Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B61—RAILWAYS
  • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
  • B61B13/00—Other railway systems
  • B61B13/12—Systems with propulsion devices between or alongside the rails, e.g. pneumatic systems
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
  • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
  • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
  • H10P72/3218—Conveying cassettes, containers or carriers
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B61—RAILWAYS
  • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
  • B61B13/00—Other railway systems
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B61—RAILWAYS
  • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
  • B61B3/00—Elevated railway systems with suspended vehicles
  • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
  • B65G1/02—Storage devices
  • B65G1/04—Storage devices mechanical
  • B65G1/0457—Storage devices mechanical with suspended load carriers
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G35/00—Mechanical conveyors not otherwise provided for
  • B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
  • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
  • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
  • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
  • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
  • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
  • H10P72/3202—Mechanical details, e.g. rollers or belts
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
  • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
  • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
  • H10P72/3221—Overhead conveying
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
  • B65G2201/02—Articles
  • B65G2201/0297—Wafer cassette

Landscapes

• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Transportation (AREA)
• Chemical & Material Sciences (AREA)
• Combustion & Propulsion (AREA)
• Platform Screen Doors And Railroad Systems (AREA)
• Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)

Applications Claiming Priority (2)

Publications (2)

Family

ID=89941439

Family Applications (1)

Country Status (6)

Families Citing this family (1)

Family Cites Families (3)

• 2023
  • 2023-06-20 KR KR1020257004171A patent/KR102919918B1/ko active Active
  • 2023-06-20 EP EP23854709.5A patent/EP4559774A1/en active Pending
  • 2023-06-20 US US19/103,678 patent/US20260048769A1/en active Pending
  • 2023-06-20 WO PCT/JP2023/022791 patent/WO2024038671A1/ja not_active Ceased
  • 2023-06-20 CN CN202380060193.7A patent/CN119731067A/zh active Pending
  • 2023-06-20 JP JP2024541431A patent/JPWO2024038671A1/ja active Pending

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