US3467058A - Apparatus for vaporizing metal - Google Patents

Apparatus for vaporizing metal Download PDF

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Publication number
US3467058A
US3467058A US511515A US3467058DA US3467058A US 3467058 A US3467058 A US 3467058A US 511515 A US511515 A US 511515A US 3467058D A US3467058D A US 3467058DA US 3467058 A US3467058 A US 3467058A
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United States
Prior art keywords
metal
crucible
bath
vaporization
make
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Expired - Lifetime
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US511515A
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English (en)
Inventor
William A Box
Waldo Rall
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United States Steel Corp
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United States Steel Corp
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Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Definitions

  • This invention relates to the vaporization of metal and, in particular, to a method and apparatus for vaporizing metal at a substantial rate, as for the purpose of coating a traveling strip by condensation in a vacuum.
  • Vacuum-deposition lines for coating strip traveling at even moderate speeds require the vaporization of coating metal from a crucible at a substantial rate.
  • This immediately presents a problem of supplying make-up coating metal, through the wall of the vacuum chamber, to the crucible containing the molten coating metal from the surface of which evaporation takes plate. It has been proposed to feed metal in wire form from the outside of the chamber into the crucible. Regardless of the form in which make-up metal is supplied, the high rate of the melting thereof which is necessary, causes the gases super cially associated with the coating metal, e.g., aluminum, or dissolved therein, to erupt or evolve violently. Spattering and splashing of the molten metal in the crucible may result with objectionable effects such as marring the strip being coated or short-circuiting the electron-beam gun which is the means usually employed to heat the surface of the molten metal.
  • the object of our invention to provide a method and means for supplying make-up metal to a vaporization crucible, which isolate from the surface of the bath from which vaporization occurs all violent eruption or vigorous evolution of gas from the make-up metal as' it is melted.
  • a fusion chamber or pool adjacent thereto and communicating therewith, but separated therefrom, both above and below the surface of the molten metal we further provide means for introducing solid make-up metal into the fusion chamber and causing the flow thereof, when melted, into the main bath below the surface thereof.
  • FIGURE 1 is a plan view of a crucible incorporating our invention with its related electron-beam gun;
  • FIGURE 2 is a longitudinal section through the crucible showing make-up metal-feeding means associated therewith;
  • FIGURE 3 is a cross section taken along the plane of line III-III of FIGURE 1.
  • a crucible 10 comprises a trough or boat 11 of refractory metal, an outer sheath 12 of metal and alternating layers 13 and 14 of molded and granular insulation therebetween.
  • a crucible is described and claimed in the copending application of Joseph K. Swindt, Ser. No. 439,238, led Mar. 12, 1965, now Patent No. 3,345,059.
  • the crucible is adapted to contain a charge of metal 15 to be melted and vaporized. Heat may be generated at the exposed surface of the charge in the known manner by the impact thereon of electrons from a gun 16. The path of the electrons is made curvilinear by a magnetic eld in the direction of the length of the crucible.
  • a wall 17 of refractory material such as alumina, standing on the upper edge of the crucible 10 includes an end portion 18, a side portion 19 and a portion 20 disposed transversely of trough 11.
  • Portion 20 depends into the trough but terminates short of the bottom thereof, leaving a passage 21 connecting an end portion 22 of metal bath in the trough with the remainder thereof, designated 23.
  • This main portion 23 of the metal bath is the target of electrons from gun 16, the paths being generally indicated at 24, and vaporization of the metal constituting charge 15 takes place from the surface of portion 23.
  • Portion 22 constitutes a fusion pool for supplying make-up metal to portion 23.
  • the strip to be coated is passed over portion 23 as indicated at 25 in a direction normal to the length of the crucible.
  • Make-up metal is introduced into fusion pool 22 by any suitable means such as pinch rolls 26 for feeding metal in wire form.
  • the pinch rolls may be located inside or outside the vacuum chamber enclosing the crucible and the portion of the strip undergoing coating.
  • Tubular guides (not shown) may also be needed to direct the wire accurately into pool 22.
  • Metal wire fed into pool 22 s melted by heat absorbed from bath portion 23 through the walls of trough 11. It will be understood that the supply of make-up metal is closely correlated with the loss of metal by vaporization and that the level of liquid metal in the two bath portions 22 and 23 is equalized by flow through passage 21.
  • Wall 20 also tends to prevent stray electrons from gun 16 from reaching the fusion pool 22. Since feed wire is melted in pool 22 by heat absorbed from bath portion 23, the former is at a lower temperature than the latter, thereby reducing the possibility of substantial vaporization from the surface of pool. 22n
  • a vacuum-condensation apparatus for coating sheet material, means to support the material, an elon-x gated crucible extending horizontally below the material for holding a bath of molten coating metal, a cross wall in said Crucible adjacent one end thereof defining adjoining but separate fusion and vaporization chambers, said vaporization chamber being disposed below the material and said fusion chamber laterally, thereof, said wall having a passage below the surface of the bath connecting said chambers to establish a common liquid level therein, and extending to a substantial height above said surface to form a partition between said chambers, electron-beam means adjacent the Crucible for topfheating the surface of the bath in the vaporization chamber only, and means feeding solid metal into said fusion chamber,

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
US511515A 1965-12-03 1965-12-03 Apparatus for vaporizing metal Expired - Lifetime US3467058A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51151565A 1965-12-03 1965-12-03

Publications (1)

Publication Number Publication Date
US3467058A true US3467058A (en) 1969-09-16

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Family Applications (1)

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US511515A Expired - Lifetime US3467058A (en) 1965-12-03 1965-12-03 Apparatus for vaporizing metal

Country Status (6)

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US (1) US3467058A (fr)
BE (1) BE690410A (fr)
DE (1) DE1508531A1 (fr)
ES (1) ES333958A1 (fr)
FR (1) FR1502453A (fr)
NL (1) NL6617037A (fr)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3575132A (en) * 1968-10-25 1971-04-13 Bethlehem Steel Corp Vapor deposition apparatus
US3649734A (en) * 1971-01-29 1972-03-14 Motorola Inc Crucible electron beam evaporation of aluminum
US3860444A (en) * 1972-02-08 1975-01-14 Cockerill Coating of workpieces by vapor deposition
US3930463A (en) * 1972-07-14 1976-01-06 The Secretary Of State For Defense In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Vapor deposition apparatus including a three-compartment evaporator
US5132506A (en) * 1990-11-28 1992-07-21 Matsushita Electric Industrial Co., Ltd. Vacuum evaporation apparatus and method for making vacuum evaporated sheet
US5224971A (en) * 1990-06-22 1993-07-06 Kabushiki Kaisha Toshiba Method and apparatus for separating isotopes
US20070028629A1 (en) * 2005-08-03 2007-02-08 Gunter Klemm Evaporator arrangement for the coating of substrates
US20080044166A1 (en) * 2006-08-16 2008-02-21 Applied Materials Gmbh & Co. Kg Vaporizer apparatus with automatic feeding of a wire into a crucible
US20100104752A1 (en) * 2007-03-20 2010-04-29 Arcelormittal France Method for coating a substrate and metal alloy vacuum deposition facility
US8920566B2 (en) 2010-12-30 2014-12-30 United Technologies Corporation Wire feed pressure lock system

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0430210B1 (fr) * 1989-11-29 1994-03-16 Matsushita Electric Industrial Co., Ltd. Appareillage pour évaporation sous vide et procédé de fabrication de feuilles évaporées sous vide
DE102008023025B4 (de) * 2008-05-09 2013-12-12 Von Ardenne Anlagentechnik Gmbh Tiegelanordnung für thermische Beschichtungsverfahren

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2621625A (en) * 1948-03-25 1952-12-16 Nat Res Corp Vapor coating device
US2664852A (en) * 1950-04-27 1954-01-05 Nat Res Corp Vapor coating apparatus
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3329524A (en) * 1963-06-12 1967-07-04 Temescal Metallurgical Corp Centrifugal-type vapor source

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2621625A (en) * 1948-03-25 1952-12-16 Nat Res Corp Vapor coating device
US2664852A (en) * 1950-04-27 1954-01-05 Nat Res Corp Vapor coating apparatus
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3329524A (en) * 1963-06-12 1967-07-04 Temescal Metallurgical Corp Centrifugal-type vapor source

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3575132A (en) * 1968-10-25 1971-04-13 Bethlehem Steel Corp Vapor deposition apparatus
US3649734A (en) * 1971-01-29 1972-03-14 Motorola Inc Crucible electron beam evaporation of aluminum
US3860444A (en) * 1972-02-08 1975-01-14 Cockerill Coating of workpieces by vapor deposition
US3930463A (en) * 1972-07-14 1976-01-06 The Secretary Of State For Defense In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Vapor deposition apparatus including a three-compartment evaporator
US5224971A (en) * 1990-06-22 1993-07-06 Kabushiki Kaisha Toshiba Method and apparatus for separating isotopes
US5132506A (en) * 1990-11-28 1992-07-21 Matsushita Electric Industrial Co., Ltd. Vacuum evaporation apparatus and method for making vacuum evaporated sheet
US20070028629A1 (en) * 2005-08-03 2007-02-08 Gunter Klemm Evaporator arrangement for the coating of substrates
US20080044166A1 (en) * 2006-08-16 2008-02-21 Applied Materials Gmbh & Co. Kg Vaporizer apparatus with automatic feeding of a wire into a crucible
US20100104752A1 (en) * 2007-03-20 2010-04-29 Arcelormittal France Method for coating a substrate and metal alloy vacuum deposition facility
US8481120B2 (en) * 2007-03-20 2013-07-09 Arcelormittal France Method for coating a substrate and metal alloy vacuum deposition facility
US8920566B2 (en) 2010-12-30 2014-12-30 United Technologies Corporation Wire feed pressure lock system

Also Published As

Publication number Publication date
FR1502453A (fr) 1967-11-18
NL6617037A (fr) 1967-06-05
ES333958A1 (es) 1967-10-16
DE1508531A1 (de) 1969-10-30
BE690410A (fr) 1967-05-29

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