US3204860A - High-vacuum pump - Google Patents

High-vacuum pump Download PDF

Info

Publication number
US3204860A
US3204860A US802816A US80281659A US3204860A US 3204860 A US3204860 A US 3204860A US 802816 A US802816 A US 802816A US 80281659 A US80281659 A US 80281659A US 3204860 A US3204860 A US 3204860A
Authority
US
United States
Prior art keywords
pump
anode
cathode
electrode
envelope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US802816A
Other languages
English (en)
Inventor
Huber Harry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
CSF Compagnie Generale de Telegraphie sans Fil SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CSF Compagnie Generale de Telegraphie sans Fil SA filed Critical CSF Compagnie Generale de Telegraphie sans Fil SA
Application granted granted Critical
Publication of US3204860A publication Critical patent/US3204860A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances

Definitions

  • the present invention relates to high-vacuum pumps of the adsorbing-and-ionizing type, that is to devices operatively connected with envelopes or enclosures operating under high vacuum and intended to improve the vacuum by double eifect of ion pumping, that is, by the capture of positive ions resulting from the ionization of the residual gas molecules within the evacuated envelope and submitted to any suitable electric field, and by the adsorption of the gas molecules on a metal which is evaporated in a continuous manner and of which the condensation is produced in a thin layer on a wall.
  • FIGURE 9 is a diagram showing the results obtained with the pump illustrated in FIGURE 7,
  • FIGURES 5 and 6 represent a modified embodiment along two longitudinally mutually perpendicular crosssectional planes which offers a certain number of differences with respect to the embodiments described hereinabove.
  • the envelope or casing 1 is relatively flat and wall thereof perpendicular to the plane of FIGURE 5, which deposits 22 and 22 operate as cold cathodes, thereby replacing the filament 3 of the preceding embodiments which is obviated thereby.
  • the anode 5 which supports the titanium reserve is a cylinder having an axis perpendicular to the axis of the envelope or casing 1, as in the case of the embodiment of FIGURE 4, but is additionally heated by a heating element 23 fed across the connections 24.
  • the magnetic poles 21 and 21' are provided in the same manner as in FIGURE 4.

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
US802816A 1958-04-16 1959-03-30 High-vacuum pump Expired - Lifetime US3204860A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR763295 1958-04-16

Publications (1)

Publication Number Publication Date
US3204860A true US3204860A (en) 1965-09-07

Family

ID=8706258

Family Applications (1)

Application Number Title Priority Date Filing Date
US802816A Expired - Lifetime US3204860A (en) 1958-04-16 1959-03-30 High-vacuum pump

Country Status (3)

Country Link
US (1) US3204860A (de)
DE (1) DE1089504B (de)
GB (1) GB909308A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3280365A (en) * 1963-04-15 1966-10-18 Gen Electric Penning-type discharge ionization gauge with discharge initiation electron source
US3310226A (en) * 1965-02-11 1967-03-21 Nat Res Corp Vacuum device
US3327931A (en) * 1965-09-13 1967-06-27 Charles L Hall Ion-getter vacuum pump and gauge
US3343781A (en) * 1965-04-28 1967-09-26 Gen Electric Ionic pump

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5150001A (en) * 1990-04-10 1992-09-22 Orchid One Corporation Field emission electron gun and method having complementary passive and active vacuum pumping

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB797232A (en) * 1955-07-11 1958-06-25 Manfred Von Ardenne Improvements in or relating to high vacuum ion pumps
US2925214A (en) * 1953-04-24 1960-02-16 Gen Electric Ionic vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2894679A (en) * 1953-11-23 1959-07-14 Wisconsin Alumni Res Found Pump
US2796555A (en) * 1954-06-29 1957-06-18 High Voltage Engineering Corp High-vacuum pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2925214A (en) * 1953-04-24 1960-02-16 Gen Electric Ionic vacuum pump
GB797232A (en) * 1955-07-11 1958-06-25 Manfred Von Ardenne Improvements in or relating to high vacuum ion pumps

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3280365A (en) * 1963-04-15 1966-10-18 Gen Electric Penning-type discharge ionization gauge with discharge initiation electron source
US3310226A (en) * 1965-02-11 1967-03-21 Nat Res Corp Vacuum device
US3343781A (en) * 1965-04-28 1967-09-26 Gen Electric Ionic pump
US3327931A (en) * 1965-09-13 1967-06-27 Charles L Hall Ion-getter vacuum pump and gauge

Also Published As

Publication number Publication date
GB909308A (en) 1962-10-31
DE1089504B (de) 1960-09-22

Similar Documents

Publication Publication Date Title
JP3100209B2 (ja) 真空蒸着用偏向電子銃装置
US3204860A (en) High-vacuum pump
US4739214A (en) Dynamic electron emitter
US2554902A (en) Thermionic discharge device control
US2988657A (en) Ion pump
US3758777A (en) Ion source for vaporizing and ionizing solid substances
US2967012A (en) Getter-ion pump
US3168418A (en) Device for monitoring and controlling evaporation rate in vacuum deposition
US3371489A (en) Porous-plug low work-function film cathodes for electron-bombardment ion thrustors
EP0095311A2 (de) Ionenquelle
US2841726A (en) Apparatus for producing thermallycool charged particles
US3391303A (en) Electronic vacuum pump including a sputter electrode
GB1020233A (en) Improvements in or relating to hollow cathode structures
US2888189A (en) Vacuum pump
US3610985A (en) Ion source having two operative cathodes
US3517240A (en) Method and apparatus for forming a focused monoenergetic ion beam
USRE35024E (en) Electron beam gun with grounded shield to prevent arc down
US3409729A (en) Electron beam furnace and method for heating a target therein
US3074621A (en) Getter-ion pump
US3588593A (en) Method of operating an ion-getter vacuum pump with gun and grid structure arranged for optimum ionization and sublimation
US2919380A (en) Electron discharge devices
US2717962A (en) Electric discharge devices
US3416722A (en) High vacuum pump employing apertured penning cells driving ion beams into a target covered by a getter sublimator
US4155008A (en) Vapor coated emissive cathode
US3181775A (en) Pumping apparatus