US20180306646A1 - Sensor Arrangement and Method for Producing a Sensor Arrangement - Google Patents

Sensor Arrangement and Method for Producing a Sensor Arrangement Download PDF

Info

Publication number
US20180306646A1
US20180306646A1 US15/770,155 US201615770155A US2018306646A1 US 20180306646 A1 US20180306646 A1 US 20180306646A1 US 201615770155 A US201615770155 A US 201615770155A US 2018306646 A1 US2018306646 A1 US 2018306646A1
Authority
US
United States
Prior art keywords
sensor
contacting
sensor arrangement
contacting element
upper side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US15/770,155
Inventor
Jan Ihle
Anke Weidenfelder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Electronics AG
Original Assignee
Epcos AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Epcos AG filed Critical Epcos AG
Assigned to EPCOS AG reassignment EPCOS AG ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: Weidenfelder, Anke, IHLE, JAN
Publication of US20180306646A1 publication Critical patent/US20180306646A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/22Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B11/00Apparatus or processes for treating or working the shaped or preshaped articles
    • B28B11/24Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
    • B28B11/243Setting, e.g. drying, dehydrating or firing ceramic articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28BSHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B3/00Producing shaped articles from the material by using presses; Presses specially adapted therefor
    • B28B3/02Producing shaped articles from the material by using presses; Presses specially adapted therefor wherein a ram exerts pressure on the material in a moulding space; Ram heads of special form
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/28Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
    • H01C17/281Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thick film techniques
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/28Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals
    • H01C17/281Apparatus or processes specially adapted for manufacturing resistors adapted for applying terminals by thick film techniques
    • H01C17/283Precursor compositions therefor, e.g. pastes, inks, glass frits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/008Thermistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C7/00Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/04Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient
    • H01C7/042Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having negative temperature coefficient mainly consisting of inorganic non-metallic substances
    • H01C7/043Oxides or oxidic compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01CRESISTORS
    • H01C17/00Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques

Definitions

  • a sensor arrangement is provided.
  • the sensor arrangement maybe used for measuring a temperature.
  • a method for producing a sensor arrangement is also described.
  • thermocouples for monitoring and controlling temperatures in a wide variety of applications, they are mostly measured by ceramic negative temperature coefficient thermistors (NTC), silicon temperature sensors (KTY), platinum temperature sensors (PTD) or thermocouples (TC). Of these, the NTC thermistors are most commonly used, because of the low production costs. Another advantage over thermocouples and metallic resistance elements, such as, for example, Pt elements, is the significant negative resistance temperature characteristic.
  • metallic electrodes For electrical contacting of the NTC ceramic, metallic electrodes have to be applied.
  • thick-film electrodes are applied, mostly from silver or gold pastes, by means of a screen printing process with subsequent firing.
  • the silver metalizations are particularly suitable for soldered connections.
  • another electrode is necessary, especially when bonding with gold or aluminum or copper wires, because a connection to silver does not have sufficient reliability.
  • soldered connections with terminal wires cannot be realized.
  • only thin gold wire is used for making bonded connections.
  • Aluminum bonding wire connections on gold electrodes do not meet the reliability requirements.
  • NTC temperature sensors For use in power modules, SMD NTC temperature sensors that are soldered on are mostly used. Also used as an alternative to this in the case of control modules for low power levels are NTC chips, which are mounted on the underside by means of Ag sintering paste, soldering or adhesive bonding and the upper side of which is contacted by means of a bonding wire.
  • NTC temperature sensors that can be applied to the mother board/the DCB board without soldered mounting and have high long-term stability and also are suitable for higher operating temperatures. At the same time, it must also be possible for such novel sensors to be produced at low cost.
  • Embodiments provide a sensor arrangement that has improved properties.
  • a sensor arrangement for temperature measurement has a sensor element.
  • the sensor element preferably comprises a ceramic sensor material.
  • the sensor element is preferably a chip NTC thermistor.
  • the sensor element has at least one electrode.
  • the sensor element has two electrodes.
  • the electrodes are preferably arranged on different sides, for example, an upper side and an underside, of the sensor element.
  • the electrodes may also be arranged on one side, for example, the upper side.
  • the sensor arrangement may include at least one contacting element.
  • the contacting element comprises an electrically conductive material.
  • the sensor arrangement may have precisely one contacting element.
  • the sensor arrangement may also have more than one contacting element, for example, two contacting elements.
  • the contacting element is designed and arranged for the wireless contacting of the sensor element.
  • the contacting element has an outer structure/finish which makes it possible for the sensor element to be wirelessly contacted.
  • the contacting element is arranged in a specific position and/or alignment which makes it possible for the sensor element to be wirelessly contacted.
  • the relative position of the sensor element and the contacting element is chosen such that wireless contacting is made possible.
  • the contacting element is designed and arranged for increasing the stability of the sensor element or the sensor arrangement.
  • the contacting of the sensor element is preferably performed in one process step with the mounting of the sensor arrangement on a printed circuit board.
  • the contacting element has bearing areas.
  • the contacting element has at least a first bearing area and at least a second bearing area. At least one of the bearing areas, that is to say a first bearing area, is arranged at least partially on an outer area of the sensor element.
  • the first bearing area preferably lies on part of the outer area. Consequently, the contacting element serves for protecting the sensor element. Compressive loads, for example, occurring during Ag sintering, can be compensated by the contacting element. Consequently, a particularly stable sensor arrangement is provided.
  • the other one of the bearing areas is designed and arranged for connecting the sensor element to a printed circuit board.
  • the second bearing area of the contacting element lies on the printed circuit board or is secured on it. Wireless contacting of the sensor element is thereby achieved in an easy way.
  • the bearing areas have in each case a horizontally running region.
  • the horizontally running region of the bearing areas forms an upper side and/or an underside of the contacting element.
  • the upper side of the contacting element may have two defined horizontal regions that serve as bearing areas.
  • the underside of the contacting element may have two defined horizontal regions that serve as bearing areas.
  • the upper side may have at least one defined horizontal region and the underside may have at least one defined horizontal region, the horizontal regions serving as bearing areas.
  • the bearing areas are preferably connected to one another by a vertically running region of the contacting element.
  • the contacting element is designed in a stepped form.
  • the contacting element may have a metal bracket.
  • the metal bracket is preferably designed in the form of a step, so that a connection of the sensor element and the printed circuit board can be performed with the aid of the metal bracket.
  • the contacting element may be designed in a wavy form.
  • the contacting element may have a curved form.
  • the metal bracket is preferably designed in the form of a wave, so that the connection of the sensor element and the printed circuit board can be performed with the aid of the metal bracket.
  • the contacting element is designed such that it can lie both on a surface or outer area of the sensor element and on a further surface, for example, the surface of a mother board.
  • the contacting element may cover the upper side of the sensor element completely or else only partially.
  • the chosen structural form makes it possible for the sensor element to be processed with small electrical and thermal tolerances.
  • the mechanical stability of the chip NTC thermistor is increased by the design with the contacting element in the form of a bracket, in that the chip NTC thermistor itself is protected during the process of the pressure sintering.
  • the pressure sintering of the component is thereby made possible without inducing any damage such as micro cracks or the like, or even bringing about a rupturing of the component.
  • an NTC temperature sensor with a low-cost electrode system which in addition makes wireless contacting of the NTC temperature sensor possible.
  • the contacting of the temperature sensor is intended to be provided in one process step together with the mounting of the further components. In the case of power modules, this is contacting by means of Ag pressure sintering. The component thereby undergoes a compressive loading of up to 30 MPa or higher at temperatures of up to 300° C.
  • the sensor element has an upper side.
  • the upper side of the sensor element after being mounted on a printed circuit board—forms the surface of the sensor element that is facing away from the printed circuit board.
  • the contacting element is at least partially connected to the upper side.
  • the contacting element is, for example, sintered on the upper side.
  • the contacting element is preferably pressurelessly sintered on the upper side with an Ag paste.
  • the contacting element may however also be secured on the upper side by means of a soldering process or by adhesive bonding.
  • the sensor arrangement has a further contacting element.
  • the further contacting element is designed for producing a further connection between the sensor element and the printed circuit board.
  • a further advantage is the possibility of using the two areas of the contacting elements for pressing against during the Ag sintering, soldering or adhesive bonding, without in this case having to press onto the NTC chip itself.
  • the sensor element has an underside.
  • the further contacting element is at least partially arranged on the underside of the sensor element.
  • the underside of the sensor element after being mounted on a printed circuit board—forms the surface of the sensor element that is facing the printed circuit board.
  • the further contacting element is at least partially connected to the underside.
  • the contacting element is, for example, sintered on the underside.
  • the contacting element is preferably pressurelessly sintered on the underside with an Ag paste.
  • the contacting element may however also be secured on the underside by means of a soldering process or by adhesive bonding.
  • a method for producing a sensor arrangement is described.
  • the sensor arrangement described above is produced by the method. All of the properties that are disclosed with reference to the sensor element, the contacting element, the sensor arrangement or the method are also correspondingly disclosed with reference to the respective other aspects, and vice versa, even if the respective property is not explicitly mentioned in the context of the respective aspect.
  • the method has the following steps:
  • an NTC temperature sensor with a low-cost electrode system which makes wireless contacting of the NTC temperature sensor possible.
  • the contacting of the temperature sensor can be performed in one process step together with the mounting of the further components.
  • a sensor element for temperature measurement having at least one electrode, the sensor element having an upper side, and a contacting element being arranged on the upper side, the contacting element being designed in the form of a bracket.
  • FIG. 1 shows a sensor arrangement
  • FIG. 2 shows the sensor arrangement as shown in FIG. 1 in a side view
  • FIG. 3 shows the sensor arrangement as shown in FIG. 2 according to a further exemplary embodiment
  • FIG. 4 shows a sensor arrangement mounted on a DCB board.
  • FIG. 1 shows a sensor arrangement 10 .
  • FIG. 2 shows the sensor arrangement 10 in side view.
  • the sensor arrangement lo has a sensor element 1 .
  • the sensor element 1 (sensor 1 ) preferably consists of a chip NTC thermistor.
  • the chip NTC thermistor is produced on the basis of perovskites in the system Y—Ca—Cr—Al—O with various dopings or on the basis of spinels in the system Ni—Co—Mn—O with various dopings.
  • the sensor element 1 has in particular a ceramic main body 7 .
  • the ceramic main body 7 is produced on the basis of the aforementioned structures.
  • the sensor element 1 may have a further ceramic reinforcement or a carrier (not explicitly shown).
  • the chip NTC thermistor 1 may either be produced directly by pressing of granular material or be built up from ceramic sheets.
  • Electrodes 2 , 3 are applied to the upper side 5 and underside 6 of the sensor 1 by means of screen printing or thin-film technology, such as, for example, sputtering.
  • the base electrode in a first embodiment the base electrode consists of one layer (for example, a nickel layer, which may comprise fractions of vanadium, or a copper layer) or in a second embodiment of two layers (for example, Cr/Ni, Ti/Ni or Ni/Cu), which likewise may comprise fractions of vanadium.
  • the base electrode may be protected by a covering layer consisting of an oxidation-inhibiting metal. In the case of a connection by means of Ag sintering with finely dispersed silver pastes, a silver covering electrode is advantageous.
  • the thickness of the base electrode is less than 10 ⁇ m, preferably less than 3 ⁇ m, ideally less than 0.5 ⁇ m.
  • the thickness of the covering electrode may be up to 1 ⁇ m, in exceptional cases up to 20 ⁇ m.
  • the production of thick-film electrodes may be performed by a screen printing process with subsequent firing.
  • the pastes used may contain Ag or Au or any admixtures.
  • the electrodes 2 , 3 are—as mentioned above—applied to the upper side and underside 5 , 6 of the chip NTC thermistor.
  • the sensor arrangement 10 has a contacting element 4 . Furthermore, the sensor arrangement 10 may also have further contacting elements 4 ′, as described in connection with FIG. 3 .
  • the contacting element 4 is arranged on the upper side 5 of the sensor 1 .
  • the contacting element 4 lies at least partially on the electrode 2 , which is arranged on the upper side 5 .
  • the contacting element 4 takes the form of a metal bracket.
  • the contacting element 4 is designed in a stepped form.
  • the contacting element 4 must have a first bearing area 4 a and a second bearing area 4 b.
  • the bearing areas 4 a, 4 b are formed on the same side, for example, an underside, of the contacting element 4 .
  • the bearing areas 4 a, 4 b may also be formed on different sides, that is to say the upper side and the underside of the contacting element 4 .
  • the bearing areas 4 a, 4 b are designed as horizontal portions of the underside of the contacting element 4 .
  • the bearing areas 4 a, 4 b are connected to one another by a vertical web 4 c.
  • the upper side, opposite from the underside of the contacting element 4 is designed correspondingly. That is to say that the upper side of the contacting element also has two horizontal regions and a vertical web arranged in between.
  • the first bearing area 4 a lies on the upper side 5 of the sensor element 1 .
  • the first bearing area 4 a covers at least partially the electrode 2 arranged on the upper side 5 .
  • the contacting element 4 is pressurelessly sintered on the upper side 5 of the chip NTC thermistor with an Ag paste.
  • mounting the contacting element 4 for example, the metal bracket, by means of a soldering process or by adhesive bonding.
  • the second bearing surface 4 b lies, for example, on a printed circuit board or mother board or a DCB board 11 (see FIG. 4 ).
  • the second bearing surface 4 b may lie on an electrode pad 12 a , 12 b of the DCB board ( FIG. 4 ).
  • the contacting of the sensor 1 with respect to the DCB board 11 or the mother board may be performed by means of Ag sintering, soldering or adhesive bonding, the chip NTC thermistor 1 being placed onto one electrode pad and the contacting element 4 being placed onto a further electrode pad.
  • the contacting of the sensor 1 by means of the contacting element 4 is consequently provided in one process step together with the mounting of the further components.
  • the chip NTC thermistor with the contacting element 4 consequently consists substantially of a chip NTC thermistor, which is contacted by a metal bracket on the upper side 5 .
  • the contacting element 4 serves as protection for the chip NTC thermistor 1 during the Ag pressure sintering.
  • the resistance of the individual components can be set by an additional trimming process.
  • ceramic material or electrode material is partially removed, for example, by laser cutting, grinding or sawing, in such a way that the resistance is adapted by changing the geometry.
  • the mounting of the metal bracket is performed after the adaptation of the resistance.
  • the sensor 1 may—as described above—be sintered under pressure onto the mother board/the DCB board. Contacting of the sensor 1 with respect to the conductor tracks is also possible furthermore by adhesive bonding or soldering.
  • the direct contacting in one process step means that further contacting, for example, by bonding, is no longer required.
  • the chip NTC thermistor 1 can accordingly be provided with the metal bracket in a wireless mounting operation.
  • the chosen structural form makes it possible for a component to be processed with small electrical resistance tolerances.
  • the mechanical stability of the thermistor is increased by the design with the metal bracket, in that the chip NTC thermistor itself is protected during the process of the pressure sintering.
  • the pressure sintering of the component is thereby made possible without inducing any damage such as micro cracks or the like, or even bringing about a rupturing of the component.
  • a first step the production of NTC powder is performed. This comprises initial weighing, wet pre-grinding, drying, screening, calcining, wet after-grinding, drying and screening.
  • the production of NTC sheets is performed. After that, the stacking and pressing of the green sheets is performed. This is followed by decarburizing of the stacked and pressed green sheets.
  • Ni/Ag thin-film electrodes are applied on both sides, as already stated further above.
  • the electrical measuring of the resistances of the individual substrates at nominal temperature is performed. This is followed by the substrates being individually separated into chip NTC thermistors on the basis of the measurement data obtained in advance.
  • the resistance of the thermistor may be set on the one hand by means of the sintering parameters/ceramic composition and on the other hand by means of the chip geometry. Before the individual separation of the substrates, their overall resistance at nominal temperature is determined. On the basis of the measurement data obtained in advance, the geometry of the respective chip NTC thermistor is defined.
  • the final geometry is produced by a cutting process.
  • a trimming process may be performed for setting the resistance at nominal temperature by partial laser ablation.
  • a visual inspection and random control measurement follow. After that, the metal bracket is applied, as described above. In particular, the mounting of the metal bracket is performed after adaptation of the resistance. Lastly, a visual inspection and random control measurement are once again performed.
  • FIG. 3 shows a side view of a sensor arrangement 10 according to a further exemplary embodiment.
  • the sensor arrangement 10 from FIG. 3 has two contacting elements 4 , 4 ′.
  • one contacting element 4 is arranged such that its first bearing surface 4 a rests at least partially on the upper side 5 of the sensor 1 .
  • the second bearing surface 4 b of this contacting element 4 is designed, for example, for being arranged on a printed circuit board or DCB board 11 , in order to contact the sensor 1 (see FIG. 4 ).
  • the second bearing area 4 b may be arranged on an electrode pad 12 b of the DCB board 11 , as can be seen from FIG. 4 .
  • the side leg of the contacting element 4 that is formed by the second bearing area 4 b and the opposite horizontal area may for this purpose be formed as thicker (not explicitly shown).
  • the sensor 1 may therefore be made higher here or—as in this case—be arranged on a further contacting element 4 ′.
  • the vertical web 4 c which connects the bearing areas 4 a, 4 b, may be made longer, as shown in FIG. 3 .
  • the further contacting element 4 ′ is arranged such that it's first bearing area 4 a ′ at least partially lies on an underside 6 of the sensor 1 .
  • a third bearing area 8 opposite from the first bearing area 4 a ′, lies, for example, on the printed circuit board or the DCB board 11 .
  • the third bearing area 8 is arranged here on the upper side of the contacting element 4 ′.
  • a partial region of the first bearing area 4 a ′ may also lie on the DCB board 11 or an electrode pad 12 a (see FIG. 4 ).
  • the partial region of the first bearing area 4 a ′ forms a further or second bearing area 4 b ′, which serves for bearing on the DCB board 11 .

Abstract

A sensor arrangement and a method for producing a sensor arrangement are disclosed. In an embodiment, the sensor arrangement for a temperature measurement includes a sensor element with at least one electrode and at least one contacting element, wherein the contacting element is arranged and configured for wireless contacting of the sensor element.

Description

  • This patent application is a national phase filing under section 371 of PCT/EP2016/074963, filed Oct. 18, 2016, which claims the priority of German patent application 10 2015 118 720.5, filed Nov. 2, 2015 and German patent application 10 2016 101 246.7, filed Jan. 25, 2016, each of which is incorporated herein by reference in its entirety.
  • TECHNICAL FIELD
  • A sensor arrangement is provided. The sensor arrangement maybe used for measuring a temperature. A method for producing a sensor arrangement is also described.
  • BACKGROUND
  • According to the prior art, for monitoring and controlling temperatures in a wide variety of applications, they are mostly measured by ceramic negative temperature coefficient thermistors (NTC), silicon temperature sensors (KTY), platinum temperature sensors (PTD) or thermocouples (TC). Of these, the NTC thermistors are most commonly used, because of the low production costs. Another advantage over thermocouples and metallic resistance elements, such as, for example, Pt elements, is the significant negative resistance temperature characteristic.
  • For electrical contacting of the NTC ceramic, metallic electrodes have to be applied. According to the prior art, for this purpose thick-film electrodes are applied, mostly from silver or gold pastes, by means of a screen printing process with subsequent firing.
  • The silver metalizations are particularly suitable for soldered connections. As a result of the increasing technological requirements with regard to new reliable ways of establishing electrical contact in connections, such as bonding and welding, another electrode is necessary, especially when bonding with gold or aluminum or copper wires, because a connection to silver does not have sufficient reliability.
  • In the case of gold metalizations, soldered connections with terminal wires cannot be realized. For reasons of cost, only thin gold wire is used for making bonded connections. Aluminum bonding wire connections on gold electrodes do not meet the reliability requirements.
  • For use in power modules, SMD NTC temperature sensors that are soldered on are mostly used. Also used as an alternative to this in the case of control modules for low power levels are NTC chips, which are mounted on the underside by means of Ag sintering paste, soldering or adhesive bonding and the upper side of which is contacted by means of a bonding wire.
  • As a result of the increasing requirements with respect to operating temperature and reliability, there is the requirement for NTC temperature sensors that can be applied to the mother board/the DCB board without soldered mounting and have high long-term stability and also are suitable for higher operating temperatures. At the same time, it must also be possible for such novel sensors to be produced at low cost.
  • SUMMARY OF THE INVENTION
  • Embodiments provide a sensor arrangement that has improved properties.
  • According to one aspect, a sensor arrangement for temperature measurement is provided. The sensor arrangement has a sensor element. The sensor element preferably comprises a ceramic sensor material. The sensor element is preferably a chip NTC thermistor. The sensor element has at least one electrode. Preferably, the sensor element has two electrodes. The electrodes are preferably arranged on different sides, for example, an upper side and an underside, of the sensor element. As an alternative to this, the electrodes may also be arranged on one side, for example, the upper side.
  • The sensor arrangement may include at least one contacting element. The contacting element comprises an electrically conductive material. The sensor arrangement may have precisely one contacting element. The sensor arrangement may also have more than one contacting element, for example, two contacting elements. The contacting element is designed and arranged for the wireless contacting of the sensor element. In other words, the contacting element has an outer structure/finish which makes it possible for the sensor element to be wirelessly contacted. Furthermore, the contacting element is arranged in a specific position and/or alignment which makes it possible for the sensor element to be wirelessly contacted. The relative position of the sensor element and the contacting element is chosen such that wireless contacting is made possible. Furthermore, the contacting element is designed and arranged for increasing the stability of the sensor element or the sensor arrangement. The contacting of the sensor element is preferably performed in one process step with the mounting of the sensor arrangement on a printed circuit board.
  • According to an exemplary embodiment, the contacting element has bearing areas. The contacting element has at least a first bearing area and at least a second bearing area. At least one of the bearing areas, that is to say a first bearing area, is arranged at least partially on an outer area of the sensor element. The first bearing area preferably lies on part of the outer area. Consequently, the contacting element serves for protecting the sensor element. Compressive loads, for example, occurring during Ag sintering, can be compensated by the contacting element. Consequently, a particularly stable sensor arrangement is provided.
  • According to an exemplary embodiment, the other one of the bearing areas, that is to say a second bearing area, is designed and arranged for connecting the sensor element to a printed circuit board. For example, the second bearing area of the contacting element lies on the printed circuit board or is secured on it. Wireless contacting of the sensor element is thereby achieved in an easy way.
  • According to an exemplary embodiment, the bearing areas have in each case a horizontally running region. The horizontally running region of the bearing areas forms an upper side and/or an underside of the contacting element. In other words, the upper side of the contacting element may have two defined horizontal regions that serve as bearing areas. As an alternative to this, the underside of the contacting element may have two defined horizontal regions that serve as bearing areas. As an alternative to this, the upper side may have at least one defined horizontal region and the underside may have at least one defined horizontal region, the horizontal regions serving as bearing areas. The bearing areas are preferably connected to one another by a vertically running region of the contacting element.
  • For example, the contacting element is designed in a stepped form. In particular, the contacting element may have a metal bracket. The metal bracket is preferably designed in the form of a step, so that a connection of the sensor element and the printed circuit board can be performed with the aid of the metal bracket.
  • As an alternative to this, the contacting element may be designed in a wavy form. In other words, the contacting element may have a curved form. The metal bracket is preferably designed in the form of a wave, so that the connection of the sensor element and the printed circuit board can be performed with the aid of the metal bracket.
  • In particular, the contacting element is designed such that it can lie both on a surface or outer area of the sensor element and on a further surface, for example, the surface of a mother board. In this case, the contacting element may cover the upper side of the sensor element completely or else only partially.
  • The chosen structural form makes it possible for the sensor element to be processed with small electrical and thermal tolerances. At the same time, the mechanical stability of the chip NTC thermistor is increased by the design with the contacting element in the form of a bracket, in that the chip NTC thermistor itself is protected during the process of the pressure sintering. The pressure sintering of the component is thereby made possible without inducing any damage such as micro cracks or the like, or even bringing about a rupturing of the component.
  • Provided in this way is an NTC temperature sensor with a low-cost electrode system which in addition makes wireless contacting of the NTC temperature sensor possible. The contacting of the temperature sensor is intended to be provided in one process step together with the mounting of the further components. In the case of power modules, this is contacting by means of Ag pressure sintering. The component thereby undergoes a compressive loading of up to 30 MPa or higher at temperatures of up to 300° C.
  • According to an exemplary embodiment, the sensor element has an upper side. The upper side of the sensor element—after being mounted on a printed circuit board—forms the surface of the sensor element that is facing away from the printed circuit board. The contacting element is at least partially connected to the upper side. The contacting element is, for example, sintered on the upper side. The contacting element is preferably pressurelessly sintered on the upper side with an Ag paste. As an alternative to this, the contacting element may however also be secured on the upper side by means of a soldering process or by adhesive bonding.
  • According to an exemplary embodiment, the sensor arrangement has a further contacting element. The further contacting element is designed for producing a further connection between the sensor element and the printed circuit board.
  • The advantages of a sensor arrangement with two contacting elements are easily achievable level compensation on the printed circuit board and improved adaptation during mounting by means of the areas (surfaces) of the contacting elements. A further advantage is the possibility of using the two areas of the contacting elements for pressing against during the Ag sintering, soldering or adhesive bonding, without in this case having to press onto the NTC chip itself.
  • The sensor element has an underside. The further contacting element is at least partially arranged on the underside of the sensor element. The underside of the sensor element—after being mounted on a printed circuit board—forms the surface of the sensor element that is facing the printed circuit board. The further contacting element is at least partially connected to the underside. The contacting element is, for example, sintered on the underside. The contacting element is preferably pressurelessly sintered on the underside with an Ag paste. As an alternative to this, the contacting element may however also be secured on the underside by means of a soldering process or by adhesive bonding.
  • According to one aspect, a method for producing a sensor arrangement is described. Preferably, the sensor arrangement described above is produced by the method. All of the properties that are disclosed with reference to the sensor element, the contacting element, the sensor arrangement or the method are also correspondingly disclosed with reference to the respective other aspects, and vice versa, even if the respective property is not explicitly mentioned in the context of the respective aspect.
  • The method has the following steps:
      • Producing NTC sheets to form a ceramic main body.
      • Sintering the stacked, pressed and decarburized green sheets. The ceramic main body preferably has a perovskite structure. In particular, the ceramic may be based on the system Y—Ca—Cr—Al—O with various dopings. Alternatively, the ceramic may have a spinel structure. For example, the ceramic may be based on the system Ni—Co—Mn—O with various dopings.
      • Applying Ni/Ag thin-film electrodes or thick-film electrodes on the basis of Ag or Au to the main body on both sides.
      • Applying at least one contacting element to an outer area. The contacting element is preferably sintered onto a partial region of the outer area.
      • Contacting the sensor arrangement to form a printed circuit board, preferably by means of Ag sintering.
  • Provided in this way is an NTC temperature sensor with a low-cost electrode system which makes wireless contacting of the NTC temperature sensor possible. The contacting of the temperature sensor can be performed in one process step together with the mounting of the further components.
  • According to one aspect, a sensor element for temperature measurement is provided, having at least one electrode, the sensor element having an upper side, and a contacting element being arranged on the upper side, the contacting element being designed in the form of a bracket.
  • The sensor arrangement is explained in more detail below on the basis of exemplary embodiments and the associated figures.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • The drawings described below should not be regarded as true to scale. Rather, for better representation, individual dimensions may be shown as increased or reduced in size or even distorted.
  • Elements that are the same as one another or perform the same function are provided with the same designations.
  • FIG. 1 shows a sensor arrangement,
  • FIG. 2 shows the sensor arrangement as shown in FIG. 1 in a side view,
  • FIG. 3 shows the sensor arrangement as shown in FIG. 2 according to a further exemplary embodiment,
  • FIG. 4 shows a sensor arrangement mounted on a DCB board.
  • DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS
  • FIG. 1 shows a sensor arrangement 10. FIG. 2 shows the sensor arrangement 10 in side view. The sensor arrangement lo has a sensor element 1. The sensor element 1 (sensor 1) preferably consists of a chip NTC thermistor. The chip NTC thermistor is produced on the basis of perovskites in the system Y—Ca—Cr—Al—O with various dopings or on the basis of spinels in the system Ni—Co—Mn—O with various dopings. The sensor element 1 has in particular a ceramic main body 7. The ceramic main body 7 is produced on the basis of the aforementioned structures. In addition, the sensor element 1 may have a further ceramic reinforcement or a carrier (not explicitly shown). The chip NTC thermistor 1 may either be produced directly by pressing of granular material or be built up from ceramic sheets.
  • Electrodes 2, 3 are applied to the upper side 5 and underside 6 of the sensor 1 by means of screen printing or thin-film technology, such as, for example, sputtering.
  • In the application of the electrodes, a distinction can be made between thin-film and thick-film technology. The production of thin-film electrodes may be performed by sputtering or vapor deposition. In this case, in a first embodiment the base electrode consists of one layer (for example, a nickel layer, which may comprise fractions of vanadium, or a copper layer) or in a second embodiment of two layers (for example, Cr/Ni, Ti/Ni or Ni/Cu), which likewise may comprise fractions of vanadium. The base electrode may be protected by a covering layer consisting of an oxidation-inhibiting metal. In the case of a connection by means of Ag sintering with finely dispersed silver pastes, a silver covering electrode is advantageous. The thickness of the base electrode is less than 10 μm, preferably less than 3 μm, ideally less than 0.5 μm. The thickness of the covering electrode may be up to 1 μm, in exceptional cases up to 20 μm.
  • The production of thick-film electrodes may be performed by a screen printing process with subsequent firing. The pastes used may contain Ag or Au or any admixtures.
  • The electrodes 2, 3 are—as mentioned above—applied to the upper side and underside 5, 6 of the chip NTC thermistor.
  • The sensor arrangement 10 has a contacting element 4. Furthermore, the sensor arrangement 10 may also have further contacting elements 4′, as described in connection with FIG. 3.
  • In particular, the contacting element 4 is arranged on the upper side 5 of the sensor 1. The contacting element 4 lies at least partially on the electrode 2, which is arranged on the upper side 5.
  • According to this exemplary embodiment, the contacting element 4 takes the form of a metal bracket. In particular, the contacting element 4 is designed in a stepped form. However, it is also conceivable to give the contacting element 4 other forms, for example, a curved form of the contacting element 4.
  • In any event, the contacting element 4 must have a first bearing area 4 a and a second bearing area 4 b. The bearing areas 4 a, 4 b are formed on the same side, for example, an underside, of the contacting element 4. As an alternative to this, the bearing areas 4 a, 4 b may also be formed on different sides, that is to say the upper side and the underside of the contacting element 4.
  • In this exemplary embodiment, the bearing areas 4 a, 4 b are designed as horizontal portions of the underside of the contacting element 4. The bearing areas 4 a, 4 b are connected to one another by a vertical web 4 c. The upper side, opposite from the underside of the contacting element 4, is designed correspondingly. That is to say that the upper side of the contacting element also has two horizontal regions and a vertical web arranged in between.
  • The first bearing area 4 a lies on the upper side 5 of the sensor element 1. In particular, the first bearing area 4 a covers at least partially the electrode 2 arranged on the upper side 5. The contacting element 4 is pressurelessly sintered on the upper side 5 of the chip NTC thermistor with an Ag paste. There is alternatively also the possibility of mounting the contacting element 4, for example, the metal bracket, by means of a soldering process or by adhesive bonding.
  • The second bearing surface 4 b lies, for example, on a printed circuit board or mother board or a DCB board 11 (see FIG. 4). The second bearing surface 4 b may lie on an electrode pad 12 a, 12 b of the DCB board (FIG. 4).
  • The contacting of the sensor 1 with respect to the DCB board 11 or the mother board may be performed by means of Ag sintering, soldering or adhesive bonding, the chip NTC thermistor 1 being placed onto one electrode pad and the contacting element 4 being placed onto a further electrode pad. The contacting of the sensor 1 by means of the contacting element 4 is consequently provided in one process step together with the mounting of the further components. In this exemplary embodiment, the chip NTC thermistor with the contacting element 4 consequently consists substantially of a chip NTC thermistor, which is contacted by a metal bracket on the upper side 5. Apart from the contacting with respect to the board, the contacting element 4 serves as protection for the chip NTC thermistor 1 during the Ag pressure sintering.
  • For particularly closely toleranced resistances at nominal temperature, the resistance of the individual components can be set by an additional trimming process. In this case, ceramic material or electrode material is partially removed, for example, by laser cutting, grinding or sawing, in such a way that the resistance is adapted by changing the geometry.
  • The mounting of the metal bracket is performed after the adaptation of the resistance. The sensor 1 may—as described above—be sintered under pressure onto the mother board/the DCB board. Contacting of the sensor 1 with respect to the conductor tracks is also possible furthermore by adhesive bonding or soldering. The direct contacting in one process step means that further contacting, for example, by bonding, is no longer required. The chip NTC thermistor 1 can accordingly be provided with the metal bracket in a wireless mounting operation.
  • The chosen structural form makes it possible for a component to be processed with small electrical resistance tolerances. At the same time, the mechanical stability of the thermistor is increased by the design with the metal bracket, in that the chip NTC thermistor itself is protected during the process of the pressure sintering. The pressure sintering of the component is thereby made possible without inducing any damage such as micro cracks or the like, or even bringing about a rupturing of the component.
  • There follows a description of the production of the sensor arrangement 10 by way of example.
  • In a first step, the production of NTC powder is performed. This comprises initial weighing, wet pre-grinding, drying, screening, calcining, wet after-grinding, drying and screening.
  • In a further step, the production of NTC sheets is performed. After that, the stacking and pressing of the green sheets is performed. This is followed by decarburizing of the stacked and pressed green sheets.
  • Subsequently, the sintering of the decarburized substrates is performed. In a further step, Ni/Ag thin-film electrodes are applied on both sides, as already stated further above.
  • After that, the electrical measuring of the resistances of the individual substrates at nominal temperature is performed. This is followed by the substrates being individually separated into chip NTC thermistors on the basis of the measurement data obtained in advance.
  • The resistance of the thermistor may be set on the one hand by means of the sintering parameters/ceramic composition and on the other hand by means of the chip geometry. Before the individual separation of the substrates, their overall resistance at nominal temperature is determined. On the basis of the measurement data obtained in advance, the geometry of the respective chip NTC thermistor is defined.
  • The final geometry is produced by a cutting process. In the case of very closely toleranced resistances, a trimming process may be performed for setting the resistance at nominal temperature by partial laser ablation.
  • A visual inspection and random control measurement follow. After that, the metal bracket is applied, as described above. In particular, the mounting of the metal bracket is performed after adaptation of the resistance. Lastly, a visual inspection and random control measurement are once again performed.
  • FIG. 3 shows a side view of a sensor arrangement 10 according to a further exemplary embodiment.
  • As a difference from the sensor arrangement 10 according to FIGS. 1 and 2, the sensor arrangement 10 from FIG. 3 has two contacting elements 4, 4′. In this case, one contacting element 4 is arranged such that its first bearing surface 4 a rests at least partially on the upper side 5 of the sensor 1. The second bearing surface 4 b of this contacting element 4 is designed, for example, for being arranged on a printed circuit board or DCB board 11, in order to contact the sensor 1 (see FIG. 4). In particular, the second bearing area 4 b may be arranged on an electrode pad 12 b of the DCB board 11, as can be seen from FIG. 4.
  • As a difference from the contacting element described in connection with FIGS. 1 and 2, the side leg of the contacting element 4 that is formed by the second bearing area 4 b and the opposite horizontal area may for this purpose be formed as thicker (not explicitly shown). In this way, a greater distance, in particular a great height, between the sensor 1 and the printed circuit board can be bridged. For example, the sensor 1 may therefore be made higher here or—as in this case—be arranged on a further contacting element 4′. As an alternative to making the leg thicker, the vertical web 4 c, which connects the bearing areas 4 a, 4 b, may be made longer, as shown in FIG. 3.
  • The further contacting element 4′ is arranged such that it's first bearing area 4 a′ at least partially lies on an underside 6 of the sensor 1. In this exemplary embodiment, a third bearing area 8, opposite from the first bearing area 4 a′, lies, for example, on the printed circuit board or the DCB board 11. The third bearing area 8 is arranged here on the upper side of the contacting element 4′. As an alternative to this, a partial region of the first bearing area 4 a′ may also lie on the DCB board 11 or an electrode pad 12 a (see FIG. 4). In this case, the partial region of the first bearing area 4 a′ forms a further or second bearing area 4 b′, which serves for bearing on the DCB board 11.
  • The description of the subjects specified here is not restricted to the individual specific embodiments. Rather, the features of the individual embodiments can—as far as technically feasible—be combined with one another in any desired manner.

Claims (14)

1-13. (canceled)
14. A sensor arrangement for a temperature measurement comprising:
a sensor element with at least one electrode; and
at least one contacting element,
wherein the contacting element is arranged and configured for wireless contacting of the sensor element.
15. The sensor arrangement according to claim 14, wherein the contacting element has a first bearing area and a second bearing area, and wherein at least one of the first bearing area or the second bearing area is arranged at least partially on an outer area of the sensor element.
16. The sensor arrangement according to claim 15, wherein the other one of the first and second bearing areas is arranged and configured for connecting the sensor element to a printed circuit board.
17. The sensor arrangement according to claim 15, wherein the first and second bearing areas form a horizontally running region of an upper side and/or an underside of the contacting element, and wherein the bearing areas are connected to another by a vertically running region of the contacting element.
18. The sensor arrangement according to claim 14, wherein the contacting element is designed in a stepped form.
19. The sensor arrangement according to claim 14, wherein the contacting element is designed in a wavy form.
20. The sensor arrangement according to claim 14, wherein the contacting element comprises a metal bracket.
21. The sensor arrangement according to claim 14, wherein the sensor element has an upper side, and wherein the contacting element is at least partially connected to the upper side.
22. The sensor arrangement according to claim 21, wherein the contacting element is sintered on the upper side.
23. The sensor arrangement according to claim 14, wherein the sensor element has an underside, and wherein a further contacting element is at least partially arranged on the underside of the sensor element.
24. A method for producing a sensor arrangement, the method comprising:
producing NTC sheets to form a ceramic main body;
sintering stacked, pressed and decarburized green sheets;
applying Ni/Ag thin-film electrodes to the main body on both sides to form a sensor element; and
applying at least one contacting element to an outer area of the sensor element.
25. The method according to claim 24, further comprising contacting the sensor element to form a printed circuit board by Ag sintering.
26. The method according to claim 24, wherein contacting the sensor element by the contacting element and connecting the sensor element to a printed circuit board are performed in one processing step.
US15/770,155 2015-11-02 2016-10-18 Sensor Arrangement and Method for Producing a Sensor Arrangement Abandoned US20180306646A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102015118720 2015-11-02
DE102015118720.5 2015-11-02
DE102016101246.7 2016-01-25
DE102016101246.7A DE102016101246A1 (en) 2015-11-02 2016-01-25 Sensor arrangement and method for producing a sensor arrangement
PCT/EP2016/074963 WO2017076638A1 (en) 2015-11-02 2016-10-18 Sensor system and method for producing a sensor system

Publications (1)

Publication Number Publication Date
US20180306646A1 true US20180306646A1 (en) 2018-10-25

Family

ID=58545722

Family Applications (4)

Application Number Title Priority Date Filing Date
US15/770,155 Abandoned US20180306646A1 (en) 2015-11-02 2016-10-18 Sensor Arrangement and Method for Producing a Sensor Arrangement
US15/770,160 Abandoned US20180306647A1 (en) 2015-11-02 2016-10-18 Sensor Element and Method for Producing a Sensor Element
US15/773,156 Active 2037-04-02 US10908030B2 (en) 2015-11-02 2016-10-18 Sensor element and method for producing a sensor element
US15/772,790 Active US10788377B2 (en) 2015-11-02 2016-10-18 Sensor element and method for producing a sensor element

Family Applications After (3)

Application Number Title Priority Date Filing Date
US15/770,160 Abandoned US20180306647A1 (en) 2015-11-02 2016-10-18 Sensor Element and Method for Producing a Sensor Element
US15/773,156 Active 2037-04-02 US10908030B2 (en) 2015-11-02 2016-10-18 Sensor element and method for producing a sensor element
US15/772,790 Active US10788377B2 (en) 2015-11-02 2016-10-18 Sensor element and method for producing a sensor element

Country Status (6)

Country Link
US (4) US20180306646A1 (en)
EP (4) EP3371562B1 (en)
JP (5) JP6585844B2 (en)
CN (4) CN108351256A (en)
DE (4) DE102016101248A1 (en)
WO (4) WO2017076639A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020133985A1 (en) 2020-12-17 2022-06-23 Tdk Electronics Ag Sensor arrangement and method for manufacturing a sensor arrangement

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016101248A1 (en) * 2015-11-02 2017-05-04 Epcos Ag Sensor element and method for producing a sensor element
US10470247B2 (en) * 2016-03-02 2019-11-05 Watlow Electric Manufacturing Company Susceptor for use in a fluid flow system
DE102017116533A1 (en) * 2017-07-21 2019-01-24 Tdk Electronics Ag Contact temperature sensor
CN107819293B (en) * 2017-11-30 2024-02-27 杭州泽济电子科技有限公司 Moving contact with miniaturized electronic tag
DE102019127924B3 (en) * 2019-10-16 2021-01-21 Tdk Electronics Ag Component and method for manufacturing a component
DE102019127915A1 (en) * 2019-10-16 2021-04-22 Tdk Electronics Ag Sensor element and method for producing a sensor element
CN114402459A (en) 2019-11-15 2022-04-26 日本汽车能源株式会社 Positive electrode for lithium ion secondary battery and lithium ion secondary battery
DE102019131306A1 (en) 2019-11-20 2021-05-20 Tdk Electronics Ag Sensor element and method for producing a sensor element
DE102020122923A1 (en) * 2020-09-02 2022-03-03 Tdk Electronics Ag Sensor element and method for manufacturing a sensor element

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4230731A (en) * 1978-05-25 1980-10-28 Robertshaw Controls Company Microwave cooking method and control means
US4518839A (en) * 1982-03-03 1985-05-21 Hitachi Heating Appliances Co., Ltd. High frequency heating apparatus with wireless temperature probe
US5161893A (en) * 1987-10-13 1992-11-10 Respiratory Support Products, Inc. Temperature measurement
US20020026757A1 (en) * 2000-05-15 2002-03-07 Scissom James D. Access floor system
US20050101843A1 (en) * 2003-11-06 2005-05-12 Welch Allyn, Inc. Wireless disposable physiological sensor
US20060122473A1 (en) * 2004-10-13 2006-06-08 Kill Robert A Wireless patch temperature sensor system
US20080219319A1 (en) * 2007-01-05 2008-09-11 Jay Buckalew Biological parameter monitoring system and method therefor
US20100226757A1 (en) * 2006-09-14 2010-09-09 Siemens Power Generation, Inc. Instrumented component for combustion turbine engine
US8519866B2 (en) * 2007-11-08 2013-08-27 Siemens Energy, Inc. Wireless telemetry for instrumented component
US20150346039A1 (en) * 2013-02-22 2015-12-03 Murata Manufacturing Co., Ltd. Sensor tag and manufacturing method for sensor tag
US20160377490A1 (en) * 2015-06-25 2016-12-29 Apption Labs Ltd. Food thermometer and method of using thereof
US20170234818A1 (en) * 2014-11-07 2017-08-17 3M Innovative Properties Company Wireless sensing devices and method for detecting hydration

Family Cites Families (89)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477055A (en) 1967-12-22 1969-11-04 Gen Motors Corp Thermistor construction
DE1802132A1 (en) * 1968-10-09 1970-04-16 Siemens Ag Semiconductor arrangement with two semiconductor resistors
US3547835A (en) 1969-06-09 1970-12-15 Du Pont Processes of producing and applying silver compositions,and products therefrom
GB1387415A (en) * 1971-07-28 1975-03-19 Lucas Industries Ltd Method of and apparatus for producing a hot pressed component
US4160227A (en) * 1977-03-18 1979-07-03 Hitachi, Ltd. Thermistor composition and thick film thermistor
AU524439B2 (en) 1979-10-11 1982-09-16 Matsushita Electric Industrial Co., Ltd. Sputtered thin film thermistor
DE3129862A1 (en) * 1981-07-29 1983-02-17 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Resistor arrangement
JPS603102A (en) 1983-06-20 1985-01-09 トキコ株式会社 Method of producing thermistor
US4743881A (en) 1985-05-08 1988-05-10 Motorola, Inc. Ceramic temperature sensor
JPS6283641A (en) * 1985-10-08 1987-04-17 Sharp Corp Sensor element
US5140393A (en) 1985-10-08 1992-08-18 Sharp Kabushiki Kaisha Sensor device
CN86108011B (en) * 1986-11-15 1988-10-26 国营宏明无线电器材厂 Linear thick-film negative temp. coefficient thermistor
FR2645642B1 (en) * 1989-04-06 1994-01-21 Jaeger THERMISTOR TEMPERATURE SENSOR AND MANUFACTURING METHOD THEREOF
DE4025715C1 (en) 1990-08-14 1992-04-02 Robert Bosch Gmbh, 7000 Stuttgart, De
JPH0562806A (en) * 1991-08-30 1993-03-12 Ngk Spark Plug Co Ltd Thermistor and manufacturing method
JPH067204U (en) 1992-06-23 1994-01-28 株式会社芝浦電子製作所 Chip thermistor
JP3203803B2 (en) 1992-09-01 2001-08-27 株式会社デンソー Thermistor type temperature sensor
JPH06160204A (en) 1992-11-26 1994-06-07 Hitachi Ltd Intake air temperature sensor
US20010001205A1 (en) * 1993-02-05 2001-05-17 Terunobu Ishikawa Semiconductor ceramics having negative temperature coefficients of resistance
JPH07174635A (en) 1993-10-27 1995-07-14 Matsushita Electric Works Ltd Sensor circuit and sensor element used therefor
JPH08115804A (en) 1994-10-14 1996-05-07 Murata Mfg Co Ltd Surface-mounted-type ceramic electronic component and its manufacture
JPH08292102A (en) 1995-04-20 1996-11-05 Mitsubishi Materials Corp Radiation sensor and manufacture thereof
JPH0921707A (en) 1995-07-05 1997-01-21 Canon Inc Temperature detection means, manufacture thereof and heater
DE19621001A1 (en) * 1996-05-24 1997-11-27 Heraeus Sensor Nite Gmbh Sensor arrangement for temperature measurement and method for producing the arrangement
JPH1073498A (en) 1996-08-30 1998-03-17 Matsushita Electric Works Ltd Thermal sensor
JPH10242394A (en) 1997-02-27 1998-09-11 Matsushita Electron Corp Fabrication of semiconductor device
DE59805019D1 (en) * 1997-07-01 2002-09-05 Tyco Electronics Logistics Ag HYBRID CIRCUIT ARRANGEMENT WITH OVERLOAD PROTECTION
US6636143B1 (en) 1997-07-03 2003-10-21 Matsushita Electric Industrial Co., Ltd. Resistor and method of manufacturing the same
JPH1126204A (en) 1997-07-09 1999-01-29 Matsushita Electric Ind Co Ltd Resistor and manufacture thereof
TW412755B (en) 1998-02-10 2000-11-21 Murata Manufacturing Co Resistor elements and methods of producing same
JP3489000B2 (en) * 1998-11-06 2004-01-19 株式会社村田製作所 NTC thermistor, chip type NTC thermistor, and method of manufacturing temperature-sensitive resistive thin-film element
US6354736B1 (en) * 1999-03-24 2002-03-12 Honeywell International Inc. Wide temperature range RTD
JP2002048655A (en) * 2000-05-24 2002-02-15 Ngk Spark Plug Co Ltd Temperature sensor and its manufacturing and controlling method
JP3589174B2 (en) 2000-10-24 2004-11-17 株式会社村田製作所 Surface mount type positive temperature coefficient thermistor and its mounting method
US6498561B2 (en) * 2001-01-26 2002-12-24 Cornerstone Sensors, Inc. Thermistor and method of manufacture
JP4780689B2 (en) * 2001-03-09 2011-09-28 ローム株式会社 Chip resistor
JP2002305101A (en) 2001-04-05 2002-10-18 Murata Mfg Co Ltd Surface-mounted positive temperature characteristic thermistor and manufacturing method therefor
CA2453820A1 (en) 2001-07-16 2003-01-30 Sensor Tech, Inc. Sensor device and method for qualitative and quantitative analysis of gas phase substances
CN1433030A (en) 2002-01-14 2003-07-30 陈富强 Metal sheet type resistor making process and structure
US6875950B2 (en) * 2002-03-22 2005-04-05 Gsi Lumonics Corporation Automated laser trimming of resistors
CA2436497A1 (en) 2002-08-09 2004-02-09 Bombardier Inc. Drive sprocket for a tracked vehicle
US7306967B1 (en) 2003-05-28 2007-12-11 Adsem, Inc. Method of forming high temperature thermistors
US7292132B1 (en) * 2003-12-17 2007-11-06 Adsem, Inc. NTC thermistor probe
JP4476701B2 (en) * 2004-06-02 2010-06-09 日本碍子株式会社 Manufacturing method of sintered body with built-in electrode
DE102004031402A1 (en) 2004-06-29 2006-02-09 Siemens Ag Piezoelectric component with predetermined breaking point, method for producing the component and use of the component
JP2007093453A (en) 2005-09-29 2007-04-12 Mitsubishi Materials Corp Surface-mounted temperature sensor
US7595716B2 (en) 2006-02-03 2009-09-29 Murata Manufacturing Co., Ltd. Electronic component and method for manufacturing the same
JP4777817B2 (en) 2006-04-04 2011-09-21 釜屋電機株式会社 Manufacturing method of chip thermistor
US7312690B1 (en) 2006-12-21 2007-12-25 General Electric Company Temperature sensor
DE102007005341A1 (en) 2007-02-02 2008-08-07 Epcos Ag Multi-layer component and method for producing a multilayer component
CN101022048A (en) * 2007-03-23 2007-08-22 上海维安热电材料股份有限公司 Sheet type NTC and producing method thereof
TW200915357A (en) 2007-09-19 2009-04-01 Cyntec Co Ltd Thermistor chip and method of fabricating the same
WO2009111937A1 (en) * 2008-03-12 2009-09-17 电子科技大学 An ntc thin film thermal resistor and a method of producing it
US7891870B2 (en) 2008-04-29 2011-02-22 Ngk Spark Plug Co., Ltd. Temperature sensor element and method of manufacturing the same
DE102008042035A1 (en) 2008-09-12 2010-03-18 Robert Bosch Gmbh Semiconductor arrangement and method for producing a semiconductor device
US8228160B2 (en) 2008-11-14 2012-07-24 Epcos Ag Sensor element and process for assembling a sensor element
CN102483978B (en) 2009-08-28 2015-03-11 株式会社村田制作所 Thermistor and method for producing same
US8400257B2 (en) * 2010-08-24 2013-03-19 Stmicroelectronics Pte Ltd Via-less thin film resistor with a dielectric cap
CN102034580B (en) 2010-11-02 2012-07-18 肇庆爱晟电子科技有限公司 Surface-mounting high-precision large-power NTC (Negative Temperature Coefficient) thermistor and making method thereof
CN102052972B (en) 2010-11-02 2013-06-19 肇庆爱晟电子科技有限公司 Rapid reaction NTC (Negative Temperature Coefficient) temperature sensor and manufacturing method thereof
CN103180915A (en) * 2010-11-03 2013-06-26 埃普科斯股份有限公司 Ceramic multilayered component and method for producing a ceramic multilayered component
DE102010050315C5 (en) 2010-11-05 2014-12-04 Danfoss Silicon Power Gmbh Process for the production of sintered electrical assemblies and power semiconductor modules made therewith
JP5240286B2 (en) 2010-12-15 2013-07-17 Tdk株式会社 Chip thermistor and chip thermistor manufacturing method
DE102011107193A1 (en) 2011-07-13 2013-01-17 Epcos Ag Electric device
CN102288320B (en) 2011-07-22 2013-03-13 肇庆爱晟电子科技有限公司 Manufacturing method of metal-sheet-based negative temperature coefficient (NTC) thermistor temperature sensor
WO2013073324A1 (en) * 2011-11-15 2013-05-23 株式会社村田製作所 Thermistor and manufacturing method therefor
TWI433169B (en) 2012-01-20 2014-04-01 Polytronics Technology Corp Surface mountable thermistor
DE102012207761A1 (en) 2012-05-09 2013-11-14 Continental Automotive Gmbh sensor element
CN102674820B (en) * 2012-06-04 2013-11-27 惠州市富济电子材料有限公司 Insulating material, ceramic heating element containing insulating material, preparation and application
JP5509393B1 (en) 2012-07-13 2014-06-04 Semitec株式会社 Thin film thermistor element and manufacturing method thereof
DE102012110849A1 (en) * 2012-11-12 2014-05-15 Epcos Ag Temperature sensor and method for producing a temperature sensor
US20140137401A1 (en) * 2012-11-19 2014-05-22 Frederick W. Lannert Kit for Improving the Efficiency of a HVAC System and for Securing a Heat Pump from Theft or Damage
CN104078173A (en) * 2013-03-29 2014-10-01 三星电机株式会社 Chip resistor
JP6094422B2 (en) 2013-08-09 2017-03-15 三菱マテリアル株式会社 Temperature sensor
CN104124014A (en) 2014-01-09 2014-10-29 华东理工大学 Double-layer NTC (Negative Temperature Coefficient) thermistor and preparation method thereof
JP2015129731A (en) 2014-01-09 2015-07-16 株式会社村田製作所 temperature sensor
JP5880583B2 (en) * 2014-01-16 2016-03-09 株式会社村田製作所 Temperature sensor and manufacturing method
EP2899518A1 (en) 2014-01-27 2015-07-29 Technische Universität Chemnitz Temperature measurement device
CN203707180U (en) * 2014-02-18 2014-07-09 深圳市安培盛科技有限公司 Ceramic substrate with temperature sensing function
DE102014110553A1 (en) 2014-07-25 2016-01-28 Epcos Ag Sensor element, sensor arrangement and method for producing a sensor element
DE102014110560A1 (en) 2014-07-25 2016-01-28 Epcos Ag Sensor element, sensor arrangement and method for producing a sensor element and a sensor arrangement
CN204007925U (en) * 2014-07-28 2014-12-10 肇庆爱晟电子科技有限公司 The highly reliable temperature-sensitive chip of a kind of quick response
CN104167269B (en) * 2014-07-30 2018-04-27 广东爱晟电子科技有限公司 A kind of quick response heat sensitive chip and preparation method thereof
FR3034248B1 (en) * 2015-03-27 2017-04-14 Commissariat Energie Atomique THERMOSENSITIVE RESISTANCE DEVICE
WO2016183058A1 (en) 2015-05-11 2016-11-17 Delphi Technologies, Inc. Wireless battery charging system varying magnetic field frequency to maintain a desire voltage-current phase relationship
DE102015107322A1 (en) * 2015-05-11 2016-11-17 Borgwarner Ludwigsburg Gmbh Heating resistor and method for producing a heating resistor
DE102016101248A1 (en) * 2015-11-02 2017-05-04 Epcos Ag Sensor element and method for producing a sensor element
DE102015121982A1 (en) * 2015-12-16 2017-06-22 Epcos Ag NTC ceramic, electronic component for inrush current limiting and method for producing an electronic component
CN108109789B (en) * 2017-12-20 2020-01-21 广东爱晟电子科技有限公司 Composite thermistor chip and preparation method thereof

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4230731A (en) * 1978-05-25 1980-10-28 Robertshaw Controls Company Microwave cooking method and control means
US4518839A (en) * 1982-03-03 1985-05-21 Hitachi Heating Appliances Co., Ltd. High frequency heating apparatus with wireless temperature probe
US5161893A (en) * 1987-10-13 1992-11-10 Respiratory Support Products, Inc. Temperature measurement
US20020026757A1 (en) * 2000-05-15 2002-03-07 Scissom James D. Access floor system
US20050101843A1 (en) * 2003-11-06 2005-05-12 Welch Allyn, Inc. Wireless disposable physiological sensor
US20060122473A1 (en) * 2004-10-13 2006-06-08 Kill Robert A Wireless patch temperature sensor system
US20100226757A1 (en) * 2006-09-14 2010-09-09 Siemens Power Generation, Inc. Instrumented component for combustion turbine engine
US20080219319A1 (en) * 2007-01-05 2008-09-11 Jay Buckalew Biological parameter monitoring system and method therefor
US8519866B2 (en) * 2007-11-08 2013-08-27 Siemens Energy, Inc. Wireless telemetry for instrumented component
US20150346039A1 (en) * 2013-02-22 2015-12-03 Murata Manufacturing Co., Ltd. Sensor tag and manufacturing method for sensor tag
US20170234818A1 (en) * 2014-11-07 2017-08-17 3M Innovative Properties Company Wireless sensing devices and method for detecting hydration
US20160377490A1 (en) * 2015-06-25 2016-12-29 Apption Labs Ltd. Food thermometer and method of using thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020133985A1 (en) 2020-12-17 2022-06-23 Tdk Electronics Ag Sensor arrangement and method for manufacturing a sensor arrangement
WO2022128468A1 (en) 2020-12-17 2022-06-23 Tdk Electronics Ag Sensor arrangement and method for producing a sensor arrangement

Also Published As

Publication number Publication date
DE102016101247A1 (en) 2017-05-04
JP6585844B2 (en) 2019-10-02
JP2019500589A (en) 2019-01-10
US20180306647A1 (en) 2018-10-25
DE102016101249A1 (en) 2017-05-04
JP2019207241A (en) 2019-12-05
WO2017076631A1 (en) 2017-05-11
EP3371565A1 (en) 2018-09-12
JP2018535413A (en) 2018-11-29
CN108139276A (en) 2018-06-08
EP3371563B1 (en) 2020-01-01
US10788377B2 (en) 2020-09-29
EP3371562A1 (en) 2018-09-12
EP3371563A1 (en) 2018-09-12
CN108351256A (en) 2018-07-31
WO2017076639A1 (en) 2017-05-11
CN108351257A (en) 2018-07-31
US10908030B2 (en) 2021-02-02
JP6564533B2 (en) 2019-08-21
DE102016101246A1 (en) 2017-05-04
DE102016101248A1 (en) 2017-05-04
JP2019502898A (en) 2019-01-31
WO2017076632A1 (en) 2017-05-11
CN108351258A (en) 2018-07-31
JP2018535412A (en) 2018-11-29
WO2017076638A1 (en) 2017-05-11
US20180321091A1 (en) 2018-11-08
EP3371564A1 (en) 2018-09-12
US20190204162A1 (en) 2019-07-04
EP3371565B1 (en) 2020-01-01
EP3371562B1 (en) 2020-05-13

Similar Documents

Publication Publication Date Title
US20180306646A1 (en) Sensor Arrangement and Method for Producing a Sensor Arrangement
EP2472529B1 (en) Thermistor and method for producing same
US9958335B2 (en) Temperature probe and method for producing a temperature probe
US9797781B2 (en) Thermistor device
CN108028110B (en) Resistor and temperature sensor
CN114729840A (en) Sensor element and method for producing a sensor element
JPH1196871A (en) Resistance-temperature fuse and its manufacture
CN114041194A (en) NTC thin film thermistor and method of manufacturing NTC thin film thermistor
EP3370049B1 (en) Sensor substrate and detection module
US20220283040A1 (en) Sensor Element and Method for Manufacturing a Sensor Element
US20160155546A1 (en) Thermistor element
US20160055935A1 (en) Apparatus and Method for Establishing an Electrically Conductive and Mechanical Connection
JP5034830B2 (en) Chip-type thermistor and circuit board having the same
JP2633838B2 (en) High temperature thermistor
JP2007163299A (en) Pressure sensor and manufacturing method therefor
US20160064124A1 (en) Electronic component
JPH0918094A (en) Wiring board
JPS63138704A (en) Thermistor device
JP2007163298A (en) Pressure sensor and manufacturing method therefor
JP2002350268A (en) Package for pressure detector

Legal Events

Date Code Title Description
AS Assignment

Owner name: EPCOS AG, GERMANY

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:IHLE, JAN;WEIDENFELDER, ANKE;SIGNING DATES FROM 20180717 TO 20180725;REEL/FRAME:046587/0204

STPP Information on status: patent application and granting procedure in general

Free format text: APPLICATION DISPATCHED FROM PREEXAM, NOT YET DOCKETED

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION