able to bear repeated actions of the energy beam 4. Normally, on the lower free side of the underlay mass 10 atmospheric pressure will simply prevail; it is, however, also possible to adjoin a gas chamber to the free side of the underlaid mass 10 and which gas chamber is filled with any other fluid at any other suitable pressure.
  • FIG. 14 shows an embodiment fundamentally similar to the embodiment of FIG. 12, in which the same energy beam is used both to produce the bores 2 in a workpiece I and to release the auxiliary substance.
  • a mass 10 is laid beneath the side of the workpiece 1 remote from the beam and contains the auxiliary substance in closed pores; in FIG. 14 elongated bores similar to those in FIG. 12 are shown. The upper ends of the elongated pores are located close to the surface nearer to the beam of the underlay mass 10, so that a region l7 of the underlaid mass located at the lower end of the bore 2 produced is destroyed by the energy beam used for treatment after completely perforating the workpiece 1.
  • the region 18 is destroyed to such an extent that the upper ends of the passagelike pores 11 are opened and the auxiliary substance contained in the pores allowed to enter the bore 2 produced.
  • the number of elongated pores located per unit surface area of underlaid mass 10 is greater than the number of bores per unit surface area produced in the workpiece, so that at least one pore per bore is opened reliably.
  • FIG. is a schematic plan view of the workpiece 1 provided or to be provided with perforation bores 2.
  • the workpiece for example, is moved in accordance with the arrow 19 relative to the energy beam used for treatment.
  • the energy beam for example is lead in sequence over the workpiece and the sequence is indicated by the numbers in the left-hand column of the perforation holes. It will be seen that with the selected sequence only the bores 4 and 5 have been produced directly adjacent to one another.
  • numerous kinds of nonsequential control systems of the energy beam may be used in which any size of spacing may result between successively treated treatment points.
  • the use of an energy beam apart from the reasons given initially, is also of particular advantage because the energy beam has practically no mass flow so as to eliminate mutual obstruction between beam and the auxiliary substance flowing into the recess.
  • manifold treatments of the internal surfaces of recesses may be carried out.
  • bores in nonmetal materials may be coated by evaporation with an electrically conductive metailization; conversely, of course, bores in a metal workpiece may have an electrically insulating layer vapor-deposited thereon.
  • process of the invention for producing plastics material filters in which the filter openings have been bored with electron beam. Hitherto it was not possible for these very fine bores to be treated on their internal surface in a desired manner, for example, by application of an auxiliary substance to be smoothed and/or mechanically strengthened.
  • auxiliary substances and/or the workpiece material allow manifold effects to occur; for example, an auxiliary substance distributed in a manner as shown in FIG. 8 in the workpiece material and comprising a mixture reacting chemically when heated can also be used to cause special effects.
  • EXAMPLE I An aluminum plate of 1 mm. thickness was provided by means of an electron beam with bores of 0.2 mm. diameter. The action period for each bore amounted to 2 msec. with an acceleration voltage 150 kv. and a beam output of Watt. Beneath the aluminum plate as shown in FIG. 5 a polyurethane foam, foamed with oxygen, was arranged. The boring electron beam after each boring action released the contents of a few pores of the foamed material; the oxygen so released entered the highly heated bore where it produced a desired layer of aluminum oxide which has a considerably higher resistance than the pure aluminum.
  • EXAMPLE ll A foil of polytetrafluorethylene of 0.7 mm. thickness was placed on a copper support and perforated with an electron beam. The beam was impulse controlled; each impulse of 20- microsecond duration produced a hole (perforation) of about 0.8 mm. diameter. The acceleration voltage amounted to kv., the beam current amounted to 10 ma. The intensity of each electron beam impulse was controlled substantially according to the pattern of FIG. 6, so that in the second half of the overall impulse duration the beam current dropped to about 2 mm. Moreover, in the second half of the impulse duration the beam diameter was reduced by about half. A clean vapor-depositing of the internal wall surfaces with copper resulted.
  • EXAMPLE III A sheet of 0.3 mm. thickness of stainless steel was perforated with electron beam impulses of I50 kv., 25 ma. and 15 used; the diameter of the holes produced amounted to 0.33 mm. Beneath the steel sheet there was placed a disc pressed from aluminum oxide. In the perforation holes there resulted an insulation layer of vapor-deposited aluminum oxide of about 0.0005 to 0.005 mm. thickness.
  • EXAMPLE IV A hardenable steel sheet of 0.3 mm. thickness was perforated with electron beam impulses of 140 kv., ma. and 45 sec. duration; the diameter of the holes produced was 0.125 mm. Beneath the steel sheet there was placed a polyvinyl chloride fiber material of 1.2 mm. thickness saturated with methyl alcohol and provided on the surface not supported against the steel sheet with a sealing surface layer. The extensive cooling action of the methyl alcohol vapor entering the bore after it was produced caused a surface hardening of the internal wall surface of the perforation holes, thus the thickness of the layer applied was about 0.015 to 0.02 mm.
  • EXAMPLE V A sheet of synthetic leather of 0.5 mm. thickness on a polyvinyl chloride base was perforated with electron beam 2 of 125 kv., 7 ma. and 12 1sec. duration; the diameter of the holes produced was about 0.03 mm. Beneath the synthetic leather sheet there was placed a polyvinyl chloride fibrous material of 1.5 mm. thickness which was saturated with ethyl alcohol and on the side not supported against the synthetic leather sheet was provided with a sealing surface layer. The cooling action of the ethyl alcohol vapor entering each bore produced allowed the obtainable surface density of the perforation holes to be increased from 2,000 holes per cm. to 4,000 per cm. and the applicable impulse frequency could be increased from 500 holes per second to 2,000 holes per second.
  • a process for treating internal surfaces of recesses in workpieces, including slots, depressions, bores, and the like by means of beamed radiant energy in order to effect a permanent change in the condition of said internal surfaces comprising placing the workpiece which contains the recess to be treated adjacent to a material which has an auxiliary substance which is in an inactive state incorporated therein in finely divided form, and applying beamed radiant energy to the said auxiliary substance of an intensity sufficient to locally activate and release the said auxiliary substance to enable it to enter the said recesses and to alter the condition of the internal surfaces thereof 2.
  • a process for treating internal surfaces of recesses in workpieces, including slots, depressions, bores, and the like by means of beamed radiant energy in order to effect a permanent change in the condition of said internal surfaces comprising placing a carrier member consisting of a permeable mass containing an auxiliary substance which is in an inactive liquid or gaseous state dispersed throughout the carrier member adjacent to one side of the workpiece which contains the recess to be treated, and applying beamed radiant energy of an intensity sufficient to activate and release the said auxiliary substance at the opposite side of said workpiece to extend through said recess and to act on the auxiliary substance contained in the carrier member located on the opposite side of the workpiece, the auxiliary substance which is locally released and activated by the beamed radiant energy being caused thereby to enter said recesses to act on the internal surfaces thereof and to alter the condition of said internal surfaces.
  • a process for treating internal surfaces of recesses in workpieces, including slots, depressions, bores. and the like by means of beamed radiant energy in order to effect a permanent change in the condition of said internal surfaces comprising placing a carrier member consisting of a porous mass containing within its pores an auxiliary substance which is in an inactive state adjacent to one side of the workpiece which contains the recess to be treated, and applying beamed radiant energy at the opposite side of said workpiece to extend through said recess and to act on the auxiliary substance located on the opposite side of the workpiece, the beamed radiant energy being applied at an intensity sufficient to activate and release the said auxiliary substance from said pores and to cause it to enter the said recesses and to act on and alter the condition of the internal surfaces thereof.
  • a process for treating internal surfaces of recesses in workpieces, including slots, depressions, bores, and the like by means of beamed radiant energy in order to effect a permanent change in the condition of the internal surfaces comprising placing an auxiliary substance which is in an inactive state adjacent to the recess to be treated and applying beamed radiant energy to the said auxiliary substance of an intensity sufficient to activate and release the said auxiliary substance to enable it to enter the said recesses and to alter the condition of the internal surfaces thereof, the auxiliary substance comprising at least two components which react with one another under the action of the beamed radiant energy to form at least one reaction product which alters the condition of the said internal surfaces.
  • a process for successively treating internal surfaces of a plurality of spaced recesses in workpieces, including slots, depressions, bores, and the like by means of beamed radiant energy in order to effect a permanent change in the condition of said internal surfaces comprising placing an auxiliary substance which is in an inactive state adjacent to the recesses to be treated and applying beamed radiant energy to the said auxiliary substance of an intensity sufficient to activate and release the said auxiliary substance to enable it to enter the said recesses and to alter the condition of the internal surfaces thereof, the beamed radiant energy being applied successively at recesses the distance between which is greater than the distance between adjacent recesses

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Cited By (20)

* Cited by examiner, † Cited by third party
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US3892025A (en) * 1972-10-10 1975-07-01 Thomson Brandt Method of manufacturing electromechanical vibration pick-ups
US3934109A (en) * 1972-06-23 1976-01-20 The Torrington Company Latch pivot for latch needle
US4015100A (en) * 1974-01-07 1977-03-29 Avco Everett Research Laboratory, Inc. Surface modification
US4059876A (en) * 1976-11-03 1977-11-29 General Motors Corporation Method of alloying and forming a valve seat
US4063063A (en) * 1975-02-14 1977-12-13 Acieries Reunies De Burbach-Eich-Dudelange S.A. Arbed Method of descaling metal products
US4081655A (en) * 1975-08-22 1978-03-28 Caterpillar Tractor Co. Method of deburring intersecting drilled holes
US4093842A (en) * 1976-01-19 1978-06-06 General Motors Corporation Ported engine cylinder with selectively hardened bore
US4157935A (en) * 1977-12-23 1979-06-12 International Business Machines Corporation Method for producing nozzle arrays for ink jet printers
US5229163A (en) * 1989-12-21 1993-07-20 Hoffmann-La Roche Inc. Process for preparing a microtiter tray for immunometric determinations
US5614114A (en) * 1994-07-18 1997-03-25 Electro Scientific Industries, Inc. Laser system and method for plating vias
US5841099A (en) * 1994-07-18 1998-11-24 Electro Scientific Industries, Inc. Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
EP0900660A2 (en) * 1997-08-27 1999-03-10 Canon Kabushiki Kaisha A method for manufacturing liquid jet recording heads and a head manufactured by such method of manufacture
WO2002029845A2 (en) * 2000-10-04 2002-04-11 Plasmion Displays, Llc Method of fabricating plasma display panel using laser process
WO2002076666A2 (en) * 2001-03-22 2002-10-03 Xsil Technology Limited A laser machining system and method
WO2002094497A2 (en) * 2001-05-18 2002-11-28 The Welding Institute Surface modification
US20050121613A1 (en) * 2003-03-17 2005-06-09 Kenji Ito Laser beam machining method
US6955817B2 (en) 1997-05-22 2005-10-18 The Procter & Gamble Company Cleansing articles for skin or hair
US20080184744A1 (en) * 2006-10-17 2008-08-07 Blush Jason J Spinner for fiberizing glass and method
WO2015139840A1 (de) * 2014-03-21 2015-09-24 Pro-Beam Ag & Co. Kgaa Verfahren zum erzeugen kleiner bohrungen in werkstücken durch änderung eines arbeitsparameters innerhalb eines strahlimpulses
CN113302039A (zh) * 2019-01-18 2021-08-24 戴漫森有限责任公司 用于由塑料制成的增材制造的成型件的表面平滑处理的装置和方法

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FR2217118B1 (ja) * 1972-10-25 1975-04-25 Alsacienne Atom
US4081892A (en) * 1976-11-01 1978-04-04 Flow Industries, Inc. Method of making composite structure
JPS6029234A (ja) * 1983-07-11 1985-02-14 Mitsubishi Electric Corp ワイヤカツト放電加工用ワイヤ電極
FR2568154B1 (fr) * 1984-07-30 1987-07-17 United Technologies Corp Appareil de forage de trous par faisceaux d'electrons
GB8911391D0 (en) * 1989-05-18 1989-07-05 Humphreys Colin J Preparation of substrates

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FR1468426A (fr) * 1966-02-17 1967-02-03 Ibm Procédé d'usinage et de revêtement au moyen de rayons à grande énergie
US3360398A (en) * 1965-03-11 1967-12-26 United Aircraft Corp Fabrication of thin film devices
US3364087A (en) * 1964-04-27 1968-01-16 Varian Associates Method of using laser to coat or etch substrate

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US3364087A (en) * 1964-04-27 1968-01-16 Varian Associates Method of using laser to coat or etch substrate
US3360398A (en) * 1965-03-11 1967-12-26 United Aircraft Corp Fabrication of thin film devices
FR1468426A (fr) * 1966-02-17 1967-02-03 Ibm Procédé d'usinage et de revêtement au moyen de rayons à grande énergie

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3934109A (en) * 1972-06-23 1976-01-20 The Torrington Company Latch pivot for latch needle
US3892025A (en) * 1972-10-10 1975-07-01 Thomson Brandt Method of manufacturing electromechanical vibration pick-ups
US4015100A (en) * 1974-01-07 1977-03-29 Avco Everett Research Laboratory, Inc. Surface modification
US4063063A (en) * 1975-02-14 1977-12-13 Acieries Reunies De Burbach-Eich-Dudelange S.A. Arbed Method of descaling metal products
US4081655A (en) * 1975-08-22 1978-03-28 Caterpillar Tractor Co. Method of deburring intersecting drilled holes
US4093842A (en) * 1976-01-19 1978-06-06 General Motors Corporation Ported engine cylinder with selectively hardened bore
US4059876A (en) * 1976-11-03 1977-11-29 General Motors Corporation Method of alloying and forming a valve seat
US4157935A (en) * 1977-12-23 1979-06-12 International Business Machines Corporation Method for producing nozzle arrays for ink jet printers
US5229163A (en) * 1989-12-21 1993-07-20 Hoffmann-La Roche Inc. Process for preparing a microtiter tray for immunometric determinations
US5614114A (en) * 1994-07-18 1997-03-25 Electro Scientific Industries, Inc. Laser system and method for plating vias
US5841099A (en) * 1994-07-18 1998-11-24 Electro Scientific Industries, Inc. Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets
US6955817B2 (en) 1997-05-22 2005-10-18 The Procter & Gamble Company Cleansing articles for skin or hair
EP0900660A2 (en) * 1997-08-27 1999-03-10 Canon Kabushiki Kaisha A method for manufacturing liquid jet recording heads and a head manufactured by such method of manufacture
EP0900660A3 (en) * 1997-08-27 1999-09-15 Canon Kabushiki Kaisha A method for manufacturing liquid jet recording heads and a head manufactured by such method of manufacture
US6225032B1 (en) 1997-08-27 2001-05-01 Canon Kabushiki Kaisha Method for manufacturing liquid jet recording heads and a head manufactured by such method of manufacture
WO2002029845A2 (en) * 2000-10-04 2002-04-11 Plasmion Displays, Llc Method of fabricating plasma display panel using laser process
WO2002029845A3 (en) * 2000-10-04 2003-04-17 Plasmion Displays Llc Method of fabricating plasma display panel using laser process
US20020170891A1 (en) * 2001-03-22 2002-11-21 Adrian Boyle Laser machining system and method
WO2002076666A3 (en) * 2001-03-22 2004-02-12 Xsil Technology Ltd A laser machining system and method
WO2002076666A2 (en) * 2001-03-22 2002-10-03 Xsil Technology Limited A laser machining system and method
US7887712B2 (en) 2001-03-22 2011-02-15 Electro Scientific Industries, Inc. Laser machining system and method
KR100894088B1 (ko) 2001-03-22 2009-04-20 엑스에스아이엘 테크놀러지 리미티드 레이저 기계 가공 시스템 및 방법
WO2002094497A3 (en) * 2001-05-18 2003-01-16 Welding Inst Surface modification
WO2002094497A2 (en) * 2001-05-18 2002-11-28 The Welding Institute Surface modification
US6670571B2 (en) 2001-05-18 2003-12-30 The Welding Institute Surface modification
US20050121613A1 (en) * 2003-03-17 2005-06-09 Kenji Ito Laser beam machining method
US7674997B2 (en) * 2006-10-17 2010-03-09 Johns Manville Spinner for fiberizing glass and method
US20080184744A1 (en) * 2006-10-17 2008-08-07 Blush Jason J Spinner for fiberizing glass and method
WO2015139840A1 (de) * 2014-03-21 2015-09-24 Pro-Beam Ag & Co. Kgaa Verfahren zum erzeugen kleiner bohrungen in werkstücken durch änderung eines arbeitsparameters innerhalb eines strahlimpulses
CN106232282A (zh) * 2014-03-21 2016-12-14 波宾股份公司 用于通过改变在束脉冲之内的工作参数在工件中产生小孔的方法
JP2017514701A (ja) * 2014-03-21 2017-06-08 プロ−ビーム アクチェンゲゼルシャフト ウント コンパニー コマンディトゲゼルシャフト アウフ アクティーン ビームパルス内部の作業パラメータを変えることにより工作物に小孔を形成するための方法
US10179373B2 (en) 2014-03-21 2019-01-15 Pro-Beam Ag & Co. Kgaa Method for producing small bores in work pieces by changing an operating parameter within a beam pulse
CN106232282B (zh) * 2014-03-21 2020-06-02 波宾股份公司 用于通过改变在束脉冲之内的工作参数在工件中产生小孔的方法
CN113302039A (zh) * 2019-01-18 2021-08-24 戴漫森有限责任公司 用于由塑料制成的增材制造的成型件的表面平滑处理的装置和方法

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GB1217350A (en) 1970-12-31
FR1587059A (ja) 1970-03-13
SE350420B (ja) 1972-10-30
NL6808137A (ja) 1968-12-10
AT297171B (de) 1972-03-10
BE716298A (ja) 1968-12-09
CH497242A (de) 1970-10-15
CH503803A (de) 1971-02-28
BE716334A (ja) 1968-12-10
DE1621355A1 (de) 1971-05-13
GB1225804A (ja) 1971-03-24
NL6808136A (ja) 1968-12-10
AT287427B (de) 1971-01-25

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