WO2009111937A1

WO2009111937A1 - An ntc thin film thermal resistor and a method of producing it

Info

Publication number: WO2009111937A1
Application number: PCT/CN2008/073343
Authority: WO
Inventors: 杨传仁; 陈宏伟; 张继华; 杨莉军
Original assignee: 电子科技大学
Priority date: 2008-03-12
Filing date: 2008-12-05
Publication date: 2009-09-17
Also published as: US20110068890A1

Abstract

The present invention discloses an NTC thin film thermal resistor and a method of producing it. The NTC thin film thermal resistor includes substrate, sensitive layer, inner electrode and terminal electrode. There is a layer of glass glaze between the substrate and the sensitive layer, the glass glaze is used to fill the surface of the substrate. The NTC thin film thermal resistor is produced by the technology of glass glaze surface coating, which could flatten the surface of the cheap ceramic substrate, and transition metal oxide is used as sensitive material and is used for interdigital electrode structure, this can reduce the manufacture cost, make the structure of the NTC thin film thermal resistor better. The resistance of the NTC thin film thermal resistor could be controlled by the adjustment of the material ingredient, or could be controlled by the adjustment of the width, space and length of the inner electrode interdigital.

Description

Instruction manual

NTC thin film thermistor and manufacturing method thereof

Technical field

This invention relates to thin film components, and more particularly to thin film NTC thermistors and methods of making same.

Background technique

Coefficient abbreviated as NTC) Thermistor, also known as NTC thermistor, usually composed of NTC heat-sensitive materials, such as transition metal oxide semiconductor ceramic materials, whose resistance decreases exponentially with increasing temperature. , is the ideal temperature sensor material. In the prior art, the NTC thermistor is block-shaped, and its main disadvantage is that the bulk material has a large volume and a large heat capacity, which greatly reduces the temperature response speed of the NTC thermistor; Cutting, grinding, polishing and other mechanical processing, so the precision is not high; the existing NTC thermistor can not achieve large-scale automated production, so the product consistency, reliability, and high cost.

[3] About NTC Thin Film Thermistor, Japanese Patent Tokkai

64-50501 reports on the fabrication of NTC thermistors using transition metal Mn, Ni, Co, Fe, Cu oxide films. Since the resistivity of these materials is usually high and the structure of the resistor is unreasonable, the resistance is too large after the formation of the thin film thermistor, and the application range is greatly limited. During the production process, high-frequency sputtering is subjected to plasma treatment after film formation, and the preparation process is too long.

[4] Japanese Patent No. 63-266801 is applied to the upper and lower sides of the sensitive layer film. However, the NTC thermistor of this structure often appears due to the extremely small film resistance of the sensitive layer, and the electrode is directly separated by a very thin sensitive layer. Short circuit.

[5] US Patent US 6,368,734 B1 reported by LaCo0 ₃

NTC film thermistor formed by thin film. The NTC film thermistor has a lower resistivity than a transition metal oxide such as Mn, Ni, Co, Fe, Cu, etc., and its negative temperature coefficient is very small, resulting in low sensitivity of the thermistor; and due to a single material type, Therefore, the resistivity and temperature coefficient cannot be serialized.

[6] US Patent US

6,880,134B2 planarizes the surface of the substrate using silicon nitride. This method is impossible to fill the ceramic base The micron-sized pores of the plate are such that they reach a nano-scaled surface.

[7] The substrates used in existing thin film technology are generally expensive single crystal substrates (such as single crystal Si, LaA10 ₃ ,

MgO, sapphire, GaN, etc. or mechanically polished ceramic substrates are costly. There are micron-scale defects on the surface of the polished ceramic substrate, so the use of the NTC film substrate will make the NTC film and the internal electrode discontinuous, resulting in defects, disconnection, short circuit, and the like.

Summary of the invention

[8] The technical problem to be solved by the present invention is to provide a method for flattening the surface of a substrate by using a glass glaze, so that the surface roughness of the substrate is from the micron level to the nanometer level, which satisfies the requirements for the preparation of the thin film device. The invention also utilizes the interdigitated electrode structure to solve the problem that the resistance of the thermistor made of the transition metal as a sensitive material is too high.

[9] The present invention solves the technical problem, and the technical solution adopted is:

[10] The NTC thin film thermistor comprises a substrate, a sensitive layer, an inner electrode and a terminal electrode, wherein a glaze is arranged between the substrate and the sensitive layer, and the glass glaze is used for filling the Substrate surface

[11] Specifically, the sensitive layer is composed of a transition metal oxide film.

[12] NTC thin film thermistor manufacturing method, including the following steps:

[13] A, preparing a layer of glass glaze on the surface of the ceramic substrate;

[14] B, preparing a sensitive layer on the surface of the glass glaze;

[15] C, preparing an internal electrode on the surface of the sensitive layer;

[16] D, preparing a protective layer;

[17] E, preparing a terminal electrode;

[18] F, slicing, to obtain sheet-like film resistance;

[19] Further, the glass glaze is prepared by a sol-gel method, and the specific steps are as follows:

[20] A1) preparing a sol containing a glass glaze component;

[21] A2) Conventional cleaning of ceramic substrates;

[22] A3) uniformly coating the glass glaze sol on the substrate;

[23] A4) gelation and drying of the sol;

[24] A5) sintering of the glass glaze;

[25] 敏感 a reactive layer is prepared by reactive sputtering, and the sensitive layer material is a transition metal oxide, and the specific steps are as follows: Next:

[26] Bl) preparing a transition metal oxide target;

[27] B2) sputtering the target onto a substrate to form a film;

[28] B3) Annealing of sensitive layer;

[29] The internal electrode is prepared by evaporation or sputtering, and the internal electrode material may be Au, Cu, Al or other conductive materials; the specific steps are as follows:

[30] C1) evaporating or sputtering the inner electrode material to the surface of the sensitive layer to form a thin film of a conductive layer;

[31] C2) etching the conductive layer film to form an interdigital electrode;

[32] The Ag/Ni/Sn three-layer electrode was prepared by electroplating.

[33] The beneficial effects of the present invention are that the method of planarizing the surface of an inexpensive ceramic substrate by using a surface-coated glass glaze method reduces the manufacturing cost of the NTC film thermistor and improves the thermal sensitivity of the NTC film. The structure of the resistor improves reliability and yield. The use of transition metal oxides as a sensitive material enhances the performance of _NTC thin film thermistors and expands the range of application. The resistance of the NTC film thermistor of the present invention can be controlled by adjusting the material formulation or the width, gap and length of the internal electrode fingers. Accordingly, the present invention provides a method of fabricating an NTC thin film thermistor that reduces cost, improves reliability, and yields.

DRAWINGS

[34] Figure 1 is a schematic structural view of a NTC thin film thermistor;

[35] Among them: 1 ceramic substrate, 2 - glass glaze layer, 3 - sensitive layer, 4 inner electrode, 5

a protective layer, 6-terminal electrode;

[36] Figure 2 is a flow chart of the preparation of NTC thin film thermistor;

[37] Figure 3 is an SEM image of a ceramic substrate;

[38] Figure 4 is an SEM image of a glass glaze prepared on the surface of a ceramic substrate;

[39] Figure 5 is a three-dimensional AFM image of a glass glaze prepared on the surface of a ceramic substrate;

[40] Figure 6 is a graph showing the resistance temperature characteristics of a typical NTC thin film thermistor.

detailed description

[41] The invention adopts a process for preparing a glass glaze on the surface of a substrate, planarizes the surface of the substrate, and combines an advanced reactive sputtering process to prepare a transition metal oxide film as a sensitive layer, and further utilizes The etched interdigital electrode acts as an internal electrode, which improves the accuracy of the NTC thermistor and expands the range of application.

[42] Example

Referring to Fig. 1, the NTC film thermistor of this example is composed of a substrate 1, a glass glaze 2, a sensitive layer 3, an internal electrode 4, a protective layer 5, and a terminal electrode 6. The glass glaze 2 located between the substrate 1 and the sensitive layer 3 is filled in the pits on the surface of the substrate 1 to flatten the surface of the substrate 2. The sensitive layer is composed of a transition metal oxide film such as an oxide film of Mn, Ni, Co, Fe, Cu or the like. In Fig. 1, the inner electrode 4 is composed of a layer of a conductive metal film, and the inner electrode 4 is processed into a comb electrode structure (or referred to as an interdigitated electrode structure) by an etching process. This electrode structure increases the current carrying area and can greatly reduce the resistance value. By adjusting the width, gap and length of the interdigital finger, the resistance value can be precisely controlled. The substrate 1 of this example uses an A1 ₂ 0 ₃ ceramic substrate, and since a glass glaze is prepared between the sensitive layer 3 and the substrate 1, the pits on the surface of the A1 ₂ 0 ₃ ceramic substrate can be filled, so The substrate 1 of this example does not require mechanical polishing.

[44] In this example, the manufacturing process of NTC film thermistor is shown in Figure 2. The process steps are as follows:

[45] A, in unpolished A1 ₂ 0 ₃

Preparation of a layer of glass glaze on the surface of the ceramic substrate: 玻璃 Preparation of glass glaze by sol-gel method, the specific steps are as follows

[46] A1, using tetraethyl orthosilicate as a complexing agent to prepare a CaAISi-based or MgAISi-based glass glaze sol; [47] A2, conventional cleaning treatment of the ceramic substrate;

[48] A3, uniformly coating the glass glaze sol on the above substrate; the method of coating the glass glaze sol is spin coating or pulling or spraying or dipping;

[49] A4, gelation and drying of the glass glaze sol;

[50] A5, high temperature sintering treatment.

[51] In the above glass glaze preparation process, it is easy to select a suitable formulation to make the glass glaze softening temperature reach 1100~1500 °C, and the glass glaze has a higher softening temperature to avoid trouble in the subsequent process. On the other hand, the glass glaze does not contain alkali metal ions, which is beneficial to improve the electrical performance index of the glass glaze.

[52] B. Preparing a sensitive layer on the surface of the glass glaze: 敏感 preparing a sensitive layer by a reactive sputtering process, and the sensitive layer material is a transition metal oxide; the specific steps are as follows:

[53] B1, preparing a transition metal oxide target;

[54] B2, forming a transition metal oxide film on the surface of the glass glaze by a reactive sputtering process; [55] B3, annealing treatment.

[56] C. Preparing an internal electrode on the surface of the sensitive layer: 内 Preparing an internal electrode by evaporation or sputtering, and the internal electrode material may be Au, Al, Pd, Cu or other conductive materials; the specific steps are as follows:

[57] Cl, evaporating or sputtering the inner electrode material to the surface of the sensitive layer to form a conductive film;

[58] C2, the conductive layer film is dry or wet etched to form an interdigital electrode.

[59] D. Preparation of protective layer: A layer of Si0 ₂ , Si ₃ N ₄ is prepared on the inner electrode by PECVD or sputtering process, and the end conductive layer is exposed by etching to prepare a terminal electrode.

[60] E, preparing the terminal electrode; 釆 using the silver or electroplating method to prepare the terminal electrode, the terminal electrode material can be used for Ag,

Ni, Sn or other conductive metal, the terminal electrode of this example is an Ag/Ni/Sn three-layer terminal electrode.

[61] F, slicing, to obtain a sheet-like film resistor.

[62] The present invention is advantageous in that a substrate having a flat surface conforming to the requirements of a thin film circuit product is obtained by coating a glass glaze on an inexpensive unpolished ceramic substrate to replace a single crystal substrate (e.g., single crystal Si, LaA10 ₃ , Mg 0, sapphire, GaN, etc.) or mechanically polished substrates. Therefore, the present invention is of great significance for reducing the preparation cost of the NTC film thermistor. Similarly, the NTC film thermistor prepared by the invention has a special device structure including a glass glaze layer, a sensitive layer, an internal electrode, a protective layer and a terminal electrode, and the width of the oxide layer of the sensitive layer and the width of the internal electrode interdigitated finger are controlled. The gap and length can adjust the resistance and temperature sensitivity of the NTC film thermistor.

[63] Figures 3 and 4 show the A1 _₂ 0 A1 ₂ 0 ₃ a scanning electron microscope the surface of the ceramic substrate (SEM) images of the ceramic substrate ₃ and the non-mechanical polishing process according to the present invention can be seen The surface roughness (RMS) index of the substrate treated by the present invention (Fig. 4) was significantly improved, and its index was superior to that of the mechanically polished substrate.

5 is a three-dimensional atomic force microscope (AFM) image of the treated A1 ₂ 0 ₃ substrate of the present invention. It can be seen that the surface of the substrate on which the glass glaze is prepared is flat, the RMS is 0.55 nm, and the height fluctuation is not more than 5 nm. .

[65] Figure 6 is a graph showing the resistance temperature characteristics of a typical NTC film thermistor. Over a wide temperature range (about 0 to 60 ° C), especially around 20 ° C, the NTC film thermistor changes with temperature. Larger, with more prominent temperature sensitivity.

Claims

Claim

[1] NTC thin film thermistor, comprising a substrate, a sensitive layer, an inner electrode and a terminal electrode, characterized in that: a glass glaze is interposed between the substrate and the sensitive layer, and the glass glaze is used for filling the Substrate surface

[2] The NTC film thermistor according to claim 1, wherein the sensitive layer is composed of a transition metal oxide film.

[3] The NTC film thermistor according to claim 1 or 2, wherein the inner electrode has an interdigitated electrode structure.

[4] The NTC film thermistor according to any of the preceding claims, wherein the substrate is a ceramic substrate that is not mechanically polished.

[5] The NTC film thermistor according to claim 4, wherein the ceramic substrate material is Al ₂ 0 ₃

[6] NTC thin film thermistor manufacturing method, including the following steps:

A. preparing a layer of glass glaze on the surface of the ceramic substrate;

B. preparing a sensitive layer on the surface of the glass glaze;

C. preparing an internal electrode on the surface of the sensitive layer;

D. preparing a protective layer;

E, preparing a terminal electrode;

F, slicing, to obtain a sheet-like film resistor.

[7] The NTC film thermistor manufacturing method according to claim 6, wherein in step A

, 制备 Sol-gel method for the preparation of glass glaze, the specific steps are as follows:

A1) preparing a sol containing a glass glaze component;

A2) Regular cleaning of the ceramic substrate;

A3) uniformly coating the glass glaze sol on the substrate;

A4) gelation and drying of the sol;

A5) Sintering of the glass glaze layer.

[8] The method for producing an NTC film thermistor according to claim 7, wherein the glass glaze is a CaAISi-based or MgAISi-based glass glaze containing no alkali metal ions.

[9] The method of manufacturing a NTC film thermistor according to claim 7, wherein in step A1, ethyl orthosilicate is used as a complexing agent.

[10] The method of manufacturing a NTC film thermistor according to claim 7, wherein in the step A3, the method of coating the glass glaze sol is spin coating or pulling or spraying or dipping.

The method for producing a NTC film thermistor according to any one of claims 6 to 10, wherein the glass glaze has a softening temperature of 1100 to 1500 °C.

[12] The method of manufacturing a NTC film thermistor according to claim 6, wherein in step B

The photosensitive layer is prepared by a reactive sputtering method, and the sensitive layer material is a transition metal oxide. The specific steps are as follows:

B1) preparing a transition metal oxide target;

B2) sputtering the target onto the surface of the glass glaze to form a film;

B3) Annealing of the sensitive layer.

[13] The method of manufacturing a NTC film thermistor according to claim 6, wherein in step C

The inner electrode is prepared by evaporation or sputtering. The inner electrode material may be made of Au, Cu, Al or other conductive materials; the specific steps are as follows:

C1) evaporating or splashing the inner electrode material on the surface of the sensitive layer to form a conductive film; C2) etching the conductive layer film to form an interdigital electrode.

[14] The method of manufacturing a NTC film thermistor according to claim 6, wherein the terminal is substantially Ag or an Ag/Ni/Sn three-layer terminal electrode.