US3095309A - Electroless copper plating - Google Patents
Electroless copper plating Download PDFInfo
- Publication number
- US3095309A US3095309A US26401A US2640160A US3095309A US 3095309 A US3095309 A US 3095309A US 26401 A US26401 A US 26401A US 2640160 A US2640160 A US 2640160A US 3095309 A US3095309 A US 3095309A
- Authority
- US
- United States
- Prior art keywords
- copper
- bath
- per liter
- cyanide
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 46
- 239000010949 copper Substances 0.000 title description 46
- 229910052802 copper Inorganic materials 0.000 title description 44
- 238000007747 plating Methods 0.000 title description 13
- 239000008139 complexing agent Substances 0.000 claims description 21
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims description 14
- 238000007772 electroless plating Methods 0.000 claims description 11
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 claims description 11
- 150000008044 alkali metal hydroxides Chemical class 0.000 claims description 7
- XLYOFNOQVPJJNP-PWCQTSIFSA-N Tritiated water Chemical compound [3H]O[3H] XLYOFNOQVPJJNP-PWCQTSIFSA-N 0.000 claims 1
- HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Inorganic materials [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 29
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 26
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 20
- 238000000034 method Methods 0.000 description 17
- 150000001879 copper Chemical class 0.000 description 16
- 238000000151 deposition Methods 0.000 description 12
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 10
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 10
- 239000000243 solution Substances 0.000 description 9
- KXZJHVJKXJLBKO-UHFFFAOYSA-N chembl1408157 Chemical compound N=1C2=CC=CC=C2C(C(=O)O)=CC=1C1=CC=C(O)C=C1 KXZJHVJKXJLBKO-UHFFFAOYSA-N 0.000 description 8
- 230000008021 deposition Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000002585 base Substances 0.000 description 6
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 6
- 229910000366 copper(II) sulfate Inorganic materials 0.000 description 6
- 150000003839 salts Chemical class 0.000 description 6
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 5
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 5
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 5
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical class [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 description 5
- 235000011006 sodium potassium tartrate Nutrition 0.000 description 5
- 229910000365 copper sulfate Inorganic materials 0.000 description 4
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 4
- 150000002825 nitriles Chemical class 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 159000000000 sodium salts Chemical class 0.000 description 4
- UEUXEKPTXMALOB-UHFFFAOYSA-J tetrasodium;2-[2-[bis(carboxylatomethyl)amino]ethyl-(carboxylatomethyl)amino]acetate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]C(=O)CN(CC([O-])=O)CCN(CC([O-])=O)CC([O-])=O UEUXEKPTXMALOB-UHFFFAOYSA-J 0.000 description 4
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 3
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 3
- -1 alkali metal salts Chemical class 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(I) oxide Inorganic materials [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 description 3
- 229940112669 cuprous oxide Drugs 0.000 description 3
- KRFJLUBVMFXRPN-UHFFFAOYSA-N cuprous oxide Chemical compound [O-2].[Cu+].[Cu+] KRFJLUBVMFXRPN-UHFFFAOYSA-N 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 239000000174 gluconic acid Substances 0.000 description 3
- 235000012208 gluconic acid Nutrition 0.000 description 3
- 239000004615 ingredient Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 230000001235 sensitizing effect Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- TXUICONDJPYNPY-UHFFFAOYSA-N (1,10,13-trimethyl-3-oxo-4,5,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl) heptanoate Chemical compound C1CC2CC(=O)C=C(C)C2(C)C2C1C1CCC(OC(=O)CCCCCC)C1(C)CC2 TXUICONDJPYNPY-UHFFFAOYSA-N 0.000 description 2
- OCUCCJIRFHNWBP-IYEMJOQQSA-L Copper gluconate Chemical compound [Cu+2].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O OCUCCJIRFHNWBP-IYEMJOQQSA-L 0.000 description 2
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 2
- VMQMZMRVKUZKQL-UHFFFAOYSA-N Cu+ Chemical compound [Cu+] VMQMZMRVKUZKQL-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 229920000877 Melamine resin Polymers 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 2
- 101150003085 Pdcl gene Proteins 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 2
- 238000007792 addition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 2
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 description 2
- 229960003280 cupric chloride Drugs 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 2
- 229920001568 phenolic resin Polymers 0.000 description 2
- NNFCIKHAZHQZJG-UHFFFAOYSA-N potassium cyanide Chemical compound [K+].N#[C-] NNFCIKHAZHQZJG-UHFFFAOYSA-N 0.000 description 2
- 150000003388 sodium compounds Chemical class 0.000 description 2
- 239000001488 sodium phosphate Substances 0.000 description 2
- 239000001119 stannous chloride Substances 0.000 description 2
- 235000011150 stannous chloride Nutrition 0.000 description 2
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 2
- 229910000406 trisodium phosphate Inorganic materials 0.000 description 2
- 235000019801 trisodium phosphate Nutrition 0.000 description 2
- GPRLSGONYQIRFK-MNYXATJNSA-N triton Chemical compound [3H+] GPRLSGONYQIRFK-MNYXATJNSA-N 0.000 description 2
- OWEGMIWEEQEYGQ-UHFFFAOYSA-N 100676-05-9 Natural products OC1C(O)C(O)C(CO)OC1OCC1C(O)C(O)C(O)C(OC2C(OC(O)C(O)C2O)CO)O1 OWEGMIWEEQEYGQ-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- GUBGYTABKSRVRQ-XLOQQCSPSA-N Alpha-Lactose Chemical compound O[C@@H]1[C@@H](O)[C@@H](O)[C@@H](CO)O[C@H]1O[C@@H]1[C@@H](CO)O[C@H](O)[C@H](O)[C@H]1O GUBGYTABKSRVRQ-XLOQQCSPSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 1
- FBPFZTCFMRRESA-KVTDHHQDSA-N D-Mannitol Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-KVTDHHQDSA-N 0.000 description 1
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 1
- RFSUNEUAIZKAJO-ARQDHWQXSA-N Fructose Chemical compound OC[C@H]1O[C@](O)(CO)[C@@H](O)[C@@H]1O RFSUNEUAIZKAJO-ARQDHWQXSA-N 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- GUBGYTABKSRVRQ-QKKXKWKRSA-N Lactose Natural products OC[C@H]1O[C@@H](O[C@H]2[C@H](O)[C@@H](O)C(O)O[C@@H]2CO)[C@H](O)[C@@H](O)[C@H]1O GUBGYTABKSRVRQ-QKKXKWKRSA-N 0.000 description 1
- GUBGYTABKSRVRQ-PICCSMPSSA-N Maltose Natural products O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@@H]1O[C@@H]1[C@@H](CO)OC(O)[C@H](O)[C@H]1O GUBGYTABKSRVRQ-PICCSMPSSA-N 0.000 description 1
- 229930195725 Mannitol Natural products 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- CZMRCDWAGMRECN-UGDNZRGBSA-N Sucrose Chemical compound O[C@H]1[C@H](O)[C@@H](CO)O[C@@]1(CO)O[C@@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 CZMRCDWAGMRECN-UGDNZRGBSA-N 0.000 description 1
- 229930006000 Sucrose Natural products 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- WQZGKKKJIJFFOK-VFUOTHLCSA-N beta-D-glucose Chemical compound OC[C@H]1O[C@@H](O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-VFUOTHLCSA-N 0.000 description 1
- GUBGYTABKSRVRQ-QUYVBRFLSA-N beta-maltose Chemical compound OC[C@H]1O[C@H](O[C@H]2[C@H](O)[C@@H](O)[C@H](O)O[C@@H]2CO)[C@H](O)[C@@H](O)[C@@H]1O GUBGYTABKSRVRQ-QUYVBRFLSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229940108925 copper gluconate Drugs 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 229940076286 cupric acetate Drugs 0.000 description 1
- 229940045803 cuprous chloride Drugs 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 239000008121 dextrose Substances 0.000 description 1
- SLGWESQGEUXWJQ-UHFFFAOYSA-N formaldehyde;phenol Chemical compound O=C.OC1=CC=CC=C1 SLGWESQGEUXWJQ-UHFFFAOYSA-N 0.000 description 1
- 229960002737 fructose Drugs 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002596 lactones Chemical class 0.000 description 1
- 239000008101 lactose Substances 0.000 description 1
- 239000000594 mannitol Substances 0.000 description 1
- 235000010355 mannitol Nutrition 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920005990 polystyrene resin Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000012047 saturated solution Substances 0.000 description 1
- 239000010802 sludge Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000600 sorbitol Substances 0.000 description 1
- 235000010356 sorbitol Nutrition 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000005720 sucrose Substances 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 150000003567 thiocyanates Chemical class 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/38—Coating with copper
- C23C18/40—Coating with copper using reducing agents
- C23C18/405—Formaldehyde
Definitions
- the present invention has for its object the provision of a novel and improved process for the electroless plating or deposition of a ductile, bright layer of copper on various surfaces such as insulating members, metal, ceramic and other supporting surfaces.
- a further object of the invention is the provision of a novel and improved electroless plating bath which is simple to use, operates with certainty and which is economical in use.
- the invention provides an improved elect-roless copper depositing bath and process which produces a copper de posit of better color than has heretofore been realized, and which may exhibit substantially the same ductility as good electrodeposited copper.
- the invention consists in the novel steps, processes, compositions and improvements herein shown and de scribed.
- the deposits produced by most prior electroless copper depositing baths do not produce copper deposits which are bright, but they usually exhibit a dull surface, of poor color, often yielding a smutty layer of copper.
- the baths of the prior processes are often subject to instability and as impurities accumulate in the bath, the bath finally reaches a condition in which it spontaneously decomposes, throwing down the copper as a useless sludge or precipitate.
- the baths of the present invention may be used until substantially exhausted, and may be replenished from time to time so that the remaining useful ingredients in the bath are more efficiently used, thereby reducing the over-all cost of the operation.
- the electroless plating baths of the present invention consist essentially of a soluble copper salt, such as copper sulfate, cupric chloride, cupric nitrate, copper gluconate and cupric acetate; a complexing agent for the copper ions, such as Rochelle salts, ethylenediaminetetraacetic acid and its sodium salt, triethanolamine, sugar (sucrose, dextrose, lactose, levulose or maltose), mannitol, sorbitol, or gluconic acid; sodium or potassium hydroxide; an active reducing agent such as formaldehyde; and a small amount of a complexing agent for the cuprous ions, such as a soluble cyanide, such as sodium or potassium cyanide.
- a soluble copper salt such as copper sulfate, cupric chloride, cupric nitrate, copper gluconate and cupric acetate
- a complexing agent for the copper ions such as Rochelle
- Copper sulfate from 0.5 g. to saturated solution 0.002 to :15 mol or more.
- a soluble inorganic cyanide 0.001 g. to 3.0 g., 0.00002 M.
- the ratio of the cupric salt to the complexing agent is such that there are from 0.5 to 2.5 as many moles of complexing agent as of cupric salt; e.g. 5 grams of CuSO 5H O requires from 2.5 to 8.5 grams of Rochelle salts.
- the amount of formaldehyde may be 0.4 to 3.4 moles per liter.
- Sodium hydroxide and sodium cyanide are preferred over the corresponding more costly potassium and other alkali metal salts and the thiocyanates, which are of greater molecular weight.
- Rochelle salts the sodium salts (mono-, di-, triand tetra-sodium salts) of ethylenediaminetetraacetic acid, gluconic acid, gluconates, and triethanolamine are preferred as complexing agents, but commercially available glucono 'y lactone and modified-ethylenediaminetetraacetates are also useful, and in certain instances give even better results than the pure sodium ethylenediaminetetraacetate.
- One such material is Glyco Products Tetrine M.
- Cupric sulfate is preferred but other soluble copper salts may be used, such as the nitrate, chloride and acetate.
- the plating baths of the present invention are compounded within narrower limits than set forth immediately above, and they consist essentially of:
- a soluble cupri-c salt preferably cupric sulfate 0.002 to 0.04 mole.
- Alkali metal hydroxide preferably Sodium hydroxide to give-" pH 13.5.
- the cupric salt, and the formaldehyde reducing agent may be replenished from time to time, and also that it may be advisable to monitor the pH and cyanide content of the bath, and to adjust it to its optimum value as the bath is used.
- the baths are ordinarily used at slightly elevated temperatures, such as from 35 to 65 C. although many of them may be used at lower temperatures, and others may be used at even higher temperatures.
- slightly elevated temperatures such as from 35 to 65 C. although many of them may be used at lower temperatures, and others may be used at even higher temperatures.
- the temperature is increased, it is usual to find that the rate of plating is increased, and that the ductility of the deposit is increased to a slight extent, but the temperature is not highly critical, and within the usual operating range, excellent deposits are produced which exhibit greatly improved properties over those obtained with conventional baths and processes.
- the efficiency of the copper recovery by electroless deposition from the bath often exceeds which is much greater than has heretofore been observed in working with conventional baths.
- the enprous complexing agent in the bath serves to prevent or minimize the formation of cuprous oxide in the bath and also appears to inhibit the formation of resultant hydrogen in the electroless deposited metal.
- the surface to be plated must be free of grease and other contaminating material.
- the surface areas to receive the deposit should first be treated, as in conventional processes, with conventional sensitizing and seeding solutions, such as stannous chloride (SnCl followed by treatment with a dilute solution of palladium chloride (PdCl
- metal surface such as stainless steel
- it should be degreased, and then treated with acid, such as hydrochloric or phosphoric acid to free the surface of any oxide.
- acid such as hydrochloric or phosphoric acid
- Example 1 Cupric sulfate (CuSO -H O) 7.5 grams.
- Example 2 A bath for similar use, but which gives even better ductility of the deposited copper, when used at a temperature of about 25 to 40 C., is as follows:
- Cupric sulfate (CuSO -5H O) 1.0 g. 0.004 M.
- Example 3 For use in the electroless plating of copper on a sheet of stainless steel which has been degreased and acid dipped, and which will deposit a bright ductile layer of copper about 0.001 thick in a period of 24 hours at an operating temperature of about 50 C., the following bath is preferred:
- the complexing agents may be used as mixtures and additional amounts of the complexing agent may be added, but such excess additions beyond 2.5 times the molal concentration of the copper content of the bath do not result in any improvement and are merely wasteful under ordinary circumstances.
- Example 5 Another bath which operates somewhat more rapidly at 40 C. than those specified above for the electroless plating of copper on insulating bases of plastic materials, such as phenolformaldehyde resins, polyester resins, nylon, polystyrene and epoxy resins, and has a greater life, but does not produce as ductile a deposit of copper as is produced by the bath of Example 1, is as follows:
- Example 6 A bath having still higher concentration of ingredients is, as follows:
- Cupric chloride (CuCl 2H O) g Rochelle salts g 85 to 100 Sodium hydroxide g 60 Formaldehyde, ml 35 Sodium cyanide -2 0.01 to 0.1
- Cupric sulfate g 7.5 60 which are comprised within the scope of the present Ethylenedlamine tetracetieacidtetrasodlum salt g 15.0 invention, and which are especially useful for the deposi' Sodium hydroxide g 2 l n of bright, ductile metallic layers of copper on suit- Sodrum cyanide "g" 0. ably prepared sheets or moldings of plastic materials, Formaldehyde 40% ml 20.0 Such as the melamine or phenol-formaldehyde sheet-stock Water enough to make 1000 ml. used in the making of printed circuits.
- Example No 7 8 0 10 11 12 13 i 14 15 CuSO;5HgO grnrns 0.5 0.5 0.5 0. 10 10 Tetrasodium E.D.'I.. do 1. 0 1. O 1. 0 1.; 25 20 NaOH to give pH. 13 14 13.5 12.5 13.5 13.0 13 K011 to give pH l2. 0 13.5 Formaldehyde 10% millilitcrs 10 10 5 10 40 5t) 500 Sodium cyanide "grams" 0.002 0. 000 0. 01 1. 5 3. 0 Potassium cyanide tlo 0.003 0.02 0.5 3.0 Water enough to make one liter.
- Baths which give an excellent deposit but which are always easily controlled throughout their entire life because of the low copper concentration and the necessity of replenishing the copper content of the bath may be prepared according to the following formulae:
- These baths are preferably operated at a temperature of from 40 to 50 C. and the copper content may be replenished to a limited extent by additions of cuprous chloride.
- the surface of the sheet is first Wetted with a detergent, such as a 1% water solution of Triton X-l00 (Rohm & Haas Co.) or is roughened slightly by rubbing with an abrasive. T he surface is then thoroughly cleaned with an alkaline cleaner, such as a hot solution of trisodium phosphate in water, rinsed with water and is sensitized with a solution containing about 70 grams of stannous chloride (SnCl 2H O) and 40 ml.
- a detergent such as a 1% water solution of Triton X-l00 (Rohm & Haas Co.) or is roughened slightly by rubbing with an abrasive.
- an alkaline cleaner such as a hot solution of trisodium phosphate in water, rinsed with water and is sensitized with a solution containing about 70 grams of stannous chloride (SnCl 2H O) and 40 ml.
- a similar sensitizing and seeding treatment may be used as a preliminary treatment in connection with the use of any of the other examples given above, although when a metal surface is to be plated it is seldom necessary to do more than treat the metal surface, as by a solvent or a hot solution of an alkaline cleanser (e.g. trisodium phosphate), to insure that it is grease-free and With an acid, such as hydrochloric acid if the surface has any oxide coating thereon.
- an alkaline cleanser e.g. trisodium phosphate
- the present invention is not limited to the use of the foregoing specific sensitizing and seeder solutions, and in many instances it is only necessary to roughen the surface of the insulating base material, or to thoroughly clean the metal surface.
- the process and baths may be used for the electroless deposition of copper on a base material which comprises a thermoplastic or thermosetting resin, such as an epoxy resin which contains from 30% to 50% of cuprous oxide, and which have been subjected to light abrasion in those areas where the copper is to be selectively deposited.
- a bath for the electroless plating of copper consisting essentially of: water, and a water-soluble copper salt, from 0.002 to 0.15 mole per liter; a copper complexing agent, from 0.5 to 2.5 times the moles of the copper salt; an alkali metal hydroxide, to give a pH of from 10.5 to 14; formaldehyde, from 0.06 to 3.4 moles per liter;
- a bath for the electroless plating of copper consisting essentially of: water, and a water-soluble copper salt, from 0.002 to 0.15 mole per liter; a complexing agent for cupric ion, from 0.5 to 2.5 times the moles of the copper salt; an alkali metal hydroxide, to give a pH of from 10.5 to 14; formaldehyde, from 0.06 to 3.4 moles per liter; and, as a complexing agent for cuprous ion a water soluble cyanide salt.
- a process of electroless copper plating which comprises immersing the receptive surface to be plated in a bath consisting essentially of: water, and a water-soluble copper salt, from 0.002 to 0.15 mole per liter; a copper complexing agent, from 1 to 2.5 times the moles of the copper salt; an alkali metal hydroxide, to give a pH of from 10.5 to 14; formaldehyde, from 0.06 to 3.4 m'oles per liter; and -a soluble inorganic cyanide from 0.00002 to 0.06 mole per liter.
- a process of electroless copper plating which comprises immersing the receptive surface to be plated in a bath consisting essentially of water, :and a water-soluble copper salt, from 0.002 to 0.15 mole per liter; a cupric ion complexin-g agent, from 1 to 2.5 times the moles of the copper salt; an alkali metal hydroxide, to give a pH of from 10.5 to 14; formaldehyde, from 0.06 to 3.4 m'oles per liter; and, as a complexing agent for cuprous ion a water soluble cyanide salt.
- a process of electroless copper plating which includes immersing a receptive surface to be placed in an alkaline aqueous bath having a pH of between about 10.5 and 14 and comprising water, a water soluble copper salt, a complexing agent for cupric ion, and formaldehyde, the improvement which comprises maintaining in the bath a water soluble cyanide salt in the amount of between about 0.00002 and 0.06 mole per liter.
- an alkaline electroless copper plating bath having 'a pH of between about 10.5 and 14 and comprising water, a water soluble copper salt, a complexing agent for cupric ion, and formaldehyde, the improvement which comprises a water soluble cyanide salt which is present in the bath in an amount of between about 0.00002 and 0.06 mole per liter.
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- Chemical Treatment Of Metals (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US26401A US3095309A (en) | 1960-05-03 | 1960-05-03 | Electroless copper plating |
DE1696312A DE1696312C2 (de) | 1960-05-03 | 1961-01-27 | Bad zum stromlosen Abscheiden von Kupferüberzügen |
CH345361A CH413540A (de) | 1960-05-03 | 1961-03-23 | Bad und Verfahren zum stromlosen Abscheiden von Kupferschichten |
ES266074A ES266074A1 (es) | 1960-05-03 | 1961-03-25 | Un procedimiento para el revestimiento ineléctrico de cobre |
DK152861AA DK105901C (da) | 1960-05-03 | 1961-04-13 | Bad til strømløs udskillelse af kobberovertræk på overflader af bærere. |
CH757364A CH445247A (de) | 1960-05-03 | 1964-06-10 | Verfahren zum Abscheiden von Kupferschichten und Badflüssigkeit zu seiner Durchführung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US26401A US3095309A (en) | 1960-05-03 | 1960-05-03 | Electroless copper plating |
Publications (1)
Publication Number | Publication Date |
---|---|
US3095309A true US3095309A (en) | 1963-06-25 |
Family
ID=21831628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US26401A Expired - Lifetime US3095309A (en) | 1960-05-03 | 1960-05-03 | Electroless copper plating |
Country Status (5)
Country | Link |
---|---|
US (1) | US3095309A (en)van) |
CH (1) | CH413540A (en)van) |
DE (1) | DE1696312C2 (en)van) |
DK (1) | DK105901C (en)van) |
ES (1) | ES266074A1 (en)van) |
Cited By (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3259559A (en) * | 1962-08-22 | 1966-07-05 | Day Company | Method for electroless copper plating |
US3269861A (en) * | 1963-06-21 | 1966-08-30 | Day Company | Method for electroless copper plating |
US3296012A (en) * | 1965-04-30 | 1967-01-03 | Corning Glass Works | Electroless copper plating on ceramic material |
US3306830A (en) * | 1963-06-13 | 1967-02-28 | Bell Telephone Labor Inc | Printed circuit boards and their fabrication |
US3321328A (en) * | 1962-11-15 | 1967-05-23 | Ibm | Coating of aluminum substrates with a magnetic material |
US3322881A (en) * | 1964-08-19 | 1967-05-30 | Jr Frederick W Schneble | Multilayer printed circuit assemblies |
US3326700A (en) * | 1963-06-12 | 1967-06-20 | Rudolph J Zeblisky | Electroless copper plating |
US3332860A (en) * | 1963-09-19 | 1967-07-25 | Basf Ag | Metallizing plastic surfaces |
US3340164A (en) * | 1963-12-26 | 1967-09-05 | Sperry Rand Corp | Method of copper plating anodized aluminum |
US3377174A (en) * | 1963-10-24 | 1968-04-09 | Torigai Eiichi | Method and bath for chemically plating copper |
US3403035A (en) * | 1964-06-24 | 1968-09-24 | Process Res Company | Process for stabilizing autocatalytic metal plating solutions |
US3607317A (en) * | 1969-02-04 | 1971-09-21 | Photocircuits Corp | Ductility promoter and stabilizer for electroless copper plating baths |
US3853590A (en) * | 1969-08-20 | 1974-12-10 | Crown City Plating Co | Electroless plating solution and process |
US4036651A (en) * | 1974-02-26 | 1977-07-19 | Rca Corporation | Electroless copper plating bath |
FR2527833A1 (fr) * | 1982-05-28 | 1983-12-02 | Europ Composants Electron | Procede de depot de terminaisons metalliques sur un condensateur ceramique multicouches et condensateur ainsi obtenu |
US4460427A (en) * | 1981-09-21 | 1984-07-17 | E. I. Dupont De Nemours And Company | Process for the preparation of flexible circuits |
EP0152601A1 (de) * | 1984-02-04 | 1985-08-28 | Schering Aktiengesellschaft | Wässriges alkalisches Bad zur Chemischen Abscheidung von Kupfer oder Nickel |
US4548644A (en) * | 1982-09-28 | 1985-10-22 | Hitachi Chemical Company, Ltd. | Electroless copper deposition solution |
US4557762A (en) * | 1983-08-04 | 1985-12-10 | Hitachi Chemical Company | Electroless copper plating solution |
WO1988003181A1 (en) * | 1986-10-31 | 1988-05-05 | Kollmorgen Technologies Corporation | Method of consistently producing copper deposit on a substrate by electroless deposition which deposit is essentially free of fissures |
US4908242A (en) * | 1986-10-31 | 1990-03-13 | Kollmorgen Corporation | Method of consistently producing a copper deposit on a substrate by electroless deposition which deposit is essentially free of fissures |
US5786030A (en) * | 1996-11-12 | 1998-07-28 | Henkel Corporation | Spotting resistant gloss enhancement of autodeposition coating |
US20090032144A1 (en) * | 2007-08-03 | 2009-02-05 | Mcmillen Mark W | Pretreatment compositions and methods for coating a metal substrate |
US20090084682A1 (en) * | 2007-09-28 | 2009-04-02 | Ppg Industries Ohio, Inc. | Methods for coating a metal substrate and related coated metal substrates |
US20090238979A1 (en) * | 2008-03-21 | 2009-09-24 | William Decesare | Method of Applying Catalytic Solution for Use in Electroless Deposition |
US20100159258A1 (en) * | 2008-12-18 | 2010-06-24 | Ppg Industries Ohio, Inc. | Methods for passivating a metal substrate and related coated metal substrates |
US20130071680A1 (en) * | 2011-09-21 | 2013-03-21 | Fih (Hong Kong) Limited | Coated article and method for making same |
US9273399B2 (en) | 2013-03-15 | 2016-03-01 | Ppg Industries Ohio, Inc. | Pretreatment compositions and methods for coating a battery electrode |
CN106823469A (zh) * | 2017-01-10 | 2017-06-13 | 华南理工大学 | 无需低表面能物质修饰的超疏水超亲油铜网及其制备方法 |
US9942982B2 (en) | 1997-08-04 | 2018-04-10 | Continental Circuits, Llc | Electrical device with teeth joining layers and method for making the same |
EP3351657A1 (en) | 2017-01-23 | 2018-07-25 | Rohm and Haas Electronic Materials LLC | Electroless copper plating compositions |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8103174A (nl) * | 1981-07-02 | 1983-02-01 | Philips Nv | Werkwijze voor de vervaardiging van lagen en patronen van goud en van goudlegeringen op substraten, aldus vervaardigde produkten en de hiervoor toe te passen oplossingen. |
Citations (4)
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US2391289A (en) * | 1941-09-15 | 1945-12-18 | Jr John F Beaver | Bright copper plating |
US2874072A (en) * | 1956-09-17 | 1959-02-17 | Gen Electric | Autocatalytic copper plating process and solution |
US2938805A (en) * | 1958-03-31 | 1960-05-31 | Gen Electric | Process of stabilizing autocatalytic copper plating solutions |
US2956901A (en) * | 1958-08-06 | 1960-10-18 | Alpha Metal Lab Inc | Copper coating composition and method of coating |
-
1960
- 1960-05-03 US US26401A patent/US3095309A/en not_active Expired - Lifetime
-
1961
- 1961-01-27 DE DE1696312A patent/DE1696312C2/de not_active Expired
- 1961-03-23 CH CH345361A patent/CH413540A/de unknown
- 1961-03-25 ES ES266074A patent/ES266074A1/es not_active Expired
- 1961-04-13 DK DK152861AA patent/DK105901C/da active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2391289A (en) * | 1941-09-15 | 1945-12-18 | Jr John F Beaver | Bright copper plating |
US2874072A (en) * | 1956-09-17 | 1959-02-17 | Gen Electric | Autocatalytic copper plating process and solution |
US2938805A (en) * | 1958-03-31 | 1960-05-31 | Gen Electric | Process of stabilizing autocatalytic copper plating solutions |
US2956901A (en) * | 1958-08-06 | 1960-10-18 | Alpha Metal Lab Inc | Copper coating composition and method of coating |
Cited By (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3259559A (en) * | 1962-08-22 | 1966-07-05 | Day Company | Method for electroless copper plating |
US3321328A (en) * | 1962-11-15 | 1967-05-23 | Ibm | Coating of aluminum substrates with a magnetic material |
US3326700A (en) * | 1963-06-12 | 1967-06-20 | Rudolph J Zeblisky | Electroless copper plating |
US3306830A (en) * | 1963-06-13 | 1967-02-28 | Bell Telephone Labor Inc | Printed circuit boards and their fabrication |
US3269861A (en) * | 1963-06-21 | 1966-08-30 | Day Company | Method for electroless copper plating |
US3332860A (en) * | 1963-09-19 | 1967-07-25 | Basf Ag | Metallizing plastic surfaces |
US3377174A (en) * | 1963-10-24 | 1968-04-09 | Torigai Eiichi | Method and bath for chemically plating copper |
US3340164A (en) * | 1963-12-26 | 1967-09-05 | Sperry Rand Corp | Method of copper plating anodized aluminum |
US3403035A (en) * | 1964-06-24 | 1968-09-24 | Process Res Company | Process for stabilizing autocatalytic metal plating solutions |
US3322881A (en) * | 1964-08-19 | 1967-05-30 | Jr Frederick W Schneble | Multilayer printed circuit assemblies |
US3296012A (en) * | 1965-04-30 | 1967-01-03 | Corning Glass Works | Electroless copper plating on ceramic material |
US3607317A (en) * | 1969-02-04 | 1971-09-21 | Photocircuits Corp | Ductility promoter and stabilizer for electroless copper plating baths |
US3853590A (en) * | 1969-08-20 | 1974-12-10 | Crown City Plating Co | Electroless plating solution and process |
US4036651A (en) * | 1974-02-26 | 1977-07-19 | Rca Corporation | Electroless copper plating bath |
US4460427A (en) * | 1981-09-21 | 1984-07-17 | E. I. Dupont De Nemours And Company | Process for the preparation of flexible circuits |
FR2527833A1 (fr) * | 1982-05-28 | 1983-12-02 | Europ Composants Electron | Procede de depot de terminaisons metalliques sur un condensateur ceramique multicouches et condensateur ainsi obtenu |
US4548644A (en) * | 1982-09-28 | 1985-10-22 | Hitachi Chemical Company, Ltd. | Electroless copper deposition solution |
US4557762A (en) * | 1983-08-04 | 1985-12-10 | Hitachi Chemical Company | Electroless copper plating solution |
EP0152601A1 (de) * | 1984-02-04 | 1985-08-28 | Schering Aktiengesellschaft | Wässriges alkalisches Bad zur Chemischen Abscheidung von Kupfer oder Nickel |
US4720404A (en) * | 1984-02-04 | 1988-01-19 | Josif Culjkovic | Aqueous alkaline bath for the chemical deposition of copper, nickel, cobalt and their alloys |
WO1988003181A1 (en) * | 1986-10-31 | 1988-05-05 | Kollmorgen Technologies Corporation | Method of consistently producing copper deposit on a substrate by electroless deposition which deposit is essentially free of fissures |
US4908242A (en) * | 1986-10-31 | 1990-03-13 | Kollmorgen Corporation | Method of consistently producing a copper deposit on a substrate by electroless deposition which deposit is essentially free of fissures |
AU604284B2 (en) * | 1986-10-31 | 1990-12-13 | Amp-Akzo Corporation | Method of consistently producing copper deposit on a substrate by electroless deposition which deposit is essentially free of fissures |
US5786030A (en) * | 1996-11-12 | 1998-07-28 | Henkel Corporation | Spotting resistant gloss enhancement of autodeposition coating |
US9942982B2 (en) | 1997-08-04 | 2018-04-10 | Continental Circuits, Llc | Electrical device with teeth joining layers and method for making the same |
US8673091B2 (en) | 2007-08-03 | 2014-03-18 | Ppg Industries Ohio, Inc | Pretreatment compositions and methods for coating a metal substrate |
US20090032144A1 (en) * | 2007-08-03 | 2009-02-05 | Mcmillen Mark W | Pretreatment compositions and methods for coating a metal substrate |
US20090084682A1 (en) * | 2007-09-28 | 2009-04-02 | Ppg Industries Ohio, Inc. | Methods for coating a metal substrate and related coated metal substrates |
US9574093B2 (en) | 2007-09-28 | 2017-02-21 | Ppg Industries Ohio, Inc. | Methods for coating a metal substrate and related coated metal substrates |
US20090238979A1 (en) * | 2008-03-21 | 2009-09-24 | William Decesare | Method of Applying Catalytic Solution for Use in Electroless Deposition |
US20100159258A1 (en) * | 2008-12-18 | 2010-06-24 | Ppg Industries Ohio, Inc. | Methods for passivating a metal substrate and related coated metal substrates |
US8282801B2 (en) | 2008-12-18 | 2012-10-09 | Ppg Industries Ohio, Inc. | Methods for passivating a metal substrate and related coated metal substrates |
US20130071680A1 (en) * | 2011-09-21 | 2013-03-21 | Fih (Hong Kong) Limited | Coated article and method for making same |
US9273399B2 (en) | 2013-03-15 | 2016-03-01 | Ppg Industries Ohio, Inc. | Pretreatment compositions and methods for coating a battery electrode |
CN106823469A (zh) * | 2017-01-10 | 2017-06-13 | 华南理工大学 | 无需低表面能物质修饰的超疏水超亲油铜网及其制备方法 |
EP3351657A1 (en) | 2017-01-23 | 2018-07-25 | Rohm and Haas Electronic Materials LLC | Electroless copper plating compositions |
US10060034B2 (en) | 2017-01-23 | 2018-08-28 | Rohm And Haas Electronic Materials Llc | Electroless copper plating compositions |
Also Published As
Publication number | Publication date |
---|---|
DE1696312C2 (de) | 1979-08-16 |
DE1696312B2 (de) | 1971-07-15 |
DE1696312A1 (en)van) | 1971-07-15 |
CH413540A (de) | 1966-05-15 |
ES266074A1 (es) | 1961-06-16 |
DK105901C (da) | 1966-11-21 |
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