US2074281A - Method and apparatus for the production of metallic coatings on electrically nonconducting substances by the thermal vaporization of metals in vacuo - Google Patents

Method and apparatus for the production of metallic coatings on electrically nonconducting substances by the thermal vaporization of metals in vacuo Download PDF

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US2074281A
US2074281A US734041A US73404134A US2074281A US 2074281 A US2074281 A US 2074281A US 734041 A US734041 A US 734041A US 73404134 A US73404134 A US 73404134A US 2074281 A US2074281 A US 2074281A
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metals
vacuo
production
metallic coatings
metal
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US734041A
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Sommer Ludwig August
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/541Heating or cooling of the substrates

Description

March 16, 1937.
L. A. SOMMER 2,074,281 METHOD AND APPARATUS FOR THE PRODUCTION OF METALLIC COATINGS ON ELECTRICALLY NONCONDUCTING SUBSTANCES BY THE THERMAL VAPORIZATION OF METALS IN VACUO Filed July 6, 1954 O Q a y 3 9 43 4% lllwulllll 19' Patented Mar. 16, 1937 UNITED STATES PATENT OFFICE DUCTION STANCES BY THE OF METALLIC COATINGS ,ELECTRICALLY NONCONDUCTING ON SUB- THERMAL VAPORIZA- TION OF METALS IN VACUO Ludwig August" Sommer, Berlin-Dahlem, Germany Application July 6, 1934, Serial No. 734,041 In Germany July 13, 1933 3 Claims.
The invention relates to the production of metallic coatings on electrically non-conducting substances, such as paper, textile fabrics, leather, celluloid and the like by the thermal vaporization of metals in vacuo. For this purpose vacua of 3 x 10- to about 10- mm. of mercury have been employed. k
I have found that in the thermal vaporization of the coating metal and the deposition of the same on electrically non-conducting materials a substantial improvement in the metallic deposits is obtained in ahigh vacuum.
A vacuum of say 10- to 10- mm. of mercury is meant as a high vacuum in this case. The deposits obtained by thermal metallic vaporization in a high vacuum on electrically non-conducting materials of all kinds, such as paper, wood, linen, wool, cotton, silk, artificial silk, jute, hemp or other textile fabrics, glass. porcelain, earthenware, leather, hides and skins, artificial masses and so forth, are distinguished by greater uniformity, greater tenacity or adhesive power, chemical purity, and freedom from oxidation, good electrical conductivity and metallic high polish.
I have further found that these coatings obtained by thermal vaporization of metals in a high vacuum are very well adapted to serve as a basis for further metallic deposits obtained electrolytically.
The invention also comprises an apparatus specially designed for carrying out the said process and which is illustrated in an example of construction in the accompanying drawing. Further features of the invention will appear from the description of the apparatus.
The drawing shows a longitudinal section of a vacuum chamber, which in the construction illustrated is formed by a section of a seamless pipe I, both ends of which are capable of being tightlyclosed by covers 2 and 3. According to the invention, steel or a bronze free from pores is preferably employed as constructional material for the chamber, the walls inside, and if desired also outside, being-tinned (tin coating 4). This construction has proved to be particularly advantageous in enabling the high vacuum used in the chamber to be maintained.
The evacuation of the chamber is done through the pipe connection l6. On the bottom of the (Cl. ill-12.2)
chamber, a receptacle or vessel 5, consisting of insulating material or ceramic material, is arranged in known manner in the wall of which an electric resistance heater 6 is provided. The molten metal 1 is contained in the receptacle 5. 5
The web of material 8 to be metallized is slowly wound from one roller 9 on to another roller l0, and during this operation is carried past in the proximity of the opening of the receptacle 5.
According to the invention the material 8 to be 10 metallized is strongly cooled at the place on which the metal atoms impinge. In the construction illustrated in the drawing, the cooling is effected by the guide II for the web of material being formed by a receptacle which projects into the 15 chamber and is partly filled with liquid air l2l Metallic deposits which are particularly dense and adherent are obtained according to the invention by an acceleration being imparted to the vaporized metal atoms on their way from the 0 melted mass 1 to the web 8. This is effected by an electrode, for instance, an annular electrode l3, being inserted between the receptacle 5 and the material. The opposite electrode I4 is situated on the bottom of the receptacle 5. By applying a high voltage, of, for example, several thousand volts, which is supplied from the source of current IS, a difference in potential is created between the melted mass 7 and the annular electrode i3, which diiference of potential on the positive charging of the annular electrode and negative charging of the melted metal causes a great acceleration of the vaporized negatively charged metal atoms. Consequently, the vaporized metal strikes the material to be metallized 35 with great force and metallic coatings which are particularly firmly adherent and dense are produced.
I claim:-
1. A process for producing metallic coatings which consists in melting a metal, evaporating said metal under a high vacuum of about 10- mm. or below of mercury, creating a potential difference between a positive electrode arranged above the surface of the metal and a negative electrode connected to the metal, maintaining the said potential difference for accelerating the ions of the metal vapour and collecting the metal vapour under the said high vacuum on a surface.
2. An apparatus for producing metallic coatmeans for feeding a surface to be metallized over the base end of the flask, means for melting a metal, a positive electrode arranged between the surface of the metal to be melted and the base end of the flask, a negative electrode connected to the metal to be melted, and means for placing the vessel under a high vacuum.
LUDWIG AUGUST SOMMER.
US734041A 1933-07-13 1934-07-06 Method and apparatus for the production of metallic coatings on electrically nonconducting substances by the thermal vaporization of metals in vacuo Expired - Lifetime US2074281A (en)

Applications Claiming Priority (1)

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DE432466X 1933-07-13

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Cited By (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE744768C (en) * 1938-07-17 1944-01-25 Fernseh Gmbh Process for the vapor deposition of metals on several photo and / or secondary emission electrodes to be treated differently located in the same vessel and arrangement for its implementation
US2416211A (en) * 1943-09-15 1947-02-18 American Optical Corp Apparatus for coating articles
US2422609A (en) * 1936-12-10 1947-06-17 Auwarter Max Production of metallic surface layers
US2435997A (en) * 1943-11-06 1948-02-17 American Optical Corp Apparatus for vapor coating of large surfaces
US2439983A (en) * 1944-01-15 1948-04-20 Libbey Owens Ford Glass Co Means for thermally evaporating various materials in vacuums for coating purposes
US2440135A (en) * 1944-08-04 1948-04-20 Alexander Paul Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers
US2441217A (en) * 1945-07-09 1948-05-11 Us Sec War Process of coating cathode-ray tube screens
US2443756A (en) * 1942-12-26 1948-06-22 Brush Dev Co Magnetic material
US2503571A (en) * 1947-05-02 1950-04-11 Bell Telephone Labor Inc Apparatus for coating surfaces by thermal vaporization at atmospheric pressure
US2545606A (en) * 1946-01-07 1951-03-20 Burris B Cunningham Method of coating with plutonium acetylacetonate and coated product
US2556132A (en) * 1948-10-28 1951-06-05 Chrysler Corp Strain gauge
US2562770A (en) * 1946-03-23 1951-07-31 Electro Mechanical Res Inc Thermal receiver and method for producing same
US2562182A (en) * 1948-08-04 1951-07-31 Nat Res Corp Metal coating by vapor deposition
US2621624A (en) * 1944-01-29 1952-12-16 Chilowsky Constantin Apparatus for manufacture of piezo-electric elements
US2635579A (en) * 1949-12-01 1953-04-21 Nat Res Corp Coating by evaporating metal under vacuum
US2639490A (en) * 1948-08-12 1953-05-26 Joseph B Brennan Formation of metal strip under controlled pressures
US2665228A (en) * 1950-07-19 1954-01-05 Nat Res Corp Apparatus and process for vapor coating
US2665320A (en) * 1949-09-22 1954-01-05 Nat Res Corp Metal vaporizing crucible
US2753278A (en) * 1951-04-14 1956-07-03 Haloid Co Method for the production of a xerographic plate
US2753800A (en) * 1952-03-24 1956-07-10 Ohio Commw Eng Co Production of printing plates
US2879739A (en) * 1955-01-13 1959-03-31 Nat Res Corp Vaporized metal coating apparatus
US2939943A (en) * 1954-07-27 1960-06-07 Vac Anstalt Process and device for vaporizing electrically conductive substances, preferably metals, in vacuo
US2968583A (en) * 1957-04-25 1961-01-17 Western Electric Co Capacitor sections and methods of making the same
US2998376A (en) * 1956-10-29 1961-08-29 Temescal Metallurgical Corp High-vacuum evaporator
US3117210A (en) * 1959-07-13 1964-01-07 Wisconsin Alumni Res Found Apparatus for evaporating materials
US3213825A (en) * 1959-12-31 1965-10-26 Trw Inc Vacuum deposition apparatus
US3310424A (en) * 1963-05-14 1967-03-21 Litton Systems Inc Method for providing an insulating film on a substrate
US3328192A (en) * 1963-07-31 1967-06-27 Jack A Soules Method of producing optical gratings
US3378393A (en) * 1964-11-19 1968-04-16 Gen Electric Evaporative application of metal coatings to diamond
US4374162A (en) * 1975-07-15 1983-02-15 Futaba Denshi Kogyo Kabushiki Kaisha Thin-film deposition
US5300165A (en) * 1989-04-14 1994-04-05 Katayama Special Industries, Ltd. Method for manufacturing a metallic porous sheet
US6364247B1 (en) * 2000-01-31 2002-04-02 David T. Polkinghorne Pneumatic flotation device for continuous web processing and method of making the pneumatic flotation device
US6461667B1 (en) * 2000-04-04 2002-10-08 Eastman Kodak Company Apparatus and method for vapor depositing lubricant coating on a web

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE976068C (en) * 1941-10-28 1963-02-07 Siemens Ag Process for the continuous covering of tape or wire-like structures using the thermal vapor deposition process
DE938644C (en) * 1953-07-03 1956-02-02 Hubert Mansfeld Process for applying light-sensitive materials to the support
US2873208A (en) * 1954-09-27 1959-02-10 Philips Corp Deposition of refractory metals and alloys thereof
DE1036481B (en) * 1955-12-30 1958-08-14 Ohio Commw Eng Co Method and device for the production of a metal coating on glass raw threads
DE3172124D1 (en) * 1980-06-10 1985-10-10 Matsushita Electric Ind Co Ltd A method of vacuum depositing a layer on a plastics film substrate
US6214772B1 (en) 1996-10-23 2001-04-10 Fujikura Ltd. Process for preparing polycrystalline thin film, process for preparing oxide superconductor, and apparatus therefor

Cited By (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2422609A (en) * 1936-12-10 1947-06-17 Auwarter Max Production of metallic surface layers
DE744768C (en) * 1938-07-17 1944-01-25 Fernseh Gmbh Process for the vapor deposition of metals on several photo and / or secondary emission electrodes to be treated differently located in the same vessel and arrangement for its implementation
US2443756A (en) * 1942-12-26 1948-06-22 Brush Dev Co Magnetic material
US2416211A (en) * 1943-09-15 1947-02-18 American Optical Corp Apparatus for coating articles
US2435997A (en) * 1943-11-06 1948-02-17 American Optical Corp Apparatus for vapor coating of large surfaces
US2439983A (en) * 1944-01-15 1948-04-20 Libbey Owens Ford Glass Co Means for thermally evaporating various materials in vacuums for coating purposes
US2621624A (en) * 1944-01-29 1952-12-16 Chilowsky Constantin Apparatus for manufacture of piezo-electric elements
US2440135A (en) * 1944-08-04 1948-04-20 Alexander Paul Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers
US2441217A (en) * 1945-07-09 1948-05-11 Us Sec War Process of coating cathode-ray tube screens
US2545606A (en) * 1946-01-07 1951-03-20 Burris B Cunningham Method of coating with plutonium acetylacetonate and coated product
US2562770A (en) * 1946-03-23 1951-07-31 Electro Mechanical Res Inc Thermal receiver and method for producing same
US2503571A (en) * 1947-05-02 1950-04-11 Bell Telephone Labor Inc Apparatus for coating surfaces by thermal vaporization at atmospheric pressure
US2562182A (en) * 1948-08-04 1951-07-31 Nat Res Corp Metal coating by vapor deposition
US2639490A (en) * 1948-08-12 1953-05-26 Joseph B Brennan Formation of metal strip under controlled pressures
US2556132A (en) * 1948-10-28 1951-06-05 Chrysler Corp Strain gauge
US2665320A (en) * 1949-09-22 1954-01-05 Nat Res Corp Metal vaporizing crucible
US2635579A (en) * 1949-12-01 1953-04-21 Nat Res Corp Coating by evaporating metal under vacuum
US2665228A (en) * 1950-07-19 1954-01-05 Nat Res Corp Apparatus and process for vapor coating
US2753278A (en) * 1951-04-14 1956-07-03 Haloid Co Method for the production of a xerographic plate
US2753800A (en) * 1952-03-24 1956-07-10 Ohio Commw Eng Co Production of printing plates
US2939943A (en) * 1954-07-27 1960-06-07 Vac Anstalt Process and device for vaporizing electrically conductive substances, preferably metals, in vacuo
US2879739A (en) * 1955-01-13 1959-03-31 Nat Res Corp Vaporized metal coating apparatus
US2998376A (en) * 1956-10-29 1961-08-29 Temescal Metallurgical Corp High-vacuum evaporator
US2968583A (en) * 1957-04-25 1961-01-17 Western Electric Co Capacitor sections and methods of making the same
US3117210A (en) * 1959-07-13 1964-01-07 Wisconsin Alumni Res Found Apparatus for evaporating materials
US3213825A (en) * 1959-12-31 1965-10-26 Trw Inc Vacuum deposition apparatus
US3310424A (en) * 1963-05-14 1967-03-21 Litton Systems Inc Method for providing an insulating film on a substrate
US3328192A (en) * 1963-07-31 1967-06-27 Jack A Soules Method of producing optical gratings
US3378393A (en) * 1964-11-19 1968-04-16 Gen Electric Evaporative application of metal coatings to diamond
US4374162A (en) * 1975-07-15 1983-02-15 Futaba Denshi Kogyo Kabushiki Kaisha Thin-film deposition
US5300165A (en) * 1989-04-14 1994-04-05 Katayama Special Industries, Ltd. Method for manufacturing a metallic porous sheet
US6364247B1 (en) * 2000-01-31 2002-04-02 David T. Polkinghorne Pneumatic flotation device for continuous web processing and method of making the pneumatic flotation device
US6461667B1 (en) * 2000-04-04 2002-10-08 Eastman Kodak Company Apparatus and method for vapor depositing lubricant coating on a web

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GB432466A (en) 1935-07-26
FR775783A (en) 1935-01-09

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