US20260048769A1 - Traveling vehicle system - Google Patents

Traveling vehicle system

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Publication number
US20260048769A1
US20260048769A1 US19/103,678 US202319103678A US2026048769A1 US 20260048769 A1 US20260048769 A1 US 20260048769A1 US 202319103678 A US202319103678 A US 202319103678A US 2026048769 A1 US2026048769 A1 US 2026048769A1
Authority
US
United States
Prior art keywords
traveling vehicle
traveling
track
movable block
branching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
US19/103,678
Other languages
English (en)
Inventor
Makoto Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of US20260048769A1 publication Critical patent/US20260048769A1/en
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • B61B13/12—Systems with propulsion devices between or alongside the rails, e.g. pneumatic systems
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3221—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00—Other railway systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3202—Mechanical details, e.g. rollers or belts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3218—Conveying cassettes, containers or carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Definitions

  • This disclosure relates to a traveling vehicle system.
  • An overhead traveling vehicle including a traveling unit capable of traveling along a track is known.
  • maintenance such as inspecting and cleaning the traveling unit needs to be performed periodically.
  • a part on which maintenance is to be performed is a traveling unit that travels inside the track, the part of the maintenance needs to be exposed from the track.
  • a power feeder configured to supply power to the traveling unit and magnetic plates are disposed on the track, if the track is configured such that the part of the maintenance is exposed as described above, the traveling unit cannot be self-propellable.
  • International Publication No. WO 2020/202856 discloses a traveling vehicle system provided with a moving mechanism configured to move a traveling vehicle along a track. With this traveling vehicle system, the traveling vehicle can be moved along a track where the traveling vehicle cannot be self-propellable.
  • the above-described conventional traveling vehicle system has a complicated structure because it includes a mechanism configured to sandwich a traveling unit from front and back to fit various sizes of traveling vehicles and a mechanism configured to move the traveling unit in a state in which the traveling unit is sandwiched.
  • a traveling vehicle system includes: a traveling track forming a self-propelling section where a traveling vehicle is self-propellable; a working track forming a non-self-propelling section where the traveling vehicle is not self-propellable; a traveling vehicle configured to travel along the traveling track; and a moving unit configured to move the traveling vehicle in one direction in the non-self-propelling section.
  • the moving unit includes a moving mechanism configured to move a movable block in the one direction.
  • the traveling vehicle includes one or more engagement parts capable of being engaged with the movable block, and a switching mechanism configured to switch a position of the engagement part between a first position at which the engagement parts are engaged with the movable block and a second position at which the engagement parts are separated from the movable block.
  • the moving mechanism moves the traveling vehicle by moving the movable block in the one direction with the engagement parts engaged.
  • the movable block and the traveling vehicle can be moved together simply by moving the movable block with which the engagement part included in the traveling vehicle has been engaged.
  • the moving mechanism only needs to move the movable block in the one direction, and the configuration thereof can be simplified.
  • the configuration in the moving mechanism can be simplified. In other words, in the traveling vehicle system thus configured, the traveling vehicle can be moved with a simple configuration on a working track where the traveling vehicle cannot be self-propellable.
  • the moving mechanism may be a linear motion mechanism including a screw shaft and a driver. With this configuration, the movable block can be moved in the one direction with a simple configuration.
  • the engagement parts may be arranged in two or more rows in the one direction at an interval equal to or shorter than a maximum movement distance of the movable block in the linear motion mechanism, and the moving mechanism may engage one of the engagement parts with the movable block to move the traveling vehicle in the one direction and may then engage another of the engagement parts disposed downstream of the one of the engagement parts in the one direction with the movable block to move the traveling vehicle in the one direction.
  • the traveling vehicle can be moved beyond the movable distance of the movable block. This can reduce the size of the moving mechanism in the moving direction of the traveling vehicle.
  • the traveling track may include a branching section, and a plurality of guides configured to guide the traveling vehicle in respective directions branching at the branching section, and the engagement parts may be branching rollers configured to switch the traveling direction of the traveling vehicle at the branching section by selectively coming into contact with each of the guides at the branching section.
  • the moving mechanism may be supported by a support member attached to the working track.
  • the working track may be suspended from a trestle installed on a ceiling or a floor of a building, and the traveling vehicle may be an overhead traveling vehicle configured to transport an article by traveling along the traveling track.
  • the traveling vehicle that a worker working while standing on the floor of the building cannot access can be moved. This is highly effective because it can save time and effort for the worker to prepare a stepladder or the like when manually moving the traveling vehicle.
  • the traveling vehicle may include a linear motor configured to travel by magnetic force generated between the linear motor and a magnetic plate provided in the traveling track, and the magnetic plate does not have to be provided in the working track.
  • the traveling vehicle can be moved in a non-self-propelling section where the magnetic plate is not provided.
  • a top surface portion on which the magnetic plate is provided in the self-propelling section for the traveling vehicle can be made open, and thus maintenance on an upper portion of the traveling unit can be performed easily.
  • a power feeder configured to supply electricity to the traveling vehicle may be disposed in the traveling track, and the power feeder does not have to be provided in the working track. With this configuration, the traveling vehicle can be moved in the non-self-propelling section where the power feeder is not provided.
  • the traveling vehicle On the working track on which the traveling vehicle cannot be self-propellable, the traveling vehicle can be moved with a simple configuration.
  • FIG. 1 is a schematic plan view illustrating a traveling vehicle system according to an embodiment.
  • FIG. 2 is a schematic front view of a traveling vehicle in FIG. 1 when viewed from a traveling direction.
  • FIG. 3 is a perspective view illustrating a working track in FIG. 1 .
  • FIG. 4 is a sectional view illustrating the working track in FIG. 3 and a traveling unit of the traveling vehicle.
  • FIG. 5 (A) to 5 (E) are diagrams illustrating an example of operation of a moving unit when it moves the traveling vehicle.
  • FIG. 6 (A) to 6 (D) are diagrams illustrating another example of the operation of the moving unit when it moves the traveling vehicle.
  • FIG. 7 (A) to 7 (C) are diagrams illustrating another example of the operation of the moving unit when it moves the traveling vehicle.
  • a traveling vehicle system 1 is a system for transporting an article 10 between placement sections 9 and 9 by using an overhead traveling vehicle 6 (hereinafter referred to as traveling vehicle 6 ) movable along a traveling track 4 .
  • the article 10 include a front opening unified pod (FOUP) storing a plurality of semiconductor wafers, a container storing a glass substrate, a container such as a reticle pod, and common parts.
  • the traveling vehicle system 1 includes the traveling track 4 , a plurality of the traveling vehicles 6 , a plurality of the placement sections 9 , a working track 41 , and a moving unit 60 .
  • the traveling track 4 is laid, for example, in the vicinity of a ceiling that is a space above the worker's head.
  • the traveling track 4 is, for example, suspended from the ceiling.
  • the traveling track 4 is a predetermined traveling path for the traveling vehicles 6 to travel.
  • the traveling track 4 is supported by struts 40 A and 40 A.
  • the traveling track 4 of the traveling vehicle system 1 includes: a main line 4 A on which the traveling vehicle 6 travels around a predetermined area in one direction; and a retreat section 4 B configured to guide the traveling vehicle 6 to the working track 41 to which a working area 160 for maintenance of the traveling vehicle 6 is provided. In the retreat section 4 B also, the traveling vehicle 6 moves in the one direction set in advance.
  • the traveling track 4 includes: a tubular rail body 40 including a pair of lower surface portions 40 B and 40 B, a pair of side surface portions 40 C and 40 C, and a top surface portion 40 D; a power feeder 40 E; and a magnetic plate 40 F.
  • the rail body 40 accommodates (contains) a traveling unit 50 of the traveling vehicle 6 .
  • the lower surface portions 40 B extend in the traveling direction of the traveling vehicle 6 and form a lower surface of the rail body 40 .
  • the lower surface portions 40 B are plate-like members to allow traveling rollers 51 of the traveling vehicle 6 to roll.
  • the side surface portions 40 C extend in the traveling direction of the traveling vehicle 6 and form side surfaces of the rail body 40 .
  • the top surface portion 40 D extends in the traveling direction of the traveling vehicle 6 and forms an upper surface of the rail body 40 .
  • the power feeder 40 E is a part configured to supply electricity to power feed cores 57 of the traveling vehicle 6 and transmit and receive a signal to and from the power feed cores 57 .
  • the power feeder 40 E is fixed to each of the pair of side surface portions 40 C and 40 C and extends along the traveling direction.
  • the power feeder 40 E supplies electricity to the power feed cores 57 in a contactless manner.
  • the magnetic plate 40 F causes a linear DC motor (LDM) 59 of the traveling vehicle 6 to produce magnetic force for traveling or stopping.
  • LDM linear DC motor
  • the magnetic plate 40 F is fixed to the top surface portion 40 D and extends along the traveling direction.
  • the traveling vehicle 6 travels along the traveling track 4 and transports the article 10 .
  • the wording “the traveling vehicle 6 travels on the traveling track 4 ” means that the traveling rollers 51 of the traveling vehicle 6 roll on the lower surface portions 40 B of the traveling track 4 .
  • the traveling vehicle 6 is configured to be able to transfer the article 10 .
  • the traveling vehicle 6 is an automated overhead traveling vehicle.
  • the number of traveling vehicles 6 included in the traveling vehicle system 1 is not particularly limited and is more than one.
  • Each traveling vehicle 6 includes a main body 7 , a traveling unit 50 , and a traveling vehicle controller 35 .
  • the main body 7 includes a body frame 22 , a lateral feed unit 24 , a ⁇ drive 26 , an elevation driver 28 , an elevation stage 30 , and a cover 33 .
  • the body frame 22 is connected to the traveling unit 50 and supports the lateral feed unit 24 , the 0 drive 26 , the elevation driver 28 , the elevation stage 30 , and the covers 33 .
  • the lateral feed unit 24 laterally feeds the ⁇ drive 26 , the elevation driver 28 , and the elevation stage 30 collectively in a direction perpendicular to the traveling direction of the traveling track 4 .
  • the ⁇ drive 26 turns at least one of the elevation driver 28 and the elevation stage 30 within a predetermined angle range in a horizontal plane.
  • the elevation driver 28 elevates and lowers the elevation stage 30 by reeling or unreeling a suspension member such as a wire, a rope, and a belt.
  • the elevation stage 30 has a chuck and can grip or release the article 10 .
  • a pair of the covers 33 are provided, for example, on the front and the back of the traveling vehicle 6 in the traveling direction.
  • the covers 33 extend and retract not-illustrated claws or the like and prevent the article 10 from dropping during transportation.
  • the traveling unit 50 allows the traveling vehicle 6 to travel along the traveling track 4 .
  • the traveling unit 50 includes two bodies 50 A and 50 B as illustrated in FIG. 5 (A) to 5 (E) , and the two bodies 50 A and 50 B are connected to each other.
  • Each of the two bodies 50 A and 50 B of the traveling unit 50 includes traveling rollers 51 , side rollers 52 , branching rollers (engagement parts) 53 , auxiliary rollers 54 , slanted rollers 55 , power feed cores 57 , and the LDM 59 , as illustrated in FIG. 4 .
  • the branching rollers 53 , the auxiliary rollers 54 , and the slanted roller 55 are not illustrated.
  • the traveling rollers 51 are a pair of rollers each including an outer wheel 51 A as a traveling wheel and an inner wheel 51 B as a traveling auxiliary wheel.
  • the traveling rollers 51 are disposed on the left and right ends at the front and the back of the traveling unit 50 .
  • the traveling rollers 51 roll on the pair of lower surface portions 40 B, 40 B (or lower support portions 43 in FIG. 4 described later) of the traveling track 4 .
  • the side rollers 52 are disposed to sandwich each of the outer wheels 51 A of the traveling rollers 51 in the front-back direction.
  • the side rollers 52 are provided to be able to come into contact with the side surface portions 40 C of the traveling track 4 (or side support portions 45 in FIG. 4 described later).
  • the branching rollers 53 are provided to switch the traveling vehicle 6 (traveling unit 50 ) to travel straight ahead or branch off at a branching section of the traveling track 4 . More specifically, the branching roller 53 are selectively brought (caused to come) into contact with a guide member provided at the branching section to be guided, whereby the traveling direction of the traveling vehicle 6 is switched.
  • Four branching rollers 53 are provided for one body 50 A ( 50 B) (see FIG. 6 (A) to 6 (D) ).
  • the branching rollers 53 are arranged in two or more rows in the traveling direction (one direction) of the traveling vehicle 6 at an interval equal to or shorter than a maximum movement distance D (see FIG. 3 ) of the movable block 61 in the moving mechanism 63 .
  • the branching rollers 53 that can be engaged with the movable block 61 are the four branching rollers 53 arranged on the left side of the traveling vehicle 6 .
  • the branching rollers 53 are provided to be movable in the left-right direction by a switching mechanism 53 C.
  • the position of the branching rollers 53 is switched between a first position (see FIG. 6 (B) ) at which they are engaged with the movable block 61 described later in detail and a second position (see FIG. 6 (A) ) at which they are separated from the movable block 61 .
  • Each of the bodies 50 A and 50 B is provided with the switching mechanism 53 C.
  • Each of the switching mechanisms 53 C includes a support member 53 A and a roller driver 53 B.
  • the support member 53 A supports the four branching rollers 53 and is provided to be movable in the left-right direction (width direction).
  • the roller driver 53 B moves the support member 53 A in the left-right direction.
  • the switching mechanism 53 C moves the four branching rollers 53 together in the left-right direction by moving the support member 53 A in the left-right direction.
  • the driving of the roller driver 53 B is controlled by the traveling vehicle controller 35
  • the auxiliary rollers 54 constitute groups, each including a set of three rollers, provided at the front and the back of the traveling unit 50 .
  • the auxiliary rollers 54 are provided to prevent the LDMs 59 , the power feed cores 57 , and the like from coming into contact with the magnetic plate 40 F disposed on the upper surface of the traveling track 4 when the traveling unit 50 tilts back and forth during traveling due to, for example, acceleration/deceleration.
  • the slanted rollers 55 are provided at four corners of the LDMs 59 .
  • the slanted rollers 55 are disposed in a manner slanted from the front-back direction.
  • the slanted rollers 55 are provided to prevent tilting due to centrifugal force when the traveling unit 50 travels at a curve section.
  • the power feed cores 57 are disposed at the front and the back of the traveling unit 50 to sandwich the LDM 59 in the left-right direction. Contactless power feeding and contactless transmission/reception of a variety of signals are performed between each power feed core 57 and the corresponding power feeder 40 E disposed at the traveling track 4 and the working track 41 .
  • the power feed cores 57 exchange a signal with the traveling vehicle controller 35 .
  • the LDMs 59 are provided at the front and the back of the traveling unit 50 . Each LDM 59 uses an electromagnet to produce magnetic force for traveling or stopping between the LDM 59 and the magnetic plate 40 F disposed on the upper surface of the traveling track 4 .
  • the placement sections 9 are arranged along the traveling track 4 and provided at positions where the article 10 can be delivered to and from the traveling vehicle 6 .
  • the placement sections 9 each include a buffer and a delivery port.
  • the buffer is a placement section on which the article 10 is temporarily placed.
  • the buffer is a placement section on which the article 10 is temporarily placed when the article 10 transported by the traveling vehicle 6 cannot be transferred to a target delivery port, for example, for the reason that another article 10 has been placed on the target delivery port.
  • the delivery port is, for example, a placement section for delivering the article 10 to and from a semiconductor processing device (not illustrated) such as a cleaning device, a deposition device, a lithography device, an etching device, a thermal treatment device, and a planarization device.
  • a semiconductor processing device such as a cleaning device, a deposition device, a lithography device, an etching device, a thermal treatment device, and a planarization device.
  • the processing device is not limited to a specific device and may be a variety of devices.
  • the placement sections 9 are arranged to the side of the traveling track 4 .
  • the traveling vehicle 6 delivers an article 10 to and from a placement section 9 by causing the lateral feed unit 24 to laterally feed the elevation driver 28 or the like and by slightly elevating and lowering the elevation stage 30 .
  • the placement sections 9 may be arranged immediately below the traveling track 4 . In this case, the traveling vehicle 6 delivers the article 10 to and from the placement section 9 by elevating and lowering the elevation stage 30 .
  • the traveling vehicle controller 35 is an electronic control unit including a central processing unit (CPU), a read only memory (ROM), and a random access memory (RAM).
  • the traveling vehicle controller 35 controls various operations in the traveling vehicle 6 . Specifically, the traveling vehicle controller 35 controls the traveling unit 50 , the lateral feed unit 24 , the ⁇ drive 26 , the elevation driver 28 , the elevation stage 30 , and the roller driver 53 B.
  • the traveling vehicle controller 35 can be configured, for example, as software that is a program stored in the ROM, loaded into the RAM, and executed by the CPU.
  • the traveling vehicle controller 35 may be configured as hardware with electronic circuitry, for example.
  • the traveling vehicle controller 35 communicates with the area controller 90 , using the power feeder 40 E such as feeder lines provided in the traveling track 4 .
  • the area controller 90 is an electronic control unit including a CPU, a ROM, a RAM, and the like.
  • the area controller 90 can be configured, for example, as software that is a program stored in the ROM, loaded into the RAM, and executed by the CPU.
  • the area controller 90 may be configured as hardware with, for example, electronic circuitry.
  • the area controller 90 transmits a transportation command to the traveling vehicle 6 to transport the article 10 .
  • the working area 160 is an area that is provided in a part of the retreat section 4 B and in which maintenance of the traveling rollers 51 , the power feed cores 57 , and the like of the traveling unit 50 included in the traveling vehicle 6 is performed.
  • the working track 41 see FIG. 3
  • the moving unit 60 see FIG. 5 (A) to 5 (E) and 6 (A) to 6 (D) ) are provided.
  • the working track 41 extends in one direction (hereinafter referred to as “extending direction”) such that both ends thereof are continuous to the traveling tracks 4 and 4 and, as illustrated in FIGS. 3 and 4 , forms openings 47 to expose at least a portion (e.g., the power feed cores 57 ) of the traveling unit 50 .
  • the side surface portions 40 C and the top surface portion 40 D included in the traveling track 4 are not provided, and the magnetic plate 40 F provided on the top surface portion 40 D is not provided either.
  • the traveling vehicle 6 cannot be self-propellable on the working track 41 .
  • the working track 41 forms a non-self-propelling section where the traveling vehicle 6 cannot be self-propellable. It can be said that the traveling track 4 forms a self-propelling section where the traveling vehicle 6 can be self-propellable.
  • the working track 41 includes frames 42 disposed at both ends of the working track 41 , a pair of the lower support portions 43 and 43 , a pair of the side support portions 45 and 45 , and the power feeders 40 E.
  • Each frame 42 includes a pair of pillars 42 A and 42 A and a horizontal portion 42 B.
  • the pair of pillars 42 A and 42 A are columnar members disposed to be opposed to each other in the left-right direction and extending in the vertical direction.
  • the horizontal portion 42 B is fixed to the ceiling with a bracket (not illustrated) and a strut (not illustrated) interposed therebetween.
  • the horizontal portion 42 B is a columnar member connecting the pair of pillars 42 A and 42 A at the upper ends of the pair of pillars 42 A and 42 A.
  • the lower support portions 43 support the traveling unit 50 from below. More specifically, the lower support portions 43 are members on which the inner wheels 51 B of the traveling rollers 51 of the traveling vehicle 6 roll and travel. The lower support portions 43 are fixed to the lower ends of the pillars 42 A of the frame 42 . The lower support portions 43 are formed such that first portions 43 B facing the inner wheels 51 B are positioned above second portions 43 A facing the outer wheels 51 A in the vertical direction. The first portions 43 B of the lower support portions 43 (i.e., the rolling surfaces of the inner wheels 51 B) are connected to the traveling track 4 to form planes on the same level as (be flush with) the upper surfaces of the lower surface portions 40 B (see FIG. 2 ) of the traveling track 4 at locations connected thereto.
  • the side support portions 45 are members with which the side rollers 52 of the traveling vehicle 6 are in contact.
  • the side support portions 45 are laid over between the pair of frames 42 and 42 .
  • the power feeders 40 E are laid over between the pair of frames 42 and 42 and are disposed in the openings 47 on the sides of the working track 41 .
  • the power feeders 40 E provided in the working track 41 are connected to the power feeders 40 E provided in the traveling track 4 .
  • the traveling vehicle 6 cannot be self-propellable but can receive supply of electricity.
  • the moving unit 60 moves the traveling vehicle 6 along the extending direction (one direction) of the working track 41 that is a non-self-propelling section. To both ends of the working track 41 , the traveling tracks 4 and 4 are connected. The moving unit 60 moves the traveling vehicle 6 , which cannot be self-propellable, from one traveling track 4 to the other traveling track 4 .
  • the moving unit 60 includes a movable block 61 and a moving mechanism 63 .
  • the movable block 61 is a member with which a branching roller 53 can be engaged. More specifically, the movable block 61 has a recess 61 A into which the branching roller 53 can enter (engage).
  • the moving unit 60 moves the movable block 61 with the branching roller 53 engaged in the recess 61 A, thereby moving the branching roller 53 and consequently the traveling unit 50 together with the movable block 61 .
  • the moving mechanism 63 is a mechanism configured to move the movable block 61 in the extending direction of the working track 41 .
  • the moving mechanism 63 is a linear motion mechanism (ball screw) including a screw shaft 63 A, a nut 63 B, a shaft driver 63 C, and slide rails 63 D.
  • the screw shaft 63 A is a long member having a thread groove formed on its outer circumference and extending in one direction, one end portion thereof is connected to the shaft driver 63 C and the other end portion is supported by a bearing 63 E.
  • the screw shaft 63 A is disposed such that the extending direction thereof is substantially parallel to the extending direction of the working track 41 .
  • the nut 63 B is a member that is screwed into the thread groove of the screw shaft 63 A.
  • the nut 63 B moves along the extending direction of the screw shaft 63 A, that is, the extending direction of the working track 41 , as the screw shaft 63 A is rotated.
  • the nut 63 B is supported to be slidable on the slide rails 63 D.
  • the shaft driver 63 C is a motor, and the rotating shaft thereof is connected to the screw shaft 63 A.
  • the driving of the shaft driver 63 C is controlled by the area controller 90 .
  • the slide rails 63 D support a portion of the nut 63 B from below slidably along the extending direction of working track 41 .
  • the moving mechanism 63 is disposed on one of the pair of lower support portions 43 and 43 , and is disposed in a manner supported from below by the lower support portion (support member) 43 on the left.
  • the moving mechanism 63 is disposed in a part of the lower support portions 43 supporting the traveling vehicle 6 from below.
  • a support member specifically for supporting the moving mechanism 63 may be attached to the pair of frames 42 and 42 , for example, and the moving mechanism 63 may be supported by this support member.
  • the lower support portion 43 to which the moving mechanism 63 is provided may be provided with a cleaning device configured to clean the traveling vehicle 6 and maintenance equipment such as a camera for inspecting various parts of the traveling vehicle 6 .
  • the traveling vehicle 6 arrives at the working track 41 in response to a command, from the area controller 90 , to move to the working area 160 (working track 41 ).
  • the magnetic plate 40 F is not provided in the working track 41 , but the traveling vehicle 6 can travel if at least a part of one of the two bodies 50 A and 50 B is in a position where it overlaps the magnetic plate 40 F of the traveling track 4 .
  • the traveling vehicle 6 stops in a state in which, for example, one body 50 A has entered the working track 41 .
  • the movable block 61 is waiting at a position on the side of the traveling vehicle 6 that has stopped in the state in which one body 50 A has entered the working track 41 . More specifically, the movable block 61 is waiting at the side of a branching roller 53 in the front row of the traveling vehicle 6 .
  • the traveling vehicle 6 drives the roller driver 53 B of each switching mechanism 53 C to move the corresponding support member 53 A to the left.
  • the position of the branching roller 53 is switched from the second position at which the branching roller 53 is separated from the movable block 61 to the first position at which the branching roller 53 is engaged with the movable block 61 . Consequently, the branching roller 53 is engaged with the movable block 61 .
  • the moving mechanism 63 moves the movable block 61 , with which the branching roller 53 included in the traveling vehicle 6 has been engaged, in the extending direction of the working track 41 (one direction), thereby moving the traveling vehicle 6 together.
  • the moving mechanism 63 moves them to, for example, a predetermined position of the working track 41 .
  • the maintenance equipment described above is provided at the predetermined position, and predetermined maintenance is performed on the traveling vehicle 6 .
  • the moving mechanism 63 then moves the movable block 61 to an end portion of the moving mechanism 63 in the extending direction as illustrated in FIG. 5 (C) .
  • the traveling vehicle 6 drives the roller driver 53 B of the switching mechanism 53 C to move the support member 53 A to the right.
  • the position of the branching roller 53 is switched from the first position to the second position. Consequently, the branching roller 53 is separated from the movable block 61 as illustrated in FIG. 6 (D) .
  • the moving mechanism 63 then moves the movable block 61 in the direction opposite to the moving direction of the traveling vehicle 6 and stops it on the side of a branching roller 53 disposed at the backmost row of the traveling vehicle 6 , as illustrated in FIG. 5 (D) .
  • the traveling vehicle 6 drives the roller driver 53 B of the switching mechanism 53 C to move the support member 53 A to the left such that the branching roller 53 is engaged with the movable block 61 .
  • the moving mechanism 63 then moves the traveling vehicle 6 until, for example, one body 50 A has entered the traveling track 4 as illustrated in FIG. 5 (E) .
  • the moving mechanism 63 engages the branching roller 53 (one of the engagement parts) disposed in the front row of the traveling vehicle 6 with the movable block 61 to move the traveling vehicle 6 in the extending direction of the working track 41 , and then engages the branching roller 53 disposed in the backmost row of the traveling vehicle 6 (engagement part disposed downstream of the one engagement part in the one direction) with the movable block 61 to move the traveling vehicle 6 in the one direction.
  • the traveling vehicle 6 drives the roller driver 53 B of the switching mechanism 53 C to move the support member 53 A to the right.
  • the position of the branching roller 53 is switched from the first position to the second position. Consequently, the branching roller 53 is separated from the movable block 61 .
  • the traveling vehicle 6 can be self-propellable because the body 50 A of the two bodies 50 A and 50 B has advanced to a position where it overlaps the magnetic plate 40 F of the traveling track 4 .
  • the traveling vehicle 6 leaves the working area 160 in response to a move command from the area controller 90 .
  • the traveling vehicle system 1 the movable block 61 and the traveling vehicle 6 can be moved together simply by moving the movable block 61 with which the branching roller 53 included in the traveling vehicle 6 has been engaged.
  • the moving mechanism 63 only needs to move the movable block 61 in the one direction, and thus the configuration thereof can be simplified.
  • the configuration in the moving mechanism 63 can be simplified.
  • the moving mechanism 63 is a linear motion mechanism (ball screw) including the screw shaft 63 A and the shaft driver 63 C, and thus the movable block 61 can be moved in the extending direction of the working track 41 with a simple configuration.
  • the branching roller 53 is arranged in two or more rows in the traveling direction of the traveling vehicle 6 at an interval equal to or shorter than a the maximum travel distance D of the movable block 61 in the linear motion mechanism, and the moving mechanism 63 engages a branching roller 53 in the front row with the movable block 61 to move the traveling vehicle 6 in the extending direction of the working track 41 , and then engages a branching roller 53 in the backmost row with the movable block 61 to move the traveling vehicle 6 in the extending direction of the working track 41 .
  • the traveling vehicle 6 can be moved beyond the movable distance of the movable block 61 . This can reduce the size of the moving mechanism 63 in the moving direction of the traveling vehicle 6 .
  • the branching roller 53 is engaged with the movable block 61 by switching the position of the branching roller 53 included in the traveling vehicle 6 in the left-right direction.
  • an existing member included in the traveling vehicle 6 can be simply used without providing a new engagement part configured to be engaged with the movable block 61 , and thus the traveling vehicle 6 can be manufactured at low cost.
  • the moving mechanism 63 is supported by a lower support portion 43 attached to the working track 41 .
  • a support member supporting the moving mechanism 63 is suspended individually from a ceiling or the like, man-hours required for installation can be significantly reduced.
  • the traveling vehicle 6 of the traveling vehicle system 1 is an overhead traveling vehicle configured to travel along the traveling track 4 , and the working track 41 is suspended from a trestle installed on the ceiling of a building or on the floor. With this configuration, the traveling vehicle 6 that a worker working while standing on the floor of the building cannot access can be moved. This is highly effective because it can save time and effort for the worker to prepare a stepladder or the like when manually moving the traveling vehicle 6 .
  • the traveling vehicle 6 can be moved even if the magnetic plate 40 F is not provided in the working track 41 . Consequently, in the working track 41 , the top surface portion 40 D on which the magnetic plate 40 F is provided in the traveling track 4 can be made open, and thus maintenance on an upper portion of the traveling unit 50 can be performed easily.
  • the branching roller 53 is used as an example of the engagement part.
  • a dedicated engagement member capable of being engaged with the movable block 61 may be provided to the traveling vehicle 6 .
  • the engagement part may be configured to be movable in the left-right or up-down direction by a driver, and the driver may be configured to be controllable by the area controller 90 . Even in this case, the desired effects can be obtained.
  • the working track (non-self-propelling section) 41 may have a configuration in which the power feeders 40 E are not provided.
  • the traveling vehicle 6 cannot drive the shaft driver 63 C configured to move the engagement part in the left-right direction because electricity is not supplied thereto in the working track 41 .
  • FIG. 7 (A) illustrates an example in which the power feeders 40 E are provided along the extending direction in the working track 41 .
  • the working track (non-self-propelling section) 41 may have a configuration in which the power feeders 40 E are not provided.
  • the traveling vehicle 6 cannot drive the shaft driver 63 C configured to move the engagement part in the left-right direction because electricity is not supplied thereto in the working track 41 .
  • the moving mechanism 63 is set longer than the working track 41 in the traveling direction of the traveling vehicle 6 to be configured such that the movable block 61 with which the branching roller 53 in the front row is engaged extends to a position of the traveling track 4 .
  • the moving mechanism 63 is configured so that the traveling vehicle 6 can be moved beyond the range of the working track 41 in the traveling direction of the traveling vehicle 6 .
  • the traveling vehicle 6 When the traveling vehicle 6 is moved beyond the range of the working track 41 , as illustrated in FIG. 7 (C) , the body 50 A that is one of the two bodies 50 A and 50 B of the traveling vehicle 6 overlaps the power feeders 40 E of the traveling track 4 , and thus the supply of electricity can be received and the position of the branching roller 53 can be switched in the left-right direction.
  • the body 50 A that is one of the two bodies 50 A and 50 B of the traveling vehicle 6 will overlap the magnetic plate 40 F of the traveling track 4 , and thus the traveling vehicle 6 can be self-propellable. Even with the configuration according to this modification, the traveling vehicle 6 can be moved on the working track 41 including no power feeders 40 E.
  • the side surface portions 40 C at which the power feeders 40 E are provided in the traveling track 4 can be made open, and thus maintenance on side surface portions of the traveling unit 50 can be performed easily.
  • the working track 41 of the above embodiment has been described with an example in which the sides of the traveling vehicle 6 are completely open. However, it may have walls (side portions) in which a hole, into which the movable block 61 can be inserted, is formed. Even in this case, the movable block 61 can be moved in the extending direction of the working track 41 with the branching roller 53 engaged, and thus the traveling vehicle can be moved.
  • the working area 160 i.e., the working track 41
  • the working area 160 may be disposed at an end of the traveling track 4 .
  • this disclosure is applied to the traveling track 4 for allowing the traveling vehicle 6 to travel in a suspended manner.
  • this disclosure may be applied to a traveling vehicle system in which a traveling vehicle travels in a traveling track disposed on the floor.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transportation (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
US19/103,678 2022-08-18 2023-06-20 Traveling vehicle system Pending US20260048769A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-130661 2022-08-18
JP2022130661 2022-08-18
PCT/JP2023/022791 WO2024038671A1 (ja) 2022-08-18 2023-06-20 走行車システム

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US20260048769A1 true US20260048769A1 (en) 2026-02-19

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US19/103,678 Pending US20260048769A1 (en) 2022-08-18 2023-06-20 Traveling vehicle system

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EP (1) EP4559774A1 (cg-RX-API-DMAC7.html)
JP (1) JPWO2024038671A1 (cg-RX-API-DMAC7.html)
KR (1) KR102919918B1 (cg-RX-API-DMAC7.html)
CN (1) CN119731067A (cg-RX-API-DMAC7.html)
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GB2642043A (en) * 2024-06-20 2025-12-31 Anglo American Technical & Sustainability Services Ltd External vehicle propulsion infrastructure

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JP5062757B2 (ja) 2008-07-04 2012-10-31 株式会社ダイフク スクリュー駆動の搬送台車装置
JP6443631B2 (ja) 2015-11-12 2018-12-26 株式会社ダイフク 搬送装置
CN113557186B (zh) 2019-04-03 2024-02-13 村田机械株式会社 行驶车系统

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TW202421479A (zh) 2024-06-01
KR102919918B1 (ko) 2026-01-28
EP4559774A1 (en) 2025-05-28
CN119731067A (zh) 2025-03-28
KR20250034478A (ko) 2025-03-11
WO2024038671A1 (ja) 2024-02-22

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