US3604800A - High resolution contact printing - Google Patents

High resolution contact printing Download PDF

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Publication number
US3604800A
US3604800A US835321A US3604800DA US3604800A US 3604800 A US3604800 A US 3604800A US 835321 A US835321 A US 835321A US 3604800D A US3604800D A US 3604800DA US 3604800 A US3604800 A US 3604800A
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US
United States
Prior art keywords
master
contact
plates
exposure
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US835321A
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English (en)
Inventor
Joseph G Jordan
Robert C Kammerzell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
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International Business Machines Corp
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Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
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Publication of US3604800A publication Critical patent/US3604800A/en
Anticipated expiration legal-status Critical
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/02—Exposure apparatus for contact printing
    • G03B27/14—Details
    • G03B27/18—Maintaining or producing contact pressure between original and light-sensitive material
    • G03B27/20—Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure

Definitions

  • the invention pertains to transfer of photographic images between planar master and object media by the technique of contact printing.
  • the invention concerns a technique and associated apparatus for obtaining the uniform and complete face-to-face contact between master and object plates for a contact print exposure operation.
  • the invention seeks to provide uniformly close face-to-face contact between an image transferring master element and an image receiving object element in a photographic contact printing process. This is especially useful in fabrication of finely detailed devices such as integrated circuits where high resolution image transfer is an important factor in the process of fabrication.
  • Apparatus for performing the foregoing steps of operation comprises, in a preferred embodiment, several members adapted for convenient assembly and disassembly into a number of enclosed compartments and an interior holding fixture or retaining the master and object contact print elements.
  • the compartment forming members have fittings through which exhaust connections can be made to remove air from the enclosure.
  • the members forming the interior holding fixture are provided with means operable to separate and bring together the master and object elements and to hold the elements in either the separated or touching condition while the compartments are in either exhausted or pressurized conditions.
  • the members forming the outermost compartment surrounding the fixture are adapted to admit light or other radiation into the enclosure, to complete the contact print exposure operation, while the master and object elements are being held in uniform contact and while vacuum is being maintained at the contact interface between elements.
  • FIGS. 1-4 of drawing contain sectional views in elevation of a preferred embodiment of apparatus according to the invention for producing contact print exposures, the views showing the various stages of assembly and operation of the apparatus.
  • FIG. 5 is a sectional view of an alternate embodiment of apparatus according to the invention.
  • FIGS. 14 show apparatus for producing contact prints b the method of the present invention. The several views show the apparatus in various stages of assembly and operation.
  • Members I and 2 joined together at hinge 4 form an outer compartment when closed.
  • Members I and 3 together with a connecting bellows member 5 form a first inner compartment of varying size.
  • Shaft extension 3a of member 3 extends through opening 6 in member I, and through another opening 7 in a bearing plate 8 fastened to the exterior of member 1.
  • Extension 30 terminates in an axle member 3b on which a cammed lever 9 is rotatably supported.
  • Lever 9 with its cammed portion 10 is rotatable about member 3b in clockwise and counterclockwise directions 11 (FIG. 2) for the purpose of displacing member 3 together with bellows 5 relative to section I.
  • O-ring 12 (FIG. 2) seals off the variable inner compartment space 12a formed by members 1, 3 and 5.
  • Members I3 have a number of exhaust port fittings l4l7 (FIG. 1) which are used to evacuate air from and return air to the various compartment spaces formed by these members.
  • Exhaust fitting 16 in member 1 connects with exhaust fitting 17 in member 3 through flexible tubing member 18 designed to maintain the exhaust connection through the varying inner compartment space 12a.
  • Member 2 has an exhaust port 20 and a collimating lens 21, made of glass, plastic, or other suitable transparent material.
  • Lens 21 is a window used to admit light for the yet to be described contact exposure operation.
  • O-ring 24 provided for use with members 1 and 2, forms an outer seal for outer compartment space 24a. This O-ring may for convenience be adhered to the edge surface 25 of member 2,.
  • Other O-rings 26 and 27 are respectively provided with or adhered to members 2 and 3 to form seals between respective inner compartment spaces 26a and 27a and the outer compartment space 24a.
  • Master plate 28 contains the negative of the image, e.g., circuit pattern, to be transferred and developed in object plate 29.
  • Plates 28 and 29 are stacked in registration and placed in position over the O-ring 26, so that when members 1 and 2 are in closed position and iever 9 is in the raised or vertical position the plates 28, 29 are touching and objectplate 29 and O-ring 27 form the closure of space 27a, and master plate 28 and O-ring 26 form the closure of space 26a.
  • lever 9 With members I and 2 in closed position over plates 28 and 29 lever 9 is set in vertical position, as shown in FIG. 2.
  • Fitting I7 communicates with a pump or other exhausting mechanism through flexible tubing 18 and exhaust fitting I6 in member I.
  • Inner compartment space 12a (FIG. 2) is exhausted next.
  • plates 28 and 29 are touching but contact is not uniform and complete due to the presence of air in the still pressurized space between the plates and in the outer compartment space 240.
  • O-rings 26 and 27 are maintaining tight vacuum seals between respective plates 28 and 29 and respective housing members 2 and 3.
  • Lever 9 is thrown clockwise to the depressed horizontal position indicated in FIG. 3 displacing members 3 and 5 away from member 2 and towards member 1. Vacuum maintained in spaces 26a and 27a keeps plates 28 and 29 in sealing connection with respective O-rings 26 and 27 and therefore as member 3 is displaced upwards object plate is also displaced upwards away from master plate 28 leaving the space between plates shown in FIG. 3. Spring clips 24b, 24c are pushed aside by the object plate during this operation.
  • Lever 9 is restored counterclockwise to vertical position (FIG. 4) bringing plates 28, 29 together into touching contact through the now exhausted intervening space. Clips 24b, 240 are again pushed aside by the object plate.
  • Space 12a is pressurized to hold the plates together and then pressure less than that in space 12a is restored to spaces 26a and 27a to force the plates 28, 29 into complete face-toface contact over the total area of potential contact. Contact is total, uniform and unimpeded due to the vacuum between plates. Excellent contact is achieved when space 24a is exhausted to a pressure of 1 millimeter of mercury.
  • the arrangement of apparatus just described represents a unique means for remotely adjusting the relative spacing of a pair of master and object plates so that the space between and surrounding the plates may be evacuated while the plates are held apart and also so that thereafter the plates may be uniformly pressed together into unimpeded total contact.
  • this arrangement eliminates the problem of irr gular or deformed contact caused by entrapment of air bet een touching plates.
  • the lever arrangement (3a, 3b, 9) for controlling the displacement position of member 3 could be replaced 2) fixed a solenoid 9' (pictured in phantom in FIG. 2) fixed to member 1 and attractable to a magnetically permeable plate or the like 3a attached to the upper portion of section 3.
  • the bellows chamber space 12a could be compressed merely by electrically energizing the solenoid, and reexpanded into contact-establishing position simply by deenergizing the solenoid and introducing appropriate pressures successively into spaces 12a, 26a, 27a.
  • a double-acting pneumatic cylinder could be used.
  • FIG. 5 Another variant suggested in FIG. 5 would replace the collimating lens window 21 on member 2 with a hinged cover I9 which would be opened at step 8 of the foregoing procedure to accomplish exposure.
  • opening a section of the enclosure providing access to said master for said radiant energy exposure.
  • Apparatus for producing photographic prints by contact printing exposure of an image receiving object element through a master transparency element comprising:
  • said access providing means includes a collimating lens forming a window section of said compartment forming means which is adaptive for transferring radiant exposure energy from an exterior source to said tightly contacting elements.
  • Apparatus for rapidly producing on an object plate a photographic contact print of a fine line image contained on a transparent master plate, subject to very close tolerance restrictions on dimensions of the transferred image comprising:
  • said exposing means includes a collimating lens window section for transferring said radiant energy from an external source into said enclosure.
  • the apparatus for rapidly yet faithfully transferring a fine line image from a master plate to a sensitized object plate, by a contact exposure to radiant energy and with very close tolerances maintained on fidelity of the transferred image comprising:
  • hinged chamber forming means including first, second and third members, said first and second members, joined by a hinge, forming an outer chamber;
  • said third member being displaceably joined to said first member by a bellows membrane and forming thereby a first inner chamber which is collapsible;
  • said members each having at least one exhaust opening
  • said second and third members together forming a holding fixture for said plates and with respective said plates forming distinct second and third airtight inner chambers which are isolated from each other and from the chamber;
  • said second member having an opening to admit external radiant energy to expose said plates
  • said third member having a displaceable plate holding frame with an exhaust opening, a shaft attached to said displaceable frame and extending slidably through a pressure sealed opening in said first member, and flexible means sealably connecting the exhaust opening in the displaceable frame with a said exhaust opening in the first member;
  • said means including a hinged cover plate swingable to closed and opened positions relative to said opening.

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
US835321A 1969-06-23 1969-06-23 High resolution contact printing Expired - Lifetime US3604800A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83532169A 1969-06-23 1969-06-23

Publications (1)

Publication Number Publication Date
US3604800A true US3604800A (en) 1971-09-14

Family

ID=25269209

Family Applications (1)

Application Number Title Priority Date Filing Date
US835321A Expired - Lifetime US3604800A (en) 1969-06-23 1969-06-23 High resolution contact printing

Country Status (6)

Country Link
US (1) US3604800A (en:Method)
JP (1) JPS4938726B1 (en:Method)
CA (1) CA936398A (en:Method)
DE (1) DE2028181A1 (en:Method)
FR (1) FR2052373A5 (en:Method)
GB (1) GB1287340A (en:Method)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3834815A (en) * 1973-07-06 1974-09-10 Ipt Corp Photocopying apparatus with vacuum means
US3995955A (en) * 1974-04-30 1976-12-07 Hoechst Aktiengesellschaft Printing frame
US4007987A (en) * 1976-01-12 1977-02-15 Tamarack Scientific Co. Inc. Vacuum contact printing system and process for electronic circuit photomask replication
US4054383A (en) * 1976-02-02 1977-10-18 International Business Machines Corporation Jig and process for contact printing
US4711570A (en) * 1985-12-17 1987-12-08 Agfa-Gevaert N.V. Vacuum contact exposure apparatus
US4879573A (en) * 1987-04-24 1989-11-07 Tesla, Koncernovy Podnik Clamping frame for contact printers of working masks
US5144365A (en) * 1990-10-15 1992-09-01 Visage Albert B Device for reproducing images, by contact, on an unexposed photographic film from a transparent original

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105012U (en:Method) * 1975-02-18 1976-08-23
CN113391525A (zh) * 2021-06-08 2021-09-14 吉林华微电子股份有限公司 一种光刻版翻版机及光刻版翻版系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3521953A (en) * 1968-03-13 1970-07-28 Kulicke & Soffa Ind Inc Adjustable separation wafer clamp

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3521953A (en) * 1968-03-13 1970-07-28 Kulicke & Soffa Ind Inc Adjustable separation wafer clamp

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3834815A (en) * 1973-07-06 1974-09-10 Ipt Corp Photocopying apparatus with vacuum means
US3995955A (en) * 1974-04-30 1976-12-07 Hoechst Aktiengesellschaft Printing frame
US4007987A (en) * 1976-01-12 1977-02-15 Tamarack Scientific Co. Inc. Vacuum contact printing system and process for electronic circuit photomask replication
US4054383A (en) * 1976-02-02 1977-10-18 International Business Machines Corporation Jig and process for contact printing
US4711570A (en) * 1985-12-17 1987-12-08 Agfa-Gevaert N.V. Vacuum contact exposure apparatus
US4879573A (en) * 1987-04-24 1989-11-07 Tesla, Koncernovy Podnik Clamping frame for contact printers of working masks
US5144365A (en) * 1990-10-15 1992-09-01 Visage Albert B Device for reproducing images, by contact, on an unexposed photographic film from a transparent original

Also Published As

Publication number Publication date
DE2028181A1 (de) 1970-12-23
JPS4938726B1 (en:Method) 1974-10-19
CA936398A (en) 1973-11-06
GB1287340A (en) 1972-08-31
FR2052373A5 (en:Method) 1971-04-09

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