US3522724A - Method and apparatus for testing clean room filtration efficiency - Google Patents

Method and apparatus for testing clean room filtration efficiency Download PDF

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Publication number
US3522724A
US3522724A US717345A US3522724DA US3522724A US 3522724 A US3522724 A US 3522724A US 717345 A US717345 A US 717345A US 3522724D A US3522724D A US 3522724DA US 3522724 A US3522724 A US 3522724A
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US
United States
Prior art keywords
diffuser
smoke
testing
aperture
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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US717345A
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English (en)
Inventor
James V Knab
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Kidde Inc
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Walter Kidde and Co Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
    • F24F13/10—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers
    • F24F13/14—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre
    • F24F13/1413—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre using more than one tilting member, e.g. with several pivoting blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
    • F24F13/10—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers
    • F24F13/14—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre
    • F24F13/1426—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre characterised by actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/08—Air-flow control members, e.g. louvres, grilles, flaps or guide plates
    • F24F13/10—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers
    • F24F13/14—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre
    • F24F13/1426—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre characterised by actuating means
    • F24F2013/1473—Air-flow control members, e.g. louvres, grilles, flaps or guide plates movable, e.g. dampers built up of tilting members, e.g. louvre characterised by actuating means with cams or levers

Definitions

  • This invention relates to clean rooms and, more particularly, to a method of and apparatus for testing clean room filtration efficiency.
  • U.S. Pat. No. 3,323,437 there is illustrated a mode of clean room construction wherein the ceiling of the particular room in question is formed from a plurality of side-by-side air filtration units.
  • Each of the units comprises an air plenum with a high-efiiciency filter positioned across the room-abutting surface thereof.
  • the filters ordinarily, have particle efficiencies exceeding 99.97 percent for 0.3 micron diameter particles vas determined by the Chemical Corp D.O.P. tests.
  • Installation specifications invariably require that, subsequent to completion of the installation, a test be run as a means of insuring that all of the filters are in proper operating condition and, thus, that there 'exists no means within the room wherethrough contaminated matter may gain access.
  • tests are accomplished, ordinarily, by introducing dioctyl phthalate smoke into the air circulation system.
  • the filter surfaces and their connection with the plenum units are then scanned with a photometer to detect any excessive amount of leakage.v
  • ⁇ It is a more specific object of this invention to provide an air diffuser apparatus incorporating integrally therein means whereby the smoke may be introduced into the interior of the unit during the testing procedure and, additionally, whereby the smoke concentration may be constantly monitored.
  • FIG. l is a side-elevation view, partially in cross-section, of an illustrative clean-room installation
  • FIG. 2 is a plan view of a diffuser unit similar to that illustrated in the patent noted above which has been modified in accordance with the teachings of the instant invention;
  • FIG. 3 is a cross-sectional view taken along plane III- 111 of FIG. 2;
  • FIG. 4 is a cross-sectional view taken along plane IV-- IV of FIG. 2;
  • FIG. 5 is a fragmentary view of the aperture sealing structure.
  • this invention comprises a method of and apparatus for testing the filtering effectiveness of an air diffuser including a plenum with a filter positioned across one portion thereof.
  • the method and apparatus contemplate the provision of a first sealable aperture into the interior of the diffuser through which smoke is injected directly into the diffuser unit. Subsequent to completion of the scanning of the exposed portion of the exterior surface of the diffuser to ascertain the existence of excessive smoke leakage and, thus, the acceptability of the unit, the aperture is sealed off.
  • this invention contemplates additionally the provision of a second sealable aperture into the interior of the diffuser, the second aperture being utilized to monitor the concentration of smoke within the diffuser during the scanning process.
  • FIG. l illustrates a typical clean-room installation having a series of pedestals 11 positioned upon the sub floor of the particular enclosure within which the room is assembled. Mounted upon the pedestals 11 in conventional fashion are a series of perforate fioor panels 12 from which walls 13 extend vertically.
  • FIG. l illustrates only a single row of plenum units 20 within the particular clean-room. Several such rows, ordinarily, would be positioned in side-by-side relationship to form the ceiling of the particular installation. Each of the rows is provided with its own supply duct and pressurization fan 16.
  • the operation of the clean-room, briefiy involves the laminar diffusion of air through the diffuser units in a downward fashion. This air passes through the perforate oor panels 12 into the return air plenum 18. The air is then drawn to the side of plenum 18 as illustrated in FIG. l through the prefilter and back into the intake of fan 16. Prescribed quantities of conditioned air are introduced into the system during this process via the inlet 19.
  • the diffuser units 20 each comprise a stack 21 to which the supply duct 15 is connected during the installation process. From the stack 21 there extends in smoothly diverging fashion a plenum envelope 22 which is fabricated, preferably, of plastic.
  • the plenum envelope 22 terminates in a rectangular filter receptacle 23 (formed integrally with the envelope 22) within which is positioned the filter 24.
  • Filter 24, as -will be readily appreciated by those skilled in the art, must be sealed virtually perfectly to the edges of the filter receptacle 23.
  • the interior of the filter receptacle 23 is bordered with wooden strips to which the filter edge is glued by means of a suitable construction sealant.
  • a retaining grill as illustrated in the patent noted heretofore may be utilized to assist in the retention of the filter within filter receptacle 23.
  • plenum envelope 22 preferably, is coated with an insulation such as a foamed vinyl in order to minimize heat loss, sweating and the like during operation.
  • This coating may be omitted in certain types of operative environments.
  • the air diffuser unit 20 is provided with an air volume control assembly.
  • 'Ihe control assembly consists of an aperture 31 through the filter or the filter-connecting strip in the event it is necessary to utilize two or more filters within the receptacle.
  • Within the apertures 31 is suspended an elongated shaft 32 which ties directly to a bi-valve damper assembly 33.
  • the downward extremity of shaft 32 is provided with a slot for reception of a screwdriver or other suitable tool and, by rotating the shaft 32, the dampers 33 are caused to close and open by means of a conventional worm gear assembly.
  • a fiexible plug 34 such as that to be discussed in connection with FIG. 5, is provided for sealing the aperture 31 subsequent to adjustment of the damper assembly 30.
  • the filter diffuser unit 20 is identical to the unit described in detail in U.S. lPat. No. 3,323,437, noted previously.
  • the instant invention relates to the incorporation within the diffuser unit 20 of a smoke input aperture 40 and a smoke monitoring aperture 45.
  • These apertures preferably, are positioned within the filter 24 or the connecting strip in the manner illustrated in order to permit testing of the unit from the interior of the room rather than requiring the provision of walk ways and the like overhead.
  • the apertures could be placed elsewhere in the diffuser unit such as in the plenum envelope 22 when convenient.
  • the aperture 40 comprises a hollow sleeve 41 which is positioned within and glued to the sides of the filter in a manner similar to the sleeve utilized in conjunction with the damper control shaft 32.
  • the sleeve 41 is provided with a removable plug 42.
  • the smoke monitoring aperture 45 similarly, comprises a sleeve 46 positioned within filter 24 having a cap 47 removably positioned thereover.
  • apertures 40 and 45 may be drilled directly through the strip. In this event, of course, it is not necessary to utilize sleeves within the apertures. Such a structure is illustrated, for example, in FIG. 5.
  • one of the fans 16 is activated.
  • Each of the filters are then tested by removing the caps 42 and 47 therefrom.
  • Smoke is fed into the interior 28 of plenum envelope 22 via aperture 40.
  • This smoke will ordinarily be dioctyl phthalate having a 0.3 micron dispersion factor. 'Installation specifications will require ordinarily that the smoke concentration within the envelope 22 be maintained at or above a specified figure-ie. micrograms per liter or equivalent of a No. 4 on the Sinclair Phoenix Photometer-during the testing procedure.
  • the instant invention permits monitoring of the smoke concentration within the plenum 28 by means of the aperture 45.
  • FIG. 5 illustrates a plug 42 or 47 suitable for use in conjunction with the practice of the instant invention.
  • This plug as noted previously, is positioned within an aperture in a wooden joining strip as opposed to within a sleeve such as those indicated at ⁇ 41 and 46 passing directly through the filter.
  • the plug has a cylindrical section 51 with a shoulder 52 extending outwardly from the downward extremity thereof.
  • Sections 51 and 52 are integrally formed from rubber, polyvinyl chloride or some other elastic material.
  • the upper extremity of section 51 has positioned therein and joined thereto a nut 53 into which is threaded a screw 54.
  • the head 55 of screw 54 rests on shoulder 52.
  • the relaxed diameter of section 51 slightly less than the diameter of the aperture to be sealed.
  • the plug When testing of a particular unit has been completed, the plug is inserted into the aperture and the screw 54 tightened to draw nut 53 toward shoulder 52. Since nut 53 is bonded to the section 51, such drawing causes cylindrical section 51 to expand in diameter, tightly sealing the aperture.
  • each of the diffuser units may be tested without filling the entire system with smoke as required previously.
  • the head of air at the stack 21 will prevent nearly all, if not all, of the smoke from finding its way into other diffuser units during the testing process and, thus, other filters will not be needlessly contaminated.
  • the instant invention provides, additionally, a means whereby the smoke concentration within the unit being tested may be monitored to insure that is it up to specification.
  • This invention thus, provides a method and apparatus whereby the filtering effectiveness may be tested more easily and more accurately than has been possible heretofore.
  • a clean room suitable for specialized electronic production, medical surgery and the like comprising a plurality of closely adjacent air diffuser means positioned along one surface thereof, each of said diffuser means having a plenum chamber with a filter positioned across one surface thereof and having a compressed air intake thereinto, a series of said diffuser means having their respective intakes connected to common supply lines, the pressure in each said supply line exceeding the pressure in the plenum chambers connected thereto when said room is in operation, first sealable aperture means opening to the interior 0f each said diffuser means wherethroughV smoke may be introduced into the interior of each said diffuser means for purposes of testing the filtering effectiveness thereof; second sealable aperture means opening to the interior of each said diffuser means Wherethrough the smoke concentration within each of the diffuser means may be monitored during testing thereof; and, means for sealing said first and second aperture means after testing and monitoring has been completed.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Ventilation (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Sampling And Sample Adjustment (AREA)
US717345A 1968-03-29 1968-03-29 Method and apparatus for testing clean room filtration efficiency Expired - Lifetime US3522724A (en)

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Application Number Priority Date Filing Date Title
US71734568A 1968-03-29 1968-03-29

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US717345A Expired - Lifetime US3522724A (en) 1968-03-29 1968-03-29 Method and apparatus for testing clean room filtration efficiency

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US (1) US3522724A (xx)
BE (1) BE730343A (xx)
CA (1) CA919518A (xx)
DE (1) DE1915127C3 (xx)
FR (1) FR2005026A1 (xx)
GB (1) GB1199545A (xx)
LU (1) LU58306A1 (xx)
NL (1) NL6904722A (xx)
SE (1) SE351715B (xx)

Cited By (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3760568A (en) * 1969-04-29 1973-09-25 Delbag Luftfilter Gmbh Overhead air filter
US3985158A (en) * 1974-05-28 1976-10-12 Felter John V Box for mounting diffusers
US3986850A (en) * 1974-12-05 1976-10-19 Flanders Filters, Inc. Flow control apparatus and air filters
US4030518A (en) * 1974-12-05 1977-06-21 Flanders Filters, Inc. Air flow control apparatus
US4061082A (en) * 1975-10-20 1977-12-06 American Air Filter Company, Inc. Ventilating air filtering and distributing device
US4088463A (en) * 1976-05-05 1978-05-09 Frederick L. Fichter Filtration module
US4198856A (en) * 1978-08-11 1980-04-22 Appleton Joseph H Smoke bomb isolation and containment device
WO1980001952A1 (en) * 1979-03-05 1980-09-18 Flanders Filters Method and apparatus for the leak testing of filters
US4324568A (en) * 1980-08-11 1982-04-13 Flanders Filters, Inc. Method and apparatus for the leak testing of filters
EP0067577A1 (en) * 1981-05-26 1982-12-22 Graham Steed Roberts Modular room construction
US4380188A (en) * 1981-01-28 1983-04-19 Barber-Colman Company Heat-retarding air distribution unit
US4381664A (en) * 1979-11-13 1983-05-03 Watkins And Watson Limited Methods of and apparatus for the detection of airborne particles
US4409889A (en) * 1981-11-02 1983-10-18 Burleson Maurice L Modular clean room
US4493207A (en) * 1982-01-19 1985-01-15 Taggents, Inc. Method and apparatus for measuring the rate at which air infiltrates into and out of buildings
US4494403A (en) * 1982-07-14 1985-01-22 Flanders Filters, Inc. Filter testing apparatus and method
US4518405A (en) * 1983-12-19 1985-05-21 Weber Technical Products, Division Of Craig Systems Corporation Clean room with replaceable filter and a seal cutting mechanism
USRE31952E (en) * 1980-08-11 1985-07-23 Flanders Filters, Inc. Method and apparatus for the leak testing of filters
US4548068A (en) * 1983-11-10 1985-10-22 Cambridge Filter Corp. Downflow air filter construction and methods for air flow adjustment and leak testing thereof
US4549472A (en) * 1983-09-29 1985-10-29 Hitachi Ltd. Rearrangeable partial environmental control device
US4646558A (en) * 1983-11-10 1987-03-03 Cambridge Filter Corp. Method for leak testing air filters
US4666477A (en) * 1986-04-22 1987-05-19 Weber Technical Products, Division Of Craig Systems Corporation Adjustable damper for clean room systems
US4735899A (en) * 1985-03-11 1988-04-05 The Baker Company, Inc. Detection of airborne microorganisms
US5871556A (en) * 1997-05-02 1999-02-16 Hepa Corporation Clean room air filter system with self-supporting filter units
US6074463A (en) * 1997-01-09 2000-06-13 Samsung Electronics Co., Ltd. Fan filter unit having a monitoring device for use in a semiconductor device manufacturing clean room
US20050003754A1 (en) * 2002-07-11 2005-01-06 Allan Pilger Boot hanger mounting bracket
US20060112757A1 (en) * 2004-11-29 2006-06-01 Morse Thomas C Filter housing assembly with leak testable aerosol injection port
WO2006083290A3 (en) * 2004-06-07 2007-04-19 Entegris Inc System and method for removing contaminants
US20070123161A1 (en) * 2002-07-11 2007-05-31 Allan Pilger Boot hanger mounting bracket
US20080210879A1 (en) * 2005-07-11 2008-09-04 Maintenance Securite Installation Service Method for Controlling Leakage Rate of Active Carbon Filters
US20140273803A1 (en) * 2013-06-05 2014-09-18 Fontanesi and Kann Company Airflow diffuser with integrated light fixture
CN112934116A (zh) * 2021-01-29 2021-06-11 无锡苏胜尔机械设备有限公司 一种方便使用的防爆高压釜

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8227470U1 (de) * 1982-09-30 1983-04-14 Weiss Technik GmbH Umwelt-Klima-Messtechnik, 6301 Reiskirchen Zuluftdecke

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE184358C (xx) *
US1933791A (en) * 1931-03-20 1933-11-07 Eastman Kodak Co Method of detecting leaks in a closed gas system
US3323437A (en) * 1965-08-20 1967-06-06 Weber Showcase & Fixture Co Filter system
US3364729A (en) * 1966-10-27 1968-01-23 Mcmullen John J Leak detection system and method for cold liquid storage tanks
US3395514A (en) * 1965-10-27 1968-08-06 Mine Safety Appliances Co Filter testing system and method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE184358C (xx) *
US1933791A (en) * 1931-03-20 1933-11-07 Eastman Kodak Co Method of detecting leaks in a closed gas system
US3323437A (en) * 1965-08-20 1967-06-06 Weber Showcase & Fixture Co Filter system
US3395514A (en) * 1965-10-27 1968-08-06 Mine Safety Appliances Co Filter testing system and method
US3364729A (en) * 1966-10-27 1968-01-23 Mcmullen John J Leak detection system and method for cold liquid storage tanks

Cited By (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3760568A (en) * 1969-04-29 1973-09-25 Delbag Luftfilter Gmbh Overhead air filter
US3985158A (en) * 1974-05-28 1976-10-12 Felter John V Box for mounting diffusers
US3986850A (en) * 1974-12-05 1976-10-19 Flanders Filters, Inc. Flow control apparatus and air filters
US4030518A (en) * 1974-12-05 1977-06-21 Flanders Filters, Inc. Air flow control apparatus
US4061082A (en) * 1975-10-20 1977-12-06 American Air Filter Company, Inc. Ventilating air filtering and distributing device
US4088463A (en) * 1976-05-05 1978-05-09 Frederick L. Fichter Filtration module
US4198856A (en) * 1978-08-11 1980-04-22 Appleton Joseph H Smoke bomb isolation and containment device
WO1980001952A1 (en) * 1979-03-05 1980-09-18 Flanders Filters Method and apparatus for the leak testing of filters
US4381664A (en) * 1979-11-13 1983-05-03 Watkins And Watson Limited Methods of and apparatus for the detection of airborne particles
US4324568A (en) * 1980-08-11 1982-04-13 Flanders Filters, Inc. Method and apparatus for the leak testing of filters
USRE31952E (en) * 1980-08-11 1985-07-23 Flanders Filters, Inc. Method and apparatus for the leak testing of filters
US4380188A (en) * 1981-01-28 1983-04-19 Barber-Colman Company Heat-retarding air distribution unit
EP0067577A1 (en) * 1981-05-26 1982-12-22 Graham Steed Roberts Modular room construction
US4506595A (en) * 1981-05-26 1985-03-26 Roberts Graham S Modular wall and ceiling system
US4409889A (en) * 1981-11-02 1983-10-18 Burleson Maurice L Modular clean room
US4493207A (en) * 1982-01-19 1985-01-15 Taggents, Inc. Method and apparatus for measuring the rate at which air infiltrates into and out of buildings
US4494403A (en) * 1982-07-14 1985-01-22 Flanders Filters, Inc. Filter testing apparatus and method
US4549472A (en) * 1983-09-29 1985-10-29 Hitachi Ltd. Rearrangeable partial environmental control device
US4548068A (en) * 1983-11-10 1985-10-22 Cambridge Filter Corp. Downflow air filter construction and methods for air flow adjustment and leak testing thereof
US4646558A (en) * 1983-11-10 1987-03-03 Cambridge Filter Corp. Method for leak testing air filters
US4518405A (en) * 1983-12-19 1985-05-21 Weber Technical Products, Division Of Craig Systems Corporation Clean room with replaceable filter and a seal cutting mechanism
US4735899A (en) * 1985-03-11 1988-04-05 The Baker Company, Inc. Detection of airborne microorganisms
US4666477A (en) * 1986-04-22 1987-05-19 Weber Technical Products, Division Of Craig Systems Corporation Adjustable damper for clean room systems
US6074463A (en) * 1997-01-09 2000-06-13 Samsung Electronics Co., Ltd. Fan filter unit having a monitoring device for use in a semiconductor device manufacturing clean room
US5871556A (en) * 1997-05-02 1999-02-16 Hepa Corporation Clean room air filter system with self-supporting filter units
US7140960B2 (en) 2002-07-11 2006-11-28 Applied Applications International, Inc. Boot hanger mounting bracket
US20050003754A1 (en) * 2002-07-11 2005-01-06 Allan Pilger Boot hanger mounting bracket
US20070123161A1 (en) * 2002-07-11 2007-05-31 Allan Pilger Boot hanger mounting bracket
US7645189B2 (en) 2002-07-11 2010-01-12 Applied Applications International, Inc. Boot hanger mounting bracket
WO2006083290A3 (en) * 2004-06-07 2007-04-19 Entegris Inc System and method for removing contaminants
TWI386250B (zh) * 2004-06-07 2013-02-21 Entegris Inc 排除污染的系統及方法
US20060112757A1 (en) * 2004-11-29 2006-06-01 Morse Thomas C Filter housing assembly with leak testable aerosol injection port
US7186286B2 (en) * 2004-11-29 2007-03-06 Camfil Farr, Inc. Filter housing assembly with leak testable aerosol injection port
US20080210879A1 (en) * 2005-07-11 2008-09-04 Maintenance Securite Installation Service Method for Controlling Leakage Rate of Active Carbon Filters
US20140273803A1 (en) * 2013-06-05 2014-09-18 Fontanesi and Kann Company Airflow diffuser with integrated light fixture
CN112934116A (zh) * 2021-01-29 2021-06-11 无锡苏胜尔机械设备有限公司 一种方便使用的防爆高压釜

Also Published As

Publication number Publication date
LU58306A1 (xx) 1969-07-15
FR2005026A1 (xx) 1969-12-05
DE1915127A1 (de) 1969-10-09
CA919518A (en) 1973-01-23
SE351715B (xx) 1972-12-04
BE730343A (xx) 1969-09-01
GB1199545A (en) 1970-07-22
DE1915127C3 (de) 1974-03-07
DE1915127B2 (de) 1973-07-19
NL6904722A (xx) 1969-10-01

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