US20180135776A1 - Angle valve having fixed heater block - Google Patents
Angle valve having fixed heater block Download PDFInfo
- Publication number
- US20180135776A1 US20180135776A1 US15/507,944 US201515507944A US2018135776A1 US 20180135776 A1 US20180135776 A1 US 20180135776A1 US 201515507944 A US201515507944 A US 201515507944A US 2018135776 A1 US2018135776 A1 US 2018135776A1
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- United States
- Prior art keywords
- heater block
- fixed heater
- valve
- angle valve
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K49/00—Means in or on valves for heating or cooling
- F16K49/002—Electric heating means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/48—Attaching valve members to screw-spindles
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K41/00—Spindle sealings
- F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K49/00—Means in or on valves for heating or cooling
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Definitions
- the present invention relates to an angle valve including a fixed heater block.
- the angle valve includes: a valve casing 100 having a fluid flow hole 101 defined therein and including an inlet 110 through which fluid is introduced and an outlet 120 through which the fluid is discharged; a fixed heater block 200 fixed in the valve casing 100 and having a slide hole 210 defined therein; a driving member 300 detachably coupled to an upper portion of the valve casing 100 to provide a driving force; and a sealing unit 400 connected to the driving member 300 to open and close the inlet 110 according to whether the driving member 300 is driven.
- a semiconductor device is manufactured in a vacuum state to completely block contact of foreign substances contained in the air.
- an angle valve is installed to transfer fluid moved by a vacuum pump to a chamber or block the fluid.
- the angle valve includes an inlet through which the fluid is introduced and an outlet through which the fluid is discharged, and a sealing unit moves according to whether a cylinder is driven to open and close the inlet, the fluid is transferred into the chamber or blocked.
- the particles generated by the above-described chemical reaction are precipitated at a low temperature and stuck on the sealing unit or the like to reduce a lifespan of the angle valve.
- a heater radiating heat that is greater than a predetermined temperature is attached in the angle valve to increase an inner temperature of the angle valve, thereby preventing the precipitation phenomenon of the particles.
- the present invention provides an angle valve including a fixed heater block, in which as the fixed heater block is fixed in a bellows to maintain a fixed state of the fixed heater block although the driving member operates, the angle valve may improve a lifespan and efficiency of the fixed heater block and reduce the number of replacement of a component, and prevent a wire connected to the fixed heater block from being damaged by an operation of a driving member.
- the present invention also provides an angle valve including a fixed heater block, in which as a heat transfer block vertically moving by driving of a driving member is connected to the fixed heater block of which an entire body generates heat, thermal conduction and radiation may be performed uniformly in a valve casing and a bellows.
- An embodiment of the inventive concept provides an angle valve 1 having a fixed heater block, the angle valve 1 including: a valve casing 100 having a fluid flow hole 101 defined therein and including an inlet 110 through which fluid is introduced and an outlet 120 through which the fluid is discharged; a fixed heater block 200 fixedly installed in the valve casing 100 and having a slide hole 210 defined therein; a driving member 300 detachably coupled to an upper portion of the valve casing 100 to provide a driving force; and a sealing unit 400 connected to the driving member 300 to open and close the inlet 110 according to whether the driving member 300 is driven.
- the sealing unit 400 may include a heat transfer block 410 having a connection groove 411 into which the fixed heater block 200 is inserted so that heat generated from the fixed heater block 200 is conducted thereto.
- the sealing unit 400 may include: a fixing plate 420 having a fixing portion 421 horizontally extending from an upper portion thereof, a support 422 disposed on a lower portion thereof, and an insertion hole 423 defined in a central portion of the support 422 ; a bellows 430 coupled to a lower portion of the support 422 to separate a vacuum state provided in the valve casing 100 from the atmospheric state; and a sealing plate 440 having a coupling groove 441 recessed in an inside direction so that the heat transfer block 410 is inserted therein.
- the fixed heater block 200 may further include a holding part 220 extending from an upper outer circumference so that the holding part 220 of the fixed heater block 200 is seated on the support 422 of the fixing plate 420 to dispose the fixed heater block 200 in the bellows 430 .
- a heat transfer shaft 450 configured to connect the driving member 300 to a heat transfer block 610 may be provided.
- the heating fixed heater block is fixed in the bellows to maintain the fixed state of the fixed heater block although the driving member operates, the lifespan and efficiency of the fixed heater block is improved to reduce the number of replacement of the component, and the wire connected to the fixed heater block is prevented from being damaged by the operation of the driving member.
- the thermal conduction and radiation may be performed uniformly in the valve casing and the bellows.
- FIG. 1 is a perspective view illustrating an overall appearance of an angle valve including a fixed heater block according to a preferred embodiment of the present invention.
- FIG. 2 is an exploded perspective view illustrating a state in which the angle valve including the fixed heater block is exploded according to a preferred embodiment of the present invention.
- FIG. 3 is an exploded cross-sectional view illustrating a state in which the angle valve including the fixed heater block is exploded according to a preferred embodiment of the present invention.
- FIG. 4 is a cross-sectional view illustrating a cross-section of the angle valve including the fixed heater block according to a preferred embodiment of the present invention.
- FIG. 5 is a view illustrating a state in which the angle valve including the fixed heater block operates according to a preferred embodiment of the present invention.
- an angle valve 1 includes a valve casing 100 , a fixed heater block 200 , a driving member 300 , and a sealing unit 400 .
- valve casing 100 is a component serving as a passage allowing a fluid to move from a vacuum pump (not shown) to a chamber (not shown).
- the valve casing 100 may include an inlet 110 through which the fluid is introduced and an outlet 120 through which the fluid is discharged.
- the valve casing 100 may include an inner space in which a component of the present invention, e.g., the fixed heater block 200 that will be described later is inserted and a fluid flow hole 101 through which the fluid moves is defined.
- a component of the present invention e.g., the fixed heater block 200 that will be described later is inserted and a fluid flow hole 101 through which the fluid moves is defined.
- a first coupling bracket 130 closely connecting the valve casing 100 to the driving member 300 that will be described later may be disposed on an upper portion of the valve casing 100 .
- a through-hole 131 is defined in a central portion of the first coupling bracket 130 , and an L-shaped fixed protrusion 132 is disposed on an upper portion of an inner circumferential surface of the through-hole 131 .
- the first coupling bracket 130 may be coupled to a fixing plate 420 that will be described later.
- the fixed heater block 200 is a component fixedly installed in the valve casing 100 and heating an inside of the valve casing 100 to remove particles generated from the inside of the valve casing 100 .
- the holding part 220 of the fixed heater block 200 may be connected to a support 422 of the fixing plate 420 to allow the fixed heater block 200 to be seated on the fixing plate 420 .
- the holding part 220 and the support 422 may be fixed by, e.g., screw coupling.
- the fixed heater block 200 including the holding part 220 may transfer heat to the support 422 of the fixing plate 420 and a bellows 700 connected to the support 422 and coupled to the fixing plate 420 , which will be described later.
- a slide hole 210 into which a lower portion of a shaft 330 that will be described later is inserted, and installation grooves 230 , into which a heater and a thermocouple are respectively inserted, may be defined in the fixed heater block 200 .
- the fixed heater block 200 is fixedly installed in the valve casing 100 , since the fixed heater block 200 is fixed although the shaft 330 vertically moves, other components may not be affected during operations (e.g., vertical movement of a piston 320 and elastic movement of an elastic member 316 ), and a wire 510 and a sensor 520 which are connected to a heating device 500 installed outside the angle valve 1 including the fixed heater block 200 may be prevented from being worn or damaged.
- the driving member 300 is a component coupled to an upper portion of the valve casing 100 to drive the angle valve 1 including the fixed heater block.
- the cylinder type driving device including a piston 320 and a shaft 330 is described as an example, the driving member 300 may further include, e.g., an actuator.
- the cylinder 310 includes the piston 320 and the shaft 330 , which will be described later.
- the cylinder 310 may be divided into a piston driving portion 311 for driving the piston 320 and a shaft driving portion 312 for driving the shaft 330 connected to the piston 320 .
- the piston driving portion 311 may be provided as a sealed space separated from the shaft driving portion 312 for the purpose of smooth operation of the piston 320 and blocking of heat transfer.
- a second coupling bracket 313 may be provided on a lower portion of the cylinder 310 so that the second coupling bracket 313 is connected to the first coupling bracket 130 to couple the valve casing 100 to the cylinder 310 .
- a cylinder shaped support 314 including an insertion hole 315 through which the shaft 330 is inserted to pass is provided on a central lower portion of the second coupling bracket 313 , the lower portion of the support 314 presses the upper portion of the fixed heater block 200 in a state in which the valve casing 100 is coupled to the cylinder 310 to further fix the fixed heater block 200 .
- an elastic member 316 guiding movement of the shaft 330 may be provided in the shaft driving portion 312 .
- the piston 400 is a component installed on the piston driving portion 311 to vertically move by a pneumatic pressure.
- the piston 400 may include a piston plate 321 and a shaft shaped piston rod 322 disposed on a lower portion of the piston plate 321 .
- the piston plate 321 may be installed on an inside of the piston driving portion 311 , and the piston rod 322 may pass through the piston driving portion 311 and be exposed to an inside of the shaft driving portion 312 .
- the shaft 330 may operate together according to whether the piston 320 vertically moves.
- the shaft 330 is a component having an upper portion connected to the piston rod 322 and a lower portion inserted into the slide hole 210 and connected to a sealing plate 440 that will be described later.
- the shaft 330 serves to open and close the sealing plate 440 according to whether the piston 320 vertically moves.
- a catching plate 331 may be provided on an outer circumference of the shaft 330 so that the elastic member 316 is interlocked thereto to provide an elastic force to the shaft 330 .
- the shaft 330 may be prevented from being worn and damaged due to friction because the lower outer circumference of the shaft 330 does not contact the inner surface of the slide hole 210 , and heat generated from the fixed heater block 200 may not be directly transferred to the shaft 330 .
- a portion of the shaft 330 disposed in the shaft driving portion 312 may be additionally provided with an insulating material so that the heat generated by the fixed heater block 200 is not transferred into the cylinder 310 .
- the sealing unit 400 is a component coupled to the lower portion of the shaft 330 to open and close the inlet 110 by the vertical movement of the piston 320 .
- the sealing unit 400 includes a heat transfer block 410 , a fixing plate 420 , a bellows 430 , a sealing plate 440 , and a heat transfer shaft 450 .
- the heat transfer block 410 is a component surrounding a central portion and a lower outer circumference of the fixed heater block 200 so that heat radiated from the fixed heater block 200 is conducted thereto.
- a connection groove 411 may be defined in a central portion thereof so that the fixed heater block 200 is inserted.
- the heat transfer block 410 may vertically slide while surrounding the central portion and the lower circumference of the fixed heater block 200 according to whether the piston 320 vertically moves.
- the fixing plate 420 serves to allow an upper portion of the fixed heater block 200 to be seated on the support 142 and allow the fixed heater block 200 to be fixed to an inside of the bellows 430 .
- the fixing plate 420 has a cylindrical shape including an inner space and includes a fixing part 421 provided on an upper portion thereof for connection with the fixed protrusion 132 , a support 422 provided on a lower portion thereof, and an insertion hole 423 defined in a central portion of the support 422 .
- a stepped portion may be provided between the fixing portion 421 and the support 422 .
- a space is defined between the holding part 220 and the second coupling bracket 313 to prevent the heat radiated from the fixed heater block 200 from being conducted to the driving member 300 due to the space, thereby improving product reliability of the driving member 300 .
- a sensor 520 connected to a heating device 500 that will be described later may be installed in the space.
- the bellows 430 is characterized to separate a vacuum state provided in the valve casing 100 from the atmospheric state.
- the bellows 430 may have an upper portion fixed to the fixing plate 420 and a lower portion fixed to a sealing plate 440 that will be described later.
- the sealing plate 440 is a component configured to open and close the inlet 110 .
- the sealing plate may have a coupling groove 441 for connection with the heat transfer block 410 .
- the heat transfer shaft 450 may be inserted into the slide hole 210 to allow the shaft 330 and the heat transfer block 410 to be connected to each other.
- a temperature adjusting sensor 600 for detecting a temperature of the valve casing 100 may be installed on the angle valve 1 including the fixed heater block.
- the present invention has a structure in which the valve casing 100 in which the fixed heater block 200 is installed and the driving member 300 are separately constituted to be coupled to and separated from each other, the components provided in the valve casing 100 and the driving member 300 may be efficiently and conveniently replaced and inspected.
- FIG. 5 is a view illustrating a state in which as compressed air in the piston driving portion 311 is discharged, the piston 320 , the shaft 330 , and the sealing plate 440 descend, and the inlet 110 is closed due to the descending of the sealing plate 440 .
- the fixed heater block 200 disposed in the bellows 430 is fixed in the valve casing 100 although the piston 320 , the shaft 330 , and the sealing plate 440 are linked to perform a reciprocal movement
- the wire 510 and the sensor 520 which are connected to the heating device 500 installed to the outside of the fixed heater block 200 , and the angle valve 1 including the fixed heater block may be prevented from being worn or damaged by the movement thereof, and the fixed heater block 200 may stably radiate heat to increase an inner temperature of the valve casing 100 , thereby effectively removing particles generated in the valve casing 100 .
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Valves (AREA)
- Sliding Valves (AREA)
- Lift Valve (AREA)
- Mechanically-Actuated Valves (AREA)
Abstract
Provided is an angle valve including a fixed heater block. The angle valve includes a valve casing 100 having a fluid flow hole 101 defined therein and having an inlet 110 through which fluid is introduced and an outlet 120 through which the fluid is discharged, a fixed heater block 200 fixedly installed in the valve casing 100 and having a slide hole 210 defined therein, a driving member 300 detachably coupled to an upper portion of the valve casing 100 to provide a driving force, and a sealing unit 400 connected to the driving member 300 to open and close the inlet 110 according to whether the driving member 300 is driven.
Description
- The present invention relates to an angle valve including a fixed heater block. The angle valve includes: a
valve casing 100 having afluid flow hole 101 defined therein and including aninlet 110 through which fluid is introduced and anoutlet 120 through which the fluid is discharged; afixed heater block 200 fixed in thevalve casing 100 and having aslide hole 210 defined therein; adriving member 300 detachably coupled to an upper portion of thevalve casing 100 to provide a driving force; and asealing unit 400 connected to thedriving member 300 to open and close theinlet 110 according to whether thedriving member 300 is driven. - In general, since each of a semiconductor and LCD has a high precision degree, high cleanliness and special manufacturing technique are required.
- Due to such a reason, a semiconductor device is manufactured in a vacuum state to completely block contact of foreign substances contained in the air.
- Accordingly, technique for sealing a vacuum operation area of a semiconductor manufacturing apparatus from the atmosphere also gives significant effects on a quality of a semiconductor product.
- In the above-described processing area for manufacturing a semiconductor, an angle valve is installed to transfer fluid moved by a vacuum pump to a chamber or block the fluid.
- As the angle valve includes an inlet through which the fluid is introduced and an outlet through which the fluid is discharged, and a sealing unit moves according to whether a cylinder is driven to open and close the inlet, the fluid is transferred into the chamber or blocked.
- Meanwhile, as the fluid is discharged by the vacuum pump, process by-products are introduced into the angle valve. Due to this, when the bellows made of stainless steel or metal in the angle valve is exposed, particles are generated due to a chemical reaction.
- The particles generated by the above-described chemical reaction are precipitated at a low temperature and stuck on the sealing unit or the like to reduce a lifespan of the angle valve. To prevent the sticking of the particles, a heater radiating heat that is greater than a predetermined temperature is attached in the angle valve to increase an inner temperature of the angle valve, thereby preventing the precipitation phenomenon of the particles.
- According to the
below patent document 1 of “Vacuum exhaust valve of CVD apparatus (Korean Pat. No. 10-0256768)”, in a vacuum exhaust valve of a CVD apparatus in which an operation connecting part of a valve body that is opened and closed by an actuator disposed thereabove is sealed by a bellows in a valve box having a gas inlet or a gas outlet at one side thereof and a gas outlet at a lower side thereof, a sheath heater on an elastically stretchable coil is disposed at an outer circumference side of the operation connecting part of the valve body in the bellows, a lower end thereof is fixed above the valve body, an upper end is fixed to a ceiling surface in the valve box, and then connected to a lead wire outside the valve box, a sheath thermocouple controlling a temperature of the sheath heater is concentrically disposed at an inner circumferential side of the sheath heater with the same level and the same coil winding number, and a rubber heater is attached to an outer surface of the valve box. Accordingly, the valve body and the sheath heater in the bellows may integrally operate to heat the valve body and the bellows while the valve is opened and closed, thereby preventing particles from being generated in the valve box. - However, in the
patent document 1 of “Vacuum exhaust valve of CVD apparatus, as the coil shaped sheath heater and sheath thermocouple, which are connected to a piston rod, simultaneously move during a vertical movement of the actuator, the sheath heater and the sheath thermocouple may experience a reciprocal process of contraction and relaxation due to an operation of the actuator that is repeated at least hundreds of times to thousands of times per a day. As a result, the sheath heater and the sheath thermocouple may be displaced and damaged. - Also, due to a structural shape of the coil shaped sheath heater and sheath thermocouple, during relaxation, since a heat generation rate is small in comparison with a volume of the relaxed sheath heater, the heat may not be efficiently transferred into the valve box and the bellows.
- The present invention provides an angle valve including a fixed heater block, in which as the fixed heater block is fixed in a bellows to maintain a fixed state of the fixed heater block although the driving member operates, the angle valve may improve a lifespan and efficiency of the fixed heater block and reduce the number of replacement of a component, and prevent a wire connected to the fixed heater block from being damaged by an operation of a driving member.
- The present invention also provides an angle valve including a fixed heater block, in which as a heat transfer block vertically moving by driving of a driving member is connected to the fixed heater block of which an entire body generates heat, thermal conduction and radiation may be performed uniformly in a valve casing and a bellows.
- An embodiment of the inventive concept provides an
angle valve 1 having a fixed heater block, theangle valve 1 including: avalve casing 100 having afluid flow hole 101 defined therein and including aninlet 110 through which fluid is introduced and anoutlet 120 through which the fluid is discharged; afixed heater block 200 fixedly installed in thevalve casing 100 and having aslide hole 210 defined therein; adriving member 300 detachably coupled to an upper portion of thevalve casing 100 to provide a driving force; and asealing unit 400 connected to thedriving member 300 to open and close theinlet 110 according to whether thedriving member 300 is driven. - In an embodiment, the
sealing unit 400 may include aheat transfer block 410 having aconnection groove 411 into which thefixed heater block 200 is inserted so that heat generated from thefixed heater block 200 is conducted thereto. - In an embodiment, the
sealing unit 400 may include: afixing plate 420 having afixing portion 421 horizontally extending from an upper portion thereof, asupport 422 disposed on a lower portion thereof, and aninsertion hole 423 defined in a central portion of thesupport 422; abellows 430 coupled to a lower portion of thesupport 422 to separate a vacuum state provided in thevalve casing 100 from the atmospheric state; and asealing plate 440 having acoupling groove 441 recessed in an inside direction so that theheat transfer block 410 is inserted therein. - In an embodiment, the
fixed heater block 200 may further include aholding part 220 extending from an upper outer circumference so that theholding part 220 of thefixed heater block 200 is seated on thesupport 422 of thefixing plate 420 to dispose thefixed heater block 200 in thebellows 430. - In an embodiment, a
heat transfer shaft 450 configured to connect thedriving member 300 to a heat transfer block 610 may be provided. - According to the present invention, as the heating fixed heater block is fixed in the bellows to maintain the fixed state of the fixed heater block although the driving member operates, the lifespan and efficiency of the fixed heater block is improved to reduce the number of replacement of the component, and the wire connected to the fixed heater block is prevented from being damaged by the operation of the driving member.
- Also, as the heat transfer block vertically moving by the driving of the driving member is connected to the fixed heater block of which an entire body generates heat, the thermal conduction and radiation may be performed uniformly in the valve casing and the bellows.
-
FIG. 1 is a perspective view illustrating an overall appearance of an angle valve including a fixed heater block according to a preferred embodiment of the present invention. -
FIG. 2 is an exploded perspective view illustrating a state in which the angle valve including the fixed heater block is exploded according to a preferred embodiment of the present invention. -
FIG. 3 is an exploded cross-sectional view illustrating a state in which the angle valve including the fixed heater block is exploded according to a preferred embodiment of the present invention. -
FIG. 4 is a cross-sectional view illustrating a cross-section of the angle valve including the fixed heater block according to a preferred embodiment of the present invention. -
FIG. 5 is a view illustrating a state in which the angle valve including the fixed heater block operates according to a preferred embodiment of the present invention. - Hereinafter, an
angle valve 1 including a fixed heater block according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. It is also noted that like reference numerals denote like elements in appreciating the drawings. Moreover, detailed descriptions related to well-known functions or configurations will be ruled out in order not to unnecessarily obscure subject matters of the present invention. - As illustrated in
FIG. 2 , anangle valve 1 according to the present invention includes avalve casing 100, afixed heater block 200, adriving member 300, and asealing unit 400. - First, the
valve casing 100 will be described. As illustrated inFIG. 1 or 2 , thevalve casing 100 is a component serving as a passage allowing a fluid to move from a vacuum pump (not shown) to a chamber (not shown). Thevalve casing 100 may include aninlet 110 through which the fluid is introduced and anoutlet 120 through which the fluid is discharged. - Also, as illustrated in
FIG. 3 or 4 , thevalve casing 100 may include an inner space in which a component of the present invention, e.g., thefixed heater block 200 that will be described later is inserted and afluid flow hole 101 through which the fluid moves is defined. - Meanwhile, as illustrated in
FIG. 1 or 2 , afirst coupling bracket 130 closely connecting thevalve casing 100 to thedriving member 300 that will be described later may be disposed on an upper portion of thevalve casing 100. - Also, according to the present invention, as illustrated in
FIG. 2 or 3 , a through-hole 131 is defined in a central portion of thefirst coupling bracket 130, and an L-shaped fixedprotrusion 132 is disposed on an upper portion of an inner circumferential surface of the through-hole 131. Thereby, thefirst coupling bracket 130 may be coupled to afixing plate 420 that will be described later. - Next, the
fixed heater block 200 will be described. As illustrated inFIG. 2 or 4 , thefixed heater block 200 is a component fixedly installed in thevalve casing 100 and heating an inside of thevalve casing 100 to remove particles generated from the inside of thevalve casing 100. - Meanwhile, as illustrated in
FIG. 2 or 3 , as aholding part 220 extending to the outside is provided on an upper portion of an outer circumferential surface of thefixed heater block 200, theholding part 220 of thefixed heater block 200 may be connected to asupport 422 of thefixing plate 420 to allow thefixed heater block 200 to be seated on thefixing plate 420. - In this case, the
holding part 220 and thesupport 422 may be fixed by, e.g., screw coupling. - According to the present invention, as the
fixed heater block 200 including theholding part 220 has a T shape, thefixed heater block 200 may transfer heat to thesupport 422 of thefixing plate 420 and a bellows 700 connected to thesupport 422 and coupled to thefixing plate 420, which will be described later. - Also, as illustrated in
FIG. 3 or 4 , aslide hole 210, into which a lower portion of ashaft 330 that will be described later is inserted, andinstallation grooves 230, into which a heater and a thermocouple are respectively inserted, may be defined in thefixed heater block 200. - According to the present invention, as the
fixed heater block 200 is fixedly installed in thevalve casing 100, since thefixed heater block 200 is fixed although theshaft 330 vertically moves, other components may not be affected during operations (e.g., vertical movement of apiston 320 and elastic movement of an elastic member 316), and awire 510 and asensor 520 which are connected to aheating device 500 installed outside theangle valve 1 including thefixed heater block 200 may be prevented from being worn or damaged. - Next, the
driving member 300 will be described. As illustrated inFIG. 1 or 2 , thedriving member 300 is a component coupled to an upper portion of thevalve casing 100 to drive theangle valve 1 including the fixed heater block. Although the cylinder type driving device including apiston 320 and ashaft 330 is described as an example, thedriving member 300 may further include, e.g., an actuator. - As illustrated in
FIG. 1 or 2 , the cylinder 310 includes thepiston 320 and theshaft 330, which will be described later. Here, the cylinder 310 may be divided into apiston driving portion 311 for driving thepiston 320 and ashaft driving portion 312 for driving theshaft 330 connected to thepiston 320. - In this case, the
piston driving portion 311 may be provided as a sealed space separated from theshaft driving portion 312 for the purpose of smooth operation of thepiston 320 and blocking of heat transfer. - Meanwhile, as illustrated in
FIG. 2 or 4 , asecond coupling bracket 313 may be provided on a lower portion of the cylinder 310 so that thesecond coupling bracket 313 is connected to thefirst coupling bracket 130 to couple thevalve casing 100 to the cylinder 310. - In the present invention, as a cylinder shaped
support 314 including aninsertion hole 315 through which theshaft 330 is inserted to pass is provided on a central lower portion of thesecond coupling bracket 313, the lower portion of thesupport 314 presses the upper portion of thefixed heater block 200 in a state in which thevalve casing 100 is coupled to the cylinder 310 to further fix thefixed heater block 200. - Meanwhile, an
elastic member 316 guiding movement of theshaft 330 may be provided in theshaft driving portion 312. - As illustrated in
FIG. 3 or 4 , thepiston 400 is a component installed on thepiston driving portion 311 to vertically move by a pneumatic pressure. Thepiston 400 may include apiston plate 321 and a shaft shapedpiston rod 322 disposed on a lower portion of thepiston plate 321. - In this case, the
piston plate 321 may be installed on an inside of thepiston driving portion 311, and thepiston rod 322 may pass through thepiston driving portion 311 and be exposed to an inside of theshaft driving portion 312. - Meanwhile, as illustrated in
FIG. 4 , as a lower portion of thepiston rod 322 is connected to an upper portion of theshaft 330, theshaft 330 may operate together according to whether thepiston 320 vertically moves. - As illustrated in
FIG. 3 or 4 , theshaft 330 is a component having an upper portion connected to thepiston rod 322 and a lower portion inserted into theslide hole 210 and connected to asealing plate 440 that will be described later. Theshaft 330 serves to open and close the sealingplate 440 according to whether thepiston 320 vertically moves. - Also, as illustrated in
FIG. 2 or 4 , a catchingplate 331 may be provided on an outer circumference of theshaft 330 so that theelastic member 316 is interlocked thereto to provide an elastic force to theshaft 330. - Meanwhile, as a diameter of a lower portion of the
shaft 330 inserted into theslide hole 210 is set less than a diameter of theslide hole 210, theshaft 330 may be prevented from being worn and damaged due to friction because the lower outer circumference of theshaft 330 does not contact the inner surface of theslide hole 210, and heat generated from the fixedheater block 200 may not be directly transferred to theshaft 330. - Also, a portion of the
shaft 330 disposed in theshaft driving portion 312 may be additionally provided with an insulating material so that the heat generated by the fixedheater block 200 is not transferred into the cylinder 310. - Next, the sealing
unit 400 will be described. As illustrated inFIG. 3 or 4 , the sealingunit 400 is a component coupled to the lower portion of theshaft 330 to open and close theinlet 110 by the vertical movement of thepiston 320. The sealingunit 400 includes aheat transfer block 410, a fixingplate 420, abellows 430, a sealingplate 440, and aheat transfer shaft 450. - As illustrated in
FIG. 2 or 4 , theheat transfer block 410 is a component surrounding a central portion and a lower outer circumference of the fixedheater block 200 so that heat radiated from the fixedheater block 200 is conducted thereto. In this case, aconnection groove 411 may be defined in a central portion thereof so that the fixedheater block 200 is inserted. - In this case, as illustrated in
FIG. 5A or 5B , theheat transfer block 410 may vertically slide while surrounding the central portion and the lower circumference of the fixedheater block 200 according to whether thepiston 320 vertically moves. - As the fixing
plate 420 is seated and fixed to the fixedprotrusion 132, the fixingplate 420 serves to allow an upper portion of the fixedheater block 200 to be seated on the support 142 and allow the fixedheater block 200 to be fixed to an inside of thebellows 430. - As illustrated in
FIG. 2 or 3 , the fixingplate 420 has a cylindrical shape including an inner space and includes a fixingpart 421 provided on an upper portion thereof for connection with the fixedprotrusion 132, asupport 422 provided on a lower portion thereof, and aninsertion hole 423 defined in a central portion of thesupport 422. - Here, as illustrated in
FIG. 3 , a stepped portion may be provided between the fixingportion 421 and thesupport 422. - When the holding
part 220 of the fixedheater block 200 is connected to an upper portion of thesupport 422, and thesecond coupling bracket 313 connecting thevalve casing 100 to the drivingmember 300 and fixing the fixedheater block 200 is coupled to thefirst coupling bracket 130, a space is defined between the holdingpart 220 and thesecond coupling bracket 313 to prevent the heat radiated from the fixedheater block 200 from being conducted to the drivingmember 300 due to the space, thereby improving product reliability of the drivingmember 300. - In addition, a
sensor 520 connected to aheating device 500 that will be described later may be installed in the space. - The bellows 430 is characterized to separate a vacuum state provided in the
valve casing 100 from the atmospheric state. Desirably, thebellows 430 may have an upper portion fixed to the fixingplate 420 and a lower portion fixed to asealing plate 440 that will be described later. - As illustrated in
FIG. 4 or 5 , the sealingplate 440 is a component configured to open and close theinlet 110. The sealing plate may have acoupling groove 441 for connection with theheat transfer block 410. - As illustrated in
FIG. 4 , theheat transfer shaft 450 may be inserted into theslide hole 210 to allow theshaft 330 and theheat transfer block 410 to be connected to each other. - Meanwhile, a
temperature adjusting sensor 600 for detecting a temperature of thevalve casing 100 may be installed on theangle valve 1 including the fixed heater block. - Since a principle of constituting and operating the
temperature adjusting sensor 600 is well known to those skilled in the art, detailed description regarding this will be omitted. - As described above, as the present invention has a structure in which the
valve casing 100 in which the fixedheater block 200 is installed and the drivingmember 300 are separately constituted to be coupled to and separated from each other, the components provided in thevalve casing 100 and the drivingmember 300 may be efficiently and conveniently replaced and inspected. - Hereinafter, an operation state of the
angle valve 1 including the fixed heater block will be described with reference toFIG. 5 . - First,
FIG. 5 is a view illustrating a state in which as compressed air in thepiston driving portion 311 is discharged, thepiston 320, theshaft 330, and the sealingplate 440 descend, and theinlet 110 is closed due to the descending of the sealingplate 440. - Thereafter, as illustrated in
FIG. 5B , when the compressed air is introduced into thepiston driving portion 311, thepiston 320 ascends, and theshaft 330 and the sealingplate 440 also ascend to open theclosed inlet 110 due to the ascending of the sealingplate 440. - As described above, since the fixed
heater block 200 disposed in thebellows 430 is fixed in thevalve casing 100 although thepiston 320, theshaft 330, and the sealingplate 440 are linked to perform a reciprocal movement, thewire 510 and thesensor 520, which are connected to theheating device 500 installed to the outside of the fixedheater block 200, and theangle valve 1 including the fixed heater block may be prevented from being worn or damaged by the movement thereof, and the fixedheater block 200 may stably radiate heat to increase an inner temperature of thevalve casing 100, thereby effectively removing particles generated in thevalve casing 100. - Optimum embodiments are disclosed in the drawings and the specification. While specific terms were used, they were not used to limit the meaning or the scope of the present invention described in claims, but merely used to explain the present invention. Accordingly, a person having ordinary skill in the art will understand from the above that various modifications and other equivalent embodiments are also possible. Hence, the real protective scope of the present invention shall be determined by the technical scope of the accompanying claims.
Claims (5)
1. An angle valve (1) having a fixed heater block, the angle valve (1) comprising:
a valve casing (100) having a fluid flow hole (101) defined therein and comprising an inlet (110) through which fluid is introduced and an outlet (120) through which the fluid is discharged;
a fixed heater block (200) fixedly installed in the valve casing (100) and having a slide hole 210 defined therein;
a driving member (300) detachably coupled to an upper portion of the valve casing (100) to provide a driving force; and
a sealing unit (400) connected to the driving member (300) to open and close the inlet (110) according to whether the driving member (300) is driven.
2. The angle valve (1) of claim 1 , wherein the sealing unit (400) comprises a heat transfer block (410) having a connection groove (411) into which the fixed heater block (200) is inserted so that heat generated from the fixed heater block (200) is conducted thereto.
3. The angle valve (1) of claim 2 , wherein the sealing unit (400) comprises: a fixing plate (420) having a fixing portion (421) horizontally extending from an upper portion thereof, a support (422) disposed on a lower portion thereof, and an insertion hole (423) defined in a central portion of the support (422); a bellows (430) coupled to a lower portion of the support (422) to separate a vacuum state provided in the valve casing (100) from the atmospheric state; and a sealing plate (440) having a coupling groove (441) recessed in an inside direction so that the heat transfer block (410) is inserted therein.
4. The angle valve (1) of claim 3 , wherein the fixed heater block (200) further comprises a holding part (220) extending from an upper outer circumference so that the holding part (220) of the fixed heater block (200) is seated on the support (422) of the fixing plate (420) to dispose the fixed heater block (200) in the bellows (430).
5. The angle valve (1) of claim 2 , wherein a heat transfer shaft (450) configured to connect the driving member (300) to a heat transfer block (610) is provided.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2014-0122490 | 2014-09-16 | ||
KR1020140122490A KR101595217B1 (en) | 2014-09-16 | 2014-09-16 | A Fixed-heater provided angle valve |
PCT/KR2015/009274 WO2016043456A2 (en) | 2014-09-16 | 2015-09-03 | Angle valve having fixed heater block |
Publications (2)
Publication Number | Publication Date |
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US20180135776A1 true US20180135776A1 (en) | 2018-05-17 |
US10260655B2 US10260655B2 (en) | 2019-04-16 |
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Application Number | Title | Priority Date | Filing Date |
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US15/507,944 Active 2035-12-04 US10260655B2 (en) | 2014-09-16 | 2015-09-03 | Angle valve having fixed heater block |
Country Status (5)
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US (1) | US10260655B2 (en) |
JP (1) | JP6644773B2 (en) |
KR (1) | KR101595217B1 (en) |
CN (1) | CN106605092B (en) |
WO (1) | WO2016043456A2 (en) |
Cited By (3)
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US10871316B2 (en) * | 2018-08-01 | 2020-12-22 | Chicony Power Technology Co., Ltd. | Valve, expansion valve, and stepping control method thereof |
RU2742630C1 (en) * | 2020-05-12 | 2021-02-09 | Акционерное общество "Информационные спутниковые системы" имени академика М.Ф. Решетнёва" | Valve for chemically aggressive media |
CN115745378A (en) * | 2022-11-28 | 2023-03-07 | 蚌埠中光电科技有限公司 | Tin bath top cover of float glass |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP7313169B2 (en) * | 2019-03-19 | 2023-07-24 | 株式会社キッツエスシーティー | vacuum bellows hot valve |
CN116592146B (en) * | 2023-07-07 | 2023-12-05 | 长沙华实半导体有限公司 | Straight-through sealing type vacuum angle valve and assembling method thereof |
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Also Published As
Publication number | Publication date |
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US10260655B2 (en) | 2019-04-16 |
WO2016043456A2 (en) | 2016-03-24 |
KR101595217B1 (en) | 2016-02-17 |
JP6644773B2 (en) | 2020-02-12 |
CN106605092A (en) | 2017-04-26 |
CN106605092B (en) | 2019-06-25 |
JP2017527759A (en) | 2017-09-21 |
WO2016043456A3 (en) | 2016-05-12 |
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